CN102830088A - Gas concentration monitoring device by combining integrating sphere and diode laser absorption spectroscopy and monitoring method based on monitoring device - Google Patents

Gas concentration monitoring device by combining integrating sphere and diode laser absorption spectroscopy and monitoring method based on monitoring device Download PDF

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CN102830088A
CN102830088A CN 201210315214 CN201210315214A CN102830088A CN 102830088 A CN102830088 A CN 102830088A CN 201210315214 CN201210315214 CN 201210315214 CN 201210315214 A CN201210315214 A CN 201210315214A CN 102830088 A CN102830088 A CN 102830088A
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integrating sphere
signal
light
gas concentration
diode laser
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CN 201210315214
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高强
张治国
曹文武
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昆山昱翌辉华电子科技有限公司
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Abstract

The invention relates to a gas concentration monitoring device by combining integrating sphere and diode laser absorption spectroscopy and a monitoring method based on the monitoring device, and relates to the gas concentration monitoring device and the monitoring method based on the monitoring device, and the invention solves the problem of low sensitivity and poor miniaturization degree of the current gas concentration monitoring devices. According to the invention, a diode laser is employed as light source, the output light is passed through a collimating lens and then enters into an integrating sphere through a light entering hole of the integrating sphere, the integrating sphere is filled with gas to be measured with unknown, the laser is interacted with gas, an uniform light field is obtained by multiple uniform scattering in the integrating sphere, the scattered light enables emergence through a light outputting hole of the integrating sphere, the emergent light signals are focused to a light reception surface of a detector by a focusing lens, and transformed to electric signals and collected by a data collection card, and the data is input to a computer through a PCI interface for processing to obtain the gas concentration to be measured. The invention is suitable for monitoring the gas concentration.

Description

利用积分球结合二极管激光吸收光谱技术的气体浓度监测装置及基于该监测装置的监测方法 Integrating sphere using the gas concentration monitoring device in conjunction with diode laser absorption spectroscopy method for monitoring and monitoring device based on the

技术领域 FIELD

[0001] 本发明涉及一种气体浓度监测装置及基于该监测装置的监测方法。 [0001] The present invention relates to a gas concentration monitoring apparatus and a monitoring method based on the monitoring device.

背景技术 Background technique

[0002] 气体浓度实时在线监测在工业生产、生物医药及环境监测领域都具有非常重要的意义。 [0002] Real-time online monitoring gas concentrations has a very important significance in industrial production, biomedical and environmental monitoring. 在各种气体监测技术日益成熟的今天,人们在追求高灵敏度的同时也在追求仪器的小型化和低成本。 In a variety of gas monitoring technology has become more sophisticated today, people in the pursuit of high sensitivity of the instrument while also pursuing miniaturization and low cost.

[0003] 可调谐二极管激光吸收光谱技术(Tunable diode laser absorptionspectroscopy-TDLAS)具有高灵敏、高分辨、高速度、可实时在线监测的优点使其成为目前光学气体监测的主流方法。 [0003] Tunable Diode spectroscopy (Tunable diode laser absorptionspectroscopy-TDLAS) the laser absorbent having high sensitivity, high resolution advantages, high-speed, real-time on-line monitoring method of making an optical mainstream gas monitoring. 为了提高探测灵敏度,在TDLAS的基础上增加光程是提高探测灵敏度的最直接有效的手段。 In order to increase the detection sensitivity, increased optical path on the basis of TDLAS is the most direct and effective means to improve the detection sensitivity. 多通池具有很强的延长光程的能力,也是目前最常用光程延长方法,但多通池对入射角有一定的要求才能实现较好的光路延长,而且入射角微小的变化都会导致很大的光程改变,所以稳定性及重复性较差,而其内部精密的光学器件又导致多通池具有较高的价格,进而提高整个探测系统的成本。 Multi-pass pool has a strong ability to extend the optical path, is currently the most common method of extending the optical drive, but more through the pool to the angle of incidence has certain requirements in order to achieve a better extension of the optical path, and the angle of incidence will result in very small changes large optical path changing, the poor stability and reproducibility, and its internal precision optics in turn results in a multi-way cell with a higher price, thereby increasing the cost of the entire detection system.

