CN103344315A - High-speed optical fiber balance interference vibration measurement system - Google Patents

High-speed optical fiber balance interference vibration measurement system Download PDF

Info

Publication number
CN103344315A
CN103344315A CN2013102517291A CN201310251729A CN103344315A CN 103344315 A CN103344315 A CN 103344315A CN 2013102517291 A CN2013102517291 A CN 2013102517291A CN 201310251729 A CN201310251729 A CN 201310251729A CN 103344315 A CN103344315 A CN 103344315A
Authority
CN
China
Prior art keywords
optical fiber
balance
fiber
measurement
module
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN2013102517291A
Other languages
Chinese (zh)
Other versions
CN103344315B (en
Inventor
朱振宇
李新良
梁志国
李华丰
李强
张力
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Changcheng Institute of Metrology and Measurement AVIC
Original Assignee
Beijing Changcheng Institute of Metrology and Measurement AVIC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing Changcheng Institute of Metrology and Measurement AVIC filed Critical Beijing Changcheng Institute of Metrology and Measurement AVIC
Priority to CN201310251729.1A priority Critical patent/CN103344315B/en
Publication of CN103344315A publication Critical patent/CN103344315A/en
Application granted granted Critical
Publication of CN103344315B publication Critical patent/CN103344315B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Abstract

The invention relates to a high-speed optical fiber balance interference vibration measurement system, and belongs to the technical field of precise measurement of high-speed impacts and vibration solid waves. The vibration measurement system comprises a balance optical fiber coupling unit, an interference measurement unit, an optical fiber optical wave face precise alignment module, a control and information output unit, an interference signal demodulation unit and a physical grating. A measuring light source forms two signal beams through a balanced type optical separation component, two light beams are projected on a measuring and separating type grating through an optical fiber space position demodulation component, measuring light carries speed measuring signals and returns to an optical interference component to form speed interference measurement signals, and speed demodulation and output is completed through an electronic demodulation system. A simple result is adopted, the measurement system is convenient to operate, low in cost and high in measurement and control precision, the balance interference method is adopted, and high-speed measurement and evaluation is achieved through the high-speed optical fiber balance interference vibration measurement system.

