CN103344315B - High-speed optical fiber balance interference vibration measurement system - Google Patents

High-speed optical fiber balance interference vibration measurement system Download PDF

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CN103344315B
CN103344315B CN201310251729.1A CN201310251729A CN103344315B CN 103344315 B CN103344315 B CN 103344315B CN 201310251729 A CN201310251729 A CN 201310251729A CN 103344315 B CN103344315 B CN 103344315B
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optical fiber
fiber
measurement
balance
interference
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CN103344315A (en
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朱振宇
李新良
梁志国
李华丰
李强
张力
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Beijing Changcheng Institute of Metrology and Measurement AVIC
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Beijing Changcheng Institute of Metrology and Measurement AVIC
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Abstract

The invention relates to a high-speed optical fiber balance interference vibration measurement system, and belongs to the technical field of precise measurement of high-speed impacts and vibration solid waves. The vibration measurement system comprises a balance optical fiber coupling unit, an interference measurement unit, an optical fiber optical wave face precise alignment module, a control and information output unit, an interference signal demodulation unit and a physical grating. A measuring light source forms two signal beams through a balanced type optical separation component, two light beams are projected on a measuring and separating type grating through an optical fiber space position demodulation component, measuring light carries speed measuring signals and returns to an optical interference component to form speed interference measurement signals, and speed demodulation and output is completed through an electronic demodulation system. A simple result is adopted, the measurement system is convenient to operate, low in cost and high in measurement and control precision, the balance interference method is adopted, and high-speed measurement and evaluation is achieved through the high-speed optical fiber balance interference vibration measurement system.

