CN103342987B - Special zirconium-aluminium composite ground micro-powder for optoelectronic industry and production method for same - Google Patents
Special zirconium-aluminium composite ground micro-powder for optoelectronic industry and production method for same Download PDFInfo
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Abstract
The invention discloses special zirconium-aluminium composite ground micro-powder for the optoelectronic industry and a production method for the same. The special zirconium-aluminium composite ground micro-powder for optoelectronic industry is produced from two main raw materials, namely, fused alumina and zirconium silicate, via ball-milling, water-washing, grading, compounding, surface coating, filtering, spray-drying and sieving, wherein the compounding ratios of the contents of the raw materials are as follows: the content of alumina particles is 30-50%, and the content of zirconium silicate particles is 70-50%. The product disclosed by the invention is reasonable in particle shape collocation, wide in particle size distribution, stable in median diameter, high in basic particle size ratio, without large particles and ultrafine particles, excellent in interparticle lubrication property, and especially suitable for grinding and polishing high-tech products in the optoelectronic industry.
Description
Technical field
The present invention relates to abrasive substance, i.e. the special zirconium aluminium of a kind of optical electron industry multiple grinding micro mist and preparation method thereof.
Background technology
Abrasive substance is an industrial circle application class novel material more widely, mainly contains aluminum oxide, silicon carbide, diamond etc., and according to national grinding materials and grinding tool association expert statistics, in recent years, along with the fast development of industrial circle, the demand of abrasive material constantly increases.1.4 hundred million dollars of U.S.'s market sales in 2012, rate of increase every year on average reaches 20%; The EU market sales volume of 2012 has reached 1.8 hundred million Euros, and rate of increase is also more than 15%; Asian market is take China, Japan, Korea S as main, and 2012 annual sales amounts are amounted to Renminbi and reached 1,500,000,000, and Renminbi is amounted in world market can reach 5,000,000,000.Along with the development of high-tech area, will constantly increase the demand of high performance abrasive substance, 2012 are only precise finiss Polishing Powder demand and can reach 1,000,000,000 Renminbi according to incompletely statistics, estimate to increase more than 10% for 2013, reach 1,100,000,000 yuan.
China is abrasive substance big producing country, a large amount of abrasive micro-powder of low and middle-grade times of annual outlet on the one hand, and on the other hand, the required high-performance abrasive micro-powder of chip needs import.According to customs statistics, approximately 6000 tons of left and right of China's Imported High-performance last year abrasive micro-powder, are worth 200,000,000 yuans.And exporting nearly 500,000,000 yuan of low and middle-grade abrasive materials, high-end product is several ten million Renminbi only.The product of domestic production manufacturer production is main mainly with low and middle-grade particulate state corundum materials greatly.
Along with the develop rapidly of optical electron industry, the continuous miniaturization of microscopic dimensions of computer chip etc., more and more higher to polishing accuracy requirement, on chip, extremely small difference in height all may make that IC wiring pattern deforms, distortion, cause insulation layer insulating power to reduce, so require it to there is smooth surface shape, therefore the quality of abrasive micropowder had higher requirement.So that the market requirement of high performance abrasive micropowder constantly increases, ratio shared in abrasive substance constantly expands, particularly in the grinding and polishing process of silicon chip middle and later periods, Surface Quality requires very high, must not there is a bit cut, this just requires micro mist size-grade distribution to want evenly, and particle shape is round and smooth, must not have corner angle sharp shaped material.These are all had higher requirement to the technical indicator of abrasive micropowder.Senior abrasive micropowder is mainly used in the grinding and polishing of optical electron material, as: the precise finiss of semiconductor material, piezoelectric crystal material, silicon single crystal, polysilicon, opticglass and polishing.Electronic material is very high to abrasive micropowder specification of quality in grinding and polishing, must not there is a bit cut, also to keep certain mill efficiency simultaneously, this just requires micro powder granule distribution to concentrate, evenly, particle shape is round and smooth, and oilness will be got well, thereby guarantees that the grinding polishing effect of optics or electronic component reaches good surface quality.
The import price of this type of senior abrasive micropowder product is 30,000 yuan/ton at present, expensive, market cannot be accepted, therefore, how to prepare that grinding speed is fast, to be thrown the new grinding polishing material that surface accuracy is high, production cost is lower be one of primary study content of current semi-conductor and microelectronic.