[0004] 积分球(Integrating Spheres, IS)是通常被用来测量光照度的装置,由于其内部特殊的球腔结构,对于入射到积分球内部的光起到平均延长的作用,故可将气体池应用于气体检测领域中。 [0004] The integrating sphere (Integrating Spheres, IS) is a commonly used means of measuring illumination, due to the special structure of the internal spherical cavity for light entering the integrating sphere average extended functions, it may be a gas tank applied in the field of gas detection. 而且由于积分球外形紧凑,空间占用率较小,且价格低廉,非常适合开发高灵敏、低成本、小型化的气体监测装置。 And because the integrating sphere compact, space occupancy rate is small, and inexpensive, it is very suitable for the development of highly sensitive, low cost, miniaturization of the gas monitoring device.

发明内容 SUMMARY

[0005] 本发明是为了解决现有的气体浓度监测装置的灵敏度低、小型化程度差的问题,从而提供一种利用积分球结合二极管激光吸收光谱技术的气体浓度监测装置及基于该监测装置的监测方法。 [0005] The present invention is made to solve the low sensitivity of the conventional gas concentration monitoring device, the problem of poor degree of miniaturization, thereby providing the monitoring apparatus using a gas concentration monitoring in conjunction with an integrating sphere apparatus diode laser absorption spectroscopy and based on monitoring methods.

[0006] 利用积分球结合二极管激光吸收光谱技术的气体浓度监测装置,其特征是:它包括调制正弦波信号发生器、扫描锯齿波信号发生器、耦合器、电流控制器、可调谐二极管激光器、准直透镜、积分球、聚焦透镜、光探测器、采集卡和计算机; [0006] The integrating sphere gas concentration monitoring device in conjunction with diode laser absorption spectroscopy, characterized in that: it includes a modulation signal generator sinusoidal, sawtooth scanning signal generator, a coupler, a current controller, a tunable diode laser, a collimator lens, integrating sphere, a focusing lens, a light detector, and a computer acquisition card;

[0007] 调制正弦波信号发生器的调制正弦波信号输出端与耦合器的调制正弦波信号输入端连接;扫描锯齿波信号发生器的扫描锯齿波信号输出端与耦合器的扫描锯齿波信号输入端连接;耦合器的耦合后信号输出端与电流控制器的耦合后信号输入端连接;电流控制器的控制信号输出端与可调谐二极管激光器的控制信号输入端连接; [0007] The modulated signal input sine wave modulated sine wave signal output of the coupler modulated sine wave signal generator is connected; a scanning signal input scanning sawtooth ramp signal output of coupler sawtooth scanning signal generator terminal; the signal output terminal coupled to the current controller coupled-coupler signal input terminal; a current controller control signal output terminal of the tunable laser diode control signal input terminal is connected;

[0008] 可调谐二极管激光器发出激光光束,所述激光光束入射至准直透镜,经所述准直透镜透射后通过积分球的入光孔入射进积分球内,并在积分球内多次均匀散射形成均匀光场,部分散射光通过积分球的出射孔入射至聚焦透镜,经所述聚焦透镜聚焦至光探测器的感光面; [0008] The tunable diode laser emits a laser beam, said laser beam incident on the collimator lens, said collimator lens through the light transmissive apertures through the integrating sphere incident into the integrating sphere and an integrating sphere uniform repeatedly formed uniformly scattered light field, scattered aperture portion incident on a focusing lens focusing the light receiving surface through the lens passes through the detector polyethylene Jiaozhi Guang integrating sphere;

[0009] 所述光探测器的电信号输出端与采集卡的电信号输入端连接;调制正弦波信号发生器的触发信号输出端与采集卡的触发信号输入端连接;采集卡的探测信号输出端与计算机的PCI接口的连接。 [0009] The electrical signal input end of the light detector electrical output of the capture card connector; a trigger signal input terminal and outputting a trigger signal modulated acquisition card connected to the sine wave signal generator; acquisition card detection signal output PCI interface connected to the computer terminal.

