CN103344932A - Standard testing sample - Google Patents
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- CN103344932A CN103344932A CN2013102863773A CN201310286377A CN103344932A CN 103344932 A CN103344932 A CN 103344932A CN 2013102863773 A CN2013102863773 A CN 2013102863773A CN 201310286377 A CN201310286377 A CN 201310286377A CN 103344932 A CN103344932 A CN 103344932A
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Abstract
The invention provides a standard testing sample. The standard testing sample comprises a package substrate and a standard resistor, wherein the packaging substrate comprises at least four connecting pins, and the standard resistor is located on the packaging substrate. The two ends of the stand resistor are connected to two connecting pins of the packaging substrate respectively to form a four-end method testing sample, and the sample is used for verifying a packaging testing machine platform. Meanwhile, a series of standard resistors with different resistance values can be arranged on the packaging substrate of the sample, the testing capability and the repeatability of the packaging testing machine platform under different resistance-value conditions can be verified at a time, measuring values of different machine platforms can be compared and the cost of verification of the packaging testing machine platform is reduced.
Description
Technical field
The present invention relates to the semiconductor test technical field, particularly a kind of standard testing sample for checking package level tester table.
Background technology
Reliability testing (Reliability) can simply be described as product under regular service condition, in the serviceable life that can work smoothly (Lifetime), it is important component part in the SIC (semiconductor integrated circuit) manufacture process that semiconductor devices (for example MOS device) is carried out reliability testing.In order to record the reliability of semiconductor devices at short notice; usually can use the accelerated test experiment; reach semiconductor devices is applied the stress condition (stress that accelerates its performance degradation (degrade); refer to the environment temperature higher than normal running conditions, humidity, voltage, electric current, pressure etc.); measure its performance parameter; and then obtaining the serviceable life of semiconductor devices under the working environment stricter than normal running conditions, recycling lifetime model (Lifetime Model) calculates the life-span of product under regular service condition.
Package level reliability (PLR) test of metal oxide semiconductor transistor is that transistorized test structure is cut down from wafer, be bonded at for example loading plate of ceramic silicone tube (Side Braze), carry out again being inserted in plugboard after routing (Wire Bonding) encapsulation, putting into the baking oven (oven) of package level tester table then tests, a plugboard a plurality of measured devices of can pegging graft, tester table also can hold the polylith plugboard, with simultaneously to a plurality of measured device stress applications (stress, for example temperature, voltage) with measure its performance parameter.
In reliability testing, for the measurement to resistance more accurate, use the tested object of Calvin (kelvin) structure to test, this structure respectively has two connecting lines at the two ends of resistance, wherein two are added electric current, measure other two voltage then, use voltage difference divided by electric current then, just can calculate resistance, can mask extra resistance such as connecting line and sealing wire by this mode, accordingly, also the package level tester table to be arranged to measure the pattern of four-end method kelvin structure.
The accuracy that the package level tester table is measured directly influences the reliability of products test result, therefore uses identical sample that the package level tester table is verified and is absolutely necessary, and this sample also needs to satisfy four-end method measurement structure simultaneously.Can long preservation but do not have at present, the specimen of repeated use and stable performance, no matter cause is repeatability, the repeatability aptitude tests of package level tester table, still the contrast of board differences, the evaluation of the power of test of board under different ranges all can't be carried out.So just can't get rid of between board and whether there are differences, also can't obtain the reperformance test ability of board, in case find that test result is undesirable, just can't guarantee the power of test of equipment itself, also can't persuade survey unit of committee trust test result.Usually in order clearing up problems, to need the interim sample of preparing, to assess repeatedly and search reason, waste time and energy.
Summary of the invention
The invention provides a kind of standard testing sample, with solve do not have in the existing measuring technology can long preservation, the problem of the specimen that is used for checking package level tester table of repeated use and stable performance.
Standard testing sample provided by the invention comprises:
Encapsulation base includes at least four pins;
Measuring resistance is positioned on the described encapsulation base, and an end of described measuring resistance is connected on two pins of described encapsulation base, and the other end is connected on other two pins of described encapsulation base, forms the four-end method specimen.
Further, the quantity of described measuring resistance is a plurality of.
Further, the resistance of a plurality of measuring resistances has nothing in common with each other.
Further, the Standard resistance range of described measuring resistance is 1 Ω～10000 Ω.
Further, the material of described encapsulation base is pottery.
Further, the two ends of described measuring resistance are welded in respectively on two pins of described encapsulation base.
Compared with prior art, the present invention has the following advantages:
1, the present invention is by placing the measuring resistance of stable performance at encapsulation base, each end of measuring resistance is connected on two pins of encapsulation base, form the four-end method specimen, this sample can be reused, it is low that preservation condition requires, thus solved lack in the existing measuring technique can long preservation, the problem of the specimen that is used for checking package level tester table of repeated use and stable performance; And the measuring resistance of a series of different Standard resistance ranges can be set simultaneously on the encapsulation base of described sample, in order to verify the power of test of package level tester table under different ranges, thereby can disposable power of test and the repeatability of package level tester table under different resistance be verified, can also do the contrast of measuring value between the different platform.
2, standard testing sample of the present invention can be reused, long preservation, compares with the package level wafer sample, has reduced the cost of checking package level tester table.
Description of drawings
The synoptic diagram of the standard testing sample that Fig. 1 provides for one embodiment of the invention.
The trend map of standard testing sample repeatability parameter under duplicate measurements that Fig. 2 provides for one embodiment of the invention.
Embodiment
Below in conjunction with the drawings and specific embodiments the standard testing sample that the present invention proposes is described in further details.According to the following describes and claims, advantages and features of the invention will be clearer, it should be noted that, accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only be used for convenient, the purpose of the aid illustration embodiment of the invention lucidly.
Core concept of the present invention is, a kind of four-end method standard testing sample is provided, comprise encapsulation base and measuring resistance, the repeatability, the repeatability ability that are used for checking package level tester table, the contrast of board differences and the board power of test under different ranges, the accuracy of assurance package level tester table measurement result.
Please refer to Fig. 1, the synoptic diagram of the standard testing sample that it provides for one embodiment of the invention, as shown in Figure 1, the standard testing sample comprises:
Measuring resistance 101, be positioned on the described encapsulation base 100, one end of described measuring resistance 101 is connected on two pins 102 and 103 of described encapsulation base, and the other end is connected on other two pins 104 and 105 of described encapsulation base, forms the four-end method specimen.
In the present embodiment, encapsulation base 100 is provided with a plurality of measuring resistances 101, and the resistance of measuring resistance 101 has nothing in common with each other, need determine that Standard resistance range is 1 Ω～10000 Ω, for example 10 Ω according to the range of the actual package level tester table that will verify, 100 Ω, 1000 Ω, 10000 Ω.Different resistances is used for the power of test of checking package level tester table under different ranges, thereby can disposable power of test and the repeatability of package level tester table under different resistance be verified, can also contrast the measuring value between the different platform simultaneously.
The standard testing sample that present embodiment provides is used for checking package level tester table, can reuse, and lower to the requirement of sample preservation condition, after reusing 30 times, repeatability result meets standard-required, and less than 0.5%, test result as shown in Figure 2.
Adopt standard testing sample of the present invention, in time verify repeatability, repeatability ability, the contrast board differences of package level tester table and estimate the power of test of board under different ranges, can determine whether there are differences between board, obtain the reperformance test ability of board simultaneously.If the undesirable situation of test result takes place, can guarantee the power of test of equipment itself, prepare sample when having avoided the generation problem more temporarily and assess repeatedly and search reason, save time and manpower; And because can use repeatedly, saved testing cost.
In sum, the present invention is by placing the measuring resistance of stable performance at encapsulation base, each end of measuring resistance is connected on two pins of encapsulation base, form the four-end method specimen, this sample can be reused, it is low that preservation condition requires, thus solved lack in the existing measuring technique can long preservation, the problem of the specimen that is used for checking package level tester table of repeated use and stable performance; And the measuring resistance of a series of different Standard resistance ranges can be set simultaneously on the encapsulation base of described sample, in order to verify the power of test of package level tester table under different ranges, thereby can disposable power of test and the repeatability of package level tester table under different resistance be verified, can also do the contrast of measuring value between the different platform; Standard testing sample of the present invention can be reused, long preservation, compares with the package level wafer sample, has reduced the cost of checking package level tester table.
Foregoing description only is the description to preferred embodiment of the present invention, is not any restriction to the scope of the invention, and any change, modification that the those of ordinary skill in field of the present invention is done according to above-mentioned disclosure all belong to the protection domain of claims.
Claims (6)
1. a standard testing sample is characterized in that, comprising:
Encapsulation base includes at least four pins;
Measuring resistance is positioned on the described encapsulation base, and an end of described measuring resistance is connected on two pins of described encapsulation base, and the other end is connected on other two pins of described encapsulation base, forms the four-end method specimen.
2. standard testing sample as claimed in claim 1 is characterized in that, the quantity of described measuring resistance is a plurality of.
3. standard testing sample as claimed in claim 2 is characterized in that, the resistance of a plurality of measuring resistances has nothing in common with each other.
4. standard testing sample as claimed in claim 3 is characterized in that, the Standard resistance range of described measuring resistance is 1 Ω～10000 Ω.
5. standard testing sample as claimed in claim 1 is characterized in that, the material of described encapsulation base is pottery.
6. standard testing sample as claimed in claim 1 is characterized in that, the two ends of described measuring resistance are welded in respectively on two pins of described encapsulation base.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013102863773A CN103344932A (en) | 2013-07-09 | 2013-07-09 | Standard testing sample |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013102863773A CN103344932A (en) | 2013-07-09 | 2013-07-09 | Standard testing sample |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103887150A (en) * | 2014-03-20 | 2014-06-25 | 上海华力微电子有限公司 | Method for preparing test sample |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201368912Y (en) * | 2009-03-20 | 2009-12-23 | 湖北省电力试验研究院 | Standard resistor for tracing the value of large-current micro-ohm resistor |
| JP2011179818A (en) * | 2010-02-26 | 2011-09-15 | National Institute Of Advanced Industrial Science & Technology | Resistive voltage divider device for calibrating resistance ratio meter and calibration method using the device |
| CN202975312U (en) * | 2012-12-25 | 2013-06-05 | 北京无线电计量测试研究所 | Metering-used four-terminal-pair high-frequency standard resistor |
-
2013
- 2013-07-09 CN CN2013102863773A patent/CN103344932A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201368912Y (en) * | 2009-03-20 | 2009-12-23 | 湖北省电力试验研究院 | Standard resistor for tracing the value of large-current micro-ohm resistor |
| JP2011179818A (en) * | 2010-02-26 | 2011-09-15 | National Institute Of Advanced Industrial Science & Technology | Resistive voltage divider device for calibrating resistance ratio meter and calibration method using the device |
| CN202975312U (en) * | 2012-12-25 | 2013-06-05 | 北京无线电计量测试研究所 | Metering-used four-terminal-pair high-frequency standard resistor |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103887150A (en) * | 2014-03-20 | 2014-06-25 | 上海华力微电子有限公司 | Method for preparing test sample |
| CN103887150B (en) * | 2014-03-20 | 2016-06-08 | 上海华力微电子有限公司 | A kind of preparation method testing sample |
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Application publication date: 20131009 |