CN103341816A - 一种气压浮动防碰撞的悬浮基盘抛光装置 - Google Patents
一种气压浮动防碰撞的悬浮基盘抛光装置 Download PDFInfo
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN110560424A (zh) * | 2019-09-18 | 2019-12-13 | 宁波南大光电材料有限公司 | 一种用于光刻设备的非接触式超声清洗装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0796450A (ja) * | 1993-09-30 | 1995-04-11 | Shin Etsu Handotai Co Ltd | フロートポリッシング装置 |
JP2002346928A (ja) * | 2001-05-25 | 2002-12-04 | Canon Inc | フロートポリッシング装置 |
CN101708592A (zh) * | 2009-11-05 | 2010-05-19 | 浙江工业大学 | 用于悬浮抛光的基盘 |
CN102699809A (zh) * | 2012-05-07 | 2012-10-03 | 浙江工业大学 | 可主动驱动的悬浮基盘抛光装置 |
CN203266378U (zh) * | 2013-05-22 | 2013-11-06 | 浙江工业大学 | 一种气压浮动防碰撞的悬浮基盘抛光装置 |
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0796450A (ja) * | 1993-09-30 | 1995-04-11 | Shin Etsu Handotai Co Ltd | フロートポリッシング装置 |
JP2002346928A (ja) * | 2001-05-25 | 2002-12-04 | Canon Inc | フロートポリッシング装置 |
CN101708592A (zh) * | 2009-11-05 | 2010-05-19 | 浙江工业大学 | 用于悬浮抛光的基盘 |
CN102699809A (zh) * | 2012-05-07 | 2012-10-03 | 浙江工业大学 | 可主动驱动的悬浮基盘抛光装置 |
CN203266378U (zh) * | 2013-05-22 | 2013-11-06 | 浙江工业大学 | 一种气压浮动防碰撞的悬浮基盘抛光装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110560424A (zh) * | 2019-09-18 | 2019-12-13 | 宁波南大光电材料有限公司 | 一种用于光刻设备的非接触式超声清洗装置 |
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Effective date of registration: 20191216 Address after: 314300 room 241, building 1, new economy Pioneer Park, Tongyuan Town, Haiyan County, Jiaxing City, Zhejiang Province Patentee after: Jiaxing Huizhai home furnishing Co.,Ltd. Address before: 310018 Room 1004-1006, 17 Block 57, Baiyang Street Science Park Road, Hangzhou Economic and Technological Development Zone, Zhejiang Province Patentee before: Zhejiang Qibo Intellectual Property Operation Co.,Ltd. Effective date of registration: 20191216 Address after: 310018 Room 1004-1006, 17 Block 57, Baiyang Street Science Park Road, Hangzhou Economic and Technological Development Zone, Zhejiang Province Patentee after: Zhejiang Qibo Intellectual Property Operation Co.,Ltd. Address before: The city Zhaohui six districts Chao Wang Road Hangzhou City, Zhejiang province 310014 18 Patentee before: Zhejiang University of Technology |
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Effective date of registration: 20200917 Address after: Room 402, building 32, No.8 Nujiang Road, Hexi District, Tianjin 300202 Patentee after: Outbay (Tianjin) robot Co.,Ltd. Address before: 314300 room 241, building 1, new economy Pioneer Park, Tongyuan Town, Haiyan County, Jiaxing City, Zhejiang Province Patentee before: Jiaxing Huizhai home furnishing Co.,Ltd. |
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