Description

A kind of optical fiber balance is interfered the high speed vibration measuring system
Technical field
The present invention relates to a kind of optical fiber balance and interfere the high speed vibration measuring system, the high speed field of measuring technique of solid ripple in belonging to high speed impact and vibrating.
Background technology
The high speed of solid ripple is measured and is had a very important role in the development of the national economy, the production of national defence weapon equipment preparation in high speed impact and the vibration, has the ubiquity demand at present in commercial production and test.Optical vibrometer is as present most important, the most widely used surveying instrument in vibration-testing field, has that adaptability is good, accuracy is high, dynamic response is fast and distinguishes advantage such as velocity reversal.
Yet optical vibrometer is in use because the restriction of speed, particularly the high speed of solid ripple can't satisfy the requirement that present speed promotes in measuring in high speed impact and vibration, therefore at the solid wave measurement of measuring speed greater than 30m/s, the high speed optical vialog is significant in the technical research of velocity survey performance and environmental suitability.
Summary of the invention
The objective of the invention is in use to measure the problem that requires because the restriction of speed can't be satisfied in order to solve existing optical vibrometer, propose a kind of optical fiber balance and interfere the high speed vibration measuring system.This system has than high-adaptability and high speed measurement capability.
The objective of the invention is to be achieved through the following technical solutions.
A kind of optical fiber balance of the present invention is interfered the high speed vibration measuring system, is used for measuring the solid ripple of impact shock, comprises the balance fiber coupling module, the interferometry module, optical fiber light wave face fine registration module, control and message output module, the interference signal demodulation module, physical grating and measurand;
Wherein the optical fiber of balance fiber coupling module employing is that homology is isometric, is made up of fiber coupler and relevant auxiliary body, is used for measuring light wave and is coupled among the optical fiber, constitutes the balance optical interference circuit with this; The interferometry module comprises measurement light source, spectroscope, interference signal photoelectric commutator; The elaborate servo mechanism of the modular belt displacement modulation of optical fiber light wave face fine registration and angular setting; The interference signal demodulation module carries out the related electric demodulation with interference signal, obtains digital signal; Control and message output module function are for coordinating the servo control mechanism of optical fiber light wave face fine registration module, measuring system is adjusted to the measurement state, when measuring, trigger the coordinated intervention signal demodulating system synchronously and carry out digital synchronous and sample to obtain measurement result, and the output of measurement of correlation information can be provided.
Measuring light is passed through to form measurement and reference beam behind collimator and extender device and the spectroscope during systematic survey, enter optical fiber by fiber coupler respectively, go out to penetrate two-beam in optical fiber other end collimating apparatus, adjust to the corresponding Bragg diffraction level time incident of physical grating by the elaborate servo system of the displacement modulation of optical fiber light wave face and angular setting, and be intersected in one point union and form interference fringe, finally converge to photelectric receiver and obtain measurement result by the interference signal demodulating system.
The light source that above-mentioned balance fiber coupling module adopts can be any light wave of interfering of can being used for, and the size on its corrugated is decided by to measure with the grid of physical grating and takes measurement of an angle;
The optical fiber that above-mentioned balance fiber coupling module adopts can be multimode, single mode or single-mode polarization maintaining fiber, and guarantees that its function can be guaranteed to measure, reference light wave passes through;
The physical grating that adopts when above-mentioned balance fiber coupling module is measured is reflective gratings, and it adopts the base material stiffness to get well, and requires density little.
The elaborate servo mechanism of above-mentioned balance fiber coupling module light wave face fine registration system's band displacement modulation and angular setting is flexible structure or the motion form of machinery, this adjusting mechanism is the flexible hinge form when adopting flexible structure, and this adjusting mechanism then adopts the form of the rotational structure of single-point support when adopting motion; This topworks can adjust incident angle attitude and the locus of optical fiber outgoing light wave, and the drive part of adjusting topworks is piezoelectric device or displacement generator.
The optical fiber balance is interfered the high speed vibration measuring system, comprising: measurement light source, collimator and extender device, spectroscope, first fiber coupler, second fiber coupler, first optical fiber, second optical fiber, first optical fiber collimator, second optical fiber collimator, physical grating, measuring object, plus lens, photelectric receiver;
