CN103386679A - Multi-micro part coplane adjusting platform and method based on microscopic vision depth of field - Google Patents

Multi-micro part coplane adjusting platform and method based on microscopic vision depth of field Download PDF

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Publication number
CN103386679A
CN103386679A CN2013102923365A CN201310292336A CN103386679A CN 103386679 A CN103386679 A CN 103386679A CN 2013102923365 A CN2013102923365 A CN 2013102923365A CN 201310292336 A CN201310292336 A CN 201310292336A CN 103386679 A CN103386679 A CN 103386679A
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China
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micro
platform
vision
parts
micro parts
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CN2013102923365A
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Chinese (zh)
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CN103386679B (en
Inventor
刘松
张大朋
李海鹏
张正涛
徐德
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中国科学院自动化研究所
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Publication of CN103386679A publication Critical patent/CN103386679A/en
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Abstract

The invention discloses a multi-micro part coplane adjusting working platform and a corresponding method based on one-way microscopic vision. The platform comprises a motion platform A, a motion platform B, a microscopic vision system, a holder base, a pitching platform, a holder, micro parts and a computer. The method comprises the following steps that firstly, the microscopic vision system is adjusted to a maximum visual field, and the micro parts are adjusted into the visual field so as to form a clear image; then the image is processed to obtain the positions of the parts in the image, and the motion amount that the parts are moved to the holder in the center of the visual field is obtained through computation; finally, some micro part is moved to the center of the visual field, the vision system is adjusted to a minimum visual filed, the part is precisely focused, then the other parts are moved to the center of the visual filed in sequence, and all the parts form clear images in the vision system. The multi-micro part coplane adjusting working platform and the corresponding method based on one-way microscopic vision have the advantages that micron dimension coplane adjustment precision is realized, the method is simple and easy to carry out, and the execution efficiency is high.

