CN103382078A - Manufacturing method of glass substrate, manufacturing device of glass substrate, and stirring device - Google Patents

Manufacturing method of glass substrate, manufacturing device of glass substrate, and stirring device Download PDF

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Publication number
CN103382078A
CN103382078A CN2013101494396A CN201310149439A CN103382078A CN 103382078 A CN103382078 A CN 103382078A CN 2013101494396 A CN2013101494396 A CN 2013101494396A CN 201310149439 A CN201310149439 A CN 201310149439A CN 103382078 A CN103382078 A CN 103382078A
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China
Prior art keywords
turning axle
melten glass
paddle wheel
glass
steel basin
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CN2013101494396A
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CN103382078B (en
Inventor
月向仁志
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Avanstrate Inc
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Avanstrate Inc
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Priority claimed from JP2013080533A external-priority patent/JP2013249247A/en
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
    • C03B5/16—Special features of the melting process; Auxiliary means specially adapted for glass-melting furnaces
    • C03B5/18—Stirring devices; Homogenisation
    • C03B5/187—Stirring devices; Homogenisation with moving elements

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Compositions (AREA)
  • Mixers Of The Rotary Stirring Type (AREA)

Abstract

The invention provides a manufacturing method of a glass substrate, a manufacturing device of the glass substrate, and a stirring device, which can prevent deformation and damage of a stirrer used for stirring molten glass and can stir the molten glass uniformly. Molten glass (G) is stirred by a stirrer (102) disposed in a stirring tank (101), and as a result, the molten glass (G) is guided from the upper portion to the lower portion or from the lower portion to the upper portion in the stirring tank (101). The stirrer (102) comprises a rotary shaft (105) disposed in the vertical direction and a plurality of stirring impellers (106a-106e) which are embedded in the rotary shaft (105) and thus are fixed to the outer peripheral surface of the rotary shaft (105) and are disposed along the rotary shaft (105) from the uppermost section to the lowermost section. In the stirrer (102), at least the parts where the stirring impellers (106a-106e) are embedded in the rotary shaft (105) and the vicinity thereof are made of strengthened platinum.

Description

The manufacture method of glass substrate, the manufacturing installation of glass substrate and whipping appts
Technical field
The present invention relates to the manufacture method of glass substrate, manufacturing installation and the whipping appts of glass substrate.
Background technology
In the technique of the glassworks such as batch production glass substrate, generate melten glass by the heating frit, and the melten glass that generates is shaped, make glasswork.Inhomogeneous melten glass becomes the reason that produces streak on glasswork.Streak is the muscle shape zone that specific refractory power and proportion are different from the peripheral region, when being used for the optics such as lens and liquid-crystal display (LCD) with substrate etc., requires strictly streak to be got rid of from glasswork.Particularly, the flat-panel monitor take the LCD substrate as representative (FPD), needs in substrate surface integral body, streak to be suppressed for extremely low-level for preventing the striped in gap with in glass substrate.In order to suppress the generation of streak, in the manufacturing process of glasswork, need to stir equably melten glass.
Usually, stir the required whipping appts of melten glass, it comprises steel basin, is configured in the agitator of steel basin inside.Agitator has turning axle, by the paddle wheel of welded and installed on the turning axle periphery.Melten glass is sent to steel basin, and by the axle rotation of agitator, melten glass is by uniform stirring.From the viewpoint of thermotolerance and oxidation-resistance, formed by platinum, platinum alloy or reinforcement platinum with the contacted steel basin inwall of the melten glass of high temperature and agitator.Platinum alloy is for example platinum rhodium, and fusing point and intensity are higher than platinum.Strengthen platinum and be oxide compounds such as making zirconium white and be scattered in platinum material on platinum or platinum alloy.Strengthen platinum and have stratiform platinum grain boundary structure, at high temperature, its creep strength and tensile strength are higher than platinum or platinum alloy.Therefore, as the special table of patent documentation 1(2005-511462 communique) as shown in, the inwall of steel basin and agitator the best are served as reasons reinforcement platinum and are made.
Patent documentation
Patent documentation 1: Japanese Unexamined Patent Application Publication 2005-511462 communique
Summary of the invention
But, being heated to fusing point above the platinum grain boundary structure of stratiform is collapsed and dissolved in case strengthen platinum, strength decreased is to the degree identical with common platinum or platinum alloy.Therefore, strengthen the platinum parts by welding and form when being used in the agitator of device for stirring molten glass, the creep strength of weld and tensile strength are lower than other parts.And, stir in the process of melten glass at whipping appts, because the turning axle of agitator needs supporting role in the stress of paddle wheel, especially easily be subject to the larger load from the high viscosity melten glass.Also have, the turning axle of agitator easily be subject to because of paddle wheel self from heavy loading.These produce in the axial agitator component parts of rotation from heavy loading.Therefore, be arranged on paddle wheel on turning axle or when forming agitator by welding by welding, the distortion or the breakage that easily produce agitator because of the reduction of weld intensity, the very difficult melten glass that stirs equably.
The object of the invention is to, a kind of distortion or breakage that can suppress to be used in the agitator that stirs melten glass is provided, and can stirs equably the manufacture method of the glass substrate of melten glass, manufacturing installation and the whipping appts of glass substrate.
The manufacture method that relates to glass substrate of the present invention, it comprise by molten raw make melten glass smelting process, be stirred in the stirring technique of the melten glass that smelting process makes.In stirring technique, melten glass the inside of steel basin from above below guiding, or from guiding top, below the time, the agitator that is configured in agitator inside stirs.Agitator has along the turning axle of vertical configuration and along turning axle from epimere to paddle wheel, the paddle wheel of hypomere multistage configuration and is fixed on the periphery of turning axle by being embedded in turning axle.In agitator, paddle wheel is embedded in the part of turning axle and makes by strengthening platinum on every side at least.
In the manufacture method of this glass substrate, the agitator that is used in stirring technique is made by strengthening platinum, and paddle wheel is completed assembling by being fitted on turning axle.Strengthen platinum and have following character, namely, in case to be heated to fusing point above and dissolve, its strength decreased is to the degree identical with common platinum or platinum alloy.Therefore, and compare when paddle wheel is installed on turning axle by welding, by chimeric, paddle wheel is installed on turning axle, can suppress the strength decreased of the connection section of turning axle and paddle wheel.Therefore, in the manufacture method of this glass substrate, due to the distortion and the breakage that suppress to be used in the agitator that stirs melten glass, can stir equably melten glass.
And, relating in the manufacture method of glass substrate of the present invention, the best is formed on its periphery for turning axle has, and is used for the embedded hole of chimeric a part of paddle wheel.And paddle wheel has the mosaic process that is entrenched in the turning axle embedded hole, and by inserting the embedded hole of turning axle, mosaic process is fixed on the periphery of turning axle.
And, relate to the manufacture method of glass substrate of the present invention, in stirring technique, being stirred the melten glass that device stirs is that viscosity is 10 2.5When the temperature during dPas surpasses the glass of 1450 ℃, the most suitable the present invention.
And, relating in the manufacture method of glass substrate of the present invention, alkali metal oxide content the best of glass substrate is 0 quality %～2 quality %.
And, relating in the manufacture method of glass substrate of the present invention, glass substrate the best is liquid crystal display glass substrate or OLED display any one of glass substrate.
And, relating in the manufacture method of glass substrate of the present invention, glass substrate the best shows for carrying low temperature polycrystalline Si TFT glass substrate for display and carrying oxide semiconductor any one that use glass substrate.
And, relate in the manufacture method of glass substrate of the present invention, the molten glass viscosity in stirring technique, the best is 450dPs～2500dPs.
And, relating in the manufacture method of glass substrate of the present invention, paddle wheel is best for having the back up pad perpendicular with the medullary ray of turning axle, being configured in the accessory plate on back up pad top interarea and below interarea.And, in stirring technique, best for being rotated around rotating shaft center's line by agitator, accessory plate makes melten glass produce flowing towards the turning axle radial direction, and at the accessory plate that is configured between the paddle wheel back up pad of adjacent two sections, make melten glass produce flowing of equidirectional.
In the manufacture method of this glass substrate, by the axle rotation of agitator, the melten glass of steel basin is whipped into rotation shaft side or is pushed to the inwall side of steel basin.Namely, melten glass in steel basin from above below guiding or from below above guiding in, the radial direction that is moved toward turning axle stirs.In the manufacture method of this glass substrate, do not use the agitator with complex construction, can stir equably melten glass.
The manufacture method of this glass substrate, the best is in stirring technique, by agitator rotation around the medullary ray of turning axle, in paddle wheel separately, be configured in the accessory plate on the interarea of back up pad top or be configured in accessory plate on the interarea of back up pad below, the accessory plate that is positioned at a side produces from the inside of steel basin to the flowing of turning axle melten glass, is positioned at the opposite side accessory plate and produces and make melten glass produce flowing from axial rotary steel basin inwall.
And, relate in the manufacture method of glass substrate of the present invention, stirring technique is best for to be formed by the 1st stirring technique and the 2nd stirring technique, wherein, described the 1st stirring technique is, the inside of the 1st steel basin from below the technique that stirs when guiding melten glass upward, described the 2nd stirring technique is, the inside of the 2nd steel basin from above the technique that stirs in the melten glass that is stirred being guided in the 1st stirring technique downwards.The 1st steel basin, it comprises the 1st treatment chamber, stirs the 1st agitator of melten glass in the 1st treatment chamber, can discharge from the bottom of the 1st treatment chamber the 1st vent pipe of melten glass.The 2nd steel basin, it comprises the 2nd treatment chamber, stirs the 2nd agitator of melten glass in the 2nd treatment chamber, can discharge from the molten glass level in the 2nd treatment chamber the 2nd vent pipe of melten glass.The top sidepiece of the 1st steel basin is connected with the top sidepiece of the 2nd steel basin by pipe connecting.Melten glass is sent to the 2nd steel basin via pipe connecting from the 1st steel basin.
And, relating to the manufacturing installation of glass substrate of the present invention, it comprises that molten raw makes the fusing department of melten glass, is stirred in the mixing part of the melten glass that fusing department makes.The mixing part has steel basin, is configured in the agitator of steel basin inside.Agitator steel basin inner stir from above below guiding or from below melten glass above guiding.Agitator has along the turning axle of vertical configuration and along turning axle from epimere to paddle wheel, the paddle wheel of hypomere multistage configuration and is fixed on the periphery of turning axle by being embedded in turning axle.In agitator, paddle wheel is embedded in the part of turning axle and on every side at least, makes by strengthening platinum.
