CN103389283A - Turnable diode laser trace gas measurement device and method using high diffuse reflection square chamber to increase optical paths - Google Patents
Turnable diode laser trace gas measurement device and method using high diffuse reflection square chamber to increase optical paths Download PDFInfo
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- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
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- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
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Abstract
A turnable diode laser trace gas measurement device and method which use a high diffuse reflection square chamber to increase optical paths belong to the technical field of trace gas concentration measurement. The invention solves the problem that methods which increase gas absorption optical paths in a limited space are complex in structure and high in cost. The device comprises a diode laser and a high diffuse reflection square chamber. The device further comprises a photomultiplier tube, a sawtooth wave signal generator, a sine wave signal generator, a mixer, a temperature controller, a current controller, a data collection card, a computer, a high voltage power supply, a wedge incident quartz lens and a wedge exit quartz lens. The method demodulates an electrical signal output by the photomultiplier tube into a second harmonic signal in the computer to obtain an optical parameter OP of the concentration of a to-be-measured gas, and then compares the OP to a standard curve of a to-be-measured gas optical parameter changing with the concentration of a gas in a high diffuse reflection square chamber, to obtain the concentration of the to-be-measured gas and to achieve measurement of the content of the to-be-measured gas. The device and the method are used for trace gas measurement.
Description
Technical field
The present invention relates to adopt chamber, high diffuse reflection side to increase tunable diode laser trace gas detection device and the method for light path, belong to trace gas Concentration Detection field.
Background technology
The Sensitive Detection technology of gas concentration has important application in a lot of fields, for example in the monitoring of industrial production waste gas, medical treatment to the detection of characteristics of contaminated respiratory droplets gas componant and content, and air environmental pollution gas and the monitoring of toxic gas content etc.Utilize the absorption characteristic of gas to special wavelength light, developed the multiple gases absorption spectroscopy techniques, comprise Differential Optical Absorption Spectroscopy DOAS, Fourier transform spectrometry (FTS) FTIR, associated light spectral technology COSPEC and tunable diode laser technology TDLAS etc.The TDLAS technology has very high sensitivity, low detection limit, but real-time online detects the gas concentration changing condition, therefore is widely studied.In the TDLAS technology, modulate by sawtooch sweep and by a high_frequency sine wave by a diode laser with very narrow emission spectrum, the sweep limit of sawtooth wave is through the absorption line of gas to be measured, the second harmonic signal of demodulation sine wave, then according to the Beer-Lambert law, can calculate gas concentration.Have the gas pollutant that is interrupted spectral line characteristic, as oxygen, methane and carbon dioxide etc. all available TDLAS technology survey.
At present, for further improving the detection level of TDLAS technology to gas, the most direct effective method is exactly to increase the gas absorption light path in the finite space.Present light path increase technology both domestic and external mainly contains the TDLAS technology of many logical pool technologies, integration chamber output spectrum technology ICOS, Research on Cavity Ring Down Spectroscopy CRDS, integrating sphere technology and scattering enhancing etc.Many logical pool technologies are to utilize light repeatedly turns back to reach in sample cell increase light path in the finite space effect, and for guaranteeing high reflectance and less energy loss, the normal employing converged spherical mirror as reflecting element.Abroad to the research in many logical ponds early, commercial White pond, Herriot pond and Chernin pond and various improvement pond all are widely used in the every field that trace gas/liquid body is surveyed at present.Research on Cavity Ring Down Spectroscopy CRDS is called again chamber and declines and swing laser absorption spectrum technology Cavity Ring-down Laser Absorption Spectroscopy, CRLAS, propagate back and forth continuous absorbed strength retrogression between two high reflection mirrors the time measure sample concentration in sample cell by measuring light, Dalian Chemical Physics Research Institute utilizes cavity attenuation and vibration technique, general frequency spectrum to H2O has been done research, Wuhan Inst. of Physics and Mathematics, Chinese Academy of Sciences, the National University of Defense technology, Northwestern Polytechnical University, University of Electronic Science and Technology, many departments such as Photoelectric Technology Inst., Chinese Academy of Sciences have also carried out a large amount of research work to the CRDS technology.The integrating sphere technology namely utilizes integrating sphere as gas cell, and is complicated, expensive because integrating sphere itself is made, so mostly is used at present the gasmetry research in laboratory, less being applied in the industrial gasses detection.The advantage of the TDLAS technology that scattering strengthens be highly sensitive, cost is low and volume is little, but due to the less stable of scattering medium own, the position of laser incident angle and detector all can make effective light path produce deviation, therefore need the effective light path calibration to each scattering medium in practical application, increased the measurement difficulty.In sum, the TDLAS technology of present long light path is in the complicacy of structure, and stabilization of equipment performance, all respectively have shortcoming on portability and cost.