[0010] 基于上述装置的利用积分球结合二极管激光吸收光谱技术的气体浓度监测方法,它由以下步骤实现: [0010] Gas concentration monitoring method of binding diode laser absorption spectroscopy using an integrating sphere based on the above-described apparatus, which is implemented by the steps of:

[0011] 步骤一、将待测气体充入积分球内;采用调制正弦波信号发生器产生调制正弦波信号;米用扫描锯齿波信号发生器产生扫描锯齿波信号; [0011] Step a, the test gas into the integrating sphere; sine wave modulated using a modulation signal generator generates a sine wave signal; m sawtooth scanning signal generator generates a scan sawtooth signal;

[0012] 步骤二、采用耦合器将步骤一中产生的调制正弦波信号和扫描锯齿波信号进行耦合,并将耦合后的信号输入至电流控制器; [0012] Step two, using sinusoidal modulated sawtooth signal and a scan signal couplers produced in step a coupled, and the coupled signal is input to the current controller;

[0013] 步骤三、电流控制器根据步骤二中的耦合后的信号控制可调谐二极管激光器的工作电流参数和工作温度参数,可调谐二极管激光器根据所述工作电流参数和工作温度参数产生激光光束; [0014] 步骤四、采用准直透镜对步骤三产生的激光光束进行准直,所述准直后的激光光束通过积分球的入光孔入射进积分球内,并在积分球内的待测气体中进行多次均匀散射形成均匀光场,同时与待测气体相互作用,部分散射光通过积分球的出射孔出射;采用聚焦透镜将多路反射光聚焦至光探测器的感光面; [0013] Step three, the current control signal control the coupling step two tunable parameters of the operating current and temperature parameters of the diode laser, tunable diode laser generates a laser beam in accordance with the operating parameters and current parameters of operating temperature; [0014] step 4 using the collimator lens for the laser beam generated in step three collimates the laser beam into the light hole straight through the integrating sphere quasi incident into the integrating sphere and an integrating sphere in the test the gas uniformly scattered several times to form a uniform light field, while interacting with the test gas, part of the scattered light by an integrating sphere exit aperture; focusing lens using multipath reflection surface of the photosensitive photopolymerizable Jiaozhi Guang detector;

[0015] 步骤五、采用调制正弦波信号发生器产生TTL触发信号,触发采集卡实时采集光探测器输出的信号;并输入至计算机中; [0015] Step 5 using modulated signal generator generates a sine wave TTL trigger signal to trigger acquisition card real-time acquisition of the detector output signal light; and input to the computer;

[0016] 步骤六、计算机将采集卡发送的信号进行解调,获得吸收信号,将所述吸收信号根据比尔吸收定律和积分球等效路径计算出待测气体的浓度;实现利用积分球结合二极管激光吸收光谱技术的气体浓度监测。 [0016] Step six, sending the computer the signal acquisition card is demodulated to obtain a signal absorption, the absorption signal measured gas concentration is calculated according to Beer's law and integrating sphere equivalent absorption path; binding diode implemented using an integrating sphere gas concentration monitoring laser absorption spectroscopy technique.

[0017] 本发明能够实现气体浓度的实时监测,其高灵敏度、低成本低、小型化程度好。 [0017] The present invention enables real-time monitoring of gas concentrations, its high sensitivity, low cost, good degree of miniaturization. 本发明在继承TDLAS技术优势的基础上,利用积分球延长光程,进一步提高探测灵敏度。 The present invention, in succession TDLAS technology advantages, an integrating sphere optical path extended to further improve the detection sensitivity. 由于积分球外观紧凑,非常便于仪器的小型化,而且与多通池相比成本非常低廉。 Since the integrating sphere compact appearance, is very easy miniaturization of the instrument, and compared with the multi-way cell costs are very low. 积分球对入射角没有要求,提高测量的稳定性和重复性,同时还具有响应速度快、可靠性高、维护简单、实时性强、在线监测等优点。 Integrating sphere does not require the incident angle, to improve the measurement stability and reproducibility, and also having a fast response, high reliability, easy maintenance advantages, real-time, on-line monitoring.

附图说明 BRIEF DESCRIPTION

[0018] 图I是本发明的利用积分球结合二极管激光吸收光谱技术的气体浓度监测装置的结构示意图。 [0018] FIG. I is a schematic view of a gas concentration monitoring apparatus using an integrating sphere of the present invention in conjunction with the diode laser absorption spectroscopy.