And, relating to whipping appts of the present invention for being used for stirring the whipping appts of melten glass, it comprises steel basin, is configured in the agitator of steel basin inside.The inside that agitator is stirred in steel basin is from guiding below, top or from the melten glass of guiding top, below.Agitator has along the turning axle of vertical configuration and along turning axle from epimere to paddle wheel, the paddle wheel of hypomere multistage configuration and is fixed on the periphery of turning axle by being embedded in turning axle.In agitator, paddle wheel is embedded in the part of turning axle and on every side at least, makes by strengthening platinum.
In addition, the manufacture method that relates to glass substrate of the present invention, it comprise by molten raw make melten glass smelting process, be stirred in the stirring technique of the melten glass that makes in smelting process, from the forming technology of the melten glass molding glass substrate that is stirred stirring technique.In stirring technique, melten glass steel basin inside from above below guiding or from above below guiding in, the agitator that is configured in steel basin inside stirs.Agitator has along the turning axle of vertical configuration and along turning axle from epimere to paddle wheel, the paddle wheel of hypomere multistage configuration and is fixed on the periphery of turning axle by being embedded in turning axle.In agitator, paddle wheel is embedded in the part of turning axle and on every side at least, makes by strengthening platinum.
Also have, the manufacture method that relates to glass substrate of the present invention, it comprise molten raw make the fusing department of melten glass, be stirred in the mixing part of the melten glass that makes in fusing department, from the forming section of the melten glass molding glass substrate that is stirred the mixing part.The mixing part has steel basin, is configured in the agitator of steel basin inside.Agitator is stirred in steel basin inside from guiding below, top or from the melten glass of guiding top, below.Agitator has along the turning axle of vertical configuration and along turning axle from epimere to paddle wheel, the paddle wheel of hypomere multistage configuration and is fixed on the periphery of turning axle by being embedded in turning axle.。In agitator, paddle wheel is embedded in the part of turning axle and on every side at least, makes by strengthening platinum.
The invention effect
Relate to the manufacture method of glass substrate of the present invention, manufacturing installation and the whipping appts of glass substrate, suppress distortion and breakage for the agitator that stirs melten glass, and can stir equably melten glass.
Description of drawings
Fig. 1 relates to the example modes figure of the glass manufacturing apparatus structure of the 1st embodiment for expression;
Fig. 2 is the whipping appts side-view that relates to the 1st embodiment;
Fig. 3 is the oblique drawing that relates to the agitator paddle wheel of the 1st embodiment;
Fig. 4 is the orthographic plan that relates to the agitator paddle wheel of the 1st embodiment;
Fig. 5 is the oblique drawing that relates to the agitator paddle wheel of the 1st embodiment;
Fig. 6 is the orthographic plan that relates to the agitator paddle wheel of the 1st embodiment;
Fig. 7 relates to the layout diagram of two impellers of the agitator of the 1st embodiment for expression;
Fig. 8 relates to the bearing layout diagram of the paddle wheel of the 1st embodiment for expression;
Fig. 9 is the bearing side-view that relates to the paddle wheel of the 1st embodiment;
Figure 10 is the bearing top view that relates to the paddle wheel of the 1st embodiment;
Figure 11 is entrenched in turning axle state top view before for the chock that expression relates to the paddle wheel of the 1st embodiment;
Figure 12 is entrenched in turning axle state top view afterwards for the chock that expression relates to the paddle wheel of the 1st embodiment;
Figure 13 relates to for expression the figure that in the whipping appts of the 1st embodiment, melten glass flows;
Figure 14 is the agitator oblique drawing that relates to the flexible routine B of the 1st embodiment;
Figure 15 is the paddle wheel top view of agitator that relates to the flexible routine C of the 1st embodiment;
Figure 16 relates to the example modes figure of the glass manufacturing apparatus structure of the 2nd embodiment for expression;
Figure 17 is the top view of paddle wheel upside accessory plate that relates to the agitator of the 3rd embodiment;
Figure 18 is the longitudinal diagram of paddle wheel upside accessory plate that relates to the agitator of the 3rd embodiment;
Figure 19 is the side-view of paddle wheel upside accessory plate that relates to the agitator of the 3rd embodiment;
Figure 20 is the side-view of paddle wheel upside accessory plate outboard end that relates to the agitator of the 3rd embodiment;
Figure 21 is the drawing in side sectional elevation of paddle wheel upside accessory plate that relates to the agitator of the 3rd embodiment.
Nomenclature
40 melt groove (fusing department)
42 building mortions (forming section)
100 whipping apptss (mixing part)
101 steel basins
102 agitators
105 turning axles
The 105a embedded hole
106a～106e paddle wheel
108 supporting plates
109 accessory plates
126 chocks (mosaic process)
200 glass manufacturing apparatus (manufacturing installation of glass substrate)
The G melten glass
The medullary ray of L turning axle
Embodiment
The＜the 1 embodiment 〉
(1) one-piece construction of glass manufacturing apparatus
By reference to the accompanying drawings, the manufacture method that relates to glass substrate of the present invention, the manufacturing installation of glass substrate and the 1st embodiment of whipping appts are described.Fig. 1 is the mode chart of the glass manufacturing apparatus 200 of this embodiment.Glass manufacturing apparatus 200, it comprises melting groove 40, clarifying tank 41, whipping appts 100, building mortion 42.Melt groove 40 and clarifying tank 41, be connected by conduit 43a.Clarifying tank 41 and whipping appts 100 are connected by conduit 43b.Whipping appts 100 and building mortion 42 are connected by conduit 43c.At the melten glass G that melts groove 40 generations, flow into clarifying tank 41 by conduit 43a.At the clarified melten glass G of clarifying tank 41, flow into whipping appts 100 by conduit 43b.The melten glass G that is stirred in whipping appts 100 flows into building mortion 42 by conduit 43c.In building mortion 42, by under draw method and be configured as glass ribbon 44 from melten glass G.
Although not shown, melt groove 40 and comprise the heating units such as burner.In melting groove 40, frit is by heating unit dissolving, generation melten glass G.Frit is modulated into, and makes it can obtain the glass of required composition in fact.As the example of glass ingredient, non-alkali glass or little alkali glass are made of following composition, namely, SiO 2: 57 quality %～65 quality %, Al 2O 3: 15 quality %～19 quality %, B 2O 3: 8 quality %～13 quality %, MgO:1 quality %～3 quality %, CaO:4 quality %～7 quality %, SrO:1 quality %～4 quality %, BaO:0 quality %～2 quality %, Na 2O:0 quality %～1 quality %, K 2O:0 quality %～1 quality %, As 2O 3: 0 quality %～1 quality %, Sb 2O 3: 0 quality %～1 quality %, SnO 2: 0 quality %～1 quality %, Fe 2O 3: 0 quality %～1 quality %, ZrO 2: 0 quality %～1 quality %.Here, " in fact " means, in the scope of less than 0.1 quality %, allows the existence of other trace ingredientss.And, about having the glass of mentioned component, Fe 2O 3, As 2O 3, Sb 2O 3And SnO 2Containing ratio separately is that the composition of Fe, As, Sb or the Sn that will have a plurality of valence mumbers is respectively as Fe 2O 3, As 2O 3, Sb 2O 3Or SnO 2The value that converts.
Be modulated into frit as above, be put into melting groove 40.In melting groove 40, frit dissolves at the temperature corresponding with its composition.According to this formation, melt in groove 40, make the melten glass G of 1500 ℃～1600 ℃ of high temperature.
Melten glass G melting groove 40 makes flows into clarifying tanks 41 by conduit 43a from melting groove 40.Although not shown, and melt groove 40 in the same manner, clarifying tank 41 comprises heating unit.In clarifying tank 41, heat up by further making melten glass G, carry out the clarification of melten glass G.In clarifying tank 41, make the temperature of melten glass G best for rising to 1600 ℃～1800 ℃, being more preferred from and rising to 1630 ℃～1750 ℃, be more preferred from and rise to 1650 ℃～1750 ℃.
At the clarified melten glass G of clarifying tank 41, flow into whipping appts 100 by conduit 43b from clarifying tank 41.Because melten glass G is cooled by conduit 43b the time, in whipping appts 100, be stirred than the low melten glass G of temperature of the melten glass G of clarifying tank 41.For the glass with mentioned component, in whipping appts 100, the best be Temperature Setting with melten glass G in the scope of 1400 ℃～1550 ℃ in, the viscosity of melten glass G is adjusted in the scope of 2500dPaS～450dPaS, carry out the stirring of melten glass G.Melten glass G, homogenized by stirring in whipping appts 100.
Be stirred in whipping appts 100, and homogenized melten glass G, flow into building mortion 42 by conduit 43c from whipping appts 100.Melten glass G is cooled to during by conduit 43c and is suitable for the temperature that is shaped in building mortion 42, for example, and 1200 ℃.In building mortion 42, by under draw method, be configured as glass ribbon 44 from melten glass G.Particularly, the melten glass G that overflows from the top of building mortion 42 by flowing to the below along building mortion 42 sidewalls, is glass ribbon 44 from the lower end continuous molding of building mortion 42.Glass ribbon 44 is cooling gradually along with flowing to the below, is cut at last the glass substrate of required size.
(2) structure of whipping appts
(2-1) one-piece construction of whipping appts
Fig. 2 is the side-view of whipping appts 100.Whipping appts 100 comprises cylindric steel basin 101, is configured in the agitator 102 of steel basin 101 inside.Steel basin 101 has the upstream side conduit 103 on the upper side of being arranged on and is arranged on downstream side conduit 104 on lower side.Upstream side conduit 103 is conduit 43b, and downstream side conduit 104 is conduit 43c.Melten glass G flows into from upstream side conduit 103 towards horizontal direction in steel basin 101, steel basin 101 in from above below guiding in, be stirred device 102 stirrings, and flow to downstream side conduit 104 from steel basin 101 is interior towards horizontal direction.
Agitator 102 is made by strengthening platinum.Strengthen platinum and be oxide compounds such as making zirconium white and be scattered in platinum or platinum alloy, and the material of rolling.Strengthen platinum and have stratiform platinum grain boundary structure, at high temperature, its creep strength and tensile strength are higher than platinum or platinum alloy.Therefore, for the contacted agitator 102 of the melten glass G of high temperature, strengthening platinum is best materials.
Agitator 102 has cylindric turning axle 105 along vertical configuration, is connected to five paddle wheel 106a, 106b, 106c, 106d, 106e on turning axle 105 peripherys.Paddle wheel 106a, 106b, 106c, 106d, 106e, order configures from the top toward the below same intervals along turning axle 105 according to this.Turning axle 105, connect its columned above the center and below carry out axle around the centre line L at center and rotate.Namely, turning axle 105 has along its centre line L, disposes the structure of five sections paddle wheel 106a～106e.Turning axle 105 is that inside is the tubular part in cavity.