Description

The coplanar adjustment platform of a kind of many micro parts based on the micro-vision depth of field and method
Technical field
The micro-vision that the invention belongs in little mounting technology field is measured and is controlled, specifically the coplanar adjustment platform of a kind of many micro parts based on the micro-vision depth of field and method.
Background technology
Along with the fast development of MEMS, it is complicated that assemble flow is tending towards, and usually relates to the problem to the coplanar adjustment in certain two dimensional surface of a plurality of micro parts.The advanced coplanar adjustment technology of many micro parts is for the production cycle that shortens the microminiature product, the aspect such as reduces costs significant, and micro-vision is widely used in little assembling simultaneously.The present invention is based on the particularity of fiber vision system, utilized the characteristics of the little depth of field of micro-vision system, proposed a kind of brand-new coplanar adjustment platform of many parts and method, realized micron-sized coplanar adjustment precision, can meet the requirement of microassembly system.
Summary of the invention
, in order to solve the coplanar adjustment problem of the many micro parts in little assembling process, the object of the present invention is to provide a kind ofly can meet micro parts realize quick coplanar adjustment platform and method in two dimensional surface.The present invention has utilized the little characteristics of the micro-vision depth of field, be the corresponding large depth of field of the large visual field of little enlargement ratio situation, the corresponding little depth of field of large enlargement ratio low coverage situation, but can't see whole parts under low coverage, therefore method of adjustment of the present invention is divided coarse adjustment and two steps of accurate adjustment.
For achieving the above object, according to an aspect of the present invention, provide a kind of many micro parts based on the micro-vision depth of field coplanar adjustment workbench, this platform comprises: motion platform A, motion platform B, micro-vision system, clamper pedestal, pitching platform, clamper, be fixed on little part and the computer of clamper bare terminal end, wherein:
Described motion platform A has 1 translation freedoms of vertical direction, is fixed on vibration-isolating platform;
Described micro-vision system comprises ccd video camera and microlens, and described ccd video camera is fixed on described motion platform A; Described microlens is arranged on described ccd video camera;
Described motion platform B has 3 translation freedoms, is fixed on vibration-isolating platform; Described clamper pedestal is arranged on described motion platform B, and be positioned at described microlens under; Described pitching platform is fixed on described clamper pedestal; Described clamper is fixed on described pitching platform; Described little part is fixed on the bare terminal end of described clamper;
Described computer is connected with described ccd video camera, is used for from described ccd video camera reading images;
During described working platform, by moving movement platform A, the little part of benchmark is focused on, by moving movement platform B, each little part is moved under microlens successively, by adjusting the pitching platform, the little part that moves under microlens is focused on.
According to a further aspect in the invention, also provide a kind of and many micro parts are carried out the method for coplanar adjustment based on described platform, based on the micro-vision depth of field, the method comprises the following steps:
Step S1: each micro parts is installed on the bare terminal end of respective clamp device, moving movement platform B, make all micro parts all be positioned at the micro-vision system within sweep of the eye;
Step S2: adjust the angle of pitch free degree of each micro parts place bare terminal end, make each micro parts be in a plane;
Step S3: the micro-vision system is adjusted to absolute visual field, described micro parts is focused on, obtain the picture rich in detail of described micro parts;
Step S4: adjust the angle of pitch free degree of the bare terminal end of the micro parts place clamper that does not get a distinct image, make the equal blur-free imaging of all micro parts, can see all micro parts under the large visual field.
The present invention reasonably utilizes the larger visual field to obtain the position of each micro parts in the coarse adjustment stage, and realizes preliminary leveling; In the accurate adjustment stage, successively each micro parts is moved in the visual field by mobile clamper place motion platform, then the angle of pitch free degree of the bare terminal end by adjusting clamper corresponding to each micro parts realizes the accurate focusing to each micro parts.By above-mentioned steps, can realize the coplanar adjustment of many micro parts fast automaticly, and reach very high adjustment precision, improved operating efficiency.
The invention has the beneficial effects as follows: 1) realized the automatic coplanar adjustment of many micro parts at two dimensional surface; 2) realize fast automatic coplanar adjustment to many micro parts by the appropriate design to workbench, and reached the coplanar adjustment precision of micron dimension; 3) method is simple, execution efficiency is high.
Description of drawings