Zirconium aluminium multiple grinding micro mist is mainly used in grinding, the polishing of semi-conductor, silicon single crystal, polysilicon, piezoquartz, optics etc., have that polishing precision is high, strong adaptability, the advantages such as nonferromagnetic substance is stable, make in grinding and polishing process not easy damaged workpiece, surface without obvious cut.It is blank at home that its special compound technique makes this product always.
Summary of the invention
The object of the invention is to propose the special zirconium aluminium of a kind of optical electron industry multiple grinding micro mist and preparation method thereof.
The step of making method of the present invention is as follows:
one,to fused alumina, two kinds of main raw material(s)s of zirconium silicate, selected through carrying out respectively, guarantee that material crystal is good, white color, inclusion-free, in fused alumina raw material, the content of aluminum oxide is greater than 99%, particle diameter is less than 300 orders, the content of zirconium silicate raw material mesosilicic acid zirconium is greater than 98%, and particle diameter is less than 350 orders;
two,ball milling, sphering and washing: A: aluminum oxide ball milling: use stainless steel abrading-ball; Pellet weight ratio is 3:1, controls by PLC, and grinding-time speed curves is sinusoidal curve, and ball mill maximum speed is turn/per minute of 3-5, and a milling cycle is one hour;
Sphering, sphering tank be up and down all point bipyramid cylindrical shell, cylinder inboard wall is flexible, on elastic layer, be evenly distributed with many projections, many small rubber balls are housed in cylindrical shell, and the micro mist that ball milling is good is put into sphering tank again and is ground 0.5 hour, forms No. 1200 following abrasive micropowder disc-shaped structures of GB; Maximum possible subtract less granular corner angle and wedge angle, form more mellow and fuller regular structure, guarantee uniform particles, without abnormity, without large grain; After sphering, put into pickling tub and add chlorohydric acid pickling;
B: zirconium silicate ball milling: adopt zirconium oxide abrasive ball, pellet weight ratio is 3:1, controls by PLC, milling time speed curves is sinusoidal curve, ball mill maximum speed is turn/per minute of 3-5, and a milling cycle is one hour, forms No. 1200 following abrasive micropowder disc-shaped structures of GB; Maximum possible subtract less granular corner angle and wedge angle, form more mellow and fuller regular structure, guarantee uniform particles, without abnormity, without large grain; After having ground, put into pickling tub and add sulfuric acid washing;
three, overflow size separation, in Grading Overflow tank, carry out, take following two measures simultaneously:
Measure one, adopts electronic voltage-stabilizing overflow grading device to carry out respectively classification to aluminum oxide, two kinds of materials of zirconium silicate, guarantees narrow particle size distribution; Guarantee in product without macrobead; In size classification weir tank, the pressure of control agent water is 1-5kg/ square centimeter, hydraulic pressure on water-supply pipe is controlled by magnetic valve, every 0.5kg/ square centimeter is a rank, the water pressure fluctuations of each rank is controlled at 0.01-0.03kg/ square centimeter, from discharge port, collect respectively, guarantee that the precision of classification is more than 99.9%;
Measure two, adopts efficient composite dispersing agent, has solved the problem of particle agglomeration: A: the composite dispersing agent that aluminum oxide uses is: the mixture of the mixture of polycarboxylate and modified lignin resin or naphthalene sulfonic acidformaldehyde condensation product and calcium lignin sulphonate; The usage quantity of composite dispersing agent is 1/1000 of mineral weight; B: the composite dispersing agent that zirconium silicate uses, the mixture of condensate of melamine and formaldehyde and calcium lignin sulphonate or aminosulfonic acid series high-effective dispersion agent and naphthalene are the mixture of dispersion agent, the usage quantity of composite dispersing agent is 1/1000 of mineral weight;
four,in composite tank, carry out composite:
A, content are composite: fused alumina density is high, hardness is only second to diamond, has the advantages that particle shape is sharp, grinding force is strong, grinding efficiency is high, fast grinding work-piece, but its hard crisp feature causes own loss large, and under the dual function of external force and high grinding rate, abrasive particle is easily broken; Easily workpiece is caused to scuffing; Zirconium silicate chemical composition is: ZrO
2> 65%; SiO
2﹤ 35%, the molecular structure that it is special and composition, determined that it has particle shape mellow and full regular, has stronger toughness and plasticity, process of lapping gentleness is little to workpiece damage, the feature that mill efficiency is not high; Ratio after content is composite is: alumina particle content is 30-50%, and zirconium silicate particles content is 70-50%;