Summary of the invention
The present invention seeks to increases in order to solve complex structure and the expensive problem that exists in the method for gas absorption light path at present in the finite space, a kind of tunable diode laser trace gas detection device and method that adopts chamber, high diffuse reflection side to increase light path is provided.
Chamber, the high diffuse reflection side of employing of the present invention increases the tunable diode laser trace gas detection device of light path, it comprises diode laser and chamber, high diffuse reflection side, it also comprises photomultiplier, Saw-tooth Signal Waveform Generator, sine wave signal generator, frequency mixer, temperature controller, current controller, data collecting card, computing machine, high-voltage power supply, incident wedge shape quartz lens and outgoing wedge shape quartz lens
On high diffuse reflection side chamber sidewall, air intake opening and exhausr port are set,
the sawtooth signal output terminal of Saw-tooth Signal Waveform Generator connects the sawtooth signal input end of frequency mixer, the sine wave signal output terminal of sine wave signal generator connects the sine wave signal input end of frequency mixer, the mixed frequency signal output terminal of frequency mixer connects the current controling signal input end of current controller, the current controling signal output terminal of current controller connects the current controling signal input end of diode laser, the temperature control signals input end of diode laser connects the temperature control signals output terminal of temperature controller, in the laser beam of diode laser output arranges outside high diffuse reflection side chamber incidence hole chamber, the paramount diffuse reflection side of incident wedge shape quartz lens incident, the final outgoing wedge shape quartz lens outgoing that arranges outside high diffuse reflection side chamber light hole, and by photomultiplier, received, photomultiplier provides operating voltage by high-voltage power supply, the collection signal input end of the gas absorption electrical signal connection data capture card of photomultiplier, the modulation reference signals input end of data collecting card connects the modulation reference signals output terminal of sine wave signal generator, the trigger pip input end of data collecting card connects the trigger pip output terminal of Saw-tooth Signal Waveform Generator, the collection signal output terminal of data collecting card connects the collection signal input end of computing machine,
Chamber, described high diffuse reflection side is square, its light hole is arranged on bottom surface, incidence hole is arranged on the sidewall adjacent with bottom surface, light hole place, air intake opening is arranged on the end face relative with described bottom surface, exhausr port is arranged on the sidewall relative with described incidence hole place sidewall, and exhausr port is positioned at the downside of place sidewall.
Chamber, described high diffuse reflection side adopts the black organic glass as structural framework, and the inner wall surface in chamber, high diffuse reflection side evenly sprays the high diffuse reflection coating of Avian-D with lambert's characteristic.
The temperature-controlled precision of described temperature controller is 0.1 ° of C, and temperature-control range is 8 ° of C-60 ° of C.
A kind of chamber, the high diffuse reflection side of employing that increases the tunable diode laser trace gas detection device of light path based on chamber, the high diffuse reflection side of above-mentioned employing increases the tunable diode laser trace gas detection method of light path,
Select the centre wavelength of diode laser outgoing laser beam according to the absorption cross section of gas to be measured, by the air intake opening in chamber, high diffuse reflection side, pass into gas to be measured;
Will be through the laser beam irradiation of sine wave signal generator and Saw-tooth Signal Waveform Generator modulation in chamber, high diffuse reflection side, described laser beam constantly is scattered and transmits, and by gas absorption to be measured, died down on high diffuse reflection side cavity wall; Photomultiplier receives the light signal of high diffuse reflection side chamber outgoing and converts the electric signal of amplification to, the electric signal that will amplify in computing machine is demodulated into second harmonic signal, obtain the optical parameter OP of gas concentration to be measured, again with the typical curve contrast with high diffuse reflection side intracavity gas concentration change of this optical parameter OP and gas optical parameter to be measured, obtain gas concentration to be measured, realize that gas content to be measured detects.