Fig. 1 is the coplanar adjustment work platform structure of the many micro parts schematic diagram that the present invention is based on the micro-vision depth of field.
Fig. 2 is the flow chart that the present invention is based on the coplanar method of adjustment of many micro parts of the micro-vision depth of field.
The specific embodiment
For making the purpose, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.
See also the coplanar adjustment work platform structure of the many micro parts schematic diagram that the present invention is based on the micro-vision depth of field shown in Fig. 1, as shown in Figure 1, described workbench comprises: motion platform A, motion platform B, micro-vision system, clamper pedestal, pitching platform, clamper, be fixed on little part and the computer of clamper bare terminal end, wherein:
Described motion platform A has 1 translation freedoms of vertical direction, is fixed on vibration-isolating platform;
Described micro-vision system comprises ccd video camera and microlens, and described ccd video camera is fixed on described motion platform A; Described microlens is arranged on described ccd video camera;
Described motion platform B has 3 translation freedoms, is fixed on vibration-isolating platform; Described clamper pedestal is arranged on described motion platform B, and be positioned at described microlens under; Described pitching platform is fixed on described clamper pedestal; Described clamper is fixed on described pitching platform; Described little part is fixed on the bare terminal end of described clamper; Wherein, the number of described pitching platform and clamper depends on the number of little part of the coplanar adjustment of needs;
Described computer is connected with described ccd video camera, is used for from described ccd video camera reading images.
, based on above-mentioned platform, can adjust little part to the distance between microlens by moving movement platform A, motion platform B and pitching platform, until obtain the image of clear focusing in ccd video camera.
During described working platform, by moving movement platform A, the little part of benchmark is focused on, by moving movement platform B, each little part is moved under microlens successively, by adjusting the pitching platform, the little part that moves under microlens is focused on.
See also the flow chart of the coplanar method of adjustment of the many micro parts based on the micro-vision depth of field that the present invention is based on described workbench shown in Fig. 2, as shown in Figure 2, the method comprises the following steps:
Step S1: each micro parts is installed on the bare terminal end of respective clamp device, moving movement platform B, make all micro parts all be positioned at the micro-vision system within sweep of the eye;
Step S2: adjust the angle of pitch free degree of each micro parts place bare terminal end, make each micro parts be in a plane;
Step S3: the micro-vision system is adjusted to absolute visual field, described micro parts is focused on, obtain the picture rich in detail of described micro parts;
Step S4: adjust the angle of pitch free degree of the bare terminal end of the micro parts place clamper that does not get a distinct image, make the equal blur-free imaging of all micro parts, can see all micro parts under the large visual field;
Step S5: by the position of each micro parts of micro parts Image Acquisition in image of blur-free imaging, and calculate the amount of exercise that each micro parts is moved to the needed motion platform B in center, the visual field of micro-vision system;
Step S6: the micro-vision system is adjusted to maximum amplification times yield, and suitably increase the time for exposure as exposure compensating;
Step S7: make described micro-vision system focus to some micro parts by moving movement platform A, get a distinct image;
Step S8: described micro-vision system keeps maintaining static, successively each micro parts is moved to the center, the visual field of micro-vision system, by adjusting the angle of pitch free degree of each micro parts place bare terminal end, make the clear focusing respectively of each micro parts, that is to say, only can see this part this moment under maximum amplification times yield, remaining parts is not in the visual field;
In force, step S1 is the coarse adjustment process to step S4, and to step S4, the coplanar precision of each micro parts can be limited in the maximal field depth scope of micro-vision system by step S1, if meet matching requirements this moment, accurate adjustment step can be omitted; Step S5 is the accurate adjustment process to step S8, because the micro-vision system can't be seen whole micro parts under low coverage, therefore need to extract the position of each micro parts in image, so that successively each micro parts is moved to center, the visual field, just can be the accuracy limitations of coplanar adjustment in the minimum field depth of vision system by the accurate adjustment process.
As seen, the present invention can under the guiding of micro-vision, realize the coplanar adjustment of many micro parts fast and effectively.
Above-described specific embodiment; purpose of the present invention, technical scheme and beneficial effect are further described; institute is understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any modification of making, be equal to replacement, improvement etc., within all should being included in protection scope of the present invention.