B, particle diameter are composite: D
60, the particle diameter of aluminum oxide is 10 microns, the particle diameter of zirconium silicate is 15 microns; Alumina powder and zirconium silicate micro mist carry out compound with different grain size proportioning, make compounded abrasive zirconium silicate abrasive particle under flat state play support and ring encloses provide protection than alumina abrasive grain is more, in process of lapping, need to apply certain pressure, zirconium silicate utilizes its snappiness and viscous deformation to decompose a part of pressure, the bearing pressure of alumina abrasive grain is reduced, thereby effectively evade firmly crisp, the frangible defect of aluminum oxide; The simultaneously mellow and full particle shape of zirconium silicate, can well make up again the cut of the sharp structure generation of aluminum oxide, makes grinding work-piece surface quality higher;
five,particle surface modification applies: in special particle coated machine, carry out, reduce the surface energy of particle, increase dispersiveness and the oilness of particle; Add tensio-active agent, make the micro mist of making in use be convenient to disperse; Aluminum oxide and zirconium white micro powder granule surface are processed, the surface that reduces particle can, increase dispersiveness and the oilness of particle, improve the grinding polishing effect of workpiece, the kind that applies properties-correcting agent is: the compound point of agent of the additional a kind of zirconium silicate of a kind of alumina composite dispersion agent of selecting in overflow size separation, and usage quantity is 2/1000 of mineral weight;
six,filter, make its water content be less than 50%;
seven,spraying is dried: when spraying, control droplet fineness, add composite dispersing agent, the consumption of composite dispersing agent is 2-5/10000, and spraying droplet diameter 2-4 micron reduces the diameter of droplet, is not only convenient to be dried, and has also reduced agglomeration;
eight,sieve;
nine,detection, packing, finished product warehouse-in.
The special zirconium aluminium of this optical electron industry multiple grinding micro mist of producing by aforesaid method, by fused alumina, two kinds of main raw material(s)s of zirconium silicate, through ball milling, washing, classification, composite, surface-coated, filter, spraying is dry, sieve and be made, chemical composition and size-grade distribution are as following table, there is particle shape collocation rationally, narrow particle size distribution, meso-position radius is stable, basic particle diameter ratio is high, without macrobead, without ultra-fine grain, the good performance of oilness between particle, the grinding of special adaptive optics electron trade new high-tech product, polishing, its main index is as follows:
The present invention adopts the material of zirconium silicate and two kinds of special particle shapes of aluminum oxide and different hardness, different physical and chemical performances, by specific technique compound, in process of lapping, the characteristic that fully kept the grinding force of aluminum oxide strong, grinding efficiency is high, utilize the snappiness of zirconium silicate simultaneously, the excessively strong problem of fragility that has solved aluminum oxide, makes the complementation of bi-material performance advantage, thereby obtains high-quality workpiece surface polishing degree and higher grinding rate, adopt pollution-free medium ball milling novel process, guarantee that particle shape is mellow and full regular, without arris edge, adopt electronic voltage-stabilizing overflow grading device to carry out the classification of micro mist granularity high precision, guarantee narrow particle size distribution, adopt special " large grain " control techniques, guarantee in product without macrobead, adopt spray drying technology, dry micro mist is reunited few, not conglomeration, adopt particle surface modification technology, particle surface is processed, the surface that reduces particle can, increase the dispersiveness of particle and lubricate, this product is multiple grinding micro mist, have a little various of monomer micro mist concurrently, complementation neutralizes its shortcoming separately again simultaneously, there is particle shape collocation rationally, narrow particle size distribution, meso-position radius is stable, basic particle diameter ratio is high, without macrobead, without ultra-fine grain, the good excellent properties that waits of oilness between particle, the special grinding that adapts to new high-tech product, polishing, the workpieces surface condition grinding out is good, flour milling is even, complete alternative imported product also exports to foreign countries.
Accompanying drawing explanation
Fig. 1 is process flow sheet of the present invention.
