CN103382078B

CN103382078B - The manufacture method of glass substrate, the manufacture device of glass substrate and agitating device

Info

Publication number: CN103382078B
Application number: CN201310149439.6A
Authority: CN
Inventors: 月向仁志
Original assignee: Avanstrate Inc
Current assignee: Avanstrate Inc
Priority date: 2012-05-01
Filing date: 2013-04-26
Publication date: 2016-12-28
Anticipated expiration: 2033-04-26
Also published as: CN103382078A

Abstract

The present invention provides the manufacture method of glass substrate, the manufacture device of glass substrate and agitating device, it is possible to suppression is for stirring deformation and the breakage of the agitator of melten glass, and can stir melten glass equably.Melten glass (G) is configured in agitator (102) stirring that agitator tank (101) is internal, and its result melten glass (G) from lower section directed over, or guides top in the inside of agitator tank (101) from below.Agitator (102) has the rotary shaft (105) along vertical configuration, is fixed on the outer peripheral face of rotary shaft (105) by being embedded in rotary shaft (105), and the agitator arm (106a～106e) configured from uppermost to lowermost multistage along rotary shaft (105).In agitator (102), at least agitator arm (106a～106e) is embedded in the part of rotary shaft (105) and is made up of strengthening platinum about.

Description

The manufacture method of glass substrate, the manufacture device of glass substrate and agitating device

Technical field

The present invention relates to the manufacture method of glass substrate, the manufacture device of glass substrate and agitating device.

Background technology

In the technique of the glasss such as batch production glass substrate, generate melten glass by heating frit, And the melten glass generated is shaped, manufacture glass.Uneven melten glass, becomes and produces on glass The reason of streak.Streak is the muscle shape region that refractive index and proportion are different from peripheral region, for the opticses such as lens and liquid When crystal display (LCD) is with substrate etc., it is desirable to strictly streak is got rid of from glass.Particularly, with LCD substrate it is The flat faced display (FPD) represented is with in glass substrate, for preventing the striped in gap, and need to be overall by streak suppression at substrate surface For extremely low level.In order to suppress the generation of streak, in the manufacturing process of glass, need to stir equably melten glass.

Generally, the agitating device needed for stirring melten glass, it includes agitator tank, is arranged in the stirring within agitator tank Device.Agitator has rotary shaft, by welded and installed agitator arm on rotary shaft outer peripheral face.Melten glass is sent to stirring Groove, is rotated by the axle of agitator, and melten glass is by uniform stirring.From the viewpoint of thermostability and non-oxidizability, with high temperature The agitator tank inwall that contacts of melten glass and agitator formed by platinum, platinum alloy or strengthening platinum.Platinum alloy, for example, platinum rhodium Alloy, fusing point and intensity are higher than platinum.Strengthening platinum is the alloy platinum material making the oxides such as zirconium oxide be scattered on platinum or platinum alloy.Strengthening Platinum has stratiform platinum grain boundary structure, and at high temperature, its creep strength and hot strength are higher than platinum or platinum alloy.Therefore, as specially Profit document 1(spy's table 2005-511462 publication) shown in, the inwall of agitator tank and agitator are most preferably made up of strengthening platinum.

Patent documentation

Patent documentation 1: Japanese Unexamined Patent Application Publication 2005-511462 publication

Summary of the invention

But, once strengthening platinum is heated to more than fusing point and is dissolved, and the platinum grain boundary structure of stratiform is then collapsed, and intensity drops As little as identical with common platinum or platinum alloy degree.Therefore, it is used in melten glass by welding strengthening platinum parts formation to stir When mixing the agitator of device, the creep strength of weld and hot strength are less than other parts.And, stir at agitating device During melten glass, owing to the rotary shaft of agitator needs supporting role in the stress of agitator arm, it is particularly susceptible to Bigger load from high viscosity melten glass.Further, the rotary shaft of agitator is easily subject to because of the deadweight of agitator arm self Load.These produce in rotating axial agitator component parts from heavy load.Therefore, by welding, agitator arm is pacified Dress on the rotary shaft or by welding formed agitator time, easily produce because of the reduction of weld intensity agitator deformation or Breakage, is difficult to stir melten glass equably.

It is an object of the invention to, it is provided that a kind of can suppression is used in the deformation of the agitator of stirring melten glass or broken Damage, and the manufacture method of glass substrate of melten glass, the manufacture device of glass substrate and agitating device can be stirred equably.

Relating to the manufacture method of the glass substrate of the present invention, it includes being prepared melten glass by molten raw The stirring technique of the melten glass that smelting process, stirring prepare at smelting process.In stirring technique, melten glass is at agitator tank Internal from lower section directed over, or above guiding from below while, be configured in the agitator within agitator and stirred.Stir Mix utensil have along vertical configuration rotary shaft and the agitator arm configured from uppermost to lowermost multistage along rotary shaft, Agitator arm is fixed on the outer peripheral face of rotary shaft by being embedded in rotary shaft.In agitator, at least agitator arm is embedded in The part of rotary shaft and being made up of strengthening platinum about.

In the manufacture method of this glass substrate, the agitator being used in stirring technique is made by strengthening platinum, and paddle Take turns and assemble by being fitted in rotary shaft to complete.Strengthening platinum has following character, i.e., is once heated to more than fusing point and molten Solving, its intensity is reduced to the degree identical with common platinum or platinum alloy.Therefore, with by welding, agitator arm is installed on rotation Compare during rotating shaft, by chimeric, agitator arm is installed on rotary shaft, it is possible to the connecting portion of suppression rotary shaft and agitator arm Intensity reduces.Therefore, in the manufacture method of this glass substrate, it is used in the deformation of the agitator of stirring melten glass due to suppression And damaged, it is possible to stir melten glass equably.

And, in the manufacture method of the glass substrate relating to the present invention, most preferably rotary shaft has and is formed at its outer peripheral face, For being fitted together to the embedded hole of a part of agitator arm.And, agitator arm has be entrenched in rotary shaft embedded hole chimeric prominent Rise, and by inserting the embedded hole of rotary shaft, mosaic process is fixed on the outer peripheral face of rotary shaft.

And, relate to the manufacture method of the glass substrate of the present invention, in stirring technique, the melted glass stirred by agitator Glass is that viscosity is 10^2.5During the glass more than 1450 DEG C of temperature during dPa s, it is best suitable for the present invention.

And, in the manufacture method of the glass substrate relating to the present invention, the alkali metal oxide content of glass substrate is optimal It is 0 mass %～2 mass %.

And, in the manufacture method of the glass substrate relating to the present invention, glass substrate most preferably glass for liquid crystal display Any one of substrate or organic el display glass substrate.

And, in the manufacture method of the glass substrate relating to the present invention, glass substrate most preferably carries low-temperature polysilicon Si TFT display glass substrate and carry oxide semiconductor and show with any one of glass substrate.

And, in the manufacture method of the glass substrate relating to the present invention, the molten glass viscosity in stirring technique, most preferably 450dP s～2500dP s.

And, in the manufacture method of the glass substrate relating to the present invention, agitator arm most preferably have with in rotary shaft The perpendicular gripper shoe of heart line, the accessory plate being arranged on gripper shoe upper main surface and lower section interarea.And, in stirring technique, Most preferably being rotated around rotating shaft center's line by agitator, accessory plate makes melten glass produce towards rotary shaft radius The flowing in direction, and the accessory plate between the agitator arm gripper shoe being arranged in adjacent two sections, make melten glass produce phase Equidirectional flowing.

In the manufacture method of this glass substrate, being rotated by the axle of agitator, the melten glass of agitator tank is whipped into rotation Axle side or be pushed to the inwall side of agitator tank.I.e., melten glass from lower section directed over or guides in agitator tank from below While side, it is moved toward the radial direction stirring of rotary shaft.In the manufacture method of this glass substrate, do not use and there is labyrinth Agitator, it is possible to stir melten glass equably.

The manufacture method of this glass substrate, most preferably in stirring technique, all at the centrage of rotary shaft by agitator Spinning turns, and in respective agitator arm, is arranged in the accessory plate in gripper shoe upper main surface or is arranged in interarea below gripper shoe On accessory plate in, be positioned at the accessory plate of side and make melten glass produce from the inside of agitator tank to the flowing of rotary shaft, be positioned at Opposite side accessory plate produces the flowing making melten glass produce from axial rotary agitator tank inwall.

And, in the manufacture method of the glass substrate relating to the present invention, stirring technique is most preferably by the 1st stirring technique and 2 stirring techniques form, and wherein, described 1st stirring technique is, guide melted glass the most upward in the inside of the 1st agitator tank The technique being stirred while glass, described 2nd stirring technique is to be guided in from the top to the bottom in the inside of the 2nd agitator tank The technique being stirred while the melten glass being stirred in 1st stirring technique.1st agitator tank, it include the 1st process chamber, Stir the 1st agitator of melten glass in the 1st process chamber, the 1st discharge of melten glass can be discharged from the bottom of the 1st process chamber Pipe.2nd agitator tank, it include the 2nd process chamber, stirring the 2nd process chamber in melten glass the 2nd agitator, can from the 2nd process Indoor molten glass level discharges the 2nd discharge pipe of melten glass.The top sidepiece of the 1st agitator tank, by connecting tube and the 2nd The top sidepiece of agitator tank is connected.Melten glass, is sent to the 2nd agitator tank via connecting tube from the 1st agitator tank.

And, relating to the manufacture device of the glass substrate of the present invention, it includes that molten raw prepares melten glass The mixing part of the melten glass that fusing department, stirring prepare at fusing department.Mixing part, has agitator tank, is arranged in inside agitator tank Agitator.Agitator stir inside agitator tank from lower section directed over or from below guide above melten glass.Stirring Utensil has rotary shaft and the agitator arm configured from uppermost to lowermost multistage along rotary shaft along vertical configuration, stirs Mix impeller by being embedded in rotary shaft the outer peripheral face being fixed on rotary shaft.In agitator, at least agitator arm is embedded in rotation The part of rotating shaft and about, is made up of strengthening platinum.

And, the agitating device relating to the present invention is the agitating device for stirring melten glass, and it includes agitator tank, joins Put at the agitator within agitator tank.Agitator stirring is above the inside of agitator tank from lower section directed over or guides from below Melten glass.Agitator has the rotary shaft configured along vertical and joins to lowermost multistage from uppermost along rotary shaft The agitator arm put, agitator arm are by being embedded in rotary shaft the outer peripheral face being fixed on rotary shaft.In agitator, at least stir Mix impeller and be embedded in the part and about of rotary shaft, be made up of strengthening platinum.

Additionally, relate to the manufacture method of the glass substrate of the present invention, it includes being prepared by molten raw melting The stirring technique of the melten glass that the smelting process of glass, stirring prepare in smelting process, it is stirred from stirring technique The forming technology of melten glass molding glass substrate.In stirring technique, melten glass inside agitator tank from directed over Side or while lower section directed over, is configured in agitator agitator tank within and stirs.Agitator has along vertical The rotary shaft of configuration and the agitator arm configured from uppermost to lowermost multistage along rotary shaft, agitator arm are by being embedded in The outer peripheral face of rotary shaft it is fixed in rotary shaft.In agitator, at least agitator arm is embedded in part and the week thereof of rotary shaft Enclose, be made up of strengthening platinum.