(2-2) mechanism of paddle wheel
Next, the structure of paddle wheel 106a～106e described.In this embodiment, paddle wheel 106a, 106c, 106e have mutually the same shape, and paddle wheel 106b, 106d have mutually the same shape.Fig. 3 and Fig. 4 are oblique drawing and the orthographic plans of paddle wheel 106a, 106c, 106e.Fig. 5 and Fig. 6 are oblique drawing and the orthographic plans of paddle wheel 106b, 106d.Fig. 3 and the paddle wheel 106a～106e that is arranged on turning axle 105 peripherys shown in Figure 5.
Each paddle wheel 106a～106e, 101 inwall extends from turning axle 105 to steel basin to be configured to make it.Each paddle wheel 106a～106e has the three slice supporting plates 108 perpendicular with the centre line L of turning axle 105, is configured in a slice upside accessory plate 119a on each supporting plate 108 upside interarea, is configured in a slice downside accessory plate 119b on each supporting plate 108 downside interarea.Below, upside accessory plate 119a and downside accessory plate 119b are generically and collectively referred to as accessory plate 109.The accessory plate 109 of paddle wheel 106a～106e forms by bending machining.Particularly, strengthen platinum by crooked a slice, form back up pad 108 and accessory plate 109 all-in-one-piece paddle wheel 106a～106e.
When observing paddle wheel 106a～106e along the centre line L of turning axle 105, three supporting plates 108 of each paddle wheel 106a～106e are configured in the three subsymmetric positions, centre line L position of relative rotation axi 105.The interarea normal of each supporting plate 108 is parallel with the centre line L of turning axle 105.Namely, supporting plate 108 is horizontal arrangement.And three supporting plates 108 of each paddle wheel 106a～106e interconnect by connection section 110 around turning axle 105.Namely, three supporting plates 108 of each paddle wheel 106a～106e, consist of in fact parts.
Each paddle wheel 106a～106e is configured to, to be disposed at supporting plate 108 projections of paddle wheel 106a～106e of adjacent two sections when steel basin 101 bottom surface, supporting plate 108 becomes minimum with the interval of supporting plate 108, or the area of back up pad 108 and back up pad 108 laps becomes minimum.In this embodiment, be configured to along the supporting plate 108 of two adjacent paddle wheel 106a～106e of the centre line L of turning axle 105, when watching along the centre line L of turning axle 105, it does not overlapped each other.For example, when Fig. 7 represents to observe agitator 102 along the centre line L of turning axle 105, the position relationship of two paddle wheel 106a, 106b.As shown in Figure 7, each supporting plate 108 of paddle wheel 106a is configured between two supporting plates 108 of paddle wheel 106b.Namely, six supporting plates 108 of two paddle wheel 106a, 106b, seem and be configured in six subsymmetric positions, relative rotation axi 105 centre line L position.
Accessory plate 109 is configured on the interarea of supporting plate 108, so that the interarea of the relative supporting plate 108 of its interarea is perpendicular.Accessory plate 109 is configured on supporting plate 108 upside interareas and downside interarea.As mentioned above, dispose upside accessory plate 119a on supporting plate 108 upside interareas, dispose downside accessory plate 119b on the downside interarea of supporting plate 108.In Fig. 4 and Fig. 6, downside accessory plate 119b dots.When observing paddle wheel 106a～106e along the centre line L of turning axle 105, upside accessory plate 119a and downside accessory plate 119b intersect.
Accessory plate 109 is configured to, and near its outer rim to supporting plate 108 from turning axle 105 is extended.Accessory plate 109 has near the medial end 109a of turning axle 105 sides, the opposition side end of medial end 109a, namely, near the outboard end 109b of supporting plate 108 outer edge sides.Accessory plate 109 is configured to, and when overlooking agitator 102, makes it along with from medial end 109a end 109b toward the outer side, gradually away from the centre line L that connects turning axle 105 and the straight line 111 of medial end 109a.When paddle wheel 106a, 106c, 106e, as shown in Figure 4, along with from medial end 109a end 109b toward the outer side, upside accessory plate 119a is configured to, make it counterclockwise away from straight line 111, downside accessory plate 119b is configured to, and makes it toward the clockwise direction away from straight line 111.On the other hand, when paddle wheel 106b, 106d, as shown in Figure 6, along with from medial end 109a end 109b toward the outer side, upside accessory plate 119a is configured to, and makes it toward the clockwise direction away from straight line 111, and downside accessory plate 119b is configured to, and makes it counterclockwise away from straight line 111.Namely, in each paddle wheel 106a～106e, upside accessory plate 119a and downside accessory plate 119b are configured to, and it is extended each other in the opposite direction.And between two adjacent paddle wheel 106a～106e of the centre line L of turning axle 105, mutual a pair of accessory plate 109 in opposite directions is configured to, and it is extended in the same direction.For example, the downside accessory plate 119b of paddle wheel 106a and the upside accessory plate 119a that is positioned at the paddle wheel 106b of next section of paddle wheel 106b all are configured to, and make it toward the clockwise direction away from straight line 111.
(2-3) structure of the connection section of turning axle and paddle wheel
Next, the connection section of turning axle 105 with paddle wheel 106a～106e described.Each paddle wheel 106a～106e is on the chimeric periphery that is arranged on turning axle 105.Be formed with embedded hole 105a on the periphery of turning axle 105, namely, the through hole of telescoping part paddle wheel 106a～106e.Each paddle wheel 106a～106e is made of by main body, three bearings 116, six chocks 126 that connection section 110 is connected mutually three pieces of back up pads 108.Bearing 116 as described later, engages with accessory plate 109.Chock 126 although do not engage with back up pad 108 or bearing 116, is regarded one of parts that consist of paddle wheel 106a～106e as.In addition, chock 126 also can engage with back up pad 108 or bearing 116.
Each bearing 116 has be used to two chock through hole 116d that chock 126 is run through.Chock 126 is for to run through the chock through hole 116d of bearing 116, and the parts with the projection that is embedded in turning axle 105 embedded hole 105a.Each bearing 116 is not to engage with the periphery of turning axle 105 by two chocks 126, but is fixed on the periphery of turning axle 105.In addition, agitator 102 can be also to have the bearing 116 that do not form chock through hole 116d, do not run through chock through hole 116d, is embedded in the structure of the chock 126 of embedded hole 105a.Below, to the shape of bearing 116 and chock 126, and the method for installing by the periphery that each paddle wheel 106a～106e is embedded in turning axle 105 describe.
Fig. 8 is the configuration schematic diagram of turning axle 105, back up pad 108 and bearing 116.Fig. 9 is, at the height location of back up pad 108, along the side-view of radially observing bearing 116 of turning axle 105.In Fig. 9, represent back up pad 108 with dotted line.Figure 10 is the centre line L along turning axle 105, from the top view of vertical top observation bearing 116.The embedded hole 105a of the section of turning axle 105 shown in Figure 10 and turning axle 105.Figure 11 is entrenched in the top view of turning axle 105 state before for the chock 126 of expression paddle wheel 106a～106e.Figure 12 is entrenched in the top view of turning axle 105 state afterwards for the chock 126 of expression paddle wheel 106a～106e.In Figure 11, the front shown near chock 126, expression chock 126 inserts the direction of the embedded hole 105a of the chock through hole 116d of bearings 116 and turning axle 105.
As shown in Figure 9, bearing 116 is made of the axle contact part 116c between upper end 116a, lower end 116b, upper end 116a and lower end 116b.When overlooking as shown in figure 10,, upper end 116a and lower end 116b connect into approximate L word shape with the horizontal direction both ends with circular-arc axle contact part 116c.As shown in figure 10, the interarea of axle contact part 116c namely, be connected with the opposition side interarea of upper end 116a and lower end 116b side, contacts with the periphery of turning axle 105.As Figure 11 and shown in Figure 12, the medial end 109a side of the side of upper end 116a and upside accessory plate 119a engages, and the medial end 109a side of the side of lower end 116b and downside accessory plate 119b engages.Axle contact part 116c with engaging of accessory plate 109 is, for example, forms up small gap between the medial end 109a of end 116a and upside accessory plate 119a, and the platinum by melting or platinum alloy etc. are filled up this gap and carried out.In addition, axle contact part 116c and accessory plate 109 can also engage by welding.And, on three back up pads 108 of paddle wheel 106a～106e, there is respectively a bearing 116 to be connected with a pair of accessory plate 109.
As shown in Figure 9, the axle contact part 116c of bearing 116 is made of the bearing top 116c1 that is positioned at back up pad 108 tops and the bearing bottom 116c2 that is positioned at back up pad 108 belows.On bearing top 116c1 and bearing bottom 116c2, be formed with respectively a chock through hole 116d.The section shape that chock through hole 116d has sub-circular.In each paddle wheel 106a～106e, the bearing top 116c1 chock through hole 116d of three bearings 116 is formed on the height that differs from one another, and the bearing bottom 116c2 chock through hole 116d of three bearings 116 is formed on the height that differs from one another.In the periphery of turning axle 105, and be formed with embedded hole 105a on position that each chock through hole 116d of the bearing 116 of paddle wheel 106a～106e is connected.Embedded hole 105a has the sub-circular section shape identical with chock through hole 116d.
As shown in the arrow of Figure 11, by making two chocks 126 run through respectively two chock through hole 116d of each bearing 116, and then inserting respectively two embedded hole 105a of turning axle 105, each bearing 116 of each paddle wheel 106a～106e is fixed on the periphery of turning axle 105.Namely, each paddle wheel 106a～106e, be embedded in six embedded hole 105a of turning axle 105 via three bearings 116 by making six chocks 126, be arranged on turning axle 105.
In addition, in this embodiment, chock 126 has the section shape of sub-circular, and has the parts of baculum of the chock through hole 116d of the embedded hole 105a that can be embedded in turning axle 105 and bearing 116.But chock 126 can be for having the arbitrary shape of this projection.
(3) action of whipping appts
Action to the whipping appts 100 that relates to this embodiment describes.The flow graph of the melten glass G that Figure 13 is stirred by whipping appts 100 for expression.Arrow shown in Figure 13, the flow direction of expression melten glass G.Melten glass G flows into the inside of steel basin 101 from upstream side conduit 103 towards horizontal direction.Turning axle 105 upper ends of agitator 102 are connected with not shown motor.When overlooking whipping appts 100, agitator 102 counterclockwise is rotated around the centre line L of turning axle 105.In the inside of steel basin 101, when melten glass G leads the below gradually from the top, be stirred device 102 and stir.The melten glass G that is stirred flows to downstream side conduit 104 from the inside of steel basin 101 towards horizontal direction.In addition, the temperature of the melten glass G that is stirred by whipping appts 100 is when having 10 2.5During the viscosity of dPaS, the best is 1450 ℃～1750 ℃, is more preferred from 1500 ℃～1750 ℃, is more preferred from 1530 ℃～1750 ℃.