Embodiment
Be described in detail as follows for an embodiment below:
The step of making method of the present invention is as follows:
one,to fused alumina, two kinds of main raw material(s)s of zirconium silicate, selected through carrying out respectively, guarantee that material crystal is good, white color, inclusion-free, in fused alumina raw material, the content of aluminum oxide is greater than 99%, particle diameter is less than 300 orders, the content of zirconium silicate raw material mesosilicic acid zirconium is greater than 98%, and particle diameter is less than 350 orders;
two,ball milling, sphering and washing: A: aluminum oxide ball milling: use stainless steel abrading-ball; Pellet weight ratio is 3:1, controls by PLC, and grinding-time speed curves is sinusoidal curve, and ball mill maximum speed is 4 turn/per minutes, and a milling cycle is one hour;
Sphering, sphering tank be up and down all point bipyramid cylindrical shell, cylinder inboard wall is flexible, on elastic layer, be evenly distributed with many projections, many small rubber balls are housed in cylindrical shell, and the micro mist that ball milling is good is put into sphering tank again and is ground 0.5 hour, forms No. 1200 following abrasive micropowder disc-shaped structures of GB; Maximum possible subtract less granular corner angle and wedge angle, form more mellow and fuller regular structure, guarantee uniform particles, without abnormity, without large grain; After sphering, put into pickling tub and add chlorohydric acid pickling;
B: zirconium silicate ball milling: adopt zirconium oxide abrasive ball, pellet weight ratio is 3:1, controls by PLC, milling time speed curves is sinusoidal curve, ball mill maximum speed is 4 turn/per minutes, and a milling cycle is one hour, forms No. 1200 following abrasive micropowder disc-shaped structures of GB; Maximum possible subtract less granular corner angle and wedge angle, form more mellow and fuller regular structure, guarantee uniform particles, without abnormity, without large grain; After having ground, put into pickling tub and add sulfuric acid washing;
three, overflow size separation, in Grading Overflow tank, carry out, take following two measures simultaneously:
Measure one, adopts electronic voltage-stabilizing overflow grading device to carry out respectively classification to aluminum oxide, two kinds of materials of zirconium silicate, guarantees narrow particle size distribution; Guarantee in product without macrobead; In size classification weir tank, the pressure of control agent water is 1-5kg/ square centimeter, hydraulic pressure on water-supply pipe is controlled by magnetic valve, every 0.5kg/ square centimeter is a rank, the water pressure fluctuations of each rank is controlled at 0.01-0.03kg/ square centimeter, from discharge port, collect respectively, guarantee that the precision of classification is more than 99.9%;
Measure two, adopts efficient composite dispersing agent, has solved the problem of particle agglomeration: A: the composite dispersing agent that aluminum oxide uses is: the mixture of the mixture of polycarboxylate and modified lignin resin or naphthalene sulfonic acidformaldehyde condensation product and calcium lignin sulphonate; The usage quantity of composite dispersing agent is 1/1000 of mineral weight; B: the composite dispersing agent that zirconium silicate uses, the mixture of condensate of melamine and formaldehyde and calcium lignin sulphonate or aminosulfonic acid series high-effective dispersion agent and naphthalene are the mixture of dispersion agent, the usage quantity of composite dispersing agent is 1/1000 of mineral weight;
four,in composite tank, carry out composite:
A, content are composite: fused alumina density is high, hardness is only second to diamond, has the advantages that particle shape is sharp, grinding force is strong, grinding efficiency is high, fast grinding work-piece, but its hard crisp feature causes own loss large, and under the dual function of external force and high grinding rate, abrasive particle is easily broken; Easily workpiece is caused to scuffing; Zirconium silicate chemical composition is: ZrO
2> 65%; SiO
2﹤ 35%, the molecular structure that it is special and composition, determined that it has particle shape mellow and full regular, has stronger toughness and plasticity, process of lapping gentleness is little to workpiece damage, the feature that mill efficiency is not high; Ratio after content is composite is: alumina particle content is 40%, and zirconium silicate particles content is 60%;
B, particle diameter are composite: D
60, the particle diameter of aluminum oxide is 10 microns, the particle diameter of zirconium silicate is 15 microns; Alumina powder and zirconium silicate micro mist carry out compound with different grain size proportioning, make compounded abrasive zirconium silicate abrasive particle under flat state play support and ring encloses provide protection than alumina abrasive grain is more, in process of lapping, need to apply certain pressure, zirconium silicate utilizes its snappiness and viscous deformation to decompose a part of pressure, the bearing pressure of alumina abrasive grain is reduced, thereby effectively evade firmly crisp, the frangible defect of aluminum oxide; The simultaneously mellow and full particle shape of zirconium silicate, can well make up again the cut of the sharp structure generation of aluminum oxide, makes grinding work-piece surface quality higher;
five,particle surface modification applies: in special particle coated machine, carry out, reduce the surface energy of particle, increase dispersiveness and the oilness of particle; Add tensio-active agent, make the micro mist of making in use be convenient to disperse; Aluminum oxide and zirconium white micro powder granule surface are processed, the surface that reduces particle can, increase dispersiveness and the oilness of particle, improve the grinding polishing effect of workpiece, the kind that applies properties-correcting agent is: in overflow size separation, select, the additional condensate of melamine and formaldehyde of mixture of polycarboxylate and modified lignin resin and the mixture of calcium lignin sulphonate, usage quantity is 2/1000 of mineral weight;
six,filter, make its water content be less than 50%;
seven,spraying is dried: when spraying, control droplet fineness, add composite dispersing agent, the consumption of composite dispersing agent is 4/10000, and 3 microns of spraying droplet diameters reduce the diameter of droplet, are not only convenient to be dried, and have also reduced agglomeration;
eight,sieve;
nine,detection, packing, finished product warehouse-in.
The special zirconium aluminium of this optical electron industry multiple grinding micro mist of producing by aforesaid method, by fused alumina, two kinds of main raw material(s)s of zirconium silicate, through ball milling, washing, classification, composite, surface-coated, filter, spraying is dry, sieve and be made, chemical composition and size-grade distribution are as following table, there is particle shape collocation rationally, narrow particle size distribution, meso-position radius is stable, basic particle diameter ratio is high, without macrobead, without ultra-fine grain, the good performance of oilness between particle, the grinding of special adaptive optics electron trade new high-tech product, polishing, its main index is as following table:
Claims (1)
1. the making method of the special zirconium aluminium of optical electron industry multiple grinding micro mist, is characterized in that, step is as follows:
one,to fused alumina, two kinds of main raw material(s)s of zirconium silicate, selected through carrying out respectively, guarantee that material crystal is good, white color, inclusion-free, in fused alumina raw material, the content of aluminum oxide is greater than 99%, particle diameter is less than 300 orders, the content of zirconium silicate raw material mesosilicic acid zirconium is greater than 98%, and particle diameter is less than 350 orders;
two,ball milling, sphering and washing: A: aluminum oxide ball milling: use stainless steel abrading-ball; Pellet weight ratio is 3:1, controls by PLC, and grinding-time speed curves is sinusoidal curve, and ball mill maximum speed is turn/per minute of 3-5, and a milling cycle is one hour;
Sphering, sphering tank be up and down all point bipyramid cylindrical shell, cylinder inboard wall is flexible, on elastic layer, be evenly distributed with many projections, many small rubber balls are housed in cylindrical shell, and the micro mist that ball milling is good is put into sphering tank again and is ground 0.5 hour, forms No. 1200 following abrasive micropowder disc-shaped structures of GB; Maximum possible subtract less granular corner angle and wedge angle, form more mellow and fuller regular structure, guarantee uniform particles, without abnormity, without large grain; After sphering, put into pickling tub and add chlorohydric acid pickling;
B: zirconium silicate ball milling: adopt zirconium oxide abrasive ball, pellet weight ratio is 3:1, controls by PLC, milling time speed curves is sinusoidal curve, ball mill maximum speed is turn/per minute of 3-5, and a milling cycle is one hour, forms No. 1200 following abrasive micropowder disc-shaped structures of GB; Maximum possible subtract less granular corner angle and wedge angle, form more mellow and fuller regular structure, guarantee uniform particles, without abnormity, without large grain; After having ground, put into pickling tub and add sulfuric acid washing;
three, overflow size separation, in Grading Overflow tank, carry out, take following two measures simultaneously:
Measure one, adopts electronic voltage-stabilizing overflow grading device to carry out respectively classification to aluminum oxide, two kinds of materials of zirconium silicate, guarantees narrow particle size distribution; Guarantee in product without macrobead; In size classification weir tank, the pressure of control agent water is 1-5kg/ square centimeter, hydraulic pressure on water-supply pipe is controlled by magnetic valve, every 0.5kg/ square centimeter is a rank, the water pressure fluctuations of each rank is controlled at 0.01-0.03kg/ square centimeter, from discharge port, collect respectively, guarantee that the precision of classification is more than 99.9%;
Measure two, adopts efficient composite dispersing agent, has solved the problem of particle agglomeration: A: the composite dispersing agent that aluminum oxide uses is: the mixture of the mixture of polycarboxylate and modified lignin resin or naphthalene sulfonic acidformaldehyde condensation product and calcium lignin sulphonate; The usage quantity of composite dispersing agent is 1/1000 of mineral weight; B: the composite dispersing agent that zirconium silicate uses, the mixture of condensate of melamine and formaldehyde and calcium lignin sulphonate or aminosulfonic acid series high-effective dispersion agent and naphthalene are the mixture of dispersion agent, the usage quantity of composite dispersing agent is 1/1000 of mineral weight;
Four, in composite tank, carry out composite:
A, content are composite: fused alumina density is high, hardness is only second to diamond, has the advantages that particle shape is sharp, grinding force is strong, grinding efficiency is high, fast grinding work-piece, but its hard crisp feature causes own loss large, and under the dual function of external force and high grinding rate, abrasive particle is easily broken; Easily workpiece is caused to scuffing; Zirconium silicate chemical composition is: ZrO
2> 65%; SiO
2﹤ 35%, the molecular structure that it is special and composition, determined that it has particle shape mellow and full regular, has stronger toughness and plasticity, process of lapping gentleness is little to workpiece damage, the feature that mill efficiency is not high; Ratio after content is composite is: alumina particle content is 30-50%, and zirconium silicate particles content is 70-50%;
B, particle diameter are composite: D
60, the particle diameter of aluminum oxide is 10 microns, the particle diameter of zirconium silicate is 15 microns; Alumina powder and zirconium silicate micro mist carry out compound with different grain size proportioning, make compounded abrasive zirconium silicate abrasive particle under flat state play support and ring encloses provide protection than alumina abrasive grain is more, in process of lapping, need to apply certain pressure, zirconium silicate utilizes its snappiness and viscous deformation to decompose a part of pressure, the bearing pressure of alumina abrasive grain is reduced, thereby effectively evade firmly crisp, the frangible defect of aluminum oxide; The simultaneously mellow and full particle shape of zirconium silicate, can well make up again the cut of the sharp structure generation of aluminum oxide, makes grinding work-piece surface quality higher;
Five, particle surface modification applies: in special particle coated machine, carry out, reduce the surface energy of particle, increase dispersiveness and the oilness of particle; Add tensio-active agent, make the micro mist of making in use be convenient to disperse; Aluminum oxide and zirconium white micro powder granule surface are processed, the surface that reduces particle can, increase dispersiveness and the oilness of particle, improve the grinding polishing effect of workpiece, the kind that applies properties-correcting agent is: the additional a kind of zirconium silicate composite dispersing agent of a kind of alumina composite dispersion agent of selecting in overflow size separation, and usage quantity is 2/1000 of mineral weight;
Six, filter, make its water content be less than 50%;
Seven, spraying is dried: when spraying, control droplet fineness, add composite dispersing agent, the consumption of composite dispersing agent is 2-5/10000, and spraying droplet diameter 2-4 micron reduces the diameter of droplet, is not only convenient to be dried, and has also reduced agglomeration;
Eight, sieve;
Nine, detection, packing, finished product warehouse-in.
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| CN105505320A (en) * | 2016-01-03 | 2016-04-20 | 安徽律正科技信息服务有限公司 | Preparing method of white corundum micro-powder for fine grinding in electron industry |
| CN105647476A (en) * | 2016-01-08 | 2016-06-08 | 淄博金纪元研磨材有限公司 | Preparation method and application of white alundum micropowder for aerospace metal polishing |
| CN110982434B (en) * | 2019-11-28 | 2021-04-13 | 德米特（苏州）电子环保材料有限公司 | Preparation method of polishing powder and polishing solution for polishing gallium arsenide |
| CN111607360A (en) * | 2020-06-02 | 2020-09-01 | 无锡晨旸科技股份有限公司 | Grinding material for large-diameter silicon wafer and production method thereof |
| CN112430114A (en) * | 2020-11-04 | 2021-03-02 | 湖南精城特种陶瓷有限公司 | Zirconium-aluminum composite nano ceramic and preparation method thereof |
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| CN101177549A (en) * | 2007-11-06 | 2008-05-14 | 淄博金纪元研磨材有限公司 | Preparation method of disk-shaped alumina powder specially for electron industry grinding |
| CN102241959A (en) * | 2011-05-09 | 2011-11-16 | 无锡晨旸科技有限公司 | Production method for mixed grinding material |
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| CN101177549A (en) * | 2007-11-06 | 2008-05-14 | 淄博金纪元研磨材有限公司 | Preparation method of disk-shaped alumina powder specially for electron industry grinding |
| CN102241959A (en) * | 2011-05-09 | 2011-11-16 | 无锡晨旸科技有限公司 | Production method for mixed grinding material |
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