Further, relating to the manufacture method of the glass substrate of the present invention, it includes that molten raw prepares melten glass The mixing part of the melten glass that fusing department, stirring prepare in fusing department, shape from the melten glass that is stirred mixing part The forming section of glass substrate.Mixing part has agitator tank, is arranged in the agitator within agitator tank.Agitator, stirs in stirring Inside groove from lower section directed over or guide from below top melten glass.Agitator has the rotation along vertical configuration Axle and the agitator arm configured from uppermost to lowermost multistage along rotary shaft, agitator arm are by being embedded in quilt rotary shaft It is fixed on the outer peripheral face of rotary shaft..In agitator, at least agitator arm is embedded in the part and about of rotary shaft, by strengthening Platinum and make.

Invention effect

Relating to the manufacture method of the glass substrate of the present invention, the manufacture device of glass substrate and agitating device, suppression is used for The deformation of the agitator of stirring melten glass and breakage, and melten glass can be stirred equably.

Accompanying drawing explanation

Fig. 1 is the example modes figure representing the glass manufacturing apparatus structure relating to the 1st embodiment；

Fig. 2 is the agitating device side view relating to the 1st embodiment；

Fig. 3 is the oblique view of the agitator agitator arm relating to the 1st embodiment；

Fig. 4 is the plane graph of the agitator agitator arm relating to the 1st embodiment；

Fig. 5 is the oblique view of the agitator agitator arm relating to the 1st embodiment；

Fig. 6 is the plane graph of the agitator agitator arm relating to the 1st embodiment；

Fig. 7 is the configuration figure of the two panels impeller representing the agitator relating to the 1st embodiment；

Fig. 8 is the Bearing configuration figure representing the agitator arm relating to the 1st embodiment；

Fig. 9 is the bearing side view of the agitator arm relating to the 1st embodiment；

Figure 10 is the bearing top view of the agitator arm relating to the 1st embodiment；

Figure 11 is that the chock representing the agitator arm relating to the 1st embodiment is entrenched in the state top view before rotary shaft；

Figure 12 is that the chock representing the agitator arm relating to the 1st embodiment is entrenched in the state top view after rotary shaft；

Figure 13 is the figure of melten glass flowing in the agitating device representing and relating to the 1st embodiment；

Figure 14 is the agitator oblique view of flexible example B relating to the 1st embodiment；

Figure 15 is the agitator arm top view of the agitator of flexible example C relating to the 1st embodiment；

Figure 16 is the example modes figure representing the glass manufacturing apparatus structure relating to the 2nd embodiment；

Figure 17 is the top view of accessory plate on the upside of the agitator arm of the agitator relating to the 3rd embodiment；

Figure 18 is the profilograph of accessory plate on the upside of the agitator arm of the agitator relating to the 3rd embodiment；

Figure 19 is the side view of accessory plate on the upside of the agitator arm of the agitator relating to the 3rd embodiment；

Figure 20 is the side view of accessory plate outboard end on the upside of the agitator arm of the agitator relating to the 3rd embodiment；

Figure 21 is the drawing in side sectional elevation of accessory plate on the upside of the agitator arm of the agitator relating to the 3rd embodiment.

Symbol description

40 melt groove (fusing department)

42 forming devices (forming section)

100 agitating devices (mixing part)

101 agitator tanks

102 agitators

105 rotary shafts

105a embedded hole

106a～106e agitator arm

108 support plates

109 accessory plates

126 chocks (mosaic process)

200 glass manufacturing apparatus (the manufacture device of glass substrate)

G melten glass

The centrage of L rotary shaft

Detailed description of the invention

(1) overall structure of glass manufacturing apparatus

In conjunction with accompanying drawing, to the manufacture method of the glass substrate relating to the present invention, the manufacture device of glass substrate and stirring dress The 1st embodiment put illustrates.Fig. 1 is the ideograph of the glass manufacturing apparatus 200 of this embodiment.Glass manufacturing apparatus 200, It includes melting groove 40, defecator 41, agitating device 100, forming device 42.Melt groove 40 and defecator 41, by conduit 43a It is connected.Defecator 41 and agitating device 100, be connected by conduit 43b.Agitating device 100 and forming device 42, pass through conduit 43c is connected.Melt the melten glass G that groove 40 generates, flow into defecator 41 by conduit 43a.Clarified at defecator 41 Melten glass G, flows into agitating device 100 by conduit 43b.The melten glass G being stirred in agitating device 100, by leading Pipe 43c flows into forming device 42.In forming device 42, by under draw method and be configured to glass tape 44 from melten glass G.

Although it is not shown in the diagrams, but melt groove 40 and include the heaters such as burner.In melting groove 40, frit quilt Heater dissolves, generates melten glass G.Frit is modulated into so that it is be substantially obtained in that the glass of required composition. It is made up of following composition as the example of glass ingredient, alkali-free glass or micro-alkali glass, i.e., SiO₂: 57 mass %～65 matter Amount %, Al₂O₃: 15 mass %～19 mass %, B₂O₃: 8 mass %～13 mass %, MgO:1 mass %～3 mass %, CaO:4 matter Amount %～7 mass %, SrO:1 mass %～4 mass %, BaO:0 mass %～2 mass %, Na₂O:0 mass %～1 matter Amount %, K₂O:0 mass %～1 mass %, As₂O₃: 0 mass %～1 mass %, Sb₂O₃: 0 mass %～1 mass %, SnO₂: 0 Quality %～1 mass %, Fe₂O₃: 0 mass %～1 mass %, ZrO₂: 0 mass %～1 mass %.Here, " substantially " anticipate Taste, in the range of less than 0.1 mass %, it is allowed to the existence of other micro constitutents.And, about the glass with mentioned component Glass, Fe₂O₃、As₂O₃、Sb₂O₃And SnO₂Respective containing ratio is the composition difference of Fe, As, Sb or the Sn by having multiple valence mumber As Fe₂O₃、As₂O₃、Sb₂O₃Or SnO₂The value of conversion.

It is modulated into frit as above, is put into melting groove 40.Melting in groove 40, frit, with its Dissolve at a temperature of composition is corresponding.According to this composition, melt in groove 40, prepare the melten glass of 1500 DEG C～1600 DEG C high temperature G。

Melt the melten glass G that groove 40 prepares, flow into defecator 41 by conduit 43a from melting groove 40.Although in figure Not shown, identically with melting groove 40, defecator 41 includes heater.In defecator 41, by making melted glass further Glass G heats up, and carries out the clarification of melten glass G.In defecator 41, the temperature of melten glass G is made most preferably to rise to 1600 DEG C ～1800 DEG C, more preferably rise to 1630 DEG C～1750 DEG C, more preferably rise to 1650 DEG C～1750 DEG C.

At defecator 41 clarified melten glass G, flow into agitating device 100 by conduit 43b from defecator 41.Due to Melten glass G is cooled when by conduit 43b, and in agitating device 100, the temperature than the melten glass G of defecator 41 is low Melten glass G be stirred.For having the glass of mentioned component, in agitating device 100, most preferably by melten glass G's While temperature is set in the range of 1400 DEG C～1550 DEG C, the viscosity of melten glass G is adjusted to 2500dPa S～ In the range of 450dPa S, carry out the stirring of melten glass G.Melten glass G, by stirring by all in agitating device 100 Homogenize.

Agitating device 100 is stirred, and homogenized melten glass G, by conduit 43c from agitating device 100 Flow into forming device 42.The temperature being suitable to shape in forming device 42, example it is cooled to when melten glass G is by conduit 43c As, 1200 DEG C.In forming device 42, by under draw method, be configured to glass tape 44 from melten glass G.Specifically, from shaping The melten glass G that the top of device 42 is overflowed, below flowing to along forming device 42 sidewall, from the lower end of forming device 42 even Continue and be configured to glass tape 44.Glass tape 44, along with gradually cooling down below flowing to, is finally cut to the glass base of required size Plate.

(2) structure of agitating device

(2-1) overall structure of agitating device

Fig. 2 is the side view of agitating device 100.Agitating device 100, including cylindric agitator tank 101, is arranged in agitator tank Agitator 102 within 101.Agitator tank 101 has the upstream side conduit 103 being arranged in upper side and is arranged on lower side Downstream conduit 104 on face.Upstream side conduit 103 is conduit 43b, and downstream conduit 104 is conduit 43c.Melten glass G, Flow in the horizontal direction in agitator tank 101 from upstream side conduit 103, in agitator tank 101 while lower section directed over, quilt Agitator 102 stirs, and flows to downstream conduit 104 in agitator tank 101 in the horizontal direction.

Agitator 102, is made up of strengthening platinum.Strengthening platinum is to make the oxides such as zirconium oxide be scattered in platinum or platinum alloy, and The material of rolling.Strengthening platinum has stratiform platinum grain boundary structure, and at high temperature, its creep strength and hot strength are higher than platinum or platinum Alloy.Therefore, for the agitator 102 contacted with the melten glass G of high temperature, strengthening platinum is optimal material.

Agitator 102, has the cylindric rotary shaft 105 along vertical configuration, is connected on rotary shaft 105 outer peripheral face Five agitator arms 106a, 106b, 106c, 106d, 106e.Agitator arm 106a, 106b, 106c, 106d, 106e, according to this Order configures along rotary shaft 105 from top toward lower section same intervals.Rotary shaft 105, connect its columned center above with Axle rotation is carried out below around the centrage L at center.I.e., rotary shaft 105 have along its centrage L, be configured with five sections of paddles The structure of wheel 106a～106e.Rotary shaft 105 is, inside is the tubular part in cavity.

(2-2) mechanism of agitator arm

It follows that the structure of agitator arm 106a～106e is illustrated.In this embodiment, agitator arm 106a, 106c, 106e have mutually the same shape, and agitator arm 106b, 106d have mutually the same shape.Fig. 3 and Fig. 4 is to stir Mix oblique view and the plane graph of impeller 106a, 106c, 106e.Fig. 5 and Fig. 6 is the oblique view of agitator arm 106b, 106d and puts down Face figure.Agitator arm 106a～106e on rotary shaft 105 outer peripheral face it is arranged on shown in Fig. 3 and Fig. 5.

Each agitator arm 106a～106e, is configured to make it extend from rotary shaft 105 to the inwall of agitator tank 101.Often Individual agitator arm 106a～106e, have perpendicular for centrage L three support plates 108 with rotary shaft 105, be arranged in each A piece of upside accessory plate 119a on interarea on the upside of support plate 108, be arranged on the downside of each support plate 108 on interarea a piece of under Side accessory plate 119b.Below, upside accessory plate 119a and downside accessory plate 119b is generically and collectively referred to as accessory plate 109.Agitator arm The accessory plate 109 of 106a～106e, is formed by bending machining.Specifically, by bending a piece of strengthening platinum, gripper shoe is formed 108 and accessory plate 109 all-in-one-piece agitator arm 106a～106e.

