CN103386679B - Multi-micro part coplane adjusting platform and method based on microscopic vision depth of field - Google Patents
Multi-micro part coplane adjusting platform and method based on microscopic vision depth of field Download PDFInfo
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- CN103386679B CN103386679B CN201310292336.5A CN201310292336A CN103386679B CN 103386679 B CN103386679 B CN 103386679B CN 201310292336 A CN201310292336 A CN 201310292336A CN 103386679 B CN103386679 B CN 103386679B
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Abstract
The invention discloses a multi-micro part coplane adjusting working platform and a corresponding method based on one-way microscopic vision. The platform comprises a motion platform A, a motion platform B, a microscopic vision system, a holder base, a pitching platform, a holder, micro parts and a computer. The method comprises the following steps that firstly, the microscopic vision system is adjusted to a maximum visual field, and the micro parts are adjusted into the visual field so as to form a clear image; then the image is processed to obtain the positions of the parts in the image, and the motion amount that the parts are moved to the holder in the center of the visual field is obtained through computation; finally, some micro part is moved to the center of the visual field, the vision system is adjusted to a minimum visual filed, the part is precisely focused, then the other parts are moved to the center of the visual filed in sequence, and all the parts form clear images in the vision system. The multi-micro part coplane adjusting working platform and the corresponding method based on one-way microscopic vision have the advantages that micron dimension coplane adjustment precision is realized, the method is simple and easy to carry out, and the execution efficiency is high.
Description
Technical field
The micro-vision that the invention belongs in micro assemby technical field is measured and is controlled, the specifically coplanar adjustment platform of a kind of many micro parts based on the micro-vision depth of field and method.
Background technology
Along with the fast development of MEMS, assemble flow is tending towards complicated, usually relates to the problem to the coplanar adjustment in certain two dimensional surface of multiple micro parts.The advanced coplanar adjustment technology of many micro parts is for the production cycle shortening microminiature product, and the aspect such as to reduce costs significant, micro-vision is widely used in micro assemby simultaneously.The present invention is based on the particularity of fiber vision system, make use of the feature of the little depth of field of micro-vision system, propose the coplanar adjustment platform of a kind of many parts completely newly and method, achieve micron-sized coplanar Adjustment precision, the requirement of microassembly system can be met.
Summary of the invention
In order to solve the coplanar adjustment problem of the many micro parts in micro assemby process, the object of the present invention is to provide one can meet micro parts in two dimensional surface, realizing quick coplanar adjustment platform and method.Present invention utilizes the feature that the micro-vision depth of field is little, the i.e. corresponding large depth of field of little enlargement ratio large visual field situation, the corresponding little depth of field of large enlargement ratio low coverage situation, but whole part cannot be seen under low coverage, therefore method of adjustment of the present invention divides coarse adjustment and accurate adjustment two step.
For achieving the above object, according to an aspect of the present invention, there is provided a kind of many micro parts based on the micro-vision depth of field coplanar adjustment workbench, this platform comprises: motion platform A, motion platform B, micro-vision system, holder seat, pitching platform, clamper, the micro-part being fixed on gripper end and computer, wherein:
Described motion platform A has 1 translation freedoms of vertical direction, is fixed on vibration-isolating platform;
Described micro-vision system comprises ccd video camera and microlens, and described ccd video camera is fixed on described motion platform A; Described microlens is arranged on described ccd video camera;
Described motion platform B has 3 translation freedoms, is fixed on vibration-isolating platform; Described holder seat is arranged on described motion platform B, and is positioned at immediately below described microlens; Described pitching platform is fixed on described holder seat; Described clamper is fixed on described pitching platform; Described micro-part is fixed on the bare terminal end of described clamper;
Described computer is connected with described ccd video camera, for reading images from described ccd video camera;
During described working platform, by moving movement platform A, the micro-part of benchmark is focused on, under each micro-part being moved to microlens successively by moving movement platform B, by adjustment pitching platform, the micro-part moved under microlens is focused on.
According to a further aspect in the invention, also provide a kind of based on described platform, the method for based on the micro-vision depth of field, many micro parts being carried out to coplanar adjustment, the method comprises the following steps:
Step S1: be installed to by each micro parts on the bare terminal end of respective clamp device, moving movement platform B, make all micro parts all be positioned at micro-vision system within sweep of the eye;
Step S2: the angle of pitch free degree adjusting each micro parts place bare terminal end, makes each micro parts be in a plane;
Step S3: micro-vision system is adjusted to absolute visual field, focuses on described micro parts, obtains the picture rich in detail of described micro parts;
Step S4: the angle of pitch free degree adjusting the bare terminal end of the micro parts place clamper do not got a distinct image, makes the equal blur-free imaging of all micro parts, can see all micro parts under the large visual field.
