CN103338022B - The MEMS resonator of frequency-adjustable - Google Patents
The MEMS resonator of frequency-adjustable Download PDFInfo
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- CN103338022B CN103338022B CN201310306960.6A CN201310306960A CN103338022B CN 103338022 B CN103338022 B CN 103338022B CN 201310306960 A CN201310306960 A CN 201310306960A CN 103338022 B CN103338022 B CN 103338022B
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Abstract
A kind of MEMS resonator of frequency-adjustable, comprise: a resonant element, be disc, annular or symmetric polygonal structure, its center is vibration displacement node, this resonant element is positioned at the support anchor points support of displacement node by one, and the surface of this resonant element is provided with multiple micro-structural; Multiple electrode, it is positioned at periphery or the top of resonant element, has a gap between each electrode, and each electrode directly contacts with between resonant element or has a gap.The present invention, when not increasing structural complexity, realizes multiple different frequency and exports.
Description
Technical field
The present invention relates to radio-frequency micro electromechanical (RFMEMS) technical field, more particularly, the present invention relates to radio-frequency micro-machinery resonating device, particularly a kind of MEMS resonator of frequency-adjustable.
Background technology
Along with wireless communication system is towards low-power consumption, small size, multifunctional direction development and the raising that requires level of integrated system, in the urgent need to the structure of development of new to replace traditional wireless transceiver system.Radio frequency resonant device, as the filtering in wireless receiving and dispatching structure and frequency reference device, has a wide range of applications demand.The radio frequency resonant device be most widely used at present comprises quartz, pottery, surface acoustic wave (SAW) and bulk acoustic wave (FBAR) device, they can reach the high q-factor (500-10000) needed for RF and IF filter, but they are all (off-chip) discrete components outside sheet, are unfavorable for the system integration and miniaturization.And MEMS due to have small size, low cost, low-power consumption, high q-factor, high linearity, with the advantage such as IC technique is integrated, being considered to replace one of best selection of the outer discrete component of traditional sheet, providing the foundation [1] for realizing the extensive use of radio communication in miniaturization, low-power consumption, portable set.
In order to adapt to future broadband wireless communication systems to multiband, multi-functional, multimodal application demand, needing frequency-selecting device self to have good frequency characteristic, reducing the complexity of structure.And for the application demand of multiband, usually need to set up resonator array [2] or filter array [3], to realize system-on-a-chip, so both add the complexity of system, turn improve cost, therefore, need to develop the application demand that new structure meets multiband.
To this, the present invention proposes a kind of MEMS resonator of novel frequency-adjustable, utilize this structure can realize the output of different resonance frequency.By changing the number of micro-structural, shape size and the relative position with drive electrode, the different frequency realizing resonator exports.In addition, by increasing number of poles, excitation high frequent vibration mode, obtaining high-frequency and exports, by changing the connected mode between electrode, encouraging the resonance mode of not same order, and the resonance frequency obtaining different rank exports.Utilize this resonator provided by the invention, the complexity of wireless communication system can be reduced, increase substantially the integrated level of system, thus reduce system cost further.
Citing document:
【1】C.T.-C.Nguyen，VibratingRFMEMSoverview：applicationstowirelesscommunications，inProc.SPIE：Micromachin.Microfabric.ProcessTechnol.，SanJose，CA，vol.5715，Jan.22-27，2005，pp.11-25.
【2】H.ChandrahalimandS.A.Bhave，Digitally-tunableMEMSfilterusingmechanically-coupledresonatorarray，inProc.IEEE21stInt.Conf.MicroElectroMech.Syst.(MEMS’08)，Jan.13-17，2008，pp.1020-1023.
【3】C.T.-C.Nguyen，MEMStechnologiesanddevicesforsingle-chipRFfront-ends(invited)，Tech.Dig.，CICMT’06，Denver，Colorado，April25-26，2006.
Summary of the invention
In view of this, main purpose of the present invention is the MEMS resonator proposing a kind of novel frequency-adjustable, when not increasing structural complexity, realizing multiple different frequency and exporting.
For achieving the above object, the present invention proposes a kind of MEMS resonator of frequency-adjustable, comprising:
One resonant element, be disc, annular or symmetric polygonal structure, its center is vibration displacement node, and this resonant element is positioned at the support anchor points support of displacement node by one, and the surface of this resonant element is provided with multiple micro-structural;
Multiple electrode, it is positioned at periphery or the top of resonant element, has a gap between each electrode, and each electrode directly contacts with between resonant element or has a gap.
As can be seen from technique scheme, the invention has the beneficial effects as follows:
1, the present invention is by controlling the number of micro-structural, position and shape size, achieves the flexible of resonance frequency, and when not reducing device size, realizes high frequency output.
2, the present invention is by simple microstructure design and electrode interconnection, when not increasing structure complexity, achieve the resonator that multiple different frequency exports, these simple construction units are by the resonator in alternative wireless communication system or filter array, greatly can improve the integrated level of wireless communication system, reduce complexity and the cost of manufacture of system.
Accompanying drawing explanation
For making the object, technical solutions and advantages of the present invention clearly understand, below in conjunction with embodiment and accompanying drawing, the present invention is described in more detail, wherein:
Fig. 1, Fig. 2, Fig. 3 are the structural representation of the MEMS resonator of the frequency-adjustable that the present invention proposes;
Fig. 4 is the structural representation of disc MEMS resonator when applying excitation to the electrode corresponding without microstructure area;
Fig. 5 is the schematic diagram of the resonance mode of Fig. 4;
Fig. 6 is the structural representation of disc MEMS resonator when the electrode corresponding to microstructure area applies excitation;
Fig. 7 is the schematic diagram of Fig. 6 resonance mode.
Embodiment
The invention provides a kind of MEMS resonator of frequency-adjustable, as shown in Figure 1, Figure 2, Figure 3 shows, specifically comprise:
One resonant element 1, for disc, annular or symmetric polygonal structure, wherein annular resonant element 1 is not when reducing physical dimension, higher resonance frequency can be obtained, its center is vibration displacement node 11, this resonant element 1 is supported by the support anchor point 12 that is positioned at displacement node 11, the material of this resonant element 1 is silica-base material, piezoelectric or sapphire, the surface of described resonant element 1 is provided with multiple micro-structural 13, the radius even circumferential that waits along resonant element 1 distributes, micro-structural 13 on this resonant element 1 is aperture or dentalation, by changing the relative position of micro-structural 13 and drive electrode, to encourage different resonance modes, thus obtain different rate-adaptive pacemaker, change the number of micro-structural, shape size and the position in resonant element, thus obtain different frequency-tuning ranges.
Multiple electrode 2, it is positioned at periphery or the top of resonant element 1, a gap is had between each electrode, directly contact between each electrode with resonant element 1 or have a gap, this electrode 2 material is metal or doped semiconductor materials, and the gap between described electrode 2 and resonant element 1 is that air is filled or solid state medium is filled or air and solid state medium are filled jointly.Can adopt between electrode and resonant element that electrostatic drives, the combination drive mode of Piezoelectric Driving or electrostatic-piezoelectricity.
The present invention, by controlling the number of micro-structural, position and shape size, achieves the flexible of resonance frequency, and when not reducing device size, realizes high frequency output.
Architectural feature is introduced in detail below for disc MEMS resonator, as shown in Fig. 4 and Fig