When centrage L along rotary shaft 105 observes agitator arm 106a～106e, each agitator arm 106a's～106e Three support plates 108, are arranged in the subsymmetric position, centrage L position three of relative rotation axi 105.Each support plate 108 Interarea normal is parallel with the centrage L of rotary shaft 105.I.e., support plate 108 is horizontal arrangement.And, each agitator arm 106a ～three support plates 108 of 106e, it is connected with each other by connecting portion 110 around rotary shaft 105.I.e., each agitator arm Three support plates 108 of 106a～106e, substantially constitute parts.

Each agitator arm 106a～106e is configured to, by be configured at adjacent two sections agitator arm 106a～106e When board 108 is projected on agitator tank 101 bottom surface, the interval of support plate 108 and support plate 108 becomes minimum, or gripper shoe 108 with The area of gripper shoe 108 lap becomes minimum.In this embodiment, adjacent for centrage L two along rotary shaft 105 stir The support plate 108 of impeller 106a～106e is configured to, when the centrage L along rotary shaft 105 watches so that it is do not overlap each other.Example As, when Fig. 7 represents the centrage L observation agitator 102 along rotary shaft 105, the position of two agitator arms 106a, 106b is closed System.As it is shown in fig. 7, each support plate 108 of agitator arm 106a be arranged in agitator arm 106b two support plates 108 it Between.I.e., six support plates 108 of two agitator arms 106a, 106b, seem and be arranged in relative rotation axi 105 centrage L position Six subsymmetric positions.

Accessory plate 109 is arranged on the interarea of support plate 108, so that its interarea is perpendicular relative to the interarea of support plate 108. Accessory plate 109 is arranged on the upside of support plate 108 on interarea and downside interarea.As it has been described above, configure on interarea on the upside of support plate 108 There is upside accessory plate 119a, the downside interarea of support plate 108 is configured with downside accessory plate 119b.In Fig. 4 and Fig. 6, downside is auxiliary Plate 119b is helped to be represented by dashed line.When centrage L along rotary shaft 105 observes agitator arm 106a～106e, upside accessory plate 119a intersects with downside accessory plate 119b.

Accessory plate 109 is configured to so that it is extend to the outer rim of support plate 108 near rotary shaft 105.Accessory plate 109 There is the end, opposition side of the medial end 109a closest to rotary shaft 105 side, medial end 109a, i.e., closest to support plate Outboard end 109b of 108 outer edge sides.Accessory plate 109 is configured to, when overlooking agitator 102 so that it is along with from medial end 109a, towards outboard end 109b, is gradually distance from the straight line 111 of the centrage L and medial end 109a that connect rotary shaft 105.Stir When mixing impeller 106a, 106c, 106e, as shown in Figure 4, along with assisting towards outboard end 109b, upside from medial end 109a Plate 119a is configured to so that it is counterclockwise away from straight line 111, and downside accessory plate 119b is configured to so that it is towards side clockwise To away from straight line 111.On the other hand, during agitator arm 106b, 106d, as shown in Figure 6, along with from medial end 109a towards outward Side end 109b, upside accessory plate 119a are configured to so that it is toward the clockwise direction away from straight line 111, and downside accessory plate 119b It is configured to so that it is counterclockwise away from straight line 111.I.e., in each agitator arm 106a～106e, upside accessory plate 119a And downside accessory plate 119b is configured to so that it is extend the most in the opposite direction.And, along adjacent for centrage L two of rotary shaft 105 Between individual agitator arm 106a～106e, a pair accessory plate 109 opposite each other is configured to so that it is extend in the same direction.Example As, the downside accessory plate 119b of agitator arm 106a is auxiliary with the upside of the agitator arm 106b being positioned at agitator arm next section of 106b Plate 119a is helped to be each configured to so that it is toward the clockwise direction away from straight line 111.

(2-3) structure of the connecting portion of rotary shaft and agitator arm

It follows that the connecting portion of rotary shaft 105 with agitator arm 106a～106e is illustrated.Each agitator arm 106a～106e, is arranged on the outer peripheral face of rotary shaft 105 by chimeric.It is formed with embedded hole on the outer peripheral face of rotary shaft 105 105a, i.e., the through hole of telescoping part agitator arm 106a～106e.Each agitator arm 106a～106e, by three pieces of supports Main body, 116, six chocks 126 of three bearings that plate 108 is mutually connected by connecting portion 110 are constituted.Bearing 116, as be described hereinafter, Engage with accessory plate 109.Chock 126, although do not engage with gripper shoe 108 or bearing 116, but regard as constituting agitator arm One of parts of 106a～106e.It addition, chock 126 also can engage with gripper shoe 108 or bearing 116.

Each bearing 116, has two chock through hole 116d for making chock 126 run through.Chock 126 is for running through axle Hold the chock through hole 116d of 116, and there are the parts of the projection being embedded in rotary shaft 105 embedded hole 105a.Each bearing 116, engage with the outer peripheral face of rotary shaft 105 not by two chocks 126, and be fixed in the periphery of rotary shaft 105 On face.It addition, agitator 102, it is also possible to be have and be formed without chock through hole 116d bearing 116, pass through not through chock Perforation 116d, is embedded in the structure of the chock 126 of embedded hole 105a.Below, to bearing 116 and the shape of chock 126 and pass through Each agitator arm 106a～106e is embedded in the method that the outer peripheral face of rotary shaft 105 carries out installing illustrate.

Fig. 8 is rotary shaft 105, gripper shoe 108 and the configuration schematic diagram of bearing 116.Fig. 9 is, at the height of gripper shoe 108 Position, the radial direction along rotary shaft 105 observes the side view of bearing 116.In fig .9, gripper shoe 108 it is indicated by a dotted line.Figure 10 is Along the centrage L of rotary shaft 105, above vertical, observe the top view of bearing 116.Cuing open of rotary shaft 105 shown in Figure 10 The embedded hole 105a of face and rotary shaft 105.Figure 11 is that the chock 126 representing agitator arm 106a～106e is entrenched in rotary shaft The top view of the state before 105.Figure 12 be represent agitator arm 106a～106e chock 126 be entrenched in rotary shaft 105 it After the top view of state.In Figure 11, the front shown in the vicinity of chock 126, represent that chock 126 inserts the chock of bearing 116 The direction of the embedded hole 105a of through hole 116d and rotary shaft 105.

As it is shown in figure 9, bearing 116 is by upper end 116a, lower end 116b, upper end 116a and lower end Axle contact site 116c between 116b is constituted.As shown in Figure 10, during vertical view upper end 116a and lower end 116b with have The horizontal direction both ends of arc-shaped axle contact site 116c connect into approximation L-shaped shape.As shown in Figure 10, axle contact site 116c Interarea, i.e., connects the opposition side interarea having upper end 116a and lower end 116b side, with the outer peripheral face phase of rotary shaft 105 Contact.As shown in FIG. 11 and 12, the medial end 109a side phase of the side of upper end 116a and upside accessory plate 119a Engaging, the side of lower end 116b engages with the medial end 109a side of downside accessory plate 119b.Axle contact site 116c It is such as, to be formed between the medial end 109a of end 116a and upside accessory plate 119a up with the joint of accessory plate 109 Small gap, and fill up this gap by melted platinum or platinum alloy etc. and carry out.It addition, axle contact site 116c and accessory plate 109, can engage also by welding.And, in three gripper shoes 108 of agitator arm 106a～106e, there is an axle respectively Hold 116 to be connected with a pair accessory plate 109.

As it is shown in figure 9, the axle contact site 116c of bearing 116 is by the bearing top 116c1 being positioned at above gripper shoe 108 and position Bearing bottom 116c2 below gripper shoe 108 is constituted.On bearing top 116c1 and bearing bottom 116c2, it is respectively formed with One chock through hole 116d.Chock through hole 116d has the section shape of sub-circular.Each agitator arm 106a～ In 106e, the bearing top 116c1 chock through hole 116d of three bearings 116 is formed at height different from each other, three bearings The bearing bottom 116c2 chock through hole 116d of 116 is formed at height different from each other.In the outer peripheral face of rotary shaft 105, and stir It is formed with embedded hole 105a on the position that each chock through hole 116d of the bearing 116 mixing impeller 106a～106e is connected. Embedded hole 105a, has the sub-circular section shape identical with chock through hole 116d.

As shown in the arrow of Figure 11, by making two chocks 126 extend through two chock through holes of each bearing 116 116d, and then insert two embedded hole 105a of rotary shaft 105, each bearing of each agitator arm 106a～106e respectively On 116 outer peripheral faces being fixed on rotary shaft 105.I.e., each agitator arm 106a～106e, by making six chock 126 warps It is embedded in six embedded hole 105a of rotary shaft 105 by three bearings 116, is arranged in rotary shaft 105.

It addition, in this embodiment, chock 126 has a section shape of sub-circular, and has and can be embedded in rotary shaft The parts of the baculum of the embedded hole 105a of 105 and the chock through hole 116d of bearing 116.But, chock 126 can be tool There is the arbitrary shape of this projection.

(3) action of agitating device

Action to the agitating device 100 relating to this embodiment illustrates.Figure 13 is for representing by agitating device 100 quilt The flow graph of the melten glass G of stirring.Arrow shown in Figure 13, represents the flow direction of melten glass G.Melten glass G is from upper Trip side conduit 103 flows into the inside of agitator tank 101 in the horizontal direction.In rotary shaft 105 upper end of agitator 102, with figure not The motor illustrated is connected.When overlooking agitating device 100, agitator 102, towards side counterclockwise around the centrage L of rotary shaft 105 To rotating.In the inside of agitator tank 101, while melten glass G gradually guides lower section from top, stirred by agitator 102 Mix.The melten glass G being stirred, flows to downstream conduit 104 in the horizontal direction from the inside of agitator tank 101.It addition, by stirring Mix the temperature of the melten glass G that device 100 is stirred, when having 10^2.5During the viscosity of dPa S, most preferably 1450 DEG C～1750 DEG C, more preferably 1500 DEG C～1750 DEG C, more preferably 1530 DEG C～1750 DEG C.

In agitator tank 101, being rotated by the axle of agitator arm 106a～106e, melten glass G is stirred.Each stirring The accessory plate 109 of impeller 106a～106e, stirs melten glass G to rotary shaft 105 side from the inwall side of agitator tank 101, or from Rotary shaft 105 side pushes the inwall side of agitator tank 101 to.In this embodiment, the upside auxiliary of each agitator arm 106a～106e Plate 119a and any one party of downside accessory plate 119b, stir melten glass G to rotary shaft 105 from the inwall side of agitator tank 101 Side, melten glass G is then pushed to the inwall side of agitator tank 101 by the opposing party from rotary shaft 105 side.I.e., at each agitator arm Above the support plate 108 of 106a～106e and below support plate 108, the flowing side of the melten glass G of rotary shaft 105 radial direction To for mutual opposite direction.And, for two adjacent for the centrage L along rotary shaft 105 agitator arm 106a～106e, epimere The downside accessory plate 119b interarea of agitator arm 106a～106e and the upside accessory plate of hypomere agitator arm 106a～106e 119a interarea, in the same direction away from straight line 111.Therefore, along centrage L a pair accessory plate opposite each other of rotary shaft 105 109, make melten glass G produce the radial direction along rotary shaft 105, flowing in the same direction.