Claims (5)

1. coplanar adjustment workbench of the many micro parts based on the micro-vision depth of field, it is characterized in that, this platform comprises: motion platform A, motion platform B, micro-vision system, clamper pedestal, pitching platform, clamper, be fixed on little part and the computer of clamper bare terminal end, wherein:
Described motion platform A has 1 translation freedoms of vertical direction, is fixed on vibration-isolating platform;
Described micro-vision system comprises ccd video camera and microlens, and described ccd video camera is fixed on described motion platform A; Described microlens is arranged on described ccd video camera;
Described motion platform B has 3 translation freedoms, is fixed on vibration-isolating platform; Described clamper pedestal is arranged on described motion platform B, and be positioned at described microlens under; Described pitching platform is fixed on described clamper pedestal; Described clamper is fixed on described pitching platform; Described little part is fixed on the bare terminal end of described clamper;
Described computer is connected with described ccd video camera, is used for from described ccd video camera reading images;
During described working platform, by moving movement platform A, the little part of benchmark is focused on, by moving movement platform B, each little part is moved under microlens successively, by adjusting the pitching platform, the little part that moves under microlens is focused on.
2. platform according to claim 1, is characterized in that, the number of described pitching platform and clamper depends on the number of little part of the coplanar adjustment of needs.
3. one kind is carried out the method for coplanar adjustment to many micro parts based on the micro-vision depth of field based on platform claimed in claim 1, it is characterized in that, the method comprises the following steps:
Step S1: each micro parts is installed on the bare terminal end of respective clamp device, moving movement platform B, make all micro parts all be positioned at the micro-vision system within sweep of the eye;
Step S2: adjust the angle of pitch free degree of each micro parts place bare terminal end, make each micro parts be in a plane;
Step S3: the micro-vision system is adjusted to absolute visual field, described micro parts is focused on, obtain the picture rich in detail of described micro parts;
Step S4: adjust the angle of pitch free degree of the bare terminal end of the micro parts place clamper that does not get a distinct image, make the equal blur-free imaging of all micro parts, can see all micro parts under the large visual field.
4. method according to claim 3, is characterized in that, if for the adjustment of described micro parts, also do not meet matching requirements, described method is further comprising the steps of:
Step S5: by the position of each micro parts of micro parts Image Acquisition in image of blur-free imaging, and calculate the amount of exercise that each micro parts is moved to the needed motion platform B in center, the visual field of micro-vision system;
Step S6: the micro-vision system is adjusted to maximum amplification times yield;
Step S7: make described micro-vision system focus to some micro parts by moving movement platform A, get a distinct image;
Step S8: described micro-vision system keeps maintaining static, and successively each micro parts is moved to the center, the visual field of micro-vision system,, by adjusting the angle of pitch free degree of each micro parts place bare terminal end, makes the clear focusing respectively of each micro parts.
5. method according to claim 3, is characterized in that, described step S6 also comprises increases the step of time for exposure as exposure compensating.
CN201310292336.5A 2013-07-12 2013-07-12 Multi-micro part coplane adjusting platform and method based on microscopic vision depth of field CN103386679B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103862281A (en) * 2014-03-11 2014-06-18 大连理工大学 Assembly method for miniature parts

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0577084A2 (en) * 1992-06-29 1994-01-05 Shimadzu Corporation Operating system for uniplanar translation of micromanipulator instruments
JP3033233B2 (en) * 1991-03-29 2000-04-17 株式会社島津製作所 Micro manipulator
JP2001091857A (en) * 1999-09-21 2001-04-06 Ibaraki Corp For Small & Medium Enterprise Promotion Micro-manipulation device for microfabrication
CN102959452A (en) * 2010-08-06 2013-03-06 日本精工株式会社 Manipulator system and method for manipulating microscopic object to be manipulated
CN103009390A (en) * 2012-12-20 2013-04-03 中国科学院自动化研究所 Method and device for aiming at and fetching columnar micro-part on the basis of microscopic vision
CN103192399A (en) * 2013-03-29 2013-07-10 中国科学院自动化研究所 Micro-vision hand-eye calibration method based on target motion

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3033233B2 (en) * 1991-03-29 2000-04-17 株式会社島津製作所 Micro manipulator
EP0577084A2 (en) * 1992-06-29 1994-01-05 Shimadzu Corporation Operating system for uniplanar translation of micromanipulator instruments
JP2001091857A (en) * 1999-09-21 2001-04-06 Ibaraki Corp For Small & Medium Enterprise Promotion Micro-manipulation device for microfabrication
CN102959452A (en) * 2010-08-06 2013-03-06 日本精工株式会社 Manipulator system and method for manipulating microscopic object to be manipulated
CN103009390A (en) * 2012-12-20 2013-04-03 中国科学院自动化研究所 Method and device for aiming at and fetching columnar micro-part on the basis of microscopic vision
CN103192399A (en) * 2013-03-29 2013-07-10 中国科学院自动化研究所 Micro-vision hand-eye calibration method based on target motion

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103862281A (en) * 2014-03-11 2014-06-18 大连理工大学 Assembly method for miniature parts
CN103862281B (en) * 2014-03-11 2016-03-02 大连理工大学 A kind of assembly method of micro part

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