具体实施方式 detailed description

[0019] 具体实施方式一、结合图I说明本具体实施方式,利用积分球结合二极管激光吸收光谱技术的气体浓度监测装置,它包括调制正弦波信号发生器I、扫描锯齿波信号发生器 [0019] In a particular embodiment, in conjunction with FIG. I illustrates the present specific embodiment, the integrating sphere apparatus combined gas concentration monitoring diode laser absorption spectroscopy, comprising a sine wave modulation signal generator I, the scanning sawtooth generator

2、耦合器3、电流控制器4、可调谐二极管激光器5、准直透镜6、积分球7、聚焦透镜8、光探测器9、采集卡10和计算机11; 2, coupler 3, the current controller 4, a tunable diode laser 5, a collimator lens 6, 7 integrating sphere, a focusing lens 8, the photodetector 9, the acquisition card 10 and a computer 11;

[0020] 调制正弦波信号发生器I的调制正弦波信号输出端与耦合器3的调制正弦波信号输入端连接;扫描锯齿波信号发生器2的扫描锯齿波信号输出端与耦合器3的扫描锯齿波信号输入端连接;耦合器3的耦合后信号输出端与电流控制器4的耦合后信号输入端连接;电流控制器4的控制信号输出端与可调谐二极管激光器5的控制信号输入端连接;[0021] 可调谐二极管激光器5发出激光光束,所述激光光束入射至准直透镜6,经所述准直透镜6透射后通过积分球7的入光孔入射进积分球7内,并在积分球7内多次反均匀散形成均匀光场,部分散射光通过积分球7的出射孔入射至聚焦透镜8,经所述聚焦透镜8聚焦至光探测器9的感光面; [0020] The sine wave modulated sine wave signal modulated signal input terminal coupled to the output of the sine wave modulation signal generator 3 is connected to I; scanning sawtooth generator sawtooth scanning signal output terminal coupled to scan 2 3 sawtooth signal input terminal; coupled-coupler 3 and a signal output terminal coupled to the current control signal input terminal 4; a current controller 4 may control signal output terminal and the tuning control signal input terminal 5 is connected to the diode laser ; [0021] tunable diode laser 5 emits the laser beam, said laser beam incident on the collimator lens 6, the inner through the collimator lens 6 after transmitting incident into the light integrating sphere integrating sphere aperture 7 of 7, and 7 multiple anti integrating sphere uniform light field formed homogeneously dispersed, part of the scattered light 7 incident on the aperture to the focusing lens 8, focusing lens via the light receiving surface 8 poly Jiaozhi Guang detector 9 through the integrating sphere;

[0022] 所述光探测器9的电信号输出端与采集卡10的电信号输入端连接;调制正弦波信号发生器I的触发信号输出端与采集卡10的触发信号输入端连接;采集卡10的探测信号输出端与计算机11的PCI接口的连接。 Electric signal input terminal [0022] The photodetector 9 outputs an electric signal terminal 10 is connected to the acquisition card; trigger signal input terminal of the modulation sine wave signal generator I trigger signal output terminal 10 is connected to the acquisition card; acquisition card connection detection signal output terminal 11 of the computer 10 PCI interface.

[0023] 所述的积分球外部包括进光孔、出光孔、进气孔和出气孔四个接口。 Integrating outer ball [0023] comprise the light well, the light hole, and an air intake hole four interfaces.

[0024] 工作原理:本发明使用波长调制光谱技术,实现方法将一个较高频率的调制正弦波信号和一个低频的扫描锯齿波信号耦合加载到激光器的注入电流中,通过调整激光控制器的温度和电流,使得激光器输出的中心波长能完整地扫描过待测气体吸收线。 [0024] The working principle: The present invention uses wavelength modulation spectroscopy, a method to realize a higher modulation frequency of the sine wave signal and a low frequency signal coupling sawtooth scanning the laser injection current to the load by adjusting the temperature of the laser controller and a current, so that the center wavelength of the laser output can be completely scanned across the gas absorption line to be measured. 激光通过积分球的入光孔进入积分球内,进过多次均匀反射,在积分球内部形成均匀光场,出射孔气体的调制吸收信号通过光电探测器转化成电压信号被数据卡采集,最终被送入计算机处理,基于LabVIEW软件编写的软件锁相程序可以对调制信号进行解调,并得到其二次谐波分量的大小。 Laser light incident aperture enters the integrating sphere integrating sphere, a uniform intake over multiple reflection, uniform light field is formed inside the integrating sphere exit aperture modulation gas absorption signal into a voltage signal by the data acquisition card by the photodetector, the final be processed into the computer, the software based on LabVIEW software written by lock program can demodulate the modulated signal, and to get the size of the second harmonic component. 根据Beer-Lambert定律和积分球等效路径原理可以推导出被测气体浓度信肩、O The Beer-Lambert law and the principle of integrating sphere equivalent path measured gas concentrations can be deduced from the letter shoulder, O