As shown in figure 13, in this embodiment, rotated by the axle of agitator 102, the agitator arm 106a's of uppermost Upside accessory plate 119a, makes melten glass G produce and stirs the flowing to rotary shaft 105 side from the inwall side of agitator tank 101.Therefore, The upside auxiliary of the downside accessory plate 119b of agitator arm 106a and the agitator arm 106b being positioned at agitator arm next section of 106a Plate 119a, makes melten glass G produce the flowing pushing agitator tank 101 inwall side from rotary shaft 105 side to.Similarly, agitator arm The upside accessory plate 119a of the downside accessory plate 119b and agitator arm 106c of 106b, makes melten glass G produce from agitator tank 101 Inwall side stir the flowing to rotary shaft 105 side.And, auxiliary on the downside of the agitator arm 106e of the lowermost being positioned at agitator 102 Help plate 119b, make melten glass G produce the flowing pushing agitator tank 101 inwall side from rotary shaft 105 side to.I.e., the stirring of lowermost Mixing in the lower space 122 between impeller 106e and agitator tank 101 bottom surface, melten glass G flows to arrow 124 side shown in Figure 13 To.

As shown in figure 13, in this embodiment, the upside accessory plate 119a of the agitator arm 106a of uppermost, at paddle The top of wheel 106a gripper shoe 108, produces the stream making melten glass G inwall side rotary rotating shaft 105 side shifting from agitator tank 101 Dynamic.The melten glass G near rotary shaft 105 is moved, along rotation by the upside accessory plate 119a of the top agitator arm 106a Rotating shaft 105 rises to the liquid level of melten glass G.Rise to the melten glass G of liquid level, along liquid level from rotary shaft 105 effluent to stirring Mix the inwall side of side 101.Mobile melten glass G near the inwall of agitator tank 101, the inwall along agitator tank 101 drops to Agitator arm 106a topmost.I.e., the upper space between the agitator arm 106a and the liquid level of melten glass G of uppermost In 121, form the recycle stream 123 of the melten glass G shown in Figure 13.Melten glass G, by this recycle stream 123, at upper space 121 are stirred.

It addition, in this embodiment, agitator tank 101 inner face in the section perpendicular with the centrage L of rotary shaft 105 half The ratio R/H of the interval H between upside interarea and the liquid level of melten glass G of footpath R and topmost agitator arm 106a, most preferably 0.5～2.6.

(4) feature

(4-1)

Relating in the agitating device 100 of this embodiment, agitator 102 is made up of strengthening platinum, and rotary shaft 105 is with each Agitator arm 106a～106e is connected with each other by chimeric.Agitator arm 106a～106e, passes through by running through the chock of bearing 116 Perforation 116d, and insert the embedded hole 105a of rotary shaft 105, it is fixed on the outer peripheral face of rotary shaft 105.I.e., substantially, stir Mix device 102 to be not required to be engaged with rotary shaft 105 and agitator arm 106a～106e by welding, complete to assemble.

When agitating device 100 stirs melten glass G, i.e., agitator 102 revolves around the centrage L of rotary shaft 105 When turning, agitator arm 106a～106e is by the stress produced because of stirring high temperature and full-bodied melten glass and agitator arm The stress of 106a～106e deadweight.Owing to the outer peripheral face of agitator arm 106a～106e with rotary shaft 105 is connected, therefore, rotate Rotary shaft 105, support all stress of being subject to of agitator arm 106a～106e.Here, strong as agitator 102 raw material Changing platinum, have and be once heated to more than fusing point and dissolve, the platinum grain boundary structure of stratiform is then collapsed, and creep strength and stretching are strong Degree to common platinum or the character of platinum alloy same degree.Therefore, by solder joints rotary shaft 105 and agitator arm 106a ～during 106e, because of the dissolving strengthening platinum at junction surface, compared with the intensity of other parts, the intensity at agitator junction surface during welding It is greatly reduced.Therefore, the agitator assembled by welding rotary shaft 105 and agitator arm 106a～106e, in rotation easily Deformation or damaged, it is possible to melten glass G cannot be stirred equably.

In this embodiment, the agitator 102 being made up of strengthening platinum, by chimeric, agitator arm 106a～106e is pacified It is contained on the outer peripheral face of rotary shaft 105, completes to assemble.According to this composition, with passing through to weld, agitator arm 106a～106e is pacified Compare when being contained on the outer peripheral face of rotary shaft 105, it is possible to the reduction of suppression agitator 102 intensity.Accordingly, because during suppression rotates The deformation of agitator 102 and breakage, it is possible to make agitator 102 rotate in melten glass G high speed.Therefore, this is related to The agitating device 100 of the glass manufacturing apparatus 200 of embodiment, it is possible to stirring melten glass G equably.

It addition, the nothing that the content of alkali metal oxide is 0 mass %～2 mass % subtracts glass or micro-alkali glass, with alkali metal The content of oxide is compared more than the alkali glass of 2 mass %, and the viscosity of the melten glass prepared in melting groove 40 is high.Therefore, Glass is subtracted by the less nothing of alkali metal content or glass substrate that micro-alkali glass is constituted as be applicable to FPD glass substrate, Compared with the glass substrate constituted with by the alkali glass that alkali metal content is many, easily remain streak.I.e., at the glass that alkali content is few In the manufacturing process of substrate, in order to suppress the generation of streak, it is only important that stirring melts glass equably in agitating device 100 Glass.Relate to the agitating device 100 of the glass manufacturing apparatus 200 of this embodiment, even if during due to the viscosity height of melten glass G, also Agitator 102 high speed rotating can be made, be suitable for without subtracting glass or the manufacture of micro-alkali glass substrate.Particularly, agitating device 100, It is suitable for the manufacture of glass substrate by the glass that the content of alkali metal oxide is 0 mass %～0.5 mass %.It addition, The content of alkali metal oxide represents Li₂O、Na₂O and K₂The total of O content.Below, alkali metal oxide will be contained substantially no Glass referred to as without subtracting glass, the content of alkali metal oxide is more than 0 mass % and the most micro-less than the glass of 2 mass % Alkali glass.

And, agitating device 100 is applicable to, and in stirring technique, the viscosity of melten glass is high, and is strict with eliminating streak Liquid crystal display glass substrate and the manufacture of organic el display glass substrate.

Further, owing to forming low-temperature polysilicon Si(p-Si) TFT and the glass substrate of oxide semiconductor, need the heat of high temperature Processing technique, therefore, most preferably percent thermal shrinkage is little.The glass substrate little in order to prepare percent thermal shrinkage, most preferably improves glass Strain point, but owing to the glass that strain point is high has the trend that viscosity uprises when melted, easily remain streak.Therefore, relate to The agitating device 100 of the glass manufacturing apparatus 200 of this embodiment, is suitable for carrying low-temperature polysilicon Si(p-Si) TFT and oxide The manufacture of the FPD glass substrate of quasiconductor.It addition, the strain point of glass substrate, most preferably more than 675 DEG C, more preferably 680 DEG C Above, more preferably more than 690 DEG C.And, have 10_2.5When the glass substrate temperature of dPa S viscosity is 1400 DEG C～1750 DEG C, Significantly presenting and prevent agitator 102 from deforming and effect that damaged and melten glass homogenizes, the temperature of glass substrate is 1500 DEG C ～when 1750 DEG C, these effects are more significantly to be presented, when the temperature of glass substrate is 1550 DEG C～1750 DEG C, these effects are more Significantly present.

It addition, in stirring technique, the viscosity of melten glass in agitator tank 101, be most preferably adjusted to 450dPa S～ 2500dPa·S.Particularly, in stirring technique, the viscosity of the melten glass in agitator tank 101 be 700dPa S～ During 1600dPa S, the more significantly effect presenting deformation and the breakage preventing agitator 102, and the effect that melten glass homogenizes Really.

(4-2)

Relate to, in the agitating device 100 of this embodiment, flowing into the melten glass of agitator tank 101 from upstream side conduit 103 G, is rotated by the axle of agitator 102, stirs to rotary shaft 105 side from the inwall side of agitator tank 101, or push away from rotary shaft 105 side Inwall to agitator tank 101.Towards the flowing of the melten glass G of rotary shaft 105 radial direction, along with the center along rotary shaft 105 Line L from top toward lower section, at each section of agitator arm 106a～106e one-tenth rightabout.I.e., melten glass G is from agitator tank 101 is internal while lower section directed over, the most mobile towards the radial direction of rotary shaft 5, and is stirred.

Therefore, relate to the agitating device 100 of the glass manufacturing apparatus 200 of this embodiment, be not required to the structure possessing complexity, energy Enough stirring melten glass G equably.According to this composition, the generation of streak can be suppressed, it is possible to prepare high-quality glass product.

(4-3)

Relate in the agitating device 100 of this embodiment, main above the support plate 108 of each agitator arm 106a～106e It is provided with accessory plate 109 on the interarea of on face and lower section.Once, agitator 102 carries out axle rotation, and melten glass G passes through accessory plate 109 radial directions flowing to rotary shaft 105.Specifically, the melten glass G near support plate 108 interarea passes through accessory plate 109 Being whipped into or be pushed, the interarea along support plate 108 moves towards radial direction.According to this composition, by agitator arm 106a～ The accessory plate 109 of 106e, is sufficiently stirred for melten glass G.

Therefore, relate to the agitating device 100 of the glass manufacturing apparatus 200 of this embodiment, be not required to the structure possessing complexity, can Stirring melten glass G equably.According to this composition, the generation of the streak of glass tape 44 can be suppressed, high-quality glass can be prepared Product.

(4-4)

In this embodiment, the upside accessory plate 119a of the agitator arm 106a of agitator 102 uppermost, by melten glass G Stir to rotary shaft 105 from the inwall side of agitator tank 101.According to this composition, at the agitator arm 106a and melten glass G of uppermost Liquid level between upper space 121, the melten glass G near rotary shaft 105, rise along rotary shaft 105.Rise to melted glass Melten glass G near the liquid level of glass G, flows to the inwall of agitator tank 101, and along the inwall disease decline of agitator tank 101.As above institute State, at upper space 121, as shown in figure 13, form the recycle stream 123 of melten glass G.

Here, it is considered to be different from the melten glass G above this embodiment, the top agitator arm 106a, from rotation Rotating shaft 105 side pushes the situation of agitator tank 101 inwall side to.Now, it is pushed to the melten glass G near agitator tank 101 inwall, edge The inwall of agitator tank 101 towards vertical move time, flow the most upward.Therefore, melten glass G, along the inwall of agitator tank 101 Rise near the liquid level of melten glass G.And, melten glass G along liquid level from the inwall effluent of agitator tank 101 to rotary shaft 105 sides, and decline along rotary shaft 105.I.e., the recycle stream 123 reciprocal melten glass G circulation represented with such as Figure 13 is formed Stream.

And, as it has been described above, once form the reverse circulation stream of melten glass G at upper space 121, it is present in melted glass The bubble of glass G liquid level or the result of volatile component volatilization, the sinking of the melten glass G being formed at around rotary shaft 105, meeting It is involved in the relatively large number of silicon-rich layer of silica composition.According to this composition, the melten glass G containing silicon-rich layer, near liquid level Height and position guides lower section into.It is as a result, it is possible to cause deterioration and the deterioration of streak quality of the bubble quality of glass product.