When gas to be measured is oxygen, the centre wavelength of diode laser outgoing laser beam is chosen as 762nm.
When gas to be measured is methane, the centre wavelength of diode laser outgoing laser beam is chosen as 1310nm.
When gas to be measured is carbon dioxide, the centre wavelength of diode laser outgoing laser beam is chosen as 1578nm.
Advantage of the present invention: the present invention with chamber, high diffuse reflection side as gas cell, in conjunction with the tunable diode laser absorption spectroscopy technology, trace gas concentration is detected, the Ear Mucosa Treated by He Ne Laser Irradiation that it will be modulated is in chamber, high diffuse reflection side, due to the strong scattering effect of diffuse reflection coating on square cavity wall, laser constantly is scattered and transmits on square cavity wall; The light of the gas absorption specific wavelength to be measured in the chamber, side dies down it, then with photomultiplier, surveys the emergent light that dies down.Adopt chamber, high diffuse reflection side to make and increased the gas absorption light path in the finite space as gas cell, and this gas cell is easy to make, volume is little, and cost is low, can eliminate the impact of interference fringe, thus the body burden detection sensitivity that increased gas.
Apparatus of the present invention are with the trace gas detection device miniaturization, and simple in structure, simple operation, and it has low cost and the high advantage of stability simultaneously.
The contamination gas that apparatus of the present invention and detection method can be used in industrial processes detects, and diagnoses the illness by the human body Exhaust Gas in medical treatment and the field such as ambient atmosphere monitoring, can realize the real time on-line monitoring gas concentration.
Description of drawings
Fig. 1 is the structural principle block diagram that chamber, the high diffuse reflection side of employing of the present invention increases the tunable diode laser trace gas detection device of light path.
Embodiment
Embodiment one: present embodiment is described below in conjunction with Fig. 1, chamber, the high diffuse reflection side of the described employing of present embodiment increases the tunable diode laser trace gas detection device of light path, it comprises diode laser 1 and chamber, high diffuse reflection side 2, it also comprises photomultiplier 3, Saw-tooth Signal Waveform Generator 4, sine wave signal generator 5, frequency mixer 6, temperature controller 7, current controller 8, data collecting card 9, computing machine 10, high-voltage power supply 11, incident wedge shape quartz lens 12 and outgoing wedge shape quartz lens 13
On 2 sidewalls of chamber, high diffuse reflection side, air intake opening 2-1 and exhausr port 2-2 are set,
the sawtooth signal output terminal of Saw-tooth Signal Waveform Generator 4 connects the sawtooth signal input end of frequency mixer 6, the sine wave signal output terminal of sine wave signal generator 5 connects the sine wave signal input end of frequency mixer 6, the mixed frequency signal output terminal of frequency mixer 6 connects the current controling signal input end of current controller 8, the current controling signal output terminal of current controller 8 connects the current controling signal input end of diode laser 1, the temperature control signals input end of diode laser 1 connects the temperature control signals output terminal of temperature controller 7, in the laser beam of diode laser 1 output arranges outside 2 incidence holes of chamber, high diffuse reflection side incident wedge shape quartz lens 12 chambeies, the paramount diffuse reflection side of incident 2, final outgoing wedge shape quartz lens 13 outgoing that arrange outside 2 light holes of chamber, high diffuse reflection side, and by photomultiplier 3, received, photomultiplier 3 provides operating voltage by high-voltage power supply 11, the collection signal input end of the gas absorption electrical signal connection data capture card 9 of photomultiplier 3, the modulation reference signals input end of data collecting card 9 connects the modulation reference signals output terminal of sine wave signal generator 5, the trigger pip input end of data collecting card 9 connects the trigger pip output terminal of Saw-tooth Signal Waveform Generator 4, the collection signal output terminal of data collecting card 9 connects the collection signal input end of computing machine 10,
Chamber, described high diffuse reflection side 2 is square, its light hole is arranged on bottom surface, incidence hole is arranged on the sidewall adjacent with bottom surface, light hole place, air intake opening 2-1 is arranged on the end face relative with described bottom surface, exhausr port 2-2 is arranged on the sidewall relative with described incidence hole place sidewall, and exhausr port 2-2 is positioned at the downside of place sidewall.