In steel basin 101, by the axle rotation of paddle wheel 106a～106e, melten glass G is stirred.The accessory plate 109 of each paddle wheel 106a～106e stirs melten glass G to turning axle 105 sides from the inwall side of steel basin 101, or the inwall side from turning axle 105 thrusters to steel basin 101.In this embodiment, the any one party of the upside accessory plate 119a of each paddle wheel 106a～106e and downside accessory plate 119b, melten glass G is stirred to turning axle 105 sides from the inwall side of steel basin 101, and the opposing party is with the inwall side of melten glass G from turning axle 105 thrusters to steel basin 101.Namely, above the supporting plate 108 of each paddle wheel 106a～106e and below supporting plate 108, the flow direction of the melten glass G of turning axle 105 radial directions be mutual opposite direction.And, for along two adjacent paddle wheel 106a～106e of the centre line L of turning axle 105, the upside accessory plate 119a interarea of the downside accessory plate 119b interarea of epimere paddle wheel 106a～106e and hypomere paddle wheel 106a～106e is in the same direction away from straight line 111.Therefore, along the centre line L of turning axle 105 in opposite directions a pair of accessory plate 109 mutually, make melten glass G produce radial direction along turning axle 105, flowing in the same direction.
As shown in figure 13, in this embodiment, the axle rotation by agitator 102, the upside accessory plate 119a of the paddle wheel 106a of epimere produces from the inwall side of steel basin 101 melten glass G and stirs flowing to turning axle 105 sides.Therefore, the downside accessory plate 119b of paddle wheel 106a and the upside accessory plate 119a that is positioned at the paddle wheel 106b of next section of paddle wheel 106a make flowing of melten glass G generation 101 inwall sides from turning axle 105 thrusters to steel basin.Similarly, the upside accessory plate 119a of the downside accessory plate 119b of paddle wheel 106b and paddle wheel 106c produces from the inwall side of steel basin 101 melten glass G and stirs flowing to turning axle 105 sides.And, be positioned at the paddle wheel 106e downside accessory plate 119b of the hypomere of agitator 102, make melten glass G produce flowing of from turning axle 105 thrusters to steel basin 101 inwall sides.Namely, in the lower space 122 between the paddle wheel 106e of hypomere and steel basin 101 bottom surfaces, melten glass G flows to arrow shown in Figure 13 124 directions.
As shown in figure 13, in this embodiment, the upside accessory plate 119a of the paddle wheel 106a of epimere above paddle wheel 106a back up pad 108, produces and makes melten glass G flowing from inwall side rotary rotating shaft 105 side shiftings of steel basin 101.Upside accessory plate 119a by the top paddle wheel 106a moves near the melten glass G of turning axle 105, rises to the liquid level of melten glass G along turning axle 105.Rise to the melten glass G of liquid level, 105 effluents are to the inwall side that stirs side 101 along liquid level from turning axle.Move near the melten glass G of inwall of steel basin 101, drop to the paddle wheel 106a of the top along the inwall of steel basin 101.Namely, in the upper space 121 between the liquid level of the paddle wheel 106a of epimere and melten glass G, form the cycling stream 123 of melten glass G shown in Figure 13.Melten glass G by this cycling stream 123, is stirred at upper space 121.
In addition, in this embodiment, and the steel basin 101 inner face radius Rs in the perpendicular section of the centre line L of turning axle 105 and the ratio R/H of the interval H between the liquid level of the upside interarea of paddle wheel 106a and melten glass G topmost, the best is 0.5～2.6.
(4) feature
(4-1)
Relate in the whipping appts 100 of this embodiment, agitator 102 is made by strengthening platinum, and turning axle 105 interconnects by chimeric with each paddle wheel 106a～106e.Paddle wheel 106a～106e by running through the chock through hole 116d of bearing 116, and inserts the embedded hole 105a of turning axle 105, is fixed on the periphery of turning axle 105.Namely, in essence, agitator 102 does not need to engage with turning axle 105 and paddle wheel 106a～106e by welding, completes assembling.
When whipping appts 100 stirs melten glass G, namely, when agitator 102 is rotated around the centre line L of turning axle 105, paddle wheel 106a～106e is subject to because stirring stress that high temperature and full-bodied melten glass produce and the stress of paddle wheel 106a～106e deadweight.Because paddle wheel 106a～106e is connected with the periphery of turning axle 105, therefore, the turning axle 105 of rotation supports all stress that paddle wheel 106a～106e is subject to.Here, as the reinforcement platinum of agitator 102 raw materials, in case it is above and dissolve to have a fusing point of being heated to, the platinum grain boundary structure of stratiform is collapsed, creep strength and tensile strength to the character of common platinum or platinum alloy same degree.Therefore, during by welded joint turning axle 105 and paddle wheel 106a～106e, because of the dissolving of the reinforcement platinum at junction surface, compare with the intensity of other parts during welding, the intensity at agitator junction surface significantly reduces.Therefore, yielding or damaged in rotation by the agitator that welding turning axle 105 and paddle wheel 106a～106e assemble, might stir equably melten glass G.
In this embodiment, the agitator 102 of making by strengthening platinum on the chimeric periphery that paddle wheel 106a～106e is arranged on turning axle 105, is completed assembling.Consist of according to this, compare with time on the periphery that by welding, paddle wheel 106a～106e is arranged on turning axle 105, can suppress the reduction of agitator 102 intensity.Therefore, due to the distortion and the breakage that suppress agitator 102 in rotation, can make agitator 102 melten glass G high speed be rotated.Therefore, relate to the whipping appts 100 of the glass manufacturing apparatus 200 of this embodiment, can stir equably melten glass G.
In addition, the content of alkalimetal oxide is that the nothing of 0 quality %～2 quality % subtracts glass or little alkali glass, and the alkali glass that surpasses 2 quality % with the content of alkalimetal oxide is compared, and the viscosity of the melten glass that makes in melting groove 40 is high.Therefore, as be applicable to FPD with glass substrate subtract by the less nothing of alkali metal content the glass substrate that glass or little alkali glass consist of, compare easy residual streak with the glass substrate that is consisted of by the many alkali glasses of alkali metal content.Namely, in the manufacturing process of the few glass substrate of alkali content, in order to suppress the generation of streak, melten glass is stirred in important being equably in whipping appts 100.The whipping appts 100 that relates to the glass manufacturing apparatus 200 of this embodiment even when high, also can make agitator 102 high speed rotating due to the viscosity of melten glass G, is suitable for without the manufacturing that subtracts glass or little alkali glass substrate.Particularly, whipping appts 100 is suitable for content by alkalimetal oxide and is the manufacturing of the glass substrate that the glass of 0 quality %～0.5 quality % forms.In addition, the content of alkalimetal oxide represents Li 2O, Na 2O and K 2The total of O content.Below, the glass that does not contain in fact alkalimetal oxide is referred to as without subtracting glass, the content of alkalimetal oxide surpasses 0 quality %, and is referred to as little alkali glass lower than the glass of 2 quality %.
And whipping appts 100 is applicable to, and in stirring technique, the viscosity of melten glass is high, and is strict with the liquid crystal display glass substrate of eliminating streak and the manufacturing that OLED display is used glass substrate.
Also have, due to the glass substrate that forms low temperature polycrystalline Si (p-Si) TFT and oxide semiconductor, need the thermal treatment process of high temperature, therefore, the best is that percent thermal shrinkage is little.In order to make the little glass substrate of percent thermal shrinkage, best for improving the strain point of glass, but have the trend that viscosity uprises, easy residual streak when the melting due to the high glass of strain point.Therefore, relate to the whipping appts 100 of the glass manufacturing apparatus 200 of this embodiment, be suitable for carrying the FPD of low temperature polycrystalline Si (p-Si) TFT and oxide semiconductor with the manufacturing of glass substrate.In addition, the strain point of glass substrate, the best is more than 675 ℃, is more preferred from more than 680 ℃, is more preferred from more than 690 ℃.And, have 10 2.5When the glass substrate temperature of dPaS viscosity is 1400 ℃～1750 ℃, significantly present and prevent agitator 102 distortion and damaged, and the effect that homogenizes of melten glass, when the temperature of glass substrate is 1500 ℃～1750 ℃, these effects significantly present, when the temperature of glass substrate was 1550 ℃～1750 ℃, these effects significantly presented.
In addition, in stirring technique, the viscosity of steel basin 101 interior melten glass, best for being adjusted to 450dPaS～2500dPaS.Particularly, in stirring technique, when the viscosity of the melten glass in steel basin 101 is 700dPaS～1600dPaS, significantly present the distortion and the damaged effect that prevent agitator 102, and the effect that homogenizes of melten glass.
(4-2)
Relate in the whipping appts 100 of this embodiment, flow into the melten glass G of steel basin 101 from upstream side conduit 103, by the axle rotation of agitator 102, stir to turning axle 105 sides from the inwall side of steel basin 101, or the inwall from turning axle 105 thrusters to steel basin 101.Towards flowing of the melten glass G of turning axle 105 radial directions, along with along the centre line L of turning axle 105 from the top toward the below, become reverse direction in each section of paddle wheel 106a～106e.Namely, melten glass G from steel basin 101 inside from above below guiding in, alternately mobile towards the radial direction of turning axle 5, and be stirred.
Therefore, relate to the whipping appts 100 of the glass manufacturing apparatus 200 of this embodiment, need not possess complicated structure, can stir equably melten glass G.Consist of according to this, can suppress the generation of streak, can make high-quality glassy product.
(4-3)
Relate in the whipping appts 100 of this embodiment, be provided with accessory plate 109 on interarea below reaching on interarea above the supporting plate 108 of each paddle wheel 106a～106e.In case agitator 102 carries out the axle rotation, melten glass G flows to the radial direction of turning axle 105 by accessory plate 109.Particularly, near the melten glass G supporting plate 108 interareas is whipped into or is urged by accessory plate 109, moves towards radial direction along the interarea of supporting plate 108.Consist of according to this, the accessory plate 109 by paddle wheel 106a～106e fully stirs melten glass G.
Therefore, relate to the whipping appts 100 of the glass manufacturing apparatus 200 of this embodiment, need not possess complicated structure, can stir equably melten glass G.Consist of according to this, can suppress the generation of the streak of glass ribbon 44, can make high-quality glassy product.
(4-4)
In this embodiment, the upside accessory plate 119a of the paddle wheel 106a of agitator 102 epimeres stirs melten glass G to turning axle 105 from the inwall side of steel basin 101.Consist of according to this, the upper space 121 between the liquid level of the paddle wheel 106a of epimere and melten glass G, near the melten glass G turning axle 105 is along turning axle 105 risings.Rise near the melten glass G of liquid level of melten glass G, flow to the inwall of steel basin 101, and descend along the inwall of steel basin 101 is sick.As mentioned above, at upper space 121, as shown in figure 13, form the cycling stream 123 of melten glass G.