In this embodiment, by forming the upper up-flow of melten glass G around rotary shaft 105, upper space 121 is suppressed Melten glass G along the outer peripheral face dramatic decrease of rotary shaft 105, side conduit 104 downstream under the state not being sufficiently agitated Flow out.

And, in this embodiment, owing to forming the recycle stream 123 of melten glass G at upper space 121, suppression is melted Glass G stop near liquid level.

Therefore, relate to the agitating device 100 of the glass manufacturing apparatus 200 of this embodiment, melten glass can be stirred equably G.According to this composition, it is possible to the generation of suppression streak 44, it is possible to prepare high-quality glass product.

(4-5)

In this embodiment, the lower space 122 between the agitator arm 106e and the bottom surface of agitator tank 101 of lowermost, Melten glass G is pushed to the inwall side of agitator tank 101 from rotary shaft 105 side.I.e., as shown in the front 124 of Figure 13, lowermost The downside accessory plate 119b of agitator arm 106e, makes melten glass G produce and promotes that melten glass G downstream side conduit 104 flows out Flowing.On the other hand, the upside accessory plate 119a of the agitator arm 106e of lowermost and stirring of agitator arm 106e the preceding paragraph Mix the downside accessory plate 119b of impeller 106d, make melten glass G produce suppression melten glass G downstream side conduit 104 and flow out stream Dynamic.

According to this composition, owing to the melten glass G stirred by agitator 102 easily leads from lower space 122 downstream side Pipe 104 flows out, it is possible to suppression melten glass G rests on the bottom of agitator tank 101.It is assumed that once melten glass G rests on stirring The bottom of groove 101, the average assay of relative melt glass G, the heterogeneous glass material that the balance of constituent is destroyed, such as, The oxygen enrichment zirconium layer etc. of uneven components, can be contained in stopped melten glass G.The most this melten glass G is downstream Side conduit 104 flows out, and likely produces streak, it is possible to quality problems occur on the glass tape 44 that forming device 42 shapes. And, once comprise zirconium oxide melten glass G and be provided to forming device 42, then can become generation devitrification in forming device 42 Reason, qualitative problem not only occurs, it is difficult to stably operation glass manufacturing apparatus 200, the worst in the case of need stop Operation, and safeguard.

And, in this embodiment, suppression melten glass G space above lower space 122 downstream side conduit 104 Flow out.According to this composition, due to lower space 122 melten glass G always with lower space 122 above melten glass G more Changing, suppression melten glass G rests on the bottom of agitator tank 101.I.e., the melten glass G in agitator tank 101 will not cut off along rotating Each space between agitator arm 106a～106e adjacent for centrage L of axle 105, it is possible to stirred definitely in each space Mix.According to this composition, the melten glass G that suppression is not sufficiently agitated flows out from agitating device 100.

And, in this embodiment, as shown in figure 13, it is configured with near the height and position of uppermost agitator arm 106a Upstream side conduit 103.Further, the height and position of uppermost agitator arm 106a is configured to so that it is from the liquid level of melten glass G Only it is spaced predetermined distance.During it is assumed that the height and position of agitator arm 106a is close to liquid level, because the axle of agitator 102 rotates melted The liquid level vibration of glass G, floats over the bubble etc. on liquid level and is easily introduced into lower section.On the other hand, the height of agitator arm 106a When being located away from liquid level, the recycle stream 123 of melten glass G i.e. cannot arrive near liquid level, and the melten glass G near liquid level can stop Stagnant, uneven melten glass G rests near liquid level.Therefore, according to the revolution of agitator 102 or agitator arm 106a～ The size of 106e, suitably determines the height and position of the agitator arm 106a of relative melt glass G liquid level.

And, in this embodiment, adjust the flow of melten glass G, lead so that the liquid level of melten glass G is positioned at upstream side Near the upper end of pipe 103.Further, under the gripper shoe 108 of agitator arm 106a is arranged in the diameter central authorities of upstream side conduit 103 Side.Specifically, the gripper shoe 108 of agitator arm 106a is arranged in the mutually level position with the lower end of upstream side conduit 103. According to this composition, as shown in figure 13, the upside accessory plate 119a of the agitator arm 106a of uppermost, make melten glass 7 produce and promote Enter the flowing that melten glass G flows into from upstream side conduit 103.

Therefore, the agitating device 100 of the glass manufacturing apparatus 200 of this embodiment is related to, it is possible to the melted glass of stirring equably Glass G.According to this composition, it is possible to suppression glass tape 44 produces streak, it is possible to prepare high-quality glass product.

(4-6)

In this embodiment, as it is shown in fig. 7, observe along the centrage L phase of rotary shaft 105 along the centrage L of rotary shaft 105 During the support plate 108 of two adjacent agitator arm 106a～106e, it is configured to not overlap each other.According to this composition, at agitator tank 101 inner molten glass G are towards the flowing of vertical, temporarily by support plate 108 block of each agitator arm 106a～106e.Cause This, it is each that melten glass G rests on along between agitator arm 106a～106e adjacent for centrage L of rotary shaft 105 temporarily In space, it is sufficiently agitated.

And, in this embodiment, by this configuration of agitator arm 106a～106e, it is possible to suppression upper space The melten glass G of 121 is along the outer peripheral face dramatic decrease of rotary shaft 105, and under the state not being sufficiently agitated, side is led downstream Pipe 104 flows out.

(4-7)

Relate in the agitating device 100 of this embodiment, when the centrage L along rotary shaft 105 watches agitator 102, each The accessory plate 109 of agitator arm 106a～106e, except outside side end 109b, be configured in away from support plate 108 outer rim Position.According to this composition, the melten glass G that the upside accessory plate 119a interarea along agitator arm 106a～106e flows downwards Easily running into the upside interarea of support plate 108, the downside accessory plate 119b interarea along agitator arm 106a～106e flows upward Dynamic melten glass G easily runs into the interarea on the downside of support plate 108., therefore, it is possible to the melten glass that suppression is in process chamber 101 The movement of 7 above-below directions.According to this composition, at the internal flowing melten glass G towards vertical of agitator tank 101, temporarily by respectively Support plate 108 block of agitator arm 106a～106e.Therefore, melten glass G rests on the centrage along rotary shaft 105 temporarily In each space between agitator arm 106a～106e adjacent for L, it is sufficiently agitated.

(4-8)

In this embodiment, three support plates 108 of each agitator arm 106a～106e are logical around rotary shaft 105 Cross connecting portion 110 to be connected with each other.According to this composition, improve the intensity of agitator arm 106a～106e.And, in rotary shaft 105 Around the mixing effect of melten glass is little, and melten glass G, near rotary shaft 105, is not the most sufficiently agitated and declines.Often The connecting portion 110 of individual agitator arm 106a～106e can suppress the sinking of the melten glass G near rotary shaft 105.

(5) flexible example

(5-1) flexible example A

In this embodiment, in the rotary shaft 105 of agitator 102, it is configured with five paddles along centrage L with same intervals Wheel 106a～106e.The quantity of agitator arm 106a～106e being arranged in rotary shaft 105, it is contemplated that the chi of agitator tank 101 Very little or rotary shaft 105 length etc. suitably sets.And, along the two panels agitator arm adjacent for centrage L of rotary shaft 105 Distance between 106a～106e, it is also contemplated that the size of agitator tank 101 and the length etc. of rotary shaft 105 suitably set.

(5-2) flexible example B

In this embodiment, although each agitator arm 106a～106e of agitator 102 has three support plates 108, But also can have the support plate 108 of more than two or four.

Such as, the agitator 2 of the agitator arm with two gripper shoes is comprised as shown in figure 14.This agitator 2, real with this Execute the agitator 102 of example in the same manner, comprise five agitator arm 6a～6e being fixed in rotary shaft 5.Each agitator arm In the upper main surface of 6a～6e gripper shoe and lower section interarea, it is each configured with two accessory plates.

And, when each agitator arm 106a～106e has four support plates 108, identically with this embodiment, edge When the centrage L of rotary shaft 105 observes agitator 102, along the supporting of two adjacent for centrage L agitator arm 106a～106e Plate 108 position also can be mutually different.

(5-3) flexible example C

The support plate 108 of each agitator arm 106a～106e of this embodiment, it is possible to have and be formed on its interarea Through hole 112.Figure 15 is the plane graph of agitator arm 106a, 106c, the 106e with through hole 112.In this accommodation example, once Agitator 102 carries out axle rotation, and partial melting glass G passes through through hole 112, produces the stream of the melten glass G towards vertical Dynamic.According to this composition, melten glass G produces except the flowing towards rotary shaft 105 radial direction produced because of accessory plate 109 it Outward, the flowing axial towards rotary shaft 105 produced because of through hole 112 is also produced.Accordingly, because produce more in melten glass G Complicated flowing, it is possible to obtain higher mixing effect.Additionally, expect that the agitator 102 that axle rotates is arrived by through hole 112 Diminishing from melten glass G resistance, agitating device 100 can be with less power stirring melten glass G.

And, in this accommodation example, the bubble being included in melten glass G passes through through hole 112, it is possible to rise to melt The liquid level of glass G.According to this composition, can effectively remove the bubble being included in melten glass G.For example, it is contemplated that check and When repairing agitator 102 or begin to use new agitator 102, in the melten glass G of agitator tank 101, put into this accommodation example Agitator.Now, the bubble of indrawn air, through by agitator arm 106a～106e when putting into agitator 102 Hole 112 floats rapidly.Accordingly, it is capable to shorten to the time of stable operation agitating device 100.

And, in this accommodation example, as shown in figure 15, at the support plate 108 connecting each agitator arm 106a～106e Between on connecting portion 110, it is possible to form through hole 112.

(5-4) flexible example D

Relate to the agitating device 100 of this embodiment, it is possible to there is the structure discharging melten glass G from agitator tank 101.Example As, it is possible to it is provided for discharging the outlet of the melten glass G comprising oxygen enrichment zirconium layer in agitator tank 101 bottom surface.And, it is possible to It is provided for getting rid of the outlet of the melten glass G comprising bubble or silicon-rich layer in the side of agitator tank 101.

In melten glass G, the average assay of relative melt glass G, sometimes occur that the balance of constituent is destroyed and contains The situation of heterogeneous glass material.Its reason it is contemplated that the composition inequality of melten glass G by producing in fusion tank 40 is caused, Or because volatile composition is caused from melten glass G volatilization.Particularly, wave from melten glass G because of volatile composition Send out the heterogeneous glass material caused easily to rest on the melten glass G liquid level of agitator tank 101.

In this embodiment, as shown in figure 13, when upper space 121 forms recycle stream 123, even if melten glass G There is bubble or heterogeneous glass material on liquid level, the melten glass G near liquid level also can along liquid level from rotary shaft 105 effluent to The inwall side of agitator tank 101.Therefore, by arranging outlet on the extended line that this melten glass G flows, it is possible to discharge and comprise Bubble in melten glass G or heterogeneous glass material.In agitator tank 101, more going up than the agitator arm 106a of uppermost The position of side, most preferably the liquid level of melten glass G or liquid level just below height and position, be provided with outlet.This discharge degree of lip-rounding Become in the side of agitator tank 101, be connected with drain.Partial melting glass G near liquid level, from the outlet of agitator tank 101 Discharge.