[0025] 具体实施方式二、本具体实施方式与具体实施方式一所述的利用积分球结合二极管激光吸收光谱技术的气体浓度监测装置的区别在于,积分球7的内壁涂有从可见波段到近红外波段的高反膜。 Difference [0025] DETAILED Embodiment 2, the specific embodiment of the present embodiment and the exemplary embodiment of the integrating sphere of a gas concentration monitoring device in conjunction with diode laser absorption spectroscopy in that the inner wall of the integrating sphere is coated with from 7 to near the visible band high anti-film infrared band.

[0026] 具体实施方式三、基于具体实施方式一的利用积分球结合二极管激光吸收光谱技术的气体浓度监测方法,它由以下步骤实现: [0026] DETAILED Embodiment 3, based on a specific embodiment of an integrating sphere method in conjunction with gas concentration monitoring diode laser absorption spectroscopy, it implements the following steps:

[0027] 步骤一、将待测气体充入积分球内;采用调制正弦波信号发生器I产生调制正弦波信号;米用扫描锯齿波信号发生器2产生扫描锯齿波信号; [0027] Step a, the test gas into the integrating sphere; sine wave modulated using a modulation signal generator generates a sine wave signal I; m scanning sawtooth scanning signal generator 2 generates a sawtooth wave signal;

[0028] 步骤二、采用耦合器3将步骤一中产生的调制正弦波信号和扫描锯齿波信号进行耦合,并将耦合后的信号输入至电流控制器4 ; [0028] Step two, the coupler 3 using the modulated sine wave signal and the step of scanning a sawtooth signal generated by coupling the input signal and coupled to a current controller 4;

[0029] 步骤三、电流控制器4根据步骤二中的耦合后的信号控制可调谐二极管激光器5的工作电流参数和工作温度参数,可调谐二极管激光器5根据所述工作电流参数和工作温度参数产生激光光束; [0029] Step three, the current controller 4 a control signal in accordance with step two in the coupled tunable diode laser operating current and operating temperature parameters parameters 5, tunable diode laser 5 is generated according to the operating parameters and current parameters of operating temperature laser beam;

[0030] 步骤四、采用准直透镜6对步骤三产生的激光光束进行准直,所述准直后的激光光束通过积分球7的入光孔入射进积分球7内,并在积分球7内的待测气体中进行多次均匀散射形成均匀光场,同时与待测气体相互作用,部分散射光通过积分球7的出射孔出射;采用聚焦透镜8将多路反射光聚焦至光探测器9的感光面; [0030] Step 4 using a laser beam collimation lens 6 is produced in step three collimated laser beam after the quasi-direct incident into the light integrating sphere integrating sphere aperture 7 of 7, and an integrating sphere 7 It performed a plurality of times in the measurement gas within the light field evenly scattered uniformly formed, while interacting with the test gas, part of the scattered light emitted through the aperture 7 of the integrating sphere; focusing lens 8 using the multipath reflection light detector poly Jiaozhi Guang photosensitive surface 9;

[0031] 步骤五、采用调制正弦波信号发生器I产生TTL触发信号,触发采集卡10实时采集光探测器9输出的信号;并输入至计算机11中; [0031] Step 5 using modulated I signal generator generates a sine wave TTL trigger signal to trigger acquisition card 10 real-time acquisition of the signal output from the photodetector 9; 11 and input to the computer;

[0032] 步骤六、计算机11将采集卡10发送的信号进行解调,获得吸收信号,将所述吸收信号根据比尔吸收定律和积分球等效路径计算出待测气体的浓度;实现利用积分球结合二极管激光吸收光谱技术的气体浓度监测。 [0032] Step six, the computer 11 transmits the acquisition card 10 is demodulated signal, absorption signal is obtained, the signal absorbing test gas concentration is calculated according to Beer's law and integrating sphere equivalent absorption path; implemented using an integrating sphere combined gas concentration monitoring diode laser absorption spectroscopy.