Consider to be different from the melten glass G of paddle wheel 106a this embodiment, the top top, the situation from turning axle 105 thrusters to steel basin 101 inwall sides here.At this moment, be pushed near the melten glass G steel basin 101 inwalls, when moving towards vertical along the inwall of steel basin 101, easily flow towards the top.Therefore, melten glass G, rise to the liquid level of melten glass G along the inwall of steel basin 101 near.And 101 inwall effluent to turning axle 105 sides, and descends along turning axle 105 melten glass G along liquid level from steel basin.The reciprocal melten glass G of cycling stream 123 cycling stream that namely, forms and represent as Figure 13.
And, as mentioned above, in case form the reverse circulation stream of melten glass G at upper space 121, be present in the bubble of melten glass G liquid level or the result of volatile component volatilization, be formed at the katabatic drainage of turning axle 105 melten glass G on every side, can be involved in the relatively many silicon-rich layer of silica composition.Consist of according to this, contain the melten glass G of silicon-rich layer, guide the below near the height location liquid level.Its result might cause the deterioration of bubble quality of glassy product and the deterioration of streak quality.
In this embodiment, by form the upwelling of melten glass G around turning axle 105, the melten glass G of inhibition upper space 121 descends rapidly along the periphery of turning axle 105, is flowed out from downstream side conduit 104 under well-beaten state.
And, in this embodiment, owing to forming the cycling stream 123 of melten glass G at upper space 121, suppress near the stop of melten glass G liquid level.
Therefore, relate to the whipping appts 100 of the glass manufacturing apparatus 200 of this embodiment, can stir equably melten glass G.Consist of according to this, can suppress the generation of streak 44, can make high-quality glassy product.
(4-5)
In this embodiment, the lower space 122 between the bottom surface of the paddle wheel 106e of hypomere and steel basin 101, melten glass G is pushed to the inwall side of steel basin 101 from turning axle 105 sides.Namely, as shown in the front 124 of Figure 13, the downside accessory plate 119b of the paddle wheel 106e of hypomere produces melten glass G to promote melten glass G flowing of flowing out of side conduit 104 downstream.On the other hand, the downside accessory plate 119b of the upside accessory plate 119a of the paddle wheel 106e of hypomere and the paddle wheel 106d of paddle wheel 106e the preceding paragraph, melten glass G is produced suppress melten glass G downstream side conduit 104 flow out and flow.
Consist of according to this, easily from lower space 122 side conduit 104 outflows downstream, can suppress the bottom that melten glass G rests on steel basin 101 due to the melten glass G that is stirred device 102 stirrings.Suppose, in case melten glass G rests on the bottom of steel basin 101, the average assay of relative melten glass G, the heterogeneous glass material that the balance of moiety is destroyed, for example, the rich zirconia layer of uneven components etc. can be contained in the melten glass G that stops.In case this melten glass G flows out from downstream side conduit 104, might produce streak on the glass ribbon 44 that building mortion 42 is shaped, quality problems might appear.And, be provided to building mortion 42 in case comprise zirconium white melten glass G, can become the reason that produces devitrification in building mortion 42, qualitative problem not only appears, be difficult to stably operate glass manufacturing apparatus 200, need stop operation in the worst situation, and safeguard.
And, in this embodiment, suppress melten glass G from space side conduit 104 outflows downstream of lower space 122 tops.Consist of according to this, because the melten glass G of lower space 122 always changes with the melten glass G of lower space 122 tops, suppress the bottom that melten glass G rests on steel basin 101.Namely, the melten glass G in steel basin 101 can not cut off along each space between the adjacent paddle wheel 106a～106e of the centre line L of turning axle 105, can be stirred definitely in each space.According to this formation, suppress not flowed out from whipping appts 100 by well-beaten melten glass G.
And, in this embodiment, as shown in figure 13, dispose upstream side conduit 103 near the height location of epimere paddle wheel 106a.Also have, the height location of epimere paddle wheel 106a is configured to, and makes it from the liquid level of melten glass G interval predetermined distance only.Suppose, the height location of paddle wheel 106a is during near liquid level, because of the liquid level vibration of the axle rotation melten glass G of agitator 102, floats over bubble on liquid level etc. and easily is introduced into the below.On the other hand, the height location of paddle wheel 106a is during away from liquid level, and the cycling stream 123 of melten glass G namely can't arrive near liquid level, and near the melten glass G liquid level can stagnate, and inhomogeneous melten glass G rests near liquid level.Therefore, according to the size of revolution or the paddle wheel 106a～106e of agitator 102, suitably determine the height location of the paddle wheel 106a of relative melten glass G liquid level.
And, in this embodiment, adjust the flow of melten glass G, so that the liquid level of melten glass G is positioned near the upper end of upstream side conduit 103.Also have, the back up pad 108 of paddle wheel 106a is configured in the diameter central authorities below of upstream side conduit 103.Particularly, the back up pad 108 of paddle wheel 106a is configured in the position with the lower end equal height of upstream side conduit 103.According to this formation, as shown in figure 13, the upside accessory plate 119a of the paddle wheel 106a of epimere produces melten glass 7 and promotes melten glass G from flowing that upstream side conduit 103 flows into.
Therefore, relate to the whipping appts 100 of the glass manufacturing apparatus 200 of this embodiment, can stir equably melten glass G.According to this formation, can suppress glass ribbon 44 and produce streak, can make high-quality glassy product.
(4-6)
In this embodiment, as shown in Figure 7, when observing supporting plate 108 along two adjacent paddle wheel 106a～106e of the centre line L of turning axle 105 along the centre line L of turning axle 105, be configured to the phase non-overlapping copies.Consist of according to this, at the inner melten glass G of steel basin 101 towards the flowing of vertical, temporarily by supporting plate 108 blocks of each paddle wheel 106a～106e.Therefore, melten glass G rests on along in each space between the adjacent paddle wheel 106a～106e of the centre line L of turning axle 105 temporarily, is fully stirred.
And in this embodiment, by this configuration of paddle wheel 106a～106e, the melten glass G that can suppress upper space 121 descends rapidly along the periphery of turning axle 105, and is flowed out from downstream side conduit 104 under well-beaten state.
Therefore, relate to the whipping appts 100 of the glass manufacturing apparatus 200 of this embodiment, can stir equably melten glass G.According to this formation, can suppress glass ribbon 44 and produce streak, can make high-quality glassy product.
(4-7)
Relate in the whipping appts 100 of this embodiment, when watching agitator 102 along the centre line L of turning axle 105, the accessory plate 109 of each paddle wheel 106a～106e except outboard end 109b, is configured in the position away from supporting plate 108 outer rims.According to this formation, the melten glass G that flows downwards along the upside accessory plate 119a interarea of paddle wheel 106a～106e easily runs into the upside interarea of supporting plate 108, and the melten glass G that flows upward along the downside accessory plate 119b interarea of paddle wheel 106a～106e easily runs into the interarea of supporting plate 108 downsides., therefore can be suppressed at the movement of melten glass 7 above-below directions in treatment chamber 101.Consist of according to this, in steel basin 101 inside towards the mobile melten glass G of vertical, temporarily by supporting plate 108 blocks of each paddle wheel 106a～106e.Therefore, melten glass G rests on along in each space between the adjacent paddle wheel 106a～106e of the centre line L of turning axle 105 temporarily, is fully stirred.
Therefore, relate to the whipping appts 100 of the glass manufacturing apparatus 200 of this embodiment, can stir equably melten glass G.According to this formation, can suppress glass ribbon 44 and produce streak, can make high-quality glassy product.
(4-8)
In this embodiment, three supporting plates 108 of each paddle wheel 106a～106e interconnect by connection section 110 around turning axle 105.Consist of according to this, improve the intensity of paddle wheel 106a～106e.And the mixing effect of melten glass is little around turning axle 105, and melten glass G is not easily fully stirred and descends near turning axle 105.The connection section 110 of each paddle wheel 106a～106e can suppress the katabatic drainage of the melten glass G turning axle 105 near.
Therefore, relate to the whipping appts 100 of the glass manufacturing apparatus 200 of this embodiment, can stir equably melten glass G.According to this formation, can suppress glass ribbon 44 and produce streak, can make high-quality glassy product.
(5) flexible example
(5-1) flexible routine A
In this embodiment, on the turning axle 105 of agitator 102, dispose five paddle wheel 106a～106e along centre line L with same intervals.Be arranged on the quantity of the paddle wheel 106a～106e on turning axle 105, can consider that the size of steel basin 101 or the length of turning axle 105 etc. suitably set.And, along the distance between two adjacent paddle wheel 106a～106e of the centre line L of turning axle 105, can consider that also the size of steel basin 101 and the length of turning axle 105 etc. suitably set.
(5-2) flexible routine B
In this embodiment, although each paddle wheel 106a～106e of agitator 102 has three supporting plates 108, also can have the above supporting plate 108 of two or four.
For example, the agitator 2 that comprises as shown in figure 14 the paddle wheel with two back up pads.This agitator 2, with the agitator 102 of this embodiment in the same manner, comprise five paddle wheel 6a～6e that are fixed on turning axle 5.On the top interarea and below interarea of each paddle wheel 6a～6e back up pad, dispose respectively two accessory plates.
And, when having four supporting plates 108 on each paddle wheel 106a～106e, with this embodiment in the same manner, when observing agitator 102 along the centre line L of turning axle 105, the also difference mutually along supporting plate 108 positions of two adjacent paddle wheel 106a～106e of centre line L.
(5-3) flexible routine C
The supporting plate 108 of each paddle wheel 106a～106e of this embodiment also can have the communicating pores 112 that is formed on its interarea.Figure 15 is paddle wheel 106a, the 106c with communicating pores 112, the orthographic plan of 106e.In this accommodation example, in case agitator 102 carries out axle rotation, partial melting glass G is by communicating pores 112, produces flowing towards the melten glass G of vertical.Consist of according to this, produce in melten glass G except produce because of accessory plate 109 towards the flowing of turning axle 105 radial directions, also produce because of through hole 112 produce towards axial mobile of turning axle 105.Therefore, owing to producing more complicated flowing in melten glass G, can obtain higher mixing effect.In addition, expect that by communicating pores 112 agitator 102 of axle rotation is subject to the resistance force diminishes from melten glass G, whipping appts 100 can stir melten glass G by enough power still less.
And in this accommodation example, the bubble that is included in melten glass G passes through communicating pores 112, can rise to the liquid level of melten glass G.Consist of according to this, can effectively remove the bubble that is included in melten glass G.For example, consider when checking and repairing agitator 102 or bringing into use new agitator 102, drop into the agitator of this accommodation example in the melten glass G of steel basin 101.At this moment, the bubble of indrawn air when dropping into agitator 102, the communicating pores 112 by paddle wheel 106a～106e floats rapidly.Therefore, can shorten to the time of stable operation whipping appts 100.
And, in this accommodation example, as shown in figure 15, on connection section 110 between the supporting plate 108 that connects each paddle wheel 106a～106e, also can form communicating pores 112.