Generally, when removal is included in the foreign body in melten glass G, it is necessary to make agitating device 100 shut down.But, Form recycle stream 123 at upper space 121 and be formed about from the lateral agitator tank of rotary shaft 105 at the liquid level of melten glass G During the flowing of the inwall side of 101, by arranging above-mentioned outlet on agitator tank 101, it is not required to stop the fortune of agitating device 100 Turn, it is possible to the melten glass G comprising bubble or heterogeneous glass material is discharged from agitator tank 101.Such as, even if from defecator The 141 melten glass G comprising a large amount of bubble flow into agitator tank 101, are not required to stop the operating of agitating device 100, it is possible to will comprise A small amount of melten glass G of bubble discharges from agitator tank 101.

(5-5) flexible example E

In this embodiment, the centrage L along rotary shaft 105 observes adjacent two paddles of centrage L along rotary shaft 105 When taking turns the gripper shoe 108 of 106a～106e, it is configured to not overlap each other.But, according to the major-surface-area of gripper shoe 108, will join When the support plate 108 of agitator arm 106a～106e being placed in adjacent two sections is projected on agitator tank 101 bottom surface, it is possible to make each stirring Mixing impeller 106a～106e to be configured to, the interval of support plate 108 and support plate 108 becomes minimum, or gripper shoe 108 and gripper shoe The area of 108 laps becomes minimum.

(5-6) flexible example F

By relating to the melten glass G that the agitating device 100 of this embodiment is stirred, it is not only limited to mentioned component, and And, it is not only limited to said temperature and viscosity number.The composition of above-mentioned melten glass G is, for the alkali-free glass of FPD glass substrate Glass or the glass ingredient of micro-alkali glass.

But, agitating device 100 can be used with stirring the melten glass with the glass ingredient towards strengthening glass, its In, the described glass ingredient towards strengthening glass, comprise more alkali composition.Now, most preferably the temperature of melten glass G is set Determine into and be stirred in the range of 1300 DEG C～1400 DEG C of this embodiment.

(5-7) flexible example G

Relate in the agitator 102 of this embodiment, each agitator arm 106a～106e, it is fixed on by chock 126 In rotary shaft 105.But, can also be used with other means and each agitator arm 106a～106e be fixed in rotary shaft 105.Example As, it is possible to identically with the joint between the medial end 109 of upper end 116a and upside accessory plate 119a, at agitator arm Form gap between bearing 116 and the outer peripheral face of rotary shaft 105 of 106a～106e, and filled by melted platinum or platinum alloy This gap, is more strongly fixed on agitator arm 106a～106e in rotary shaft 105.And, it is unlikely to stirring is greatly reduced In the strength range of the strengthening platinum of device 102 and rotary shaft 105, it is possible to by welding more strongly by agitator arm 106a～106e It is fixed in rotary shaft 105.

(5-8) flexible example H

Relating in the agitator 102 of this embodiment, each agitator arm 106a～106e is fixed on rotation by chock 126 In rotating shaft 105.But, it is possible to do not use chock 126, be formed at rotation by being directly embedded into by each agitator arm 106a～106e Groove on axle 105 outer peripheral face, each agitator arm 106a～106e is fixed in rotary shaft 105.

In this accommodation example, a part of each agitator arm 106a～106e, it is formed at outside rotary shaft 105 by being embedded in Recess on side face and hole etc., each agitator arm 106a～106e is fixed in rotary shaft 105.

(5-9) flexible example I

As by relate to this embodiment glass manufacturing apparatus 200 manufacture glass substrate, although enumerate have above-mentioned It is illustrated as a example by the alkali-free glass of composition and micro-alkali glass, but FPD glass substrate, it is also possible to it is containing SiO₂: 50 matter Amount %～70 mass %, Al₂O₃: 5 mass %～25 mass %, B₂O₃: 0 mass %～15 mass %, MgO:0 mass %～10 matter Amount %, CaO:0 mass %～20 mass %, SrO:0 mass %～20 mass %, BaO:0 mass %～the glass of 10 mass % Substrate.It addition, this glass substrate also can contain 5 mass %～other oxide of 20 mass %.

And, by relate to this embodiment glass manufacturing apparatus 200 manufacture glass substrate, it is also possible to be containing SiO₂: 52 mass %～78 mass %, Al₂O₃: 3 mass %～25 mass %, B₂O₃: still, RO is for 3 mass %～15 mass %, RO( The combining weight of MgO, CaO, SrO and BaO) 3 mass %～20 mass %, R₂O(still, R₂O is Li₂O、Na₂O and K₂The combining weight of O) 0.01 mass %～0.8 mass %, Sb₂O₃: 0 mass %～0.3 mass %, contain substantially no As₂O₃, mass ratio CaO/RO exceedes 0.65, mass ratio (SiO₂+Al₂O₃)/B₂O₃It is 7～30, mass ratio (SiO₂+Al₂O₃)/RO is more than 5, and strain point is more than 688 DEG C The FPD glass substrate of glass.

Further, in order to suppress the destruction of TFT, the FPD substrate of glass substrate most preferably alkali-free glass.But, in order to carry In high defecator 41, melten glass G's is clarification, and glass substrate also can contain 0.05 mass %～2% mass % simultaneously, most preferably 0.1 mass～the Li of 2 mass %₂O、Na₂O、K₂O.Further, in order to reduce the load to environment, glass substrate is most preferably without making As for clarifier₂O₃、PbO.Additionally, glass substrate, most preferably at least contain stannum oxide as clarifier, most preferably contain 0.01 mass %～the ferrum oxide of 0.2 mass %.Further, for lightness, glass substrate contains 0 mass %～10 the most simultaneously SrO and BaO of quality %.Now, in order to reduce the load to environment, the content of BaO is more preferably 0 mass %～2 mass %.

(5-10) flexible example J

Relating in the glass manufacturing apparatus 200 of this embodiment, agitating device 100 is arranged on defecator 41 and forming device 42 Between, stirring is at defecator 41 clarified melten glass G.But, agitating device 100 may also be arranged on melting groove 40 and clarification Between groove 41.Now, agitating device 100 stirs and is melting the melten glass G that groove 40 generates, and provides by uniformly to defecator 41 The melten glass G changed.It addition, can also melt between groove 40 and defecator 41, and arrange between defecator 41 and forming device Two agitating devices 100.

And, in the glass manufacturing apparatus 200 manufacturing FPD glass substrate, it is arranged on melting groove 40 and clarification The temperature range of the melten glass G of agitating device 100 stirring between groove 41, most preferably 1500 DEG C～1600 DEG C.

In conjunction with accompanying drawing, to the manufacture method of the glass substrate relating to the present invention, the manufacture device of glass substrate and stirring dress The 2nd embodiment put illustrates.The basic structure of the glass manufacturing apparatus of this embodiment, action and feature, with the 1st embodiment Glass manufacturing apparatus identical.It addition, there are the parts of identical structure and function with the 1st embodiment, use identical reference notation Number.

(1) structure

The glass manufacturing apparatus of this embodiment, has glass manufacturing apparatus 200 by the 1st embodiment represented by Fig. 1 Agitating device 100 is with having the structure that the agitating device 1100 being different from this structure is replaced.Figure 16 is the side of agitating device 1100 View.Agitating device 1100, it includes the 1st agitator tank 1101a and the 2nd agitator tank 1101b.1st agitator tank 1101a and the 2nd stirs Mix groove 1101b, there is the drum identical with the agitator tank 101 of the 1st embodiment.1st agitator tank 1101a has and is arranged on down Upstream side conduit 1103 on side, portion.2nd agitator tank 1101b has the downstream conduit 1103 being arranged in lower side. Arrow shown in Figure 16 represents the flow direction of the melten glass G being stirred in agitating device 1100.

Agitating device 1100 stirs the stirring technique of melten glass G, by the inside at the 1st agitator tank 1101a, from below While guiding melten glass G upward, the 1st stirring technique being stirred, and the inside at the 2nd agitator tank 1101b, from upper While being guided in the 1st stirring technique the melten glass G being stirred below direction, the 2nd stirring technique being stirred forms. 1st agitator tank 1101a, it includes the 1st agitator 1102a stirring inner molten glass G and can discharge melted glass from bottom The 1st discharge pipe 1110a of glass G.2nd agitator tank 1101b, it include stir inner molten glass G the 2nd agitator 1102b and The 2nd discharge pipe 1110b of melten glass G can be discharged from the liquid level LL of inner molten glass G.The top of the 1st agitator tank 1101a Side, is connected by the side, top of connecting tube 1107 with the 2nd agitator tank 1101b.Melten glass G, via connecting tube 1107 from 1st agitator tank 1101a is sent to the 2nd agitator tank 1101b.1st agitator 1101a and the 2nd agitator 1102b, with the 1st embodiment Agitator 102 in the same manner, is made up of strengthening platinum.

1st agitator 1102a has the 1st rotary shaft 1105a along vertical configuration, is fixed on the 1st rotary shaft On the outer peripheral face of 1105a, and four the 1st agitator arms configured from uppermost to lowermost multistage along the 1st rotary shaft 1105a 1106a1～1106a4.1st agitator arm 1106a1～1106a4 has 1st support perpendicular with the 1st rotary shaft 1105a Plate, it is arranged in the upper main surface of the 1st gripper shoe and the 1st accessory plate of the upper of lower section interarea.2nd agitator 1102b has along lead Hang down direction configuration the 2nd rotary shaft 1105b, be fixed on the outer peripheral face of the 2nd rotary shaft 1105b, and along the 2nd rotary shaft Five the 2nd agitator arm 1106b1～1106b5 that 1105b configures from uppermost to lowermost multistage.2nd agitator arm 1106b1～1106b5 has 2nd gripper shoe perpendicular with the 2nd rotary shaft 1105b, is arranged in the upper main surface of the 2nd gripper shoe And the 2nd upper accessory plate of lower section interarea.

In the 1st stirring technique, being rotated around the 1st rotary shaft 1105a by the 1st agitator 1102, the 1st is auxiliary Plate is helped to make melten glass G produce the flowing of the radial direction towards the 1st rotary shaft 1105a.In the 2nd stirring technique, stir by the 2nd Mixing device 1102b to rotate around the 2nd rotary shaft 1105b, the 2nd accessory plate makes melten glass G produce towards the 2nd rotary shaft The flowing of the radial direction of 1105.

It addition, the 2nd of the 1st agitator arm 1106a1～1106a4 and the 2nd agitator 1102b of the 1st agitator 1102a the stirs Mix impeller 1106b1～1106b5, there is identical for agitator arm 106a～the 106e knot with the agitator 102 of the 1st embodiment Structure.1st gripper shoe of the 1st agitator arm 1106a1～1106a4 and the 1st accessory plate, be respectively equivalent to the support of the 1st embodiment Plate 108 and accessory plate 109.2nd gripper shoe of the 2nd agitator arm 1106b1～1106b5 and the 2nd accessory plate, be respectively equivalent to The gripper shoe 108 of 1 embodiment and accessory plate 109.And, the 1st agitator arm 1106a1～1106a4 and the 2nd agitator arm 1106b1～1106b5, has bearing 116 and the knot of chock 126 of agitator arm 106a～106e being equivalent to the 1st embodiment Structure.The flow direction of the aftermentioned melten glass G formed by the 1st agitator 1102a and the 2nd agitator 1102b.