In present embodiment, select photomultiplier 3 as detector, the high input voltage that high-voltage power supply 11 produces is to photomultiplier 3, convert electric signal to and be exaggerated got to the receiving screen of photomultiplier 3 by the light signal of chamber, high diffuse reflection side 2 outgoing after, then gathered by data collecting card 9, simultaneously with in the trigger pip and modulation reference signals input data collecting card 9 of the TTL signal of Saw-tooth Signal Waveform Generator 4 and sine wave signal generator 5 as data acquisition.Data collecting card 9 is sent to digital signal in computing machine 10 by pci interface, by the phase-locked amplification software of writing based on Labview, it is carried out demodulation finally and obtains second harmonic signal.The voltage of photomultiplier 3 is by high-voltage power supply 11 regulating and controlling.
The control accuracy of current controller 8 and range of control can be selected according to the type of diode laser 1, if for example adopt the VCSEL single-mode laser the electric current range of adjustment be 0mA-20mA, precision 1 μ A, general-purpose diode laser diode current range of control is 0mA-200mA, precision 0.1mA.Adopt signal generator to produce a high_frequency sine wave signal and a sawtooch sweep signal in wavelength-modulation technique, these two signals by the frequency mixer mixing after in the input current controller.The frequency range of Saw-tooth Signal Waveform Generator 4 is 1-100Hz, and amplitude is 100-500mV; The frequency of sine wave signal generator 5 is 1k times of left and right of Saw-tooth Signal Waveform Generator 4 frequencies, and amplitude is 1/2 to 1/3 of Saw-tooth Signal Waveform Generator 4 amplitudes.
Embodiment two: present embodiment is described below in conjunction with Fig. 1, present embodiment is described further embodiment one, chamber, the described high diffuse reflection side of present embodiment 2 adopts the black organic glass as structural framework, and the inner wall surface in chamber, high diffuse reflection side 2 evenly sprays the high diffuse reflection coating of Avian-D with lambert's characteristic.
The high diffuse reflection coating of described Avian-D is the water base ethane coating of bi-component.
Embodiment three: present embodiment is described further embodiment one or two, and the temperature-controlled precision of the described temperature controller 7 of present embodiment is 0.1 ° of C, and temperature-control range is 8 ° of C-60 ° of C.
Embodiment four: below in conjunction with Fig. 1, present embodiment is described, chamber, the present embodiment high diffuse reflection side of described employing based on one of above-mentioned embodiment increases the tunable diode laser trace gas detection method of light path,
Select the centre wavelength of diode laser 1 outgoing laser beam according to the absorption cross section of gas to be measured, by the air intake opening 2-1 in chamber, high diffuse reflection side 2, pass into gas to be measured;
Will be through the laser beam irradiation of sine wave signal generator 5 and Saw-tooth Signal Waveform Generator 4 modulation in chamber, high diffuse reflection side 2, described laser beam constantly is scattered and transmits, and by gas absorption to be measured, died down on 2 inwalls of chamber, high diffuse reflection side; Photomultiplier 3 receives the light signal of chamber, high diffuse reflection side 2 outgoing and converts the electric signal of amplification to, the electric signal that will amplify in computing machine 10 is demodulated into second harmonic signal, obtain the optical parameter OP of gas concentration to be measured, again this optical parameter OP and gas optical parameter to be measured are contrasted with the typical curve that the interior gas concentration in chamber, high diffuse reflection side 2 changes, obtain gas concentration to be measured, realize that gas content to be measured detects.