The present invention reasonably utilizes the larger visual field to obtain the position of each micro parts at coarse tuning stage, and realizes preliminary leveling; In the accurate adjustment stage, successively each micro parts is moved in the visual field by mobile clamper place motion platform, then realize the exact focus to each micro parts by the angle of pitch free degree of the bare terminal end adjusting clamper corresponding to each micro parts.By above-mentioned steps, the coplanar adjustment of many micro parts can be realized fast automaticly, and reach very high Adjustment precision, improve operating efficiency.
The invention has the beneficial effects as follows: 1) achieve the automatic coplanar adjustment of many micro parts at two dimensional surface; 2) by achieving the fast automatic coplanar adjustment to many micro parts to the appropriate design of workbench, and the coplanar Adjustment precision of micron dimension is reached; 3) method is simple, execution efficiency is high.
Accompanying drawing explanation
Fig. 1 is the many micro parts coplanar adjustment work platform structure schematic diagram that the present invention is based on the micro-vision depth of field.
Fig. 2 is the flow chart of the coplanar method of adjustment of many micro parts that the present invention is based on the micro-vision depth of field.
Detailed description of the invention
For making the object, technical solutions and advantages of the present invention clearly understand, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.
Refer to the many micro parts coplanar adjustment work platform structure schematic diagram that the present invention is based on the micro-vision depth of field shown in Fig. 1, as shown in Figure 1, described workbench comprises: motion platform A, motion platform B, micro-vision system, holder seat, pitching platform, clamper, the micro-part being fixed on gripper end and computer, wherein:
Described motion platform A has 1 translation freedoms of vertical direction, is fixed on vibration-isolating platform;
Described micro-vision system comprises ccd video camera and microlens, and described ccd video camera is fixed on described motion platform A; Described microlens is arranged on described ccd video camera;
Described motion platform B has 3 translation freedoms, is fixed on vibration-isolating platform; Described holder seat is arranged on described motion platform B, and is positioned at immediately below described microlens; Described pitching platform is fixed on described holder seat; Described clamper is fixed on described pitching platform; Described micro-part is fixed on the bare terminal end of described clamper; Wherein, the number of described pitching platform and clamper depends on the number of micro-part of the coplanar adjustment of needs;
Described computer is connected with described ccd video camera, for reading images from described ccd video camera.
Based on above-mentioned platform, the distance between micro-part to microlens can be adjusted by moving movement platform A, motion platform B and pitching platform, until obtain the image of clear focusing in the ccd camera.
During described working platform, by moving movement platform A, the micro-part of benchmark is focused on, under each micro-part being moved to microlens successively by moving movement platform B, by adjustment pitching platform, the micro-part moved under microlens is focused on.
Refer to the flow chart that the present invention is based on the coplanar method of adjustment of many micro parts based on the micro-vision depth of field of described workbench shown in Fig. 2, as shown in Figure 2, the method comprises the following steps:
Step S1: be installed to by each micro parts on the bare terminal end of respective clamp device, moving movement platform B, make all micro parts all be positioned at micro-vision system within sweep of the eye;
Step S2: the angle of pitch free degree adjusting each micro parts place bare terminal end, makes each micro parts be in a plane;
Step S3: micro-vision system is adjusted to absolute visual field, focuses on described micro parts, obtains the picture rich in detail of described micro parts;
Step S4: the angle of pitch free degree adjusting the bare terminal end of the micro parts place clamper do not got a distinct image, makes the equal blur-free imaging of all micro parts, can see all micro parts under the large visual field;
Step S5: by each micro parts of micro parts Image Acquisition position in the picture of blur-free imaging, and calculate the amount of exercise of the motion platform B required for the central region each micro parts being moved to micro-vision system;
Step S6: micro-vision system is adjusted to maximum amplification times yield, and suitably increase the time for exposure as exposure compensating;
Step S7: by moving movement platform A, described micro-vision system is focused to some micro parts, get a distinct image;
Step S8: described micro-vision system keeps maintaining static, successively each micro parts is moved to the central region of micro-vision system, by adjusting the angle of pitch free degree of each micro parts place bare terminal end, make the clear focusing respectively of each micro parts, that is, now under maximum amplification times yield, only can see this part, remaining parts is not in the visual field;
In force, step S1 to step S4 is coarse tuning process, and by step S1 to step S4, the coplanar precision of each micro parts can be limited within the scope of the maximal field depth of micro-vision system, if now meet matching requirements, then fine tuning step can omit; Step S5 to step S8 is accurate adjustment process, because micro-vision system cannot see whole micro parts under low coverage, therefore need to extract each micro parts position in the picture, so that successively each micro parts is moved to central region, just the precision of coplanar adjustment can be limited in the minimum field depth of vision system by accurate adjustment process.
Visible, the present invention under the guiding of micro-vision, can realize the coplanar adjustment of many micro parts fast and effectively.