(5-4) flexible routine D
The whipping appts 100 that relates to this embodiment also can have the structure of discharging melten glass G from steel basin 101.For example, also can be provided for discharging in steel basin 101 bottom surfaces the relief outlet of the melten glass G that comprises rich zirconia layer.And, also can be provided for getting rid of the relief outlet of the melten glass G that comprises bubble or silicon-rich layer in the side of steel basin 101.
In melten glass G, the relative average assay of melten glass G, the balance that moiety sometimes occurs is destroyed and contain the situation of heterogeneous glass material.The composition uneven institute that its reason can be thought of as in fusion tank 40 the melten glass G that produces causes or causes from melten glass G volatilization institute because of volatile composition.Particularly, easily rest on the melten glass G liquid level of steel basin 101 from the heterogeneous glass material that melten glass G volatilization causes because of volatile composition.
In this embodiment, as shown in figure 13, when upper space 121 forms cycling stream 123, even have bubble or heterogeneous glass material on the liquid level of melten glass G, near the melten glass G liquid level also can be along liquid level from turning axle 105 effluents to the inwall side of steel basin 101.Therefore, by on the extended line that flows at this melten glass G, relief outlet being set, can discharging the bubble that is included in melten glass G or heterogeneous glass material.In steel basin 101, position, the best above more is the height location below just at the liquid level of melten glass G or liquid level than the paddle wheel 106a of epimere, be provided with outlet.This relief outlet is formed on the side of steel basin 101, is connected with purger.Near liquid level partial melting glass G discharges from the relief outlet of steel basin 101.
Usually, when removing the foreign matter that is included in melten glass G, be necessary to make whipping appts 100 to shut down.But, when upper space 121 forms cycling streams 123 and form from the inwall side of turning axle 105 side direction steel basins 101 mobile near the liquid level of melten glass G, by above-mentioned relief outlet is set on steel basin 101, need not stop the running of whipping appts 100, the melten glass G that comprises bubble or heterogeneous glass material can be discharged from steel basin 101.For example, even comprise the melten glass G inflow steel basin 101 of a large amount of bubbles from clarifying tank 141, need not stop the running of whipping appts 100, a small amount of melten glass G that can comprise bubble discharges from steel basin 101.
(5-5) flexible routine E
In this embodiment, when observing back up pad 108 along adjacent two the paddle wheel 106a～106e of centre line L of turning axle 105 along the centre line L of turning axle 105, be configured to the phase non-overlapping copies.But, major-surface-area according to back up pad 108, to be disposed at supporting plate 108 projections of paddle wheel 106a～106e of adjacent two sections when steel basin 101 bottom surface, each paddle wheel 106a～106e is configured to, supporting plate 108 becomes minimum with the interval of supporting plate 108, or the area of back up pad 108 and back up pad 108 laps becomes minimum.
(5-6) flexible routine F
Melten glass G by the whipping appts 100 that relates to this embodiment is stirred not only is confined to mentioned component, and, not only be confined to said temperature and viscosity number.The composition of above-mentioned melten glass G is to be used for the FPD non-alkali glass of glass substrate or the glass ingredient of little alkali glass.
But whipping appts 100 also can be used in to stir to have towards the melten glass of the glass ingredient of chilled glass, and wherein, described glass ingredient towards chilled glass comprises more alkali composition.At this moment, best for stirring in 1300 ℃～1400 ℃ scopes of Temperature Setting one-tenth lower than this embodiment with melten glass G.
(5-7) flexible routine G
Relate in the agitator 102 of this embodiment, each paddle wheel 106a～106e is fixed on turning axle 105 by chock 126.But also available other means are fixed on each paddle wheel 106a～106e on turning axle 105.For example, also can with the medial end 109 of upper end 116a and upside accessory plate 119a between engage in the same manner, form the gap between the periphery of the bearing 116 of paddle wheel 106a～106e and turning axle 105, and fill this gap by platinum or the platinum alloy of melting, more firmly paddle wheel 106a～106e is fixed on turning axle 105.And, be unlikely to significantly to reduce in the strength range of reinforcement platinum of agitator 102 and turning axle 105, also can more firmly paddle wheel 106a～106e be fixed on turning axle 105 by welding.
(5-8) flexible routine H
Relate in the agitator 102 of this embodiment, each paddle wheel 106a～106e is fixed on turning axle 105 by chock 126.But, also can not use chock 126, by each paddle wheel 106a～106e is directly embedded the groove that is formed on turning axle 105 peripherys, each paddle wheel 106a～106e is fixed on turning axle 105.
In this accommodation example, the part of each paddle wheel 106a～106e, by being embedded in the recess that is formed on turning axle 105 peripherys and hole etc., each paddle wheel 106a～106e is fixed on turning axle 105.
(5-9) flexible routine I
As the glass substrate of making by the glass manufacturing apparatus 200 that relates to this embodiment, be that example is illustrated although enumerate non-alkali glass and little alkali glass with mentioned component, the FPD glass substrate can be also to contain SiO 2: 50 quality %～70 quality %, Al 2O 3: 5 quality %～25 quality %, B 2O 3: the glass substrate of 0 quality %～15 quality %, MgO:0 quality %～10 quality %, CaO:0 quality %～20 quality %, SrO:0 quality %～20 quality %, BaO:0 quality %～10 quality %.In addition, this glass substrate also can contain other oxide compound of 5 quality %～20 quality %.
And, by the glass substrate that the glass manufacturing apparatus 200 that relates to this embodiment is made, can be also to contain SiO 2: 52 quality %～78 quality %, Al 2O 3: 3 quality %～25 quality %, B 2O 3: 3 quality %～15 quality %, RO(still, RO is the combining weight of MgO, CaO, SrO and BaO) 3 quality %～20 quality %, R 2O(still, R 2O is Li 2O, Na 2O and K 2The combining weight of O) 0.01 quality %～0.8 quality %, Sb 2O 3: 0 quality %～0.3 quality %, do not contain in fact As 2O 3, mass ratio CaO/RO surpasses 0.65, mass ratio (SiO 2+ Al 2O 3)/B 2O 3Be 7～30, mass ratio (SiO 2+ Al 2O 3)/RO surpasses 5, and strain point surpasses the FPD glass substrate that the glass of 688 ℃ forms.
Also have, in order to suppress the destruction of TFT, FPD is the substrate of non-alkali glass with glass substrate the best.But in order to improve the clarification of melten glass G in clarifying tank 41, glass substrate also can contain 0.05 quality %～2% quality % simultaneously, and the best is the Li of 0.1 quality～2 quality % 2O, Na 2O, K 2O。Also have, in order to reduce the load to environment, glass substrate is best for not containing the As finings 2O 3, PbO.In addition, glass substrate, best for to contain at least stannic oxide as finings, best for containing the ferric oxide of 0.01 quality %～0.2 quality %.Also have, for lightness, glass substrate is best for containing simultaneously SrO and the BaO of 0 quality %～10 quality %.At this moment, in order to reduce the load to environment, the content of BaO is more preferred from 0 quality %～2 quality %.
(5-10) flexible routine J
Relate in the glass manufacturing apparatus 200 of this embodiment, whipping appts 100 is arranged between clarifying tank 41 and building mortion 42, is stirred in the clarified melten glass G of clarifying tank 41.But whipping appts 100 also can be arranged on and melt between groove 40 and clarifying tank 41.At this moment, whipping appts 100 is stirred in and melts the melten glass G that groove 40 generates, and provides homogenized melten glass G to clarifying tank 41.In addition, can also melt between groove 40 and clarifying tank 41, and between clarifying tank 41 and building mortion, two whipping apptss 100 are being set.
And, with in the glass manufacturing apparatus 200 of glass substrate, being arranged on the temperature range of the melten glass G of whipping appts 100 stirrings that melt between groove 40 and clarifying tank 41 for the manufacture of FPD, the best is 1500 ℃～1600 ℃.
The＜the 2 embodiment 〉
By reference to the accompanying drawings, the manufacture method that relates to glass substrate of the present invention, the manufacturing installation of glass substrate and the 2nd embodiment of whipping appts are described.The basic structure of the glass manufacturing apparatus of this embodiment, action and feature are identical with the glass manufacturing apparatus of the 1st embodiment.In addition, the parts with the 1st embodiment has same structure and function use identical reference marks.
(1) structure
The glass manufacturing apparatus of this embodiment, whipping appts 100 use with glass manufacturing apparatus 200 of the 1st embodiment that Fig. 1 is represented have the structure of whipping appts 1100 replacements that are different from this structure.Figure 16 is the side-view of whipping appts 1100.Whipping appts 1100, it comprises the 1st steel basin 1101a and the 2nd steel basin 1101b.The 1st steel basin 1101a and the 2nd steel basin 1101b have the drum identical with the steel basin 101 of the 1st embodiment.The 1st steel basin 1101a has the upstream side conduit 1103 on the lower side of being arranged on.The 2nd steel basin 1101b has the downstream side conduit 1103 on the lower side of being arranged on.Arrow shown in Figure 16 is illustrated in the flow direction of the melten glass G that is stirred in whipping appts 1100.
Stir the stirring technique of melten glass G in whipping appts 1100, by the inside at the 1st steel basin 1101a, when guiding upward melten glass G from the below, the 1st stirring technique that stirs, with the inside at the 2nd steel basin 1101b, when being guided in from the top melten glass G that is stirred the 1st stirring technique downwards, the 2nd stirring technique that stirs forms.The 1st steel basin 1101a, the 1st vent pipe 1110a that it comprises the 1st agitator 1102a that stirs inner melten glass G and can discharge from the bottom melten glass G.The 2nd steel basin 1101b, it comprise the 2nd agitator 1102b that stirs inner melten glass G and internally the liquid level LL of melten glass G discharge the 2nd vent pipe 1110b of melten glass G.The side, top of the 1st steel basin 1101a is connected by the side, top of pipe connecting 1107 with the 2nd steel basin 1101b.Melten glass G is sent to the 2nd steel basin 1101b via pipe connecting 1107 from the 1st steel basin 1101a.The 1st agitator 1101a and the 2nd agitator 1102b, with the agitator 102 of the 1st embodiment in the same manner, make by strengthening platinum.
The 1st agitator 1102a has the 1st turning axle 1105a along vertical configuration, is fixed on the periphery of the 1st turning axle 1105a, and along the 1st turning axle 1105a from epimere to four the 1st paddle wheel 1106a1～1106a4 of hypomere multistage configuration.The 1st paddle wheel 1106a1～1106a4 has the 1st upper accessory plate of 1st back up pad perpendicular with the 1st turning axle 1105a, the top interarea that is configured in the 1st back up pad and below interarea.The 2nd agitator 1102b has the 2nd turning axle 1105b along vertical configuration, is fixed on the periphery of the 2nd turning axle 1105b, and along the 2nd turning axle 1105b from epimere to five the 2nd paddle wheel 1106b1～1106b5 of hypomere multistage configuration.The 2nd paddle wheel 1106b1～1106b5 has the 2nd upper accessory plate of 2nd back up pad perpendicular with the 2nd turning axle 1105b, the top interarea that is configured in the 2nd back up pad and below interarea.