In present embodiment, can adopt phase-locked amplification software that the electric signal that amplifies is demodulated into second harmonic signal in computing machine 10.Described typical curve is the known gas concentration of having demarcated in advance and the relation curve between the second harmonic signal optical parameter, can calculate gas concentration to be measured according to the size of the optical parameter OP that obtains in actual measurement like this.
Gas to be measured pass into chamber, high diffuse reflection side 2 interior after, can be discharged by exhausr port 2-2.
Embodiment five: present embodiment is described further embodiment four, and in present embodiment, when gas to be measured is oxygen, the centre wavelength of diode laser 1 outgoing laser beam is chosen as 762nm.
In present embodiment, diode laser 1 can adopt centre wavelength at the VCSEL of 762nm laser instrument.
Embodiment six: present embodiment is described further embodiment four, and in present embodiment, when gas to be measured is methane, the centre wavelength of diode laser 1 outgoing laser beam is chosen as 1310nm.
Embodiment seven: present embodiment is described further embodiment four, and in present embodiment, when gas to be measured is carbon dioxide, the centre wavelength of diode laser 1 outgoing laser beam is chosen as 1578nm.
Claims (7)
1. tunable diode laser trace gas detection device that adopts chamber, high diffuse reflection side to increase light path, it comprises diode laser (1) and chamber, high diffuse reflection side (2), it is characterized in that, it also comprises photomultiplier (3), Saw-tooth Signal Waveform Generator (4), sine wave signal generator (5), frequency mixer (6), temperature controller (7), current controller (8), data collecting card (9), computing machine (10), high-voltage power supply (11), incident wedge shape quartz lens (12) and outgoing wedge shape quartz lens (13)
Air intake opening (2-1) and exhausr port (2-2) are set on the sidewall of chamber, high diffuse reflection side (2),
the sawtooth signal output terminal of Saw-tooth Signal Waveform Generator (4) connects the sawtooth signal input end of frequency mixer (6), the sine wave signal output terminal of sine wave signal generator (5) connects the sine wave signal input end of frequency mixer (6), the mixed frequency signal output terminal of frequency mixer (6) connects the current controling signal input end of current controller (8), the current controling signal output terminal of current controller (8) connects the current controling signal input end of diode laser (1), the temperature control signals input end of diode laser (1) connects the temperature control signals output terminal of temperature controller (7), in the laser beam of diode laser (1) output arranges outside the incidence hole of chamber, high diffuse reflection side (2) the paramount diffuse reflection side of incident wedge shape quartz lens (12) incident chamber (2), outgoing wedge shape quartz lens (13) outgoing that finally arranges outside the light hole of chamber, high diffuse reflection side (2), and by photomultiplier (3), received, photomultiplier (3) provides operating voltage by high-voltage power supply (11), the collection signal input end of the gas absorption electrical signal connection data capture card (9) of photomultiplier (3), the modulation reference signals input end of data collecting card (9) connects the modulation reference signals output terminal of sine wave signal generator (5), the trigger pip input end of data collecting card (9) connects the trigger pip output terminal of Saw-tooth Signal Waveform Generator (4), the collection signal output terminal of data collecting card (9) connects the collection signal input end of computing machine (10),
Described high diffuse reflection side chamber (2) is square, its light hole is arranged on bottom surface, incidence hole is arranged on the sidewall adjacent with bottom surface, light hole place, air intake opening (2-1) is arranged on the end face relative with described bottom surface, exhausr port (2-2) is arranged on the sidewall relative with described incidence hole place sidewall, and exhausr port (2-2) is positioned at the downside of place sidewall.
2. chamber, the high diffuse reflection side of employing according to claim 1 increases the tunable diode laser trace gas detection device of light path, it is characterized in that, described high diffuse reflection side chamber (2) adopts the black organic glass as structural framework, and the inner wall surface in chamber, high diffuse reflection side (2) evenly sprays the high diffuse reflection coating of Avian-D with lambert's characteristic.
3. chamber, the high diffuse reflection side of employing according to claim 1 increases the tunable diode laser trace gas detection device of light path, it is characterized in that, the temperature-controlled precision of described temperature controller (7) is 0.1 ° of C, and temperature-control range is 8 ° of C-60 ° of C.
