CN103363911A - Laser thickness gauge taking laser as light source - Google Patents
Laser thickness gauge taking laser as light source Download PDFInfo
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- CN103363911A CN103363911A CN2013101473879A CN201310147387A CN103363911A CN 103363911 A CN103363911 A CN 103363911A CN 2013101473879 A CN2013101473879 A CN 2013101473879A CN 201310147387 A CN201310147387 A CN 201310147387A CN 103363911 A CN103363911 A CN 103363911A
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- 238000006243 chemical reaction Methods 0.000 claims abstract description 6
- 238000003384 imaging method Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 4
- 238000010009 beating Methods 0.000 claims description 3
- 230000005693 optoelectronics Effects 0.000 claims description 3
- 238000005259 measurement Methods 0.000 abstract description 10
- 230000003287 optical effect Effects 0.000 abstract description 3
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 241000759199 Eleocharis acicularis Species 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 239000005030 aluminium foil Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000010426 asphalt Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000004078 waterproofing Methods 0.000 description 1
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Abstract
The invention relates to a laser thickness gauge taking laser as a light source. The laser thickness gauge structurally comprises a shell and is characterized in that a lying U-shaped bracket is arranged on the shell, and an upper laser and a lower laser which are opposite for emitting, a diffraction-free optical system and an area array CCD (Charge Coupled Device) are arranged in the U-shaped bracket. On this basis, laser beams emitted from the upper laser and the lower laser are respectively radiated onto the upper surface and the lower surface of a tested object through the laser thickness gauge to form an upper light spot and a lower light spot; and light rays of the two light spots are imaged onto the area array CCD through the diffraction-free optical system, are subjected to photoelectric conversion and are then transmitted to a computer to be processed to directly obtain the thickness of the tested object. The laser thickness gauge disclosed by the invention has the beneficial effects that the measurement precision is high and reaches +/-0.0015mm, measurement errors caused by deformation, vibration and the like of the U-shaped bracket are avoided, the measurement precision is greatly improved; and the laser thickness gauge is resistant to vibration, simple to install and use, and stable in work.
Description
Technical field
The invention belongs to field of measuring technique, relate to a kind of can the object of detect thickness below 5mm, be widely used in multiple needs and measure in the commercial production of ultra-thin object thickness.
Background technology
The noncontact of thickness measurement with laser system in commercial production, the successful Application of on-line dynamic measurement are all being brought into play very important effect for the aspects such as quality, production efficiency and safety guarantee that improve product.It can finish the many Detection tasks that can't finish with the contact type measurement means.Be widely used in the online dynamically noncontact thickness measuring of battery pole piece, be used for transparent membrane/paper/glass/manufacturing enterprises such as rubber needle spikesedge herb, detect online for the production of the thickness to product on the line, be used for steel plate, copper/aluminium foil, sheet material manufacturing enterprise is detected online to the thickness of the product on the production line, be used for the rubber thickness measuring, waterproof material thickness measuring malthoid thickness measuring, asphalt waterproofing material thickness measuring field.
Present laser thickness gauge is general to adopt two laser displacement sensors to consist of, because the restriction of the working environment in industrial production line, the situation that can occur high temperature in a few thing place, and in case U-shaped the distortion or the vibration, then can cause measuring accuracy not high, the measurement point of two gauge heads did not overlap about two photoelectric conversion parts caused owing to work is asynchronous, and caused thus measuring accuracy not high, the unstable deficiency that waits of measuring accuracy.
Summary of the invention
The objective of the invention is the high measurement accuracy in order to ensure laser thickness gauge, related to a kind of with the thicknessmeter of laser as light source, no longer adopt two laser displacement sensors to measure respectively up and down gauge head and calculate thickness to the distance of the upper and lower surface of measured object, but directly measure the thickness of measured object.
Technological means of the present invention is, a kind of with the laser thickness gauge of laser as light source, comprise housing in the structure, key is: be provided with the U-shaped support of lying down at housing, in U-shaped support, be provided with upper laser instrument and the lower laser instrument of relative emission, diffraction light-free is learned system, and area array CCD, on above-mentioned basis, the light beam that laser thickness gauge sends upper laser instrument and lower laser instrument is beaten respectively upper surface and the lower surface at measured object, and forms up and down two hot spots, and the light of these two hot spots is learned system imaging to area array CCD by diffraction light-free, after opto-electronic conversion, be sent in the computing machine again and process, directly obtain the thickness of measured object.
The structure that described diffraction light-free is learned system comprises lens, lower lens, upper reflector, lower catoptron and reflecting prism, wherein going up lens, upper reflector and lower lens, lower catoptron is symmetrical arranged up and down, the light of beating at two hot spots of measured object upper and lower surface passes through respectively upper and lower lens, upper and lower reflective mirror, and reflecting prism is imaged onto in the area array CCD.
Described measured object is that thickness is less than or equal to plate object or the film of 5mm.
Described upper lens and lower lens are convex lens.
Described reflecting prism is that tapering is 95 ° prism.
Key of the present invention be with laser as light source, designed the brand-new diffraction light-free of a cover and learned system, by optical system up and down the light beam of two laser faculas gather, thereby obtain the thickness of measured object.Thoroughly changed and used laser displacement sensor as gauge head in the past, principle of work is that up and down two laser illumination form up and down two hot spots to the upper and lower surface of measured object, these two hot spots are learned system imaging to area array CCD by a diffraction light-free, then, distance between these two hot spots is exactly the mapping of the thickness of measured object, can directly calculate the thickness of measured object by the calculating of computing machine, this has just been avoided because the distortion of U-shaped support and the up and down in addition impact of the factor such as shake of measuring error of gauge head.Simultaneously the present invention has taked single-lens area array CCD to do photoelectric conversion part, owing to being that hot spot is measured simultaneously up and down, if arbitrary hot spot is too dark up and down in appearance, then should organize up and down hot spot data calcellation, has guaranteed to be used for the one by one correspondence of the up and down hot spot of thickness data.
The invention has the beneficial effects as follows, measuring accuracy is high, reach+/-0.0015mm, avoided U-shaped deformation of timbering, vibration etc. to cause measuring error, greatly improved measuring accuracy, and be not afraid of vibration, and installed and used simpler, work more stable, non-environmental-pollution, without injury, pollution-free contactless to measured object to the people, with stylish laser thickness gauge complete data output interface is arranged, this lays the foundation for closed loop automatic control system in the future.
Description of drawings
Fig. 1 is structural principle and the index path of laser thickness gauge of the present invention.
The U-shaped support of 1 representative, laser instrument in the 2-1 representative, the lower laser instrument of 2-2 representative, lens in the 3-1 representative, the lower lens of 3-2 representative, 4-1 represents upper reflector, the lower catoptron of 4-2 representative, 5 represent reflecting prism, and 6 represent area array CCD.
Embodiment
A kind of with the laser thickness gauge of laser as light source, comprise housing in the structure, key is: be provided with the U-shaped support 1 of lying down at housing, in U-shaped support 1, be provided with upper laser instrument 2-1 and the lower laser instrument 2-2 of relative emission, diffraction light-free is learned system, and area array CCD 6, on above-mentioned basis, the light beam that laser thickness gauge sends upper laser instrument 2-1 and lower laser instrument 2-2 is beaten respectively upper surface and the lower surface at measured object, and two hot spots about forming, the light of these two hot spots is learned system imaging to area array CCD 6 by diffraction light-free, is sent in the computing machine after opto-electronic conversion again and processes, and directly obtains the thickness of measured object.
The structure that described diffraction light-free is learned system comprises lens 3-1, lower lens 3-2, upper reflector 4-1, lower catoptron 4-2 and reflecting prism 5, wherein go up lens 3-1, upper reflector 4-1 and lower lens 3-2, lower catoptron 4-2 is symmetrical arranged up and down, the light of beating at two hot spots of measured object upper and lower surface passes through respectively upper and lower lens, upper and lower reflective mirror, and reflecting prism 5 is imaged onto in the area array CCD 6.
Described measured object be thickness less than or equal to plate object or the film of 5mm, also can measure with the change light path system for the plate object more than or equal to 5mm.
Described upper lens 3-1 and lower lens 3-2 are convex lens.
Described reflecting prism 5 is that tapering is 95 ° prism.
The present invention at first will adjust laser thickness gauge in the specific implementation, adjusts the focal length of laser instrument, so that focusing is located on the measured object plane about 170mm.Install the angle of coarse adjustment laser instrument after the laser instrument, so that the hot spot of upper laser instrument is beaten when the upper surface of lower laser instrument 3-2 and its essentially concentric or coaxial, in like manner laser instrument 3-2 under the coarse adjustment; To be measured is installed on the adjustment rack, and with its height control near zero plane, open laser instrument, mounted lens is so that its angle is aimed at respectively up and down hot spot; Install catoptron 4-1, so that can arrive the center of catoptron behind the hot spot scioptics, adjust its angle, so that emergent light vertically downward; Lower catoptron 4-2 is installed, adjusts its angle, human eye is placed on the position of area array CCD 6, hot spot gets final product if can observe respectively up and down by lower catoptron 4-2, otherwise needs to continue to repeat the adjustment of above-mentioned steps; Installed surface battle array CCD6, and adjust its front and back position so that near the theoretical position of area array CCD test surface design, and then adjusts the front and back position of upper and lower lens, so that hot spot all can focus at CCD up and down; Use black cylinder and magnifier, approach from the side near the up and down hot spot of laser instrument zero plane, again adjust the angle of laser instrument, so that hot spot is aimed at about it; Adjust the angle of upper reflector 4-1, so that hot spot all is imaged near the center of upright position of image up and down, and certain distance arranged in the horizontal direction, requirement is when determinand is very thin, upper hot spot also should be on the right, and can distinguish on the program and obtain two hot spots, namely do not occur the prompting of " Just One Point " in the whole image range, when measuring the object of 5mm, can access two hot spots on the image; Begin to demarcate and measure, demarcate finish after and need again accurate adjustment laser instrument so that the result can only be bigger than normal during the measured object inclination.
When concrete the measurement, if there is the situation that does not have hot spot, determine at first whether camera connects normally during measurement, then determine whether laser instrument is opened, again adjust up and down the film position, if there is only having a hot spot, can adjust at first up and down the position at film place.If this adjustment can't whether viewing film tilts so that two hot spots appear in image, to such an extent as to wherein light path is blocked or scattering enters into a little less than the auroral poles of lens.Please adjust the heeling condition of film in this situation.If or could observe two hot spots, would then adjust the time shutter by the toggle switch of camera back.
Claims (5)
1. one kind with the laser thickness gauge of laser as light source, comprise housing in the structure, it is characterized in that: be provided with the U-shaped support (1) of lying down at housing, in U-shaped support (1), be provided with the upper laser instrument (2-1) and lower laser instrument (2-2) of relative emission, diffraction light-free is learned system, and area array CCD (6), on above-mentioned basis, the light beam that laser thickness gauge sends upper laser instrument (2-1) and lower laser instrument (2-2) is beaten respectively upper surface and the lower surface at measured object, and two hot spots about forming, the light of these two hot spots is learned system imaging to area array CCD (6) by diffraction light-free, after opto-electronic conversion, be sent in the computing machine again and process, directly obtain the thickness of measured object.
2. according to claim 1 a kind of with the laser thickness gauge of laser as light source, it is characterized in that: the structure that described diffraction light-free is learned system comprises lens (3-1), lower lens (3-2), upper reflector (4-1), lower catoptron (4-2), and reflecting prism (5), wherein go up lens (3-1), upper reflector (4-1) and lower lens (3-2), lower catoptron (4-2) is symmetrical arranged up and down, the light of beating at two hot spots of measured object upper and lower surface passes through respectively, lower lens, on, lower reflective mirror, and reflecting prism (5) is imaged onto in the area array CCD (6).
3. according to claim 1 and 2 a kind of with the laser thickness gauge of laser as light source, it is characterized in that: described measured object is that thickness is less than or equal to plate object or the film of 5mm.
4. according to claim 2 a kind of with the laser thickness gauge of laser as light source, it is characterized in that: described upper lens (3-1) and lower lens (3-2) are convex lens.
5. according to claim 2 a kind of with the laser thickness gauge of laser as light source, it is characterized in that: described reflecting prism (5) is that tapering is 95 ° prism.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201310147387.9A CN103363911B (en) | 2013-04-25 | A kind of laser is as the laser thickness gauge of light source |
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CN201310147387.9A CN103363911B (en) | 2013-04-25 | A kind of laser is as the laser thickness gauge of light source |
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CN103363911A true CN103363911A (en) | 2013-10-23 |
CN103363911B CN103363911B (en) | 2016-11-30 |
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Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104019754A (en) * | 2014-06-21 | 2014-09-03 | 浙江天龙胶丸有限公司 | Rapid capsule thickness detection device |
CN106197295A (en) * | 2016-07-20 | 2016-12-07 | 华中科技大学 | A kind of laser thickness gauge |
CN109373917A (en) * | 2018-12-12 | 2019-02-22 | 常州工学院 | Thickness measurement with laser manually visualizes detection device and method to hot spot is penetrated |
CN109827511A (en) * | 2018-12-12 | 2019-05-31 | 常州工学院 | Thickness measurement with laser is to penetrating hot spot automatic detection device and method |
CN110440700A (en) * | 2018-05-02 | 2019-11-12 | 长沙青波光电科技有限公司 | Target object core intersection detection device and skin oil layer thickness detection device |
CN110864635A (en) * | 2019-10-30 | 2020-03-06 | 宁波兰羚钢铁实业有限公司 | Online thickness detection system and method for slitting machine |
CN112648928A (en) * | 2019-10-13 | 2021-04-13 | 中北大学 | Cylinder thickness gauge |
CN114812457A (en) * | 2022-06-28 | 2022-07-29 | 太原理工大学 | Light path alignment self-adjusting laser ultrasonic metal composite plate thickness measuring device and method |
CN116678331A (en) * | 2023-06-03 | 2023-09-01 | 湖北武汉亮测科技有限公司 | Laser thickness measuring instrument |
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CN2550718Y (en) * | 2002-06-03 | 2003-05-14 | 于效军 | Thickness measurer |
CN101021574A (en) * | 2006-09-22 | 2007-08-22 | 长兴光学材料(苏州)有限公司 | Optical film and two-dimensional display device |
CN101354480A (en) * | 2008-09-25 | 2009-01-28 | 中国海洋大学 | Plancton double-light path imaging apparatus |
CN201273813Y (en) * | 2008-09-28 | 2009-07-15 | 舞阳钢铁有限责任公司 | Thickness measurement instrument for CCD optical bias resistant non-invasive detection |
CN102519372A (en) * | 2011-12-23 | 2012-06-27 | 常州工学院 | Laser thickness measuring apparatus of lithium battery electrode and working method thereof |
JP2012163419A (en) * | 2011-02-04 | 2012-08-30 | Toshiba Corp | Thickness measuring instrument |
CN102679892A (en) * | 2012-05-11 | 2012-09-19 | 华中科技大学 | Single-lens laser trigonometry thickness measuring instrument |
CN102954789A (en) * | 2011-08-25 | 2013-03-06 | 中国科学院西安光学精密机械研究所 | System and method for image interpretation-based double-laser beam planar location |
Patent Citations (8)
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CN2550718Y (en) * | 2002-06-03 | 2003-05-14 | 于效军 | Thickness measurer |
CN101021574A (en) * | 2006-09-22 | 2007-08-22 | 长兴光学材料(苏州)有限公司 | Optical film and two-dimensional display device |
CN101354480A (en) * | 2008-09-25 | 2009-01-28 | 中国海洋大学 | Plancton double-light path imaging apparatus |
CN201273813Y (en) * | 2008-09-28 | 2009-07-15 | 舞阳钢铁有限责任公司 | Thickness measurement instrument for CCD optical bias resistant non-invasive detection |
JP2012163419A (en) * | 2011-02-04 | 2012-08-30 | Toshiba Corp | Thickness measuring instrument |
CN102954789A (en) * | 2011-08-25 | 2013-03-06 | 中国科学院西安光学精密机械研究所 | System and method for image interpretation-based double-laser beam planar location |
CN102519372A (en) * | 2011-12-23 | 2012-06-27 | 常州工学院 | Laser thickness measuring apparatus of lithium battery electrode and working method thereof |
CN102679892A (en) * | 2012-05-11 | 2012-09-19 | 华中科技大学 | Single-lens laser trigonometry thickness measuring instrument |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104019754A (en) * | 2014-06-21 | 2014-09-03 | 浙江天龙胶丸有限公司 | Rapid capsule thickness detection device |
CN106197295A (en) * | 2016-07-20 | 2016-12-07 | 华中科技大学 | A kind of laser thickness gauge |
CN106197295B (en) * | 2016-07-20 | 2017-10-24 | 华中科技大学 | A kind of laser thickness gauge |
CN110440700A (en) * | 2018-05-02 | 2019-11-12 | 长沙青波光电科技有限公司 | Target object core intersection detection device and skin oil layer thickness detection device |
CN109373917A (en) * | 2018-12-12 | 2019-02-22 | 常州工学院 | Thickness measurement with laser manually visualizes detection device and method to hot spot is penetrated |
CN109827511A (en) * | 2018-12-12 | 2019-05-31 | 常州工学院 | Thickness measurement with laser is to penetrating hot spot automatic detection device and method |
CN112648928A (en) * | 2019-10-13 | 2021-04-13 | 中北大学 | Cylinder thickness gauge |
CN112648928B (en) * | 2019-10-13 | 2022-08-02 | 中北大学 | Cylinder thickness gauge |
CN110864635A (en) * | 2019-10-30 | 2020-03-06 | 宁波兰羚钢铁实业有限公司 | Online thickness detection system and method for slitting machine |
CN114812457A (en) * | 2022-06-28 | 2022-07-29 | 太原理工大学 | Light path alignment self-adjusting laser ultrasonic metal composite plate thickness measuring device and method |
CN116678331A (en) * | 2023-06-03 | 2023-09-01 | 湖北武汉亮测科技有限公司 | Laser thickness measuring instrument |
CN116678331B (en) * | 2023-06-03 | 2023-12-15 | 湖北武汉亮测科技有限公司 | Laser thickness measuring instrument |
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