In the 1st stirring technique, be rotated around the 1st turning axle 1105a by the 1st agitator 1102, the 1st accessory plate makes melten glass G produce flowing towards the radial direction of the 1st turning axle 1105a.In the 2nd stirring technique, be rotated around the 2nd turning axle 1105b by the 2nd agitator 1102b, the 2nd accessory plate makes melten glass G produce flowing towards the radial direction of the 2nd turning axle 1105.
In addition, the 1st paddle wheel 1106a1～1106a4 of the 1st agitator 1102a and the 2nd paddle wheel 1106b1～1106b5 of the 2nd agitator 1102b have the structure identical with the paddle wheel 106a～106e of the agitator 102 of the 1st embodiment.The 1st back up pad of the 1st paddle wheel 1106a1～1106a4 and the 1st accessory plate are equivalent to respectively back up pad 108 and the accessory plate 109 of the 1st embodiment.The 2nd back up pad of the 2nd paddle wheel 1106b1～1106b5 and the 2nd accessory plate are equivalent to respectively back up pad 108 and the accessory plate 109 of the 1st embodiment.And the 1st paddle wheel 1106a1～1106a4 and the 2nd paddle wheel 1106b1～1106b5 have the structure of bearing 116 and the chock 126 of the paddle wheel 106a～106e that is equivalent to the 1st embodiment.Aftermentioned is by the flow direction of the melten glass G of the 1st agitator 1102a and the 2nd agitator 1102b formation.
And, in the 1st stirring technique, at the 1st accessory plate that is configured between the 1st back up pad of adjacent two section the 1st paddle wheel 1106a1～1106a4, make melten glass G produce flowing of equidirectional.In the 2nd stirring technique, at the 3rd accessory plate that is configured between the 3rd back up pad of adjacent two section the 2nd paddle wheel 1106b1～1106b5, make melten glass G produce flowing of equidirectional.
Also have, in the 1st stirring technique, be configured in the 1st accessory plate on the 1st back up pad top interarea of epimere the 1st paddle wheel 1106a1, above the 1st back up pad of the top the 1st paddle wheel 1106a1, make melten glass G from the inside of the 1st steel basin 1101a towards the 1st flowing that the 1st turning axle 1105a moves by generation, produce to make by the 1st and flow mobile melten glass along the 2nd flowing that the 1st turning axle 1105a rises.According to this formation, with the 1st embodiment in the same manner, in the 1st stirring technique, the space 1121a between the liquid level LL of the 1st paddle wheel 1106a1 of epimere and melten glass G forms the cycling stream of the melten glass G shown in the arrow 1123a of Figure 16.
And, in the 2nd stirring technique, be configured in the 2nd accessory plate on the 2nd back up pad top interarea of epimere the 2nd paddle wheel 1106b1, above the 2nd back up pad of epimere the 2nd paddle wheel 1106b1, by the 3rd flowing that generation makes that melten glass G moves from the inwall of the 2nd steel basin 1101b towards the 2nd turning axle 1105b, produce to make by the 3rd and flow mobile melten glass G along the 4th flowing that the 2nd turning axle 1105b rises.According to this formation, with the 1st embodiment in the same manner, in the 2nd stirring technique, the space between the liquid level LL of the 2nd paddle wheel 1106b1 of epimere and melten glass G forms the cycling stream of the melten glass G shown in the arrow 1123b of Figure 16.
Also have, the 1st stirs Cao 1101a, near the height location of the 1st paddle wheel 1106a4 of hypomere, has and makes melten glass G flow into the 1st influx that stirs Cao 1101a towards horizontal direction.The 2nd stirs Cao 1101b, near the height location of the 2nd paddle wheel 1106b5 of hypomere, has and makes melten glass G stir from the 2nd the spout that Cao 1101b flows out towards horizontal direction.
And, in the 1st stirring technique, carry out the axle rotation around the 1st turning axle 1105a by the 1st agitator 1102a, in the 1st paddle wheel 1106a1～1106a4 separately, be configured in the 1st accessory plate on the 1st back up pad top interarea and be configured in side the 1st accessory plate in the 1st accessory plate on the 1st back up pad below interarea, melten glass G is produced from the inside of the 1st steel basin 1101a to the flowing of the 1st turning axle 1105a, and opposite side the 1st accessory plate produces and makes melten glass G flowing from the 1st turning axle 1105a to the 1st steel basin 1101a inwall.In the 2nd stirring technique, carry out the axle rotation around the 2nd turning axle 1105b by the 2nd agitator 1102b, in the 2nd paddle wheel 1106b1～1106b5 separately, be configured in the 2nd accessory plate on the 2nd back up pad top interarea and be configured in side the 2nd accessory plate in the 2nd accessory plate on the 2nd back up pad below interarea, melten glass G is produced from the inside of the 2nd steel basin 1101b to the flowing of the 2nd turning axle 1105b, and opposite side the 2nd accessory plate produces and makes melten glass G flowing from the 2nd turning axle 1105b to the 2nd steel basin 1101b inwall.
In addition, in the 1st stirring technique, in space 1122a between the 1st paddle wheel 1106a4 of hypomere and the bottom surface of the 1st steel basin 1101a, the 1st accessory plate of the 1st paddle wheel 1106a4, as shown in the arrow 1124a of Figure 16, make melten glass G generation from inwall the flowing to the 1st turning axle 1105a of the 1st steel basin 1101a.And, between the 1st paddle wheel 1106a4 of hypomere and the 1st paddle wheel 1106a3 at the preceding paragraph of hypomere, the 1st accessory plate of the 1st paddle wheel 1106a3,1106a4 makes melten glass G produce flowing from the 1st turning axle 1105a to the 1st steel basin 1101a inwall.In the 2nd stirring technique, in space 1122b between the 2nd paddle wheel 1106b5 of hypomere and the bottom surface of the 2nd steel basin 1101b, the 2nd accessory plate of the 2nd paddle wheel 1106b5, as shown in the arrow 1124b of Figure 16, make melten glass G produce flowing from the 2nd turning axle 1105b to the 2nd steel basin 1101b inwall.And, between the 2nd paddle wheel 1106b5 of hypomere and the 2nd paddle wheel 1106b4 at the preceding paragraph of hypomere, the 2nd accessory plate of the 2nd paddle wheel 1106b4,1106ab5 makes melten glass G generation from inwall the flowing to the 2nd turning axle 1105b of the 2nd steel basin 1101b.
(2) feature
In this embodiment, be sent to the melten glass G of whipping appts 1100 by conduit 43b from clarifying tank 41, after the 1st steel basin 1101a is stirred, and then, be stirred at the 2nd steel basin 1101b.In the 1st steel basin 1101a, the melten glass G that flows into from upstream side conduit 1103 towards horizontal direction in the time of from guiding top, below, is stirred.Melten glass G the 1st steel basin 1101a is stirred is sent to the 2nd steel basin 1101b via pipe connecting 1107.In the 2nd steel basin 1101b, melten glass G is stirred when leading the below from the top, and flows out from downstream side conduit 1104 towards horizontal direction.
In whipping appts 1100, be contained in the heavy composition in melten glass G, for example, comprise the melten glass G of rich zirconia layer, be deposited in the bottom of the 1st steel basin 1101a.Because melten glass G rises in the inside of the 1st steel basin 1101a, and be sent to the 2nd steel basin 1101b, be deposited in the heavy composition of the 1st steel basin 1101a bottom, be difficult to flow into the 2nd steel basin 1101b.And, the 1st vent pipe 1110a is installed on the bottom surface of the 1st steel basin 1101a.Consist of according to this, be deposited in the heavy composition of the 1st steel basin 1101a bottom, can discharge from the 1st steel basin 1101a via the 1st vent pipe 1110a.
And, in the 1st steel basin 1101a, be contained in the little composition of proportion of melten glass G, for example, comprise the melten glass G of bubble or silicon-rich layer, be deposited near the liquid level LL of melten glass G.The little composition of proportion that is present in the 1st steel basin 1101a inside, the pipe connecting 1107 via connecting the 1st steel basin 1101a and the 2nd steel basin 1101b together is sent to the 2nd steel basin 1101b with melten glass G.Namely, be contained in the little composition of proportion of melten glass G, finally be deposited near the melten glass G liquid level LL of the 2nd steel basin 1101b.And, near the height location the melten glass G liquid level LL of the 2nd steel basin 1101b, the 2nd vent pipe 1110b is installed.Consist of according to this, be deposited near the little composition of proportion of melten glass G liquid level LL, can discharge from the 2nd steel basin 1101b via the 2nd vent pipe 1110b.
Also have, in this embodiment, with the 1st embodiment in the same manner, the 1st agitator 1102a by strengthening platinum and forming is arranged on the 1st paddle wheel 1106a1～1106a4 on the periphery of the 1st turning axle 1105a by chimeric, completes assembling.Consist of according to this, compare with time on the periphery that by welding, the 1st paddle wheel 1106a1～1106a4 is arranged on the 1st turning axle 1105a, suppress the strength decreased of the 1st agitator 1102a.About the 2nd paddle wheel 1106b1～1106b5 of the 2nd agitator 1102b, also in the same manner, by chimeric assembling, inhibition strength reduces.Therefore, owing to suppressing the 1st agitator 1102a and distortion and the breakage of the 2nd agitator 1102b in rotation, can make the 1st agitator 1102a and the 2nd agitator 1102b high speed rotating in high temperature and full-bodied melten glass G.Therefore, the whipping appts 1100 that relates to the glass manufacturing apparatus of this embodiment.Can stir equably melten glass G.
In addition, the whipping appts 1100 of this embodiment has the feature of the whipping appts 100 of the 1st above-mentioned embodiment, and can adopt rightly the above-mentioned flexible example of the whipping appts 100 of the 1st embodiment.
The＜the 3 embodiment 〉
By reference to the accompanying drawings, the manufacture method that relates to glass substrate of the present invention, the manufacturing installation of glass substrate and the 3rd embodiment of whipping appts are described.The basic structure of the glass manufacturing apparatus of this embodiment, action and feature are identical with the glass manufacturing apparatus of the 1st embodiment.In addition, the parts with the 1st embodiment has same structure and function use identical reference marks.