Above-described specific embodiment; object of the present invention, technical scheme and beneficial effect are further described; be understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any amendment made, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (5)
1. the coplanar adjustment workbench of the many micro parts based on the micro-vision depth of field, it is characterized in that, this workbench comprises: motion platform A, motion platform B, micro-vision system, holder seat, pitching platform, clamper, the micro-part being fixed on gripper end and computer, wherein:
Described motion platform A has 1 translation freedoms of vertical direction, is fixed on vibration-isolating platform;
Described micro-vision system comprises ccd video camera and microlens, and described ccd video camera is fixed on described motion platform A; Described microlens is arranged on described ccd video camera;
Described motion platform B has 3 translation freedoms, is fixed on vibration-isolating platform; Described holder seat is arranged on described motion platform B, and is positioned at immediately below described microlens; Described pitching platform is fixed on described holder seat; Described clamper is fixed on described pitching platform; Described micro-part is fixed on the bare terminal end of described clamper;
Described computer is connected with described ccd video camera, for reading images from described ccd video camera;
During described workbench work, by moving movement platform A, the micro-part of benchmark is focused on, under each micro-part being moved to microlens successively by moving movement platform B, by adjustment pitching platform, the micro-part moved under microlens is focused on.
2. workbench according to claim 1, is characterized in that, the number of described pitching platform and clamper depends on the number of micro-part of the coplanar adjustment of needs.
3. based on the micro-vision depth of field, many micro parts are carried out to a method for coplanar adjustment, the method adopts workbench according to claim 1, it is characterized in that, the method comprises the following steps:
Step S1: be installed to by each micro parts on the bare terminal end of respective clamp device, moving movement platform B, make all micro parts all be positioned at micro-vision system within sweep of the eye;
Step S2: the angle of pitch free degree adjusting each micro parts place bare terminal end, makes each micro parts be in a plane;
Step S3: micro-vision system is adjusted to absolute visual field, focuses on described micro parts, obtains the picture rich in detail of described micro parts;
Step S4: the angle of pitch free degree adjusting the bare terminal end of the micro parts place clamper do not got a distinct image, makes the equal blur-free imaging of all micro parts, can see all micro parts under absolute visual field.
4. method according to claim 3, is characterized in that, if also do not meet matching requirements for the adjustment of described micro parts, then described method is further comprising the steps of:
Step S5: by each micro parts of micro parts Image Acquisition position in the picture of blur-free imaging, and calculate the amount of exercise of the motion platform B required for the central region each micro parts being moved to micro-vision system;
Step S6: micro-vision system is adjusted to maximum amplification times yield;
Step S7: by moving movement platform A, described micro-vision system is focused to some micro parts, get a distinct image;
Step S8: described micro-vision system keeps maintaining static, and successively each micro parts is moved to the central region of micro-vision system, by adjusting the angle of pitch free degree of each micro parts place bare terminal end, makes the clear focusing respectively of each micro parts.
5. method according to claim 4, is characterized in that, described step S6 also comprises increases the step of time for exposure as exposure compensating.
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| EP0577084A2 (en) * | 1992-06-29 | 1994-01-05 | Shimadzu Corporation | Operating system for uniplanar translation of micromanipulator instruments |
| JP3033233B2 (en) * | 1991-03-29 | 2000-04-17 | 株式会社島津製作所 | Micro manipulator |
| CN102959452A (en) * | 2010-08-06 | 2013-03-06 | 日本精工株式会社 | Manipulator system and method for manipulating microscopic object to be manipulated |
| CN103009390A (en) * | 2012-12-20 | 2013-04-03 | 中国科学院自动化研究所 | Method and device for aiming at and fetching columnar micro-part on the basis of microscopic vision |
| CN103192399A (en) * | 2013-03-29 | 2013-07-10 | 中国科学院自动化研究所 | Micro-vision hand-eye calibration method based on target motion |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4758526B2 (en) * | 1999-09-21 | 2011-08-31 | 株式会社三友製作所 | Micromanipulation equipment for fine work |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3033233B2 (en) * | 1991-03-29 | 2000-04-17 | 株式会社島津製作所 | Micro manipulator |
| EP0577084A2 (en) * | 1992-06-29 | 1994-01-05 | Shimadzu Corporation | Operating system for uniplanar translation of micromanipulator instruments |
| CN102959452A (en) * | 2010-08-06 | 2013-03-06 | 日本精工株式会社 | Manipulator system and method for manipulating microscopic object to be manipulated |
| CN103009390A (en) * | 2012-12-20 | 2013-04-03 | 中国科学院自动化研究所 | Method and device for aiming at and fetching columnar micro-part on the basis of microscopic vision |
| CN103192399A (en) * | 2013-03-29 | 2013-07-10 | 中国科学院自动化研究所 | Micro-vision hand-eye calibration method based on target motion |
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