4. the tunable diode laser trace gas detection method of the light path of chamber, the high diffuse reflection side of the employing increase based on the tunable diode laser trace gas detection device of chamber, the high diffuse reflection side of the described employing of claim 1 increase light path, is characterized in that,
Select the centre wavelength of diode laser (1) outgoing laser beam according to the absorption cross section of gas to be measured, by the air intake opening (2-1) in chamber, high diffuse reflection side (2), pass into gas to be measured;
To arrive in chamber, high diffuse reflection side (2) through the laser beam irradiation of sine wave signal generator (5) and Saw-tooth Signal Waveform Generator (4) modulation, described laser beam constantly is scattered and transmits, and by gas absorption to be measured, died down on the inwall of chamber, high diffuse reflection side (2); Photomultiplier (3) receives the light signal of chamber, high diffuse reflection side (2) outgoing and converts the electric signal of amplification to, the electric signal that will amplify in computing machine (10) is demodulated into second harmonic signal, obtain the optical parameter OP of gas concentration to be measured, again this optical parameter OP and gas optical parameter to be measured are contrasted with the typical curve that the interior gas concentration in chamber, high diffuse reflection side (2) changes, obtain gas concentration to be measured, realize that gas content to be measured detects.
5. chamber, the high diffuse reflection side of employing according to claim 4 increases the tunable diode laser trace gas detection method of light path, it is characterized in that, when gas to be measured is oxygen, the centre wavelength of diode laser (1) outgoing laser beam is chosen as 762nm.
6. chamber, the high diffuse reflection side of employing according to claim 4 increases the tunable diode laser trace gas detection method of light path, it is characterized in that, when gas to be measured is methane, the centre wavelength of diode laser (1) outgoing laser beam is chosen as 1310nm.
7. chamber, the high diffuse reflection side of employing according to claim 4 increases the tunable diode laser trace gas detection method of light path, it is characterized in that, when gas to be measured is carbon dioxide, the centre wavelength of diode laser (1) outgoing laser beam is chosen as 1578nm.
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| CN103698298A (en) * | 2013-12-29 | 2014-04-02 | 哈尔滨工业大学 | Device for measuring gas concentration based on short cavity enhanced correlation spectroscopy, and method for measuring gas concentration by adopting device |
| CN105319170A (en) * | 2014-07-31 | 2016-02-10 | 横河电机株式会社 | Optical system for generating beam of reference light and method for splitting beam of light to generate beam of reference light |
| CN104655587A (en) * | 2015-02-14 | 2015-05-27 | 合肥知常光电科技有限公司 | Extra-high sensitive gas absorption spectrum measuring system and method based on MEMS |
| CN106033054A (en) * | 2015-03-18 | 2016-10-19 | 山东省科学院海洋仪器仪表研究所 | Laser temperature and humidity measurement apparatus and temperature and humidity measurement method |
| CN106033054B (en) * | 2015-03-18 | 2019-03-29 | 山东省科学院海洋仪器仪表研究所 | A kind of laser humiture measurement mechanism and method |
| CN105158206A (en) * | 2015-10-17 | 2015-12-16 | 中国科学院合肥物质科学研究院 | Laser detection system for oxygen concentration in tail gas of vehicle-mounted type motor vehicle |
| CN105158206B (en) * | 2015-10-17 | 2017-09-12 | 中国科学院合肥物质科学研究院 | The laser detection system of oxygen concentration in a kind of vehicle-carrying motor tail gas |
| CN105300889A (en) * | 2015-11-10 | 2016-02-03 | 哈尔滨工业大学 | Method and device for measuring trace gas concentration with diffuse reflection integral cavity as photoacoustic cell |
| CN105300889B (en) * | 2015-11-10 | 2018-09-11 | 哈尔滨工业大学 | The method and device of trace gas concentration is measured as photoacoustic cell using diffusing reflection integral chamber |
| CN105699326A (en) * | 2016-02-29 | 2016-06-22 | 西安邮电大学 | Device and method for monitoring oxygen concentration |
| CN113406021A (en) * | 2020-03-17 | 2021-09-17 | 山东大学 | Optical frequency comb gas detection system and method based on neural network |
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