[0033] 本实施方式中,Beer-Lambert定律和积分球等效路径原理均为光学领域现有的常规技术。 [0033] In the present embodiment, Beer-Lambert law and the principle of integrating sphere equivalent path are conventional prior art optics. [0034] 本实施方式中,对于给定的一个积分球,则待测气体浓度的表达式可以表不为:N=3kAA/2 α MD式中N为积分球中待测气体浓度,k为谐波信号和直接吸收信号比例系数。 [0034] In the present embodiment, for a given one of the integrating sphere, the expression may be measured gas concentration meter is not: N = 3kAA / 2 α MD where N is the gas concentration measured in an integrating sphere, k is harmonic signals, and direct absorption signal proportional coefficient. Λ A谐波信号面积,α是待测气体的吸收截面,M是积分球的反射系数,D为积分球的直径。 Λ A harmonic signal area, α is the absorption cross section of the test gas, M is the reflection coefficient of the integrating sphere, D is the diameter of the integrating sphere.

Claims (3)

  1. 1.利用积分球结合二极管激光吸收光谱技术的气体浓度监测装置,其特征是:它包括调制正弦波信号发生器(I)、扫描锯齿波信号发生器(2)、耦合器(3)、电流控制器(4)、可调谐二极管激光器(5)、准直透镜(6)、积分球(7)、聚焦透镜(8)、光探测器(9)、采集卡(10)和计算机(11); 调制正弦波信号发生器(I)的调制正弦波信号输出端与耦合器(3)的调制正弦波信号输入端连接;扫描锯齿波信号发生器(2)的扫描锯齿波信号输出端与耦合器(3)的扫描锯齿波信号输入端连接;耦合器(3)的耦合后信号输出端与电流控制器(4)的耦合后信号输入端连接;电流控制器(4)的控制信号输出端与可调谐二极管激光器(5)的控制信号输入端连接; 可调谐二极管激光器(5)发出激光光束,所述激光光束入射至准直透镜(6),经所述准直透镜(6 )透射后通过积分球(7 )的 1. integrating sphere gas concentration monitoring device in conjunction with diode laser absorption spectroscopy, characterized in that: it comprises a sine wave modulation signal generator (the I), the scanning sawtooth generator (2), the coupler (3), the current The controller (4), tunable diode laser (5), a collimating lens (6), an integrating sphere (7), focusing lens (8), a light detector (9), acquisition card (10) and a computer (11) ; modulated sine wave signal generator (I) of the modulated sine wave signal output of the coupler (3) of the modulated sine-wave signal input terminal; sawtooth scanning signal output terminal coupled to the scanning sawtooth generator (2) sawtooth scanning signal input terminal (3) is connected; coupled-signal input terminal coupled to the signal output coupler (3) and the current controller (4) is connected; a current controller (4) of the control signal output terminal tunable diode laser (5) a control signal input terminal; tuneable diode lasers (5) emits a laser beam, said laser beam incident on the collimator lens (6), via the collimator lens (6) after transmission by integrating sphere (7) 入光孔入射进积分球(7 )内,并在积分球(7 )内多次均匀散射形成均匀光场,部分散射光通过积分球(7)的出射孔入射至聚焦透镜(8),经所述聚焦透镜(8)聚焦至光探测器(9)的感光面; 所述光探测器(9)的电信号输出端与采集卡(10)的电信号输入端连接;调制正弦波信号发生器(I)的触发信号输出端与采集卡(10)的触发信号输入端连接;采集卡(10)的探测信号输出端与计算机(11)的PCI接口的连接。 The light incident into the integrating sphere aperture (7), and multiple evenly scattered within an integrating sphere (7) to form a homogeneous light field, part of the scattered light integrating sphere (7) is incident on the focusing lens exit aperture (8), by poly Jiaozhi Guang said focusing detector (9) of the photosensitive surface of the lens (8); said photo detector (9) of the electrical signal output of acquisition (10) connected to the input of an electrical signal; modulated sine wave signal generating is (I) a trigger signal output acquisition card (10) a trigger signal input terminal; PCI interface capture card connector (10) of the detection signal output terminal computer (11).