(1) structure
The difference of this embodiment and the 1st embodiment is the accessory plate shape of the paddle wheel of agitator.The top view of one of three back up pads of each paddle wheel 206a～206e of the agitator of this embodiment shown in Figure 17.Figure 17 is the orthographic plan that is configured in the upside accessory plate 219a on back up pad 208 top interarea 208a.Figure 18 is the longitudinal diagram of upside accessory plate 219a in the XVIII-XVIII line of Figure 17.Figure 19 is the arrow XIX direction along Figure 17, observes the side-view of upside accessory plate 219a from unlimited distance.Figure 20 is to observe the side-view of upside accessory plate 219a outboard end 209b along the arrow XX direction of Figure 17.Figure 21 is, the drawing in side sectional elevation of upside accessory plate 219a in the XXI-XXI line of Figure 18 and Figure 19.
With paddle wheel 106a～106e of the 1st embodiment in the same manner, each paddle wheel 206a～206e has three back up pads 208 that are configured in around turning axle 205.Each back up pad 208 has by being configured in the upside accessory plate 219a on the interarea of top and being configured in two accessory plates that the downside accessory plate on the interarea of below consists of.Upside accessory plate 219a has the opposition side end near medial end 209a and the medial end 209a of turning axle 205 sides, namely, near the outboard end 209b of back up pad 208 outer edge sides.And, the vertical end of accessory plate, namely, away from the end of back up pad 208 interareas that are connected with accessory plate, 205 bendings along vertical towards turning axle.Also have, the horizontal direction end of accessory plate, namely, towards radially away from the end of turning axle 205-outboard end 209b, along continuous straight runs is towards turning axle 205 bendings.Next, the concrete shape of upside accessory plate 219a and downside accessory plate described.
As shown in figure 18, upside accessory plate 219a is from the top interarea 208a of back up pad 208 towards vertical top extension.Upside accessory plate 219a is made of plate bottom 219a1 and plate top 219a2.Plate bottom 219a1, interarea 208a is extending vertically relatively.Plate top 219a2, the flexure plane of observing upside accessory plate 219a along turning axle 205 is inboard, namely, towards turning axle 205 lateral bends.
As Figure 19 and shown in Figure 20, the plate top 219a2 of the outboard end 209b of upside accessory plate 219a has the domed shape of hemisphere.As shown in figure 21, the outboard end 209b of upside accessory plate 219a is crooked towards turning axle 205 semicircle shapes.
And the downside accessory plate has the shape identical with upside accessory plate 219a.Particularly, in case, pull down upside accessory plate 219a from the top interarea of back up pad 208, reverse up and down, be arranged on the below interarea of back up pad 208, have shape and the configuration identical with the downside accessory plate.
(2) feature
The whipping appts that comprises the agitator of this embodiment, the upside accessory plate 219a of its paddle wheel 206a～206e and downside accessory plate end bent.Consist of according to this, in case the axle rotation of melten glass G by agitator is stirred, melten glass G can flow smoothly along the bend of upside accessory plate 219a and downside accessory plate.Therefore, during agitator stirs melten glass G, near the end of upside accessory plate 219a and downside accessory plate, suppress the generation of negative pressure region, namely have the generation in the space of the pressure lower than the pressure of surrounding space.In negative pressure region, lower than ambient pressure, and the molten solvable storage that is stored in the gas of melten glass G reduces, and easily produces bubble due to the pressure of melten glass G.In addition, do not produce when pushing melten glass G to steel basin radial direction mobile by accessory plate, upside accessory plate 219a is so long as have the structure of above-mentioned bend, and the downside accessory plate can not be also the structure with above-mentioned bend.
In this embodiment, be made into curved shape by the accessory plate end with paddle wheel 206a～206e, suppress to stir in the process of melten glass G producing negative pressure region.Therefore, due to the whipping appts with this agitator, needn't worry because producing the generation of the bubble that negative pressure region causes, the speed of rotation of agitator is further increased, can stir more equably melten glass G.According to this formation, suppress glass ribbon 44 and produce streak, can make high-quality glassy product.
In addition, the whipping appts of this embodiment has the feature of the whipping appts 100 of the 1st above-mentioned embodiment, and can adopt rightly the above-mentioned flexible example of the whipping appts 100 of the 1st embodiment.
＜embodiment 〉
Utilization relates to glass manufacturing apparatus of the present invention, has made glass substrate.The glass ingredient of glass substrate is, SiO 2: 60 quality %, B 2O 3: 10 quality %, Al 2O 3: 19.5 quality %, CaO:5.3 quality %, SrO:5 quality %, SnO 2: 0.2 quality %.At first, in melting groove, the dissolving frit so that it has mentioned component, and makes melten glass.Next, in clarifying tank, make the melten glass that makes in melting groove be warming up to 1650 ℃, and clarify.
Next, utilize the melten glass after the whipping appts that comprises agitator stirs clarification, wherein, described agitator forms for strengthening platinum by decentralized.Agitator has turning axle, is embedded in turning axle, and is fixed on the paddle wheel on the turning axle periphery.The rotating speed of agitator is 12.5rpm.Next, be provided at toward building mortion the melten glass that whipping appts is stirred, form glass ribbon by overflowing glass tube down-drawing.
Next, cut off glass ribbon, manufacturing thickness is that 0.7mm, size are the FPD glass substrate of 2200mm * 2500mm.Its result is utilized to relate to the continuous two-year system of glass manufacturing apparatus of the present invention and make glass substrate, also can carry out well FPD with the manufacturing of glass substrate, and do not see because of distortion and the damaged manufacturing that causes of whipping appts abnormal.
In addition, utilize to relate to glass manufacturing apparatus of the present invention, made and have following composition, namely, SiO 2: 61.5 quality %, B 2O 3: 9 quality %, Al 2O 3: 19 quality %, CaO:10 quality %, alkalimetal oxide: 0.3 quality %, Fe 2O 3: 0.05 quality %, SnO 2: the glass substrate of 0.15 quality %.Even this occasion also can be carried out FPD well with the manufacturing of glass substrate, and do not see because of distortion and the damaged manufacturing that causes of whipping appts abnormal.

Claims (10)

1. the manufacture method of a glass substrate, comprise by molten raw make melten glass smelting process, be stirred in the stirring technique of the described melten glass that makes in described smelting process, it is characterized in that:
In described stirring technique, the agitator that described melten glass is configured in described steel basin inside stirs, the described melten glass of its result the inside of steel basin from above below guiding, or from guiding top, below;
Described agitator has along turning axle and the paddle wheel of vertical configuration, paddle wheel is fixed on by being embedded in described turning axle on the periphery of described turning axle and along described turning axle from epimere to hypomere multistage configuration, described at least paddle wheel is embedded in the part of described turning axle and makes by strengthening platinum on every side.
2. the manufacture method of glass substrate according to claim 1:
Described turning axle has the embedded hole that is formed on its periphery, and the part of described paddle wheel is fitted to this embedded hole;
Described paddle wheel has mosaic process, and this mosaic process is used for being embedded in the described embedded hole of described turning axle, and by described mosaic process being inserted the described embedded hole of described turning axle, described paddle wheel is fixed on the periphery of described turning axle.
3. the manufacture method of glass substrate according to claim 1 and 2:
In described stirring technique, the described melten glass that is stirred by described agitator is to be 10 in viscosity 2.5Temperature during dPas surpasses the glass of 1450 ℃.
4. the manufacture method of the described glass substrate of any one of according to claim 1 to 3:
In described glass substrate, the content of alkalimetal oxide is 0 quality %～2 quality %.
5. the manufacture method of the described glass substrate of any one of according to claim 1 to 4:
Described glass substrate is any one in glass substrate of liquid crystal display glass substrate and OLED display.
6. the manufacture method of the described glass substrate of any one of according to claim 1 to 5:
Described paddle wheel has with the perpendicular back up pad of the medullary ray of described turning axle and is configured in the top interarea of described back up pad and the accessory plate on the interarea of below;
In described stirring technique, be rotated around the medullary ray of described turning axle by described agitator, described accessory plate produces towards the flowing of the radial direction of described turning axle described melten glass, and makes described melten glass produce flowing of equidirectional at the described accessory plate that is configured between the described back up pad of described paddle wheel of adjacent two sections.
7. the manufacture method of glass substrate according to claim 6:
In described stirring technique, be rotated around the medullary ray of described turning axle by described agitator, described accessory plate above the described back up pad of being configured in of each described paddle wheel on interarea and configuring below described back up pad in the described accessory plate on interarea, the described accessory plate that is positioned at a side produces and makes melten glass flowing from the inwall of described steel basin towards described turning axle, and the described accessory plate that is positioned at opposite side produces and makes flowing of the inwall of described melten glass from described turning axle towards described steel basin.
8. the manufacture method of the described glass substrate of any one of according to claim 1 to 7:
Described stirring technique is made of the 1st stirring technique and the 2nd technique, on one side wherein described the 1st stirring technique the inside of the 1st steel basin on one side from below guide upward described melten glass and stir; The 2nd stirring technique the inside of the 2nd steel basin on one side from above the described melten glass that is stirred being guided in described the 1st stirring technique downwards stir on one side;
Described the 1st steel basin comprises the 1st treatment chamber, stirs the 1st agitator of the described melten glass in described the 1st treatment chamber and can discharge from the bottom of described the 1st treatment chamber the 1st vent pipe of described melten glass;
Described the 2nd steel basin comprises the 2nd treatment chamber, stir the 2nd agitator of the described melten glass in described the 2nd treatment chamber and can discharge from the liquid level of the described melten glass in described the 2nd treatment chamber the 2nd vent pipe of described melten glass;
The top sidepiece of described the 1st steel basin is connected with the top sidepiece of described the 2nd steel basin by pipe connecting;
Described melten glass is delivered to described the 2nd steel basin via described pipe connecting from described the 1st steel basin.
9. the manufacturing installation of a glass substrate, it comprises the fusing department that makes melten glass for molten raw, be used for being stirred in the mixing part of the described melten glass that described fusing department makes:
The agitator that described mixing part has steel basin and is configured in described steel basin inside;
Described agitator is stirred in described steel basin inside from guiding below, top or from the described melten glass of guiding top, below;
Described agitator has along the turning axle of vertical configuration and along described turning axle from epimere to the paddle wheel of hypomere multistage configuration, described paddle wheel is fixed on by being embedded in described turning axle on the periphery of described turning axle, and described at least paddle wheel is embedded in the part of described turning axle and makes by strengthening platinum on every side.
10. whipping appts that be used for to stir melten glass, it comprises:
Steel basin;
Be configured in the agitator of described steel basin inside;
Described agitator is stirred in described steel basin inside from guiding below, top or from the described melten glass of guiding top, below;
Described agitator has along the turning axle of vertical configuration and along described turning axle from epimere to the paddle wheel of hypomere multistage configuration, described paddle wheel is fixed on by being embedded in described turning axle on the periphery of described turning axle, and described at least paddle wheel is embedded in the part of described turning axle and makes by strengthening platinum on every side.
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CN113666169A (en) * 2021-06-30 2021-11-19 陕西彩虹工业智能科技有限公司 Flexible glass curved surface guiding and conveying device and method

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