And, in the 1st stirring technique, it is positioned at and is arranged in the 1st of adjacent two section of the 1st agitator arm 1106a1～1106a4 The 1st accessory plate between gripper shoe, makes melten glass G produce the flowing of equidirectional.In the 2nd stirring technique, it is positioned at configuration The 3rd accessory plate between the 3rd gripper shoe of adjacent two section of the 2nd agitator arm 1106b1～1106b5, makes melten glass G produce The flowing of equidirectional.

Further, in the 1st stirring technique, it is arranged in the 1st gripper shoe upper main surface of uppermost the 1st agitator arm 1106a1 On the 1st accessory plate, above the 1st gripper shoe of the 1st agitator arm 1106a1 topmost, by generation make melten glass G from The 1st flowing that the inside of the 1st agitator tank 1101a is moved towards the 1st rotary shaft 1105a, produces and makes melting by the 1st flowing movement The 2nd flowing that glass rises along the 1st rotary shaft 1105a.According to this composition, identically with the 1st embodiment, in the 1st stirring technique, Space 1121a between the 1st agitator arm 1106a1 and the liquid level LL of melten glass G of uppermost, forms the arrow of Figure 16 The recycle stream of the melten glass G shown in 1123a.

And, in the 2nd stirring technique, it is arranged in the 2nd gripper shoe upper main surface of uppermost the 2nd agitator arm 1106b1 On the 2nd accessory plate, above the 2nd gripper shoe of uppermost the 2nd agitator arm 1106b1, by generation make melten glass G from The 3rd flowing that the inwall of the 2nd agitator tank 1101b moves towards the 2nd rotary shaft 1105b, produces and makes melting by the 3rd flowing movement The 4th flowing that glass G rises along the 2nd rotary shaft 1105b.According to this composition, identically with the 1st embodiment, the 2nd stirring technique In, the space between the 2nd agitator arm 1106b1 and the liquid level LL of melten glass G of uppermost, form the arrow of Figure 16 The recycle stream of the melten glass G shown in 1123b.

Further, the 1st stirring Cao 1101a, near the height and position of the 1st agitator arm 1106a4 of lowermost, have and make Melten glass G flows into the inflow entrance of the 1st stirring Cao 1101a in the horizontal direction.2nd stirring Cao 1101b, stirs in the 2nd of lowermost Mix near the height and position of impeller 1106b5, there is the stream making melten glass G flow out in the horizontal direction from the 2nd stirring Cao 1101b Outlet.

And, in the 1st stirring technique, around the 1st rotary shaft 1105a, carry out axle rotation by the 1st agitator 1102a Turn, in respective 1st agitator arm 1106a1～1106a4, be arranged in the 1st accessory plate in the 1st gripper shoe upper main surface and join Side the 1st accessory plate in the 1st accessory plate put on interarea below the 1st gripper shoe, makes melten glass G produce from the 1st stirring The inside of groove 1101a is to the flowing of the 1st rotary shaft 1105a, and opposite side the 1st accessory plate produces and makes melten glass G from the 1st rotary shaft 1105a is to the flowing of the 1st agitator tank 1101a inwall.In the 2nd stirring technique, by the 2nd agitator 1102b in the 2nd rotary shaft The surrounding of 1105b carries out axle rotation, in respective 2nd agitator arm 1106b1～1106b5, is arranged in above the 2nd gripper shoe main The 2nd accessory plate on face and side the 2nd accessory plate in the 2nd accessory plate that is arranged in below the 2nd gripper shoe on interarea, make to melt Glass G produces from the inside of the 2nd agitator tank 1101b to the flowing of the 2nd rotary shaft 1105b, and opposite side the 2nd accessory plate produces and makes to melt Melt glass G from the 2nd rotary shaft 1105b to the flowing of the 2nd agitator tank 1101b inwall.

Additionally, in the 1st stirring technique, the 1st agitator arm 1106a4 of lowermost and the bottom surface of the 1st agitator tank 1101a Between space 1122a in, the 1st accessory plate of the 1st agitator arm 1106a4, as shown in the arrow 1124a of Figure 16, make melted glass Glass G produces from the inwall of the 1st agitator tank 1101a to the flowing of the 1st rotary shaft 1105a.And, at the 1st paddle of lowermost Take turns 1106a4 and between the 1st agitator arm 1106a3 of the preceding paragraph of lowermost, the 1st agitator arm 1106a3,1106a4 The 1st accessory plate, make melten glass G produce from the 1st rotary shaft 1105a to the flowing of the 1st agitator tank 1101a inwall.Stir the 2nd Mix in technique, in the space 1122b between the 2nd agitator arm 1106b5 and the bottom surface of the 2nd agitator tank 1101b of lowermost, the 2nd 2nd accessory plate of agitator arm 1106b5, as shown in the arrow 1124b of Figure 16, makes melten glass G produce from the 2nd rotary shaft 1105b is to the flowing of the 2nd agitator tank 1101b inwall.And, lowermost the 2nd agitator arm 1106b5 be positioned at lowermost The preceding paragraph the 2nd agitator arm 1106b4 between, the 2nd accessory plate of the 2nd agitator arm 1106b4,1106ab5, make melted glass Glass G produces from the inwall of the 2nd agitator tank 1101b to the flowing of the 2nd rotary shaft 1105b.

(2) feature

In this embodiment, the melten glass G being sent to agitating device 1100 by conduit 43b from defecator 41, stirs the 1st Mix after groove 1101a is stirred, and then, it is stirred at the 2nd agitator tank 1101b.In the 1st agitator tank 1101a, from upstream side conduit The melten glass G that 1103 flow in the horizontal direction, from below guide above while, be stirred.At the 1st agitator tank 1101a quilt The melten glass G of stirring, is sent to the 2nd agitator tank 1101b via connecting tube 1107.In the 2nd agitator tank 1101b, melted glass Glass G is stirred while lower section directed over, and side conduit 1104 flows out in the horizontal direction downstream.

In agitating device 1100, the heavy composition being contained in melten glass G, such as, comprise oxygen enrichment zirconium layer Melten glass G, be deposited in the bottom of the 1st agitator tank 1101a.Owing to melten glass G is on the inside of the 1st agitator tank 1101a Rise, and be sent to the 2nd agitator tank 1101b, be deposited in the heavy composition bottom the 1st agitator tank 1101a, it is difficult to flow into the 2nd Agitator tank 1101b.And, the bottom surface of the 1st agitator tank 1101a is provided with the 1st discharge pipe 1110a.According to this composition, it is deposited in Heavy composition bottom 1st agitator tank 1101a, can discharge from the 1st agitator tank 1101a via the 1st discharge pipe 1110a.

And, in the 1st agitator tank 1101a, be contained in the composition that the proportion of melten glass G is little, such as, comprise bubble or The melten glass G of silicon-rich layer, is deposited near the liquid level LL of melten glass G.It is present in the proportion within the 1st agitator tank 1101a Little composition, via connecting the 1st agitator tank 1101a and the connecting tube 1107 of the 2nd agitator tank 1101b, with melten glass G together by It is sent to the 2nd agitator tank 1101b.I.e., it is contained in the composition that the proportion of melten glass G is little, is finally deposited in the 2nd agitator tank 1101b Melten glass G liquid level LL near.And, the height and position near the melten glass G liquid level LL of the 2nd agitator tank 1101b is pacified Equipped with the 2nd discharge pipe 1110b.According to this composition, it is deposited in the composition that the proportion near melten glass G liquid level LL is little, via the 2nd Discharge pipe 1110b can discharge from the 2nd agitator tank 1101b.

Further, in this embodiment, identically with the 1st embodiment, strengthening platinum the 1st agitator 1102a formed, passes through It is fitted together to and the 1st agitator arm 1106a1～1106a4 is arranged on the outer peripheral face of the 1st rotary shaft 1105a, complete to assemble.According to this Constitute, with by welding, the 1st agitator arm 1106a1～1106a4 is arranged on phase on the outer peripheral face of the 1st rotary shaft 1105a Ratio, the intensity of suppression the 1st agitator 1102a reduces.About the 2nd agitator 1102b the 2nd agitator arm 1106b1～ 1106b5, the most in the same manner, by chimeric assembling, inhibition strength reduces.Accordingly, because suppression the 1st agitator 1102a and the 2nd stirs Mix device 1102b deformation in rotation and breakage, the 1st agitator 1102a can be made in high temperature and full-bodied melten glass G And the 2nd agitator 1102b high speed rotating.Therefore, the agitating device 1100 of the glass manufacturing apparatus of this embodiment is related to.Can be equal Stir melten glass G evenly.

It addition, the agitating device 1100 of this embodiment, there is the feature of the agitating device 100 of the 1st above-mentioned embodiment, and The above-mentioned flexible example of the agitating device 100 of the 1st embodiment can be used rightly.

In conjunction with accompanying drawing, to the manufacture method of the glass substrate relating to the present invention, the manufacture device of glass substrate and stirring dress The 3rd embodiment put illustrates.The basic structure of the glass manufacturing apparatus of this embodiment, action and feature, with the 1st embodiment Glass manufacturing apparatus identical.It addition, there are the parts of identical structure and function with the 1st embodiment, use identical reference notation Number.

(1) structure

The accessory plate shape of the agitator arm that difference is agitator of this embodiment and the 1st embodiment.Should shown in Figure 17 The top view of one of three gripper shoes of each agitator arm 206a～206e of the agitator of embodiment.Figure 17 is for being arranged in support The plane graph of the upside accessory plate 219a in plate 208 upper main surface 208a.Figure 18 be Figure 17 XVIII-XVIII line in upside auxiliary Help the profilograph of plate 219a.Figure 19 is the arrow XIX direction along Figure 17, the side of accessory plate 219a on the upside of unlimited distance is observed View.Figure 20 is, the side view of accessory plate 219a outboard end 209b on the upside of the arrow XX direction observation of Figure 17.Figure 21 is, The drawing in side sectional elevation of upside accessory plate 219a in the XXI-XXI line of Figure 18 and Figure 19.

Identically with agitator arm 106a～106e of the 1st embodiment, each agitator arm 206a～206e has configuration Three gripper shoes 208 around rotary shaft 205.Each gripper shoe 208 has by the upside auxiliary being arranged in upper main surface Two accessory plates that plate 219a is constituted with the downside accessory plate being arranged on the interarea of lower section.Upside accessory plate 219a has closest The end, opposition side of the medial end 209a and medial end 209a of rotary shaft 205 side, i.e., closest to gripper shoe 208 outer edge side Outboard end 209b.And, the vertical end of accessory plate, i.e., away from gripper shoe 208 interarea being connected with accessory plate End, bends along vertical towards rotary shaft 205.Further, the horizontal direction end of accessory plate, i.e., towards radially farthest away from rotation End-outboard end 209b of axle 205, bends towards rotary shaft 205 in the horizontal direction.It follows that to upside accessory plate 219a and The concrete shape of downside accessory plate illustrates.

As shown in figure 18, accessory plate 219a in upside extends above towards vertical from upper main surface 208a of gripper shoe 208. Upside accessory plate 219a, is made up of plate bottom 219a1 and plate top 219a2.Plate bottom 219a1, opposing main faces 208a vertically prolong Stretch.Plate top 219a2, on the upside of rotary shaft 205 observation inside the flexure plane of accessory plate 219a, i.e., towards rotary shaft 205 lateral bending Bent.

As shown in FIG. 19 and 20, the plate top 219a2 of outboard end 209b of upside accessory plate 219a has hemisphere Domed shape.As shown in figure 21, outboard end 209b of upside accessory plate 219a, bend towards rotary shaft 205 semicircle shape.

And, downside accessory plate has the shape identical with upside accessory plate 219a.Specifically, once, from gripper shoe The upper main surface of 208 pull down upside accessory plate 219a, reverse up and down, be arranged on the lower section interarea of gripper shoe 208, then have with under Shape that side accessory plate is identical and configuration.

(2) feature

Comprise the agitating device of the agitator of this embodiment, the upside accessory plate 219a of its agitator arm 206a～206e and The bending of accessory plate end, downside.According to this composition, once melten glass G is rotated by the axle of agitator and is stirred, melten glass G Can flow smoothly along the bending section of upside accessory plate 219a and downside accessory plate.Therefore, the agitator stirring melten glass G phase Between, near the end of upside accessory plate 219a and downside accessory plate, the generation of suppression negative pressure region, i.e. have and compare surrounding space The generation in space of the low pressure of pressure.In negative pressure region, owing to the pressure of melten glass G is less than ambient pressure, and molten deposit Solvable storage in the gas of melten glass G reduces, and easily produces bubble.It addition, do not produce melten glass G by accessory plate When pushing the flowing of agitator tank radial direction to, as long as upside accessory plate 219a has the structure of above-mentioned bending section, downside assists Plate may not be the structure with above-mentioned bending section.

In this embodiment, by the accessory plate end of agitator arm 206a～206e is fabricated to curved shape, suppression is stirred Negative pressure region is produced during mixing melten glass G.Accordingly, because have the agitating device of this agitator, it is not necessary to worry because of Produce the generation of the bubble that negative pressure region causes, it is possible to make the rotary speed of agitator increase further, it is possible to more uniformly to stir Mix melten glass G.According to this composition, suppression glass tape 44 produces streak, it is possible to prepare high-quality glass product.

It addition, the agitating device of this embodiment, there is the feature of the agitating device 100 of the 1st above-mentioned embodiment, and can be proper The above-mentioned flexible example of the local agitating device 100 using the 1st embodiment.

Utilize the glass manufacturing apparatus relating to the present invention, manufacture glass substrate.The glass ingredient of glass substrate is, SiO₂: 60 mass %, B₂O₃: 10 mass %, Al₂O₃: 19.5 mass %, CaO:5.3 mass %, SrO:5 mass %, SnO₂: 0.2 matter Amount %.Initially, in melting groove, dissolve frit, to make it have mentioned component, and prepared melten glass.It follows that In defecator, make the melten glass prepared in melting groove be warming up to 1650 DEG C, and clarify.

It follows that utilize the melten glass after the agitating device stirring clarification comprising agitator, wherein, described agitator is Formed by decentralized strengthening platinum.Agitator has rotary shaft, is embedded in rotary shaft, and is fixed on stirring on rotary shaft outer peripheral face Mix impeller.The rotating speed of agitator is 12.5rpm.It follows that provide the melten glass being stirred at agitating device toward forming device, Glass tape is formed by overflowing glass tube down-drawing.

It follows that cut-out glass tape, the FPD glass base that manufacture thickness is 0.7mm, size is 2200mm × 2500mm Plate.Its result, utilizes the continuous two-year system of glass manufacturing apparatus relating to the present invention to make glass substrate, it is also possible to carry out well The manufacture of FPD glass substrate, and do not see that the manufacture caused because of deformation and the breakage of agitating device is abnormal.

Relate to the glass manufacturing apparatus of the present invention it addition, utilize, manufactured and there is following composition, i.e., SiO₂: 61.5 matter Amount %, B₂O₃: 9 mass %, Al₂O₃: 19 mass %, CaO:10 mass %, alkali metal oxide: 0.3 mass %, Fe₂O₃: 0.05 matter Amount %, SnO₂: the glass substrate of 0.15 mass %.Even if this occasion, the manufacture of FPD glass substrate also can be carried out well, And do not see that the manufacture caused because of deformation and the breakage of agitating device is abnormal.

Claims

1. a manufacture method for glass substrate, including being prepared the smelting process of melten glass by molten raw, stirring Mix the stirring technique of the described melten glass prepared in described smelting process, it is characterised in that:

In described stirring technique, described melten glass is configured in the agitator stirring within agitator tank, molten described in its result Melt glass in the inside of described agitator tank from lower section directed over, or guide top from below；

Described agitator has the rotary shaft along vertical configuration and agitator arm, and agitator arm is by being embedded in described rotation Rotating shaft and be fixed on the outer peripheral face of described rotary shaft and along described rotary shaft from uppermost to lowermost multistage configure, at least Described agitator arm is embedded in the part of described rotary shaft and is made up of strengthening platinum about,

The inside of described rotary shaft is cavity, and this rotary shaft has the embedded hole being formed at its outer peripheral face, described agitator arm A part be fitted to this embedded hole；

Described agitator arm has mosaic process, and this mosaic process is for being embedded in the described embedded hole of described rotary shaft and logical Crossing the described embedded hole that described mosaic process is inserted described rotary shaft, described agitator arm is fixed on outside described rotary shaft On side face,

Described agitator arm has the gripper shoe perpendicular with the centrage of described rotary shaft and is arranged in described gripper shoe Accessory plate in upper main surface and lower section interarea；

In described stirring technique, rotated around the centrage of described rotary shaft by described agitator, described auxiliary Plate makes described melten glass produce the flowing of radial direction towards described rotary shaft, and is positioned to be arranged in described in adjacent two sections and stirs Mixing the described accessory plate between the described gripper shoe of impeller makes described melten glass produce the flowing of equidirectional,

In described stirring technique, rotated around the centrage of described rotary shaft by described agitator, in each institute State the described accessory plate being arranged in described gripper shoe upper main surface of agitator arm and configure below described gripper shoe on interarea Described accessory plate in, be positioned at side described accessory plate produce make melten glass from the inwall of described agitator tank towards described rotation The flowing of axle, the described accessory plate generation being positioned at opposite side makes described melten glass from described rotary shaft towards described agitator tank The flowing of wall.

2. a manufacture method for glass substrate, including being prepared the smelting process of melten glass by molten raw, stirring Mix the stirring technique of the described melten glass prepared in described smelting process, it is characterised in that:

The inside of described rotary shaft is cavity, and this rotary shaft has the embedded hole being formed at its outer peripheral face, and this embedded hole is used for It is fitted together to the mosaic process being had for the chock fixing described rotary shaft and described agitator arm；

Described agitator arm has the chock through hole making described chock run through, and runs through by making described chock run through described chock Hole and make described mosaic process be embedded in described embedded hole, described agitator arm is fixed on the outer peripheral face of described rotary shaft On.

The manufacture method of glass substrate the most according to claim 1 and 2:

In described stirring technique, the described melten glass stirred by described agitator is for being 10 in viscosity^2.5Temperature during dPa s The degree glass more than 1450 DEG C.

The manufacture method of glass substrate the most according to claim 1 and 2:

In described glass substrate, the content of alkali metal oxide is 0 mass %～2 mass %.

The manufacture method of glass substrate the most according to claim 1 and 2:

Described glass substrate is any one in liquid crystal display glass substrate and organic el display glass substrate.

The manufacture method of glass substrate the most according to claim 2:

In described stirring technique, rotated around the centrage of described rotary shaft by described agitator, described auxiliary Plate makes described melten glass produce the flowing of radial direction towards described rotary shaft, and is positioned to be arranged in described in adjacent two sections and stirs Mixing the described accessory plate between the described gripper shoe of impeller makes described melten glass produce the flowing of equidirectional.

The manufacture method of glass substrate the most according to claim 6:

The manufacture method of glass substrate the most according to claim 1 and 2:

Described stirring technique is made up of the 1st stirring technique and the 2nd technique, wherein at described 1st stirring technique at the 1st agitator tank Internal one side guides described melten glass the most upward while being stirred；At the 2nd stirring technique in the 2nd agitator tank Portion is guided in described 1st stirring technique the described melten glass being stirred on one side from the top to the bottom while being stirred；

1st agitator of the described melten glass that described 1st agitator tank includes the 1st process chamber, stir in described 1st process chamber, And the 1st discharge pipe of described melten glass can be discharged from the bottom of described 1st process chamber；

2nd agitator of the described melten glass that described 2nd agitator tank includes the 2nd process chamber, stir in described 2nd process chamber, And the 2nd discharge pipe of described melten glass can be discharged from the liquid level of the described melten glass in described 2nd process chamber；

The top sidepiece of described 1st agitator tank is connected with the top sidepiece of described 2nd agitator tank by connecting tube；

Described melten glass is delivered to described 2nd agitator tank via described connecting tube from described 1st agitator tank.

9. a manufacture device for glass substrate, it includes preparing the fusing department of melten glass, use for molten raw Mixing part in the described melten glass that stirring prepares in described fusing department:

Described mixing part has agitator tank and is arranged in the agitator within described agitator tank；

Described agitator, stirs the described melted glass above from lower section directed over or guiding from below inside described agitator tank Glass；

Described agitator have along vertical configuration rotary shaft and along described rotary shaft from uppermost to lowermost multistage The agitator arm of configuration, described agitator arm is fixed on the outer peripheral face of described rotary shaft by being embedded in described rotary shaft On, the most described agitator arm is embedded in the part of described rotary shaft and is made up of strengthening platinum about,

Being rotated around the centrage of described rotary shaft by described agitator, described accessory plate makes described melten glass produce The flowing of the raw radial direction towards described rotary shaft, and it is positioned at the described gripper shoe of the described agitator arm being arranged in adjacent two sections Between described accessory plate make described melten glass produce equidirectional flowing,

Rotated around the centrage of described rotary shaft by described agitator, being arranged in of each described agitator arm In described accessory plate in described gripper shoe upper main surface and the described accessory plate that configures below described gripper shoe on interarea, it is positioned at The described accessory plate of side produces and makes melten glass from the inwall of described agitator tank towards the flowing of described rotary shaft, is positioned at opposite side Described accessory plate produce make the flowing towards the inwall of described agitator tank from described rotary shaft of described melten glass.

10. a manufacture device for glass substrate, it includes preparing the fusing department of melten glass, use for molten raw Mixing part in the described melten glass that stirring prepares in described fusing department:

11. for the agitating device stirring melten glass, comprising:

Agitator tank；

It is arranged in the agitator within described agitator tank；

12. 1 kinds of agitating devices being used for stirring melten glass, comprising:

Agitator tank；

It is arranged in the agitator within described agitator tank；