  2. 2.根据权利要求I所述的利用积分球结合二极管激光吸收光谱技术的气体浓度监测装置,其特征在于积分球(7)的内壁涂有从可见波段到近红外波段的高反膜。 The integrating sphere according to claim I combined gas concentration monitoring apparatus diode laser absorption spectroscopy, wherein the inner wall of the integrating sphere (7) is coated with a highly reflective film from the visible band to the near-infrared region.
  3. 3.基于权利要求I的利用积分球结合二极管激光吸收光谱技术的气体浓度监测方法,其特征是:它由以下步骤实现: 步骤一、将待测气体充入积分球内;采用调制正弦波信号发生器(I)产生调制正弦波信号;米用扫描锯齿波信号发生器(2)产生扫描锯齿波信号; 步骤二、采用耦合器(3)将步骤一中产生的调制正弦波信号和扫描锯齿波信号进行耦合,并将耦合后的信号输入至电流控制器(4); 步骤三、电流控制器(4)根据步骤二中的耦合后的信号控制可调谐二极管激光器(5)的工作电流参数和工作温度参数,可调谐二极管激光器(5)根据所述工作电流参数和工作温度参数产生激光光束; 步骤四、采用准直透镜(6 )对步骤三产生的激光光束进行准直,所述准直后的激光光束通过积分球(7)的入光孔入射进积分球(7)内,并在积分球(7)内的待测气体中进行多 3. The method of combined gas concentration monitoring diode laser absorption spectroscopy as claimed in claim I based on the integrating sphere, characterized in that: it is implemented by the following steps: Step 1, a test gas into the integrating sphere; modulated sine wave signal using generator (I) generating a sine wave modulation signal; m scanning sawtooth generator (2) generates scan sawtooth signal; step two, using the coupler (3) and scanning the modulated sine wave signal generated in step one serration step three parameters of the operating current, a current controller (4) tunable diode laser according to the coupled control signal in two steps (5); wave signal coupled to the signal input to the current controller (4) and the coupling and temperature parameters, tunable diode laser (5) generating a laser beam in accordance with the operating parameters and current parameters of operating temperature; step 4 using the collimating lens (6) step three of the laser beam generated by a collimator, the quasi- after the laser beam into a linear light integrating sphere through a hole (7) is incident into the integrating sphere (7), and more in the measurement gas within the integrating sphere (7) 均匀散射形成均匀光场,同时与待测气体相互作用,部分散射光通过积分球(7)的出射孔出射;采用聚焦透镜(8)将多路散射光聚焦至光探测器(9)的感光面; 步骤五、采用调制正弦波信号发生器(I)产生TTL触发信号,触发采集卡(10)实时采集光探测器(9)输出的信号;并输入至计算机(11)中; 步骤六、计算机(11)将采集卡(10)发送的信号进行解调,获得吸收信号,将所述吸收信号根据比尔吸收定律和积分球等效路径计算出待测气体的浓度;实现利用积分球结合二极管激光吸收光谱技术的气体浓度监测。 Uniformly scattered to form a uniform light field, while interacting with the test gas, part of the scattered light integrating sphere (7) of the exit aperture; using a focusing lens (8) The multi-channel poly Jiaozhi Guang scattered light detector (9) of the photosensitive surface; step 5 using modulated sine wave signal generator (I) to produce TTL trigger signal to trigger acquisition card (10) outputs a signal light detector (9) acquired in real time; and input to the computer (11); step 6 the computer (11) the acquisition card (10) demodulates the signal transmitted, obtained absorption signal, the signal absorbing test gas concentration is calculated according to Beer's law and integrating sphere equivalent absorption path; binding diode implemented using an integrating sphere gas concentration monitoring laser absorption spectroscopy technique.
CN 201210315214 2012-08-30 2012-08-30 Gas concentration monitoring device by combining integrating sphere and diode laser absorption spectroscopy and monitoring method based on monitoring device CN102830088A (en)

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