Description

A kind of optical fiber balance interference high speed vibration measuring system
Technical field
The present invention relates to a kind of optical fiber balance interference high speed vibration measuring system, the high speed field of measuring technique of solid ripple in belonging to high speed impact and vibrating.
Background technology
High speed impact is measured with the high speed of solid ripple in vibration and is had a very important role in producing at the development of the national economy, national defence weapon equipment preparation, has ubiquity demand at present in commercial production and test.Optical vibrometer, as most important, the most widely used surveying instrument in current vibration-testing field, has that adaptability is good, accuracy is high, dynamic response is fast and distinguish the advantages such as velocity reversal.
But optical vibrometer is in use due to the restriction of speed, particularly in high speed impact with vibration, the high speed of solid ripple cannot meet the requirement that current speed promotes in measuring, therefore be greater than the solid wave measurement of 30m/s for measuring speed, high speed optical vialog is significant in the technical research of velocity survey performance and environmental suitability.
Summary of the invention
The object of the invention is, in order to solve existing optical vibrometer in use because the restriction of speed cannot meet the problem measured and require, to propose a kind of optical fiber balance interference high speed vibration measuring system.This system has comparatively high-adaptability and high speed measurement capability.
The object of the invention is to be achieved through the following technical solutions.
A kind of optical fiber balance interference high speed vibration measuring system of the present invention, for measuring the solid ripple of impact shock, comprises balance fiber coupling module, interferometry module, optical fiber corrugated fine registration module, controls and message output module, interference signal demodulation module, physical grating and measurand;
The optical fiber wherein balancing fiber coupling module employing is that homology is isometric, being made up of, for being coupled among optical fiber by measurement light wave, being formed balance interference light path with this fiber coupler and relevant auxiliary body; Interferometry module comprises measurement light source, spectroscope, interference signal photoelectric commutator; The elaborate servo mechanism of optical fiber corrugated fine registration modular belt displacive modulation and angular setting; Interference signal is carried out related electric demodulation by interference signal demodulation module, obtains digital signal; Control and message output module function are coordinate the servo control mechanism of optical fiber corrugated fine registration module, measuring system is adjusted to measuring state, synchronously trigger coordinated intervention signal demodulating system when measuring and carry out digital synchronous sampling to obtain measurement result, and correlation measurement information can be provided to export.
Measure light during systematic survey to measure and reference beam by being formed after collimator and extender device and spectroscope, optical fiber is entered respectively by fiber coupler, go out to penetrate two-beam in optical fiber other end collimating apparatus, the corresponding Bragg diffraction level being adjusted to physical grating by the Servo System Based of optical fiber corrugated displacive modulation and angular setting is time incident, and be intersected in one point union formation interference fringe, finally converge to photelectric receiver and obtain measurement result by interference signal demodulating system.
The light source that above-mentioned balance fiber coupling module adopts can be the light wave that any one may be used for interfering, and the size on its corrugated is decided by the grid of measurement physical grating and takes measurement of an angle;
The optical fiber that above-mentioned balance fiber coupling module adopts can be multimode, single mode or single-mode polarization maintaining fiber, and ensures that its function can guarantee measurement, reference light wave passes through;
The physical grating adopted when above-mentioned balance fiber coupling module is measured is reflective gratings, and it adopts base material stiffness to get well, and requires that density is little.
The elaborate servo mechanism of above-mentioned balance fiber coupling module light wave face Precision alignment systems band displacive modulation and angular setting is flexible structure or the motion form of machinery, during employing flexible structure, this adjusting mechanism is flexible hinge form, and during employing motion, this adjusting mechanism then adopts the form of the rotational structure of single-point support; This topworks can adjust incident angle attitude and the locus of fiber exit light wave, and the drive part of adjustment topworks is piezoelectric device or displacement generator.
Optical fiber balance interference high speed vibration measuring system, comprising: measurement light source, collimator and extender device, spectroscope, first fiber coupler, the second fiber coupler, the first optical fiber, the second optical fiber, the first optical fiber collimator, the second optical fiber collimator, physical grating, measuring object, plus lens, photelectric receiver;
Measurement light source emergent light measures light and reference beam by being formed after collimator and extender device and spectroscope; Physical grating adheres on measuring object; Measurement light and reference light enter the first optical fiber, the second optical fiber respectively by the first fiber coupler, the second fiber coupler; Go out to penetrate two-beam at the optical fiber other end first optical fiber collimator, the second optical fiber collimator, the corresponding Bragg diffraction level being adjusted to physical grating by the Servo System Based of optical fiber corrugated displacive modulation and angular setting is time incident, and be intersected in one point union formation interference fringe, finally converge to photelectric receiver by plus lens, utilize interference signal demodulation module to obtain measurement result.
Beneficial effect
The structure that optical fiber balance interference high speed vibration measuring system of the present invention adopts is simple, be easy to operation and realize measurement function, there are good environmental suitability and measuring accuracy, when the structure adopting optical fiber balance formula to interfere conveniently can adjust measurement, the angle of incident light wave is easy to put, solve the environmental suitability of the solid wave measurement of shock and vibration under complex environment, improve the inaccurate of current solid wave velocity measurement result.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Fig. 2 is the fundamental diagram of optical fiber balance interference high speed vibration measuring system in the present invention;
Wherein, 1 is balance fiber coupling module, and 2 is interferometry module, and 3 is optical fiber corrugated fine registration module, and 4 for controlling and message output module, and 5 is interference signal demodulation module, and 6 is physical grating and measurand; 7 is measurement light source, 8 is collimator and extender device, 9 is spectroscope, 10 be the first fiber coupler, 11 is the second fiber coupler, and 12 be the first optical fiber, 13 is the second optical fiber, and 14 be the first optical fiber collimator, 15 is the second optical fiber collimator, 16 is physical grating, 17 is measuring object, and 18 is plus lens, and 19 is photelectric receiver;
Embodiment
Below in conjunction with drawings and Examples, the present invention will be further described.
Embodiment 1
Optical fiber balance interference high speed vibration measuring system, as shown in Figure 1, be mainly used in high speed impact to measure with the high speed of solid ripple in vibration, vibration measuring system is by balancing fiber coupling module (1), interferometry module (2), optical fiber corrugated fine registration module (3), controls and message output module (4), interference signal demodulation module (5), physical grating and measurand (6);
The optical fiber wherein balancing fiber coupling module employing is that homology is isometric, and corresponding coupled system is fiber coupler and relevant auxiliary body, for being coupled among optical fiber by measurement light wave, is formed balance interference light path with this; Interferometer measurement main body comprises measurement light source, spectroscope, interference signal photoelectric commutator; The elaborate servo mechanism of optical fiber corrugated Precision alignment systems band displacive modulation and angular setting; Interference signal is carried out related electric demodulation by interference signal demodulation module, obtains digital signal; Control system function is coordinate the servo control mechanism of optical fiber corrugated Precision alignment systems, by system call interception to measuring state, synchronously triggers coordinated intervention signal demodulating system carry out digital synchronous sampling to obtain measurement result when measuring.
Above-mentioned balance fiber coupling module adopt wavelength be 633nm helium-neon laser as interference light source, the bore of its collimator and extender is 2mm, physical grating select every millimeter in 150 gridlines;
Above-mentioned balance fiber coupling module adopts wave band to be that 633nm single-mode fiber is for measuring;
The alumina based material that physical grating employing 20mm is long, 10mm is wide adopted when above-mentioned balance fiber coupling module is measured, as base, adopts resin glue and measuring object to bond during measurement.
The elaborate servo mechanism of above-mentioned balance fiber coupling module light wave face Precision alignment systems band displacive modulation and angular setting is compliant motion mechanism form, it consists of three-dimension flexible hinge, can adjust incident angle attitude and the locus of fiber exit light wave, the drive part of adjustment topworks is piezoelectric device.
When balance fiber coupling module is measured as shown in Figure 2, measurement light source 7 emergent light measures light and reference beam by being formed after collimator and extender device 8 and spectroscope 9; Physical grating 16 adheres on measuring object 17; Measurement light and reference light enter the first optical fiber 12, second optical fiber 13 respectively by the first fiber coupler 10, second fiber coupler 11; Go out to penetrate two-beam at the optical fiber other end first optical fiber collimator 14, second optical fiber collimator 15, the corresponding Bragg diffraction level being adjusted to physical grating 16 by the Servo System Based of optical fiber corrugated displacive modulation and angular setting is time incident, and be intersected in one point union formation interference fringe, finally converge to photelectric receiver 19 by plus lens 18, utilize interference signal demodulation module to obtain measurement result.
The above is preferred embodiment of the present invention, and the present invention should not be confined to the content disclosed in this embodiment and accompanying drawing.Every do not depart from spirit disclosed in this invention under the equivalence that completes or amendment, all fall into the scope of protection of the invention.

Claims (2)

1. an optical fiber balance interference high speed vibration measuring system, for measuring the solid ripple of impact shock, it is characterized in that: comprise balance fiber coupling module (1), interferometry module (2), optical fiber corrugated fine registration module (3), control and message output module (4), interference signal demodulation module (5), physical grating and measurand (6); Measure light during systematic survey to measure and reference beam by being formed after collimator and extender device and spectroscope, optical fiber is entered respectively by fiber coupler, go out to penetrate two-beam in optical fiber other end collimating apparatus, the corresponding Bragg diffraction level being adjusted to physical grating by the Servo System Based of optical fiber corrugated displacive modulation and angular setting is time incident, and be intersected in one point union formation interference fringe, finally converge to photelectric receiver and obtain measurement result by interference signal demodulating system;
The light source that described balance fiber coupling module (1) adopts is the light wave of any one for interfering, and the size on its corrugated is decided by the grid of measurement physical grating and takes measurement of an angle; The optical fiber that balance fiber coupling module (1) adopts is multimode, single mode or single-mode polarization maintaining fiber, and ensures that its function can guarantee measurement, reference light wave passes through; The physical grating adopted when balance fiber coupling module (1) is measured is reflective gratings; The optical fiber corrugated fine registration modular belt displacive modulation of balance fiber coupling module (1) and the elaborate servo mechanism of angular setting are flexible structure or the motion form of machinery, during employing flexible structure, adjusting mechanism is flexible hinge form, during employing motion, adjusting mechanism then adopts the form of the rotational structure of single-point support, topworks can adjust incident angle attitude and the locus of fiber exit light wave, and the drive part of adjustment topworks is piezoelectric device or displacement generator;
The optical fiber that balance fiber coupling module (1) adopts is that homology is isometric, comprising fiber coupler, for being coupled among optical fiber by measurement light wave, and being formed balance interference light path with this; Interferometry module (2) comprises measurement light source, spectroscope, interference signal photoelectric commutator; The elaborate servo mechanism of optical fiber corrugated fine registration module (3) band displacive modulation and angular setting; Interference signal is carried out related electric demodulation by interference signal demodulation module (5), obtains digital signal; Control and message output module (4) function are coordinate the servo control mechanism of optical fiber corrugated fine registration module, measuring system is adjusted to measuring state, synchronously trigger coordinated intervention signal demodulating system when measuring and carry out digital synchronous sampling to obtain measurement result, and correlation measurement information can be provided to export.
2. a kind of optical fiber balance interference high speed vibration measuring system as claimed in claim 1, it is characterized in that: comprising: measurement light source (7), collimator and extender device (8), spectroscope (9), first fiber coupler (10), the second fiber coupler (11), first optical fiber (12), the second optical fiber (13), first optical fiber collimator (14), the second optical fiber collimator (15), physical grating (16), measuring object (17), plus lens (18), photelectric receiver (19); Measurement light source (7) emergent light is formed afterwards by collimator and extender device (8) and spectroscope (9) and measures light and reference beam; Physical grating (16) adheres on measuring object (17); Measurement light and reference light enter the first optical fiber (12), the second optical fiber (13) respectively by the first fiber coupler (10), the second fiber coupler (11); Go out to penetrate two-beam at the optical fiber other end first optical fiber collimator (14), the second optical fiber collimator (15), the corresponding Bragg diffraction level being adjusted to physical grating (16) by the Servo System Based of optical fiber corrugated displacive modulation and angular setting is time incident, and be intersected in one point union formation interference fringe, finally converge to photelectric receiver (19) by plus lens (18), utilize interference signal demodulation module to obtain measurement result.
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CN109520609A (en) * 2018-12-14 2019-03-26 天津大学 A kind of measuring device of high speed rotor vibrational state
CN111579817B (en) * 2020-06-03 2021-03-16 武汉理工大学 Fiber bragg grating two-dimensional acceleration sensor based on multiple hinges and manufacturing process thereof

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CN101750142A (en) * 2008-12-12 2010-06-23 财团法人金属工业研究发展中心 Optical measuring method of vibration and optical measuring system
CN101750143A (en) * 2010-01-15 2010-06-23 中国科学院上海光学精密机械研究所 Integrated optical interference three-dimensional vibration monitor
CN102042866A (en) * 2009-10-19 2011-05-04 综合工艺有限公司 Device and method for interferometric vibration measurement on an object

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CN1520511A (en) * 2001-06-27 2004-08-11 ��ʽ�����ȶ˿�ѧ������������ Device and method for vibration measurement
JP2005315806A (en) * 2004-04-30 2005-11-10 Electric Power Dev Co Ltd Vibration measuring device

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Publication number Priority date Publication date Assignee Title
CN101750142A (en) * 2008-12-12 2010-06-23 财团法人金属工业研究发展中心 Optical measuring method of vibration and optical measuring system
CN102042866A (en) * 2009-10-19 2011-05-04 综合工艺有限公司 Device and method for interferometric vibration measurement on an object
CN101750143A (en) * 2010-01-15 2010-06-23 中国科学院上海光学精密机械研究所 Integrated optical interference three-dimensional vibration monitor

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