CN104808332A - High-resolution and automatic-focusing electron microscope eyepiece system - Google Patents
High-resolution and automatic-focusing electron microscope eyepiece system Download PDFInfo
- Publication number
- CN104808332A CN104808332A CN201510236823.9A CN201510236823A CN104808332A CN 104808332 A CN104808332 A CN 104808332A CN 201510236823 A CN201510236823 A CN 201510236823A CN 104808332 A CN104808332 A CN 104808332A
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- Prior art keywords
- lens
- auto
- eyepiece system
- focusing electron
- combination
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B25/00—Eyepieces; Magnifying glasses
- G02B25/001—Eyepieces
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/241—Devices for focusing
- G02B21/242—Devices for focusing with coarse and fine adjustment mechanism
Abstract
The invention relates to a high-resolution and automatic-focusing electron microscope eyepiece system. The high-resolution and automatic-focusing electron microscope eyepiece system is characterized in that a first lens (1), an object plane (2), a second lens (3), a third lens (4), a fourth lens (5), a diaphragm (6), a fifth lens (7), a sixth lens (8), a seventh lens (9), an eighth lens (10) and an optical filter (11) are arranged in sequence from a microscope objective to an image plane (12). The high-resolution and automatic-focusing electron microscope eyepiece system is matched with a currently common microscope objective, an image is formed by utilizing a photosensitive chip and is output to a display screen, automatic focusing can be achieved, and the defects of inconvenient observation, non-clear imaging, inconvenient operation and the like in the prior art are overcome.
Description
[technical field]
The present invention relates to a kind of high resolving power, auto-focusing electron microscopic eyepiece system.
[background technology]
The shortcoming that current microscopic system ubiquity is such: system generally can only go to observe facing to micro-eyepiece with eyes, can not output on display screen with sensitive chip imaging, observe very inconvenient, resolution is low, can not auto-focusing etc., also do not have camera lens can overcome above-mentioned shortcoming in the market simultaneously, only has minority camera lens, improve in certain when sacrificing other side, such as sensitive chip imaging is utilized to output on display screen in order to realize, microcobjective imaging can only be used, reduce microscopical enlargement ratio, reduce the resolution of system, make imaging unintelligible, in order to realize high magnification, the volume of system must be increased, can not auto-focusing, it is very convenient etc. to operate, the high power of microscopic system requirement can not be met far away, it is convenient to observe, simple operation etc., also do not overcome the micro-eyepiece of above whole shortcoming in the market.
[summary of the invention]
Technical matters to be solved by this invention is for above-mentioned deficiency of the prior art, a kind of high resolving power, auto-focusing electron microscopic eyepiece system are provided, the microcobjective that this high resolving power, auto-focusing electron microscopic eyepiece system coupling is conventional at present, sensitive chip imaging is utilized to output on display screen, and can auto-focusing, improve prior art and observe the shortcomings such as inconvenient, imaging is unintelligible, operation is not convenient.
For achieving the above object, present invention employs following technical proposals:
A kind of high resolving power, auto-focusing electron microscopic eyepiece system, be provided with the first lens, object plane, the second lens, the 3rd lens, the 4th lens, diaphragm, the 5th lens, the 6th lens, the 7th lens, the 8th lens and optical filter successively from microcobjective to image planes.
First lens described above, the second lens, the 3rd lens, the 4th lens form the first lens combination, the focal power of described first lens combination is just, described 5th lens, the 6th lens, the 7th lens, the 8th lens form the second lens combination, and the focal power of described second lens combination is just.
First lens combination described above can move along image direction backward relative to described image planes, and described second lens combination maintains static relative to described image planes.
First lens described above are the meniscus shaped lens of positive light coke, and the concave surface facing described image planes direction of lens, second lens are the lenticular lens of positive light coke, 3rd lens are the double concave lens of negative power, 4th lens are the meniscus shaped lens of positive light coke, 5th lens are the lenticular lens of positive light coke, 6th lens are the double concave lens of negative power, 7th lens are the lenticular lens of positive light coke, 8th lens are the meniscus shaped lens of negative power, and the concave surface facing described object plane direction of lens.
Object plane described above is located at described first lens near the side of described image planes.
5th lens described above and described 6th lens are bonded together by optical glue.
First lens described above, the second lens, the 3rd lens, the 4th lens, the 5th lens, the 6th lens, the 7th lens, the 8th lens are spherical lens.
First lens described above, the second lens, the 3rd lens, the 4th lens, the 5th lens, the 6th lens, the 7th lens, the 8th lens material are optical glass.
The invention has the beneficial effects as follows:
1, most of microscopic system all can only be observed facing to micro-eyepiece with eyes in the market, and the micro-eyepiece of the present invention directly connects sensitive chip, utilizes sensitive chip imaging to output on display screen, convenient observation.
2, microscopic system common in the market can not auto-focusing, first micro-eyepiece is regulated during use, eyes are enable to see graticule clearly, and then the lifting knob of adjustment microcobjective slowly, until observed object imaging clearly on graticule, eyes just can be observed, complex operation, and slowly, the present invention only needs to adjust microcobjective, and do not need to adjust to microcobjective become on graticule clearly as, even if be imaged in the certain limit beyond graticule, eyepiece can pass through automatic focusing function, the picture of observed object is made to present on a display screen clearly, it is very convenient to operate.
3, most of electron microscope is conveniently observed to realize in the market, use microcobjective imaging, greatly reduce microscopical enlargement ratio and imaging definition, the present invention is on the basis of microcobjective imaging, recycle micro-eyepiece imaging, do not reduce microscopical enlargement ratio, picture entirety is clear.
4, resolution of the present invention high, utilize sensitive chip imaging and output on display screen, convenient to observe; In addition, when object distance changes, can auto-focusing clear, simple operations etc., it is mainly used in microscopic system, and use prospect wide, market potential is huge.
[accompanying drawing explanation]
Fig. 1 is schematic diagram of the present invention.
[embodiment]
Below in conjunction with accompanying drawing, further detailed description is done to the present invention.
As shown in Figure 1, a kind of high resolving power, auto-focusing electron microscopic eyepiece system, from microcobjective to image planes, 12 are provided with the first lens 1 successively, object plane 2, second lens 3, 3rd lens 4, 4th lens 5, diaphragm 6, 5th lens 7, 6th lens 8, 7th lens 9, 8th lens 10 and optical filter 11, the micro-eyepiece of the present invention directly connects sensitive chip, sensitive chip imaging is utilized to output on display screen, convenient observation, the present invention only needs to adjust microcobjective, and do not need to adjust to microcobjective become on graticule clearly as, even if be imaged in the certain limit beyond graticule, eyepiece can pass through automatic focusing function, makes the picture of observed object present on a display screen clearly, it is very convenient to operate, the present invention, on the basis of microcobjective imaging, recycles micro-eyepiece imaging, does not reduce microscopical enlargement ratio, picture entirety is clear, and resolution of the present invention is high, utilize sensitive chip imaging and output on display screen, convenient observation, in addition, when object distance changes, can auto-focusing clear, simple operations etc., it is mainly used in microscopic system, and use prospect wide, market potential is huge.
As shown in Figure 1, in the present embodiment, described first lens 1, second lens 3, the 3rd lens 4, the 4th lens 5 form the first lens combination 101, the focal power of described first lens combination 101 is just, described 5th lens 7, the 6th lens 8, the 7th lens 9, the 8th lens 10 form the second lens combination 102, and the focal power of described second lens combination 102 is just.
As shown in Figure 1, in the present embodiment, described first lens combination 101 can move along image direction backward relative to described image planes 12, and described second lens combination 102 maintains static relative to described image planes 12.
As shown in Figure 1, in the present embodiment, described first lens 1 are the meniscus shaped lens of positive light coke, and the concave surface facing image planes direction of lens, second lens 3 are the lenticular lens of positive light coke, 3rd lens 4 are the double concave lens of negative power, 4th lens 5 are the meniscus shaped lens of positive light coke, 5th lens 7 are the lenticular lens of positive light coke, 6th lens 8 are the double concave lens of negative power, 7th lens 9 are the lenticular lens of positive light coke, and the 8th lens 10 are the meniscus shaped lens of negative power, and concave surface facing object plane 2 direction of lens.
As shown in Figure 1, in the present embodiment, described object plane 2 is located at described first lens 1 near the side of described image planes 12.
As shown in Figure 1, in the present embodiment, described 5th lens 7 and described 6th lens 8 are bonded together by optical glue.
As shown in Figure 1, in the present embodiment, described first lens 1, second lens 3, the 3rd lens 4, the 4th lens 5, the 5th lens 7, the 6th lens 8, the 7th lens 9, the 8th lens 10 are spherical lens.
As shown in Figure 1, in the present embodiment, described first lens 1, second lens 3, the 3rd lens 4, the 4th lens 5, the 5th lens 7, the 6th lens 8, the 7th lens 9, the 8th lens 10 material are optical glass.
Described first lens 1, second lens 3, the 3rd lens 4, the 4th lens 5 are the first lens combination; 5th lens 7, the 6th lens 8, the 7th lens 9, the 8th lens 10 are the second lens combination.
In order to realize utilizing sensitive chip imaging to output on display screen, the lens combination of two groups of positive light cokes is adopted to combine during design, the focal power of guarantee whole system is just, system is made to become real image, first lens adopt focal power to be positive meniscus shaped lens, play the effect of field lens, object distance is adopted to be that negative i.e. object plane is after the first lens, and its lens below of the first lens distance are far away, observed object light after microcobjective is made can all to enter micro-eyepiece, what ensure that observing object body can be complete presents on a display screen, simultaneously, whole system does not arrange vignetting, the picture of display screen peripheral and the picture at center there will not be obvious luminance difference.
In order to realize auto-focusing, design employing first lens combination can move forward and backward along image direction relative to sensitive chip, second lens combination maintains static relative to sensitive chip, object plane is also along with the first lens combination synchronizing moving, for whole microscopic system, the picture of microcobjective is the thing of micro-eyepiece, namely when the picture of microcobjective and the thing of micro-eyepiece overlap, microscopic system just can become clearly as, when the distance of observed object and microcobjective changes, microcobjective imaging also has corresponding change, no longer overlap with the object plane of micro-eyepiece, first lens combination of micro-eyepiece will move forward and backward along image direction under the drive of motor, simultaneously the object plane of micro-eyepiece also can synchronizing moving, until image overlaps, realize auto-focusing, during design, the first lens combination leaves larger amount of movement, guarantee to overlap with the picture of microcobjective, in addition, whole micro-eyepiece system only has one mobile group, a motor is only needed to realize auto-focusing, structure is simple, simple operation.
In order to realize high resolving power, design employing second lens combination is fixed, first lens combination moves, first lens adopt focal power to be positive meniscus shaped lens, concave surface facing image planes, good tendency of correcting light, make light all can enter system below, first lens combination all adopts simple lens, and positive lens and negative lens with the use of, spherical aberration can be corrected, coma, aberration etc., second lens combination adopt balsaming lens and simple lens with the use of, cemented surface bends towards diaphragm, the first auxiliary light is not only made to have good trend, but also can spherical aberration be corrected, aberration, sinusoidal difference etc., the positive and negative collocation of simple lens, well correct the curvature of field.Whole system adopt simple lens and balsaming lens with the use of, well balance the aberration of whole system, the resolution of raising system, finally, system does not arrange vignetting, image plane center and edge have same high-resolution while, periphery and center there will not be obvious luminance difference, make whole picture limpid in sight.
Adopt wide spectral when the present invention designs, and the Theory Solution image force of design is far above theoretical demand value, ensure that image sharpness and color reducibility.
Lift an actual design case below:
| Face is numbered | Type | Radius R | Thickness | Material | Half bore |
| OBJ | Standard | INF | -6.71 | 12.5 | |
| 1 | Standard | 17.269 | 1.85 | H-ZLAF55A | 10.7 |
| 2 | Standard | 23.544 | 33.26 | 10.3 | |
| 3 | Standard | 23.183 | 1.52 | H-ZF52A | 4.8 |
| 4 | Standard | -118.256 | 3.10 | 4.5 | |
| 5 | Standard | -10.593 | 6.41 | H-LAK52 | 3.7 |
| 6 | Standard | 55.264 | 0.52 | 3.2 | |
| 7 | Standard | 52.145 | 6.61 | H-ZF12 | 3.3 |
| 8 | Standard | 12.703 | 0.40 | 3.4 | |
| STO | Standard | INF | 0.05 | 2.8 | |
| 10 | Standard | 9.035 | 5.33 | H-ZK3 | 3.4 |
| 11 | Standard | -5.871 | 0.72 | H-ZF52A | 3.2 |
| 12 | Standard | 9.254 | 0.32 | 3.1 | |
| 13 | Standard | 9.074 | 6.52 | H-LAK61 | 3.1 |
| 14 | Standard | -12.339 | 2.66 | 3.0 | |
| 15 | Standard | -5.297 | 0.50 | H-ZF7LA | 2.8 |
| 16 | Standard | INF | 0.20 | 3.2 | |
| 17 | Standard | INF | 0.85 | H-K9L | 3.2 |
| 18 | Standard | INF | 7.21 | 3.3 | |
| IMA | Standard | INF | 4.2 |
First lens combination comprises the first lens 1, second lens 3, the 3rd lens 4, the 4th lens 5, second lens combination comprises the 5th lens 7, the 6th lens 8, the 7th lens 9, moving range of focusing between the 8th lens 10, first lens combination and the second lens combination: the interval between the first lens combination ~ the second lens combination: 0.50 ~ 20.50mm.
Claims (8)
1. high resolving power, an auto-focusing electron microscopic eyepiece system, is characterized in that: from microcobjective to image planes, (12) are provided with the first lens (1), object plane (2), the second lens (3), the 3rd lens (4), the 4th lens (5), diaphragm (6), the 5th lens (7), the 6th lens (8), the 7th lens (9), the 8th lens (10) and optical filter (11) successively.
2. high resolving power according to claim 1, auto-focusing electron microscopic eyepiece system, it is characterized in that: described first lens (1), the second lens (3), the 3rd lens (4), the 4th lens (5) form the first lens combination (101), the focal power of described first lens combination (101) is just, described 5th lens (7), the 6th lens (8), the 7th lens (9), the 8th lens (10) form the second lens combination (102), and the focal power of described second lens combination (102) is just.
3. high resolving power according to claim 2, auto-focusing electron microscopic eyepiece system, it is characterized in that: described first lens combination (101) can be moved along image direction backward relative to described image planes (12), described second lens combination (102) maintains static relative to described image planes (12).
4. the high resolving power according to claim 1 or 2 or 3, auto-focusing electron microscopic eyepiece system, it is characterized in that: the meniscus shaped lens that described first lens (1) are positive light coke, and concave surface facing described image planes (12) direction of lens, the lenticular lens that second lens (3) are positive light coke, the double concave lens that 3rd lens (4) are negative power, the meniscus shaped lens that 4th lens (5) are positive light coke, the lenticular lens that 5th lens (7) are positive light coke, the double concave lens that 6th lens (8) are negative power, the lenticular lens that 7th lens (9) are positive light coke, the meniscus shaped lens that 8th lens (10) are negative power, and concave surface facing described object plane (2) direction of lens.
5. high resolving power according to claim 4, auto-focusing electron microscopic eyepiece system, is characterized in that: described object plane (2) is located at the side of described first lens (1) near described image planes (12).
6. high resolving power according to claim 5, auto-focusing electron microscopic eyepiece system, is characterized in that: described 5th lens (7) and described 6th lens (8) are bonded together by optical glue.
7. high resolving power according to claim 6, auto-focusing electron microscopic eyepiece system, is characterized in that: described first lens (1), the second lens (3), the 3rd lens (4), the 4th lens (5), the 5th lens (7), the 6th lens (8), the 7th lens (9), the 8th lens (10) are spherical lens.
8. high resolving power according to claim 7, auto-focusing electron microscopic eyepiece system, is characterized in that: described first lens (1), the second lens (3), the 3rd lens (4), the 4th lens (5), the 5th lens (7), the 6th lens (8), the 7th lens (9), the 8th lens (10) material are optical glass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510236823.9A CN104808332B (en) | 2015-05-11 | 2015-05-11 | A kind of high-resolution, auto-focusing electron microscopic eyepiece system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510236823.9A CN104808332B (en) | 2015-05-11 | 2015-05-11 | A kind of high-resolution, auto-focusing electron microscopic eyepiece system |
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| Publication Number | Publication Date |
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| CN104808332A true CN104808332A (en) | 2015-07-29 |
| CN104808332B CN104808332B (en) | 2017-11-17 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201510236823.9A Active CN104808332B (en) | 2015-05-11 | 2015-05-11 | A kind of high-resolution, auto-focusing electron microscopic eyepiece system |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106210520A (en) * | 2015-11-05 | 2016-12-07 | 杭州唐光科技有限公司 | A kind of automatic focusing electronic eyepiece and system |
| CN107703608A (en) * | 2017-11-22 | 2018-02-16 | 浙江舜宇光学有限公司 | Optical imaging lens |
| CN110244450A (en) * | 2019-07-19 | 2019-09-17 | 杭州有人光电技术有限公司 | A kind of big visual field eyepiece optical system of virtual reality device |
| CN111061036A (en) * | 2019-12-13 | 2020-04-24 | 瑞声通讯科技(常州)有限公司 | Image pickup optical lens |
| WO2021114233A1 (en) * | 2019-12-13 | 2021-06-17 | 诚瑞光学(常州)股份有限公司 | Photographing optical lens |
| US11493733B2 (en) | 2017-11-22 | 2022-11-08 | Zhejiang Sunny Optical Co., Ltd. | Optical imaging lens assembly |
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| US4469411A (en) * | 1981-08-10 | 1984-09-04 | Clegg John E | Quadrant conical-lens microscope |
| JPH08122669A (en) * | 1994-10-24 | 1996-05-17 | Olympus Optical Co Ltd | Ocular for binocular observation |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106210520A (en) * | 2015-11-05 | 2016-12-07 | 杭州唐光科技有限公司 | A kind of automatic focusing electronic eyepiece and system |
| CN107703608A (en) * | 2017-11-22 | 2018-02-16 | 浙江舜宇光学有限公司 | Optical imaging lens |
| US11493733B2 (en) | 2017-11-22 | 2022-11-08 | Zhejiang Sunny Optical Co., Ltd. | Optical imaging lens assembly |
| CN107703608B (en) * | 2017-11-22 | 2023-12-01 | 浙江舜宇光学有限公司 | Optical imaging lens |
| CN110244450A (en) * | 2019-07-19 | 2019-09-17 | 杭州有人光电技术有限公司 | A kind of big visual field eyepiece optical system of virtual reality device |
| CN110244450B (en) * | 2019-07-19 | 2021-05-11 | 杭州有人光电技术有限公司 | Large-view-field eyepiece optical system of virtual reality equipment |
| CN111061036A (en) * | 2019-12-13 | 2020-04-24 | 瑞声通讯科技(常州)有限公司 | Image pickup optical lens |
| CN111061036B (en) * | 2019-12-13 | 2021-02-19 | 诚瑞光学(常州)股份有限公司 | Image pickup optical lens |
| WO2021114233A1 (en) * | 2019-12-13 | 2021-06-17 | 诚瑞光学(常州)股份有限公司 | Photographing optical lens |
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| CN104808332B (en) | 2017-11-17 |
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