The measurement light source emergent light passes through to form measuring light and reference beam behind collimator and extender device and the spectroscope; Physical grating adheres on the measuring object; Measuring light and reference light enter first optical fiber, second optical fiber by first fiber coupler, second fiber coupler respectively; Go out to penetrate two-beam at the optical fiber other end first optical fiber collimator, second optical fiber collimator, adjust to the corresponding Bragg diffraction level time incident of physical grating by the elaborate servo system of the displacement modulation of optical fiber light wave face and angular setting, and be intersected in one point union and form interference fringe, finally converge to photelectric receiver by plus lens, utilize the interference signal demodulation module to obtain measurement result.
Beneficial effect
Optical fiber balance of the present invention is interfered the simple in structure of high speed vibration measuring system employing, easy operating is realized measurement function, environmental suitability and measuring accuracy are preferably arranged, the angle that the structure that adopts the optical fiber balanced type to interfere can conveniently be adjusted incident light wave when measuring is easy to put, solve the environmental suitability that impacts under the complex environment with the solid wave measurement that vibrates, improved the inaccurate of current solid wave velocity measurement result.
Description of drawings
Fig. 1 is structural representation of the present invention;
Fig. 2 interferes the fundamental diagram of high speed vibration measuring system for optical fiber balance among the present invention;
Wherein, 1 is the balance fiber coupling module, and 2 are the interferometry module, and 3 is optical fiber light wave face fine registration module, and 4 are control and message output module, and 5 is the interference signal demodulation module, and 6 is physical grating and measurand; 7 is measurement light source, 8 are the collimation beam expander, 9 is spectroscope, 10 is that first fiber coupler, 11 is second fiber coupler, and 12 is that first optical fiber, 13 is second optical fiber, and 14 is that first optical fiber collimator, 15 is second optical fiber collimator, 16 is physical grating, 17 is measuring object, and 18 is plus lens, and 19 is photelectric receiver;
Embodiment
The present invention will be further described below in conjunction with drawings and Examples.
Embodiment 1
The optical fiber balance is interfered the high speed vibration measuring system, as shown in Figure 1, the high speed of solid ripple is measured in being mainly used in high speed impact and vibrating, vibration measuring system is by balance fiber coupling module (1), interferometry module (2), optical fiber light wave face fine registration module (3), control and message output module (4), interference signal demodulation module (5), physical grating and measurand (6);
Wherein the optical fiber of balance fiber coupling module employing is that homology is isometric, and corresponding coupled system is fiber coupler and relevant auxiliary body, is used for measuring light wave and is coupled among the optical fiber, constitutes the balance optical interference circuit with this; The interferometer measurement main body comprises measurement light source, spectroscope, interference signal photoelectric commutator; The elaborate servo mechanism of the system's band displacement modulation of optical fiber light wave face fine registration and angular setting; The interference signal demodulation module carries out the related electric demodulation with interference signal, obtains digital signal; The control system function is adjusted to the measurement state for coordinating the servo control mechanism of optical fiber light wave face fine registration system with system, triggers the coordinated intervention signal demodulating system synchronously and carry out digital synchronous and sample to obtain measurement result when measuring.
Above-mentioned balance fiber coupling module adopt wavelength be the 633nm helium-neon laser as interfering light source, the bore of its collimator and extender is 2mm, 150 gridlines in physical grating is selected every millimeter for use;
Above-mentioned balance fiber coupling module adopts wave band to be used for measuring for the 633nm single-mode fiber;
The alumina based material that physical grating employing 20mm is long, 10mm is wide that adopts when above-mentioned balance fiber coupling module is measured adopts resin glue and measuring object to carry out bonding as the base during measurement.
The elaborate servo mechanism of above-mentioned balance fiber coupling module light wave face fine registration system's band displacement modulation and angular setting is the compliant motion mechanism form, it consists of the three-dimension flexible hinge, can adjust incident angle attitude and the locus of optical fiber outgoing light wave, the drive part of adjusting topworks is piezoelectric device.
As shown in Figure 2, measurement light source 7 emergent lights formed measuring light and reference beam by collimator and extender device 8 and spectroscope 9 backs when the balance fiber coupling module was measured; Physical grating 16 adheres on the measuring object 17; Measuring light and reference light enter first optical fiber 12, second optical fiber 13 by first fiber coupler 10, second fiber coupler 11 respectively; Go out to penetrate two-beam at the optical fiber other end first optical fiber collimator 14, second optical fiber collimator 15, adjust to the corresponding Bragg diffraction level time incident of physical grating 16 by the elaborate servo system of the displacement modulation of optical fiber light wave face and angular setting, and be intersected in one point union and form interference fringe, finally converge to photelectric receiver 19 by plus lens 18, utilize the interference signal demodulation module to obtain measurement result.
The above is preferred embodiment of the present invention, and the present invention should not be confined to the disclosed content of this embodiment and accompanying drawing.Everyly do not break away from the equivalence of finishing under the spirit disclosed in this invention or revise, all fall into the scope of protection of the invention.

Claims (4)

1. an optical fiber balance is interfered the high speed vibration measuring system, be used for measuring the solid ripple of impact shock, it is characterized in that: comprise balance fiber coupling module (1), interferometry module (2), optical fiber light wave face fine registration module (3), control and message output module (4), interference signal demodulation module (5), physical grating and measurand (6); Measuring light is passed through to form measurement and reference beam behind collimator and extender device and the spectroscope during systematic survey, enter optical fiber by fiber coupler respectively, go out to penetrate two-beam in optical fiber other end collimating apparatus, adjust to the corresponding Bragg diffraction level time incident of physical grating by the elaborate servo system of the displacement modulation of optical fiber light wave face and angular setting, and be intersected in one point union and form interference fringe, finally converge to photelectric receiver and obtain measurement result by the interference signal demodulating system.
2. a kind of optical fiber balance as claimed in claim 1 is interfered the high speed vibration measuring system, it is characterized in that: the optical fiber that balance fiber coupling module (1) adopts is that homology is isometric, formed by fiber coupler and relevant auxiliary body, be used for to measure light wave and be coupled among the optical fiber, constitute the balance optical interference circuit with this; Interferometry module (2) comprises measurement light source, spectroscope, interference signal photoelectric commutator; The elaborate servo mechanism of optical fiber light wave face fine registration module (3) band displacement modulation and angular setting; Interference signal demodulation module (5) carries out the related electric demodulation with interference signal, obtains digital signal; Control and message output module (4) function are for coordinating the servo control mechanism of optical fiber light wave face fine registration module, measuring system is adjusted to the measurement state, when measuring, trigger the coordinated intervention signal demodulating system synchronously and carry out digital synchronous and sample to obtain measurement result, and the output of measurement of correlation information can be provided.
3. a kind of optical fiber balance as claimed in claim 1 or 2 is interfered the high speed vibration measuring system, it is characterized in that: the light source that described balance fiber coupling module (1) adopts can be any light wave of interfering of can being used for, and the size on its corrugated is decided by to measure with the grid of physical grating and takes measurement of an angle; The optical fiber that described balance fiber coupling module (1) adopts can be multimode, single mode or single-mode polarization maintaining fiber, and guarantees that its function can be guaranteed to measure, reference light wave passes through; The physical grating that adopts when described balance fiber coupling module (1) is measured is reflective gratings; The elaborate servo mechanism of the fine registration system's band displacement modulation of described balance fiber coupling module (1) light wave face and angular setting is flexible structure or the motion form of machinery, this adjusting mechanism is the flexible hinge form when adopting flexible structure, and this adjusting mechanism then adopts the form of the rotational structure of single-point support when adopting motion; This topworks can adjust incident angle attitude and the locus of optical fiber outgoing light wave, and the drive part of adjusting topworks is piezoelectric device or displacement generator.
4. a kind of optical fiber balance as claimed in claim 1 is interfered the high speed vibration measuring system, it is characterized in that: comprising: measurement light source (7), collimator and extender device (8), spectroscope (9), first fiber coupler (10), second fiber coupler (11), first optical fiber (12), second optical fiber (13), first optical fiber collimator (14), second optical fiber collimator (15), physical grating (16), measuring object (17), plus lens (18), photelectric receiver (19); Measurement light source (7) emergent light forms measuring light and reference beam by collimator and extender device (8) and spectroscope (9) back; Physical grating (16) adheres on the measuring object (17); Measuring light and reference light enter first optical fiber (12), second optical fiber (13) by first fiber coupler (10), second fiber coupler (11) respectively; Go out to penetrate two-beam at the optical fiber other end first optical fiber collimator (14), second optical fiber collimator (15), adjust to the corresponding Bragg diffraction level time incident of physical grating (16) by the elaborate servo system of the displacement modulation of optical fiber light wave face and angular setting, and be intersected in one point union and form interference fringe, finally converge to photelectric receiver (19) by plus lens (18), utilize the interference signal demodulation module to obtain measurement result.
CN201310251729.1A 2013-06-24 2013-06-24 High-speed optical fiber balance interference vibration measurement system Active CN103344315B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201310251729.1A CN103344315B (en) 2013-06-24 2013-06-24 High-speed optical fiber balance interference vibration measurement system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201310251729.1A CN103344315B (en) 2013-06-24 2013-06-24 High-speed optical fiber balance interference vibration measurement system

Publications (2)

Publication Number Publication Date
CN103344315A true CN103344315A (en) 2013-10-09
CN103344315B CN103344315B (en) 2015-07-22

Family

ID=49279131

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201310251729.1A Active CN103344315B (en) 2013-06-24 2013-06-24 High-speed optical fiber balance interference vibration measurement system

Country Status (1)

Country Link
CN (1) CN103344315B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109520609A (en) * 2018-12-14 2019-03-26 天津大学 A kind of measuring device of high speed rotor vibrational state
CN111579817A (en) * 2020-06-03 2020-08-25 武汉理工大学 Fiber bragg grating two-dimensional acceleration sensor based on multiple hinges and manufacturing process thereof

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005315806A (en) * 2004-04-30 2005-11-10 Electric Power Dev Co Ltd Vibration measuring device
US20060152735A1 (en) * 2001-06-27 2006-07-13 Toudai Tlo, Ltd. Vibration measurement device and vibration measurement method
CN101750143A (en) * 2010-01-15 2010-06-23 中国科学院上海光学精密机械研究所 Integrated optical interference three-dimensional vibration monitor
CN101750142A (en) * 2008-12-12 2010-06-23 财团法人金属工业研究发展中心 Optical measuring method of vibration and optical measuring system
CN102042866A (en) * 2009-10-19 2011-05-04 综合工艺有限公司 Device and method for interferometric vibration measurement on an object

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060152735A1 (en) * 2001-06-27 2006-07-13 Toudai Tlo, Ltd. Vibration measurement device and vibration measurement method
JP2005315806A (en) * 2004-04-30 2005-11-10 Electric Power Dev Co Ltd Vibration measuring device
CN101750142A (en) * 2008-12-12 2010-06-23 财团法人金属工业研究发展中心 Optical measuring method of vibration and optical measuring system
CN102042866A (en) * 2009-10-19 2011-05-04 综合工艺有限公司 Device and method for interferometric vibration measurement on an object
CN101750143A (en) * 2010-01-15 2010-06-23 中国科学院上海光学精密机械研究所 Integrated optical interference three-dimensional vibration monitor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109520609A (en) * 2018-12-14 2019-03-26 天津大学 A kind of measuring device of high speed rotor vibrational state
CN111579817A (en) * 2020-06-03 2020-08-25 武汉理工大学 Fiber bragg grating two-dimensional acceleration sensor based on multiple hinges and manufacturing process thereof

Also Published As

Publication number Publication date
CN103344315B (en) 2015-07-22

Similar Documents

Publication Publication Date Title
JP4722474B2 (en) Displacement detector
CN102944176B (en) Displacement measuring system of heterodyne grating interferometer
CN102937411B (en) Double-frequency grating interferometer displacement measurement system
CN102564317B (en) High-accuracy remote absolute displacement measurement system based on optical fiber composite interference
CN103308150B (en) A kind of whole audience vibration measurement with laser system
US11802757B2 (en) Heterodyne grating interferometric method and system for two-degree-of-freedom with high alignment tolerance
CN101629810B (en) Optical doubling frequency laser interference measurement system and optical doubling frequency laser interference measurement method for displacement of special geometric point
CN103134431B (en) Vertical vibration displacement sensor based on Michalson fiber-optical interferometer
CN115540757A (en) Distance measuring system for improving measurement precision
CN109883362B (en) Straightness measurement system based on grating interference principle
CN108775878B (en) Grating heterodyne interference system and roll angle measuring method thereof
CN101290215B (en) Micro-displacement sensor based on PGC demodulated interferential scanning
CN102003935A (en) Environment compensation method for measurement employing laser tracker
JP2011220890A (en) Heterodyne interferometric displacement measurement apparatus
CN103344315B (en) High-speed optical fiber balance interference vibration measurement system
CN103292891B (en) Optical fiber type synchronous tunable vibration measurement system
CN101738167A (en) Resonant cavity frequency stabilization-based absolute distance measurement system and implementing method thereof
CN102095434A (en) Reflection type full optical fiber interference system
CN105698710A (en) A dynamic angle measurement apparatus and application thereof
CN1034530C (en) Laser heterodyne common-circuit interference method and its optic system
CN103234452A (en) Solid laser feedback interferometer
RU2544885C1 (en) Micro-opto-electromechanical sensor of angular speed
CN116007503A (en) Interference displacement measuring device based on polarization beam splitting grating
WO2018199786A1 (en) Measurement method of vibrations, especially of seismic type, and a device for the measurement of vibrations, especially of seismic type
CN111562009B (en) Common-path angle mirror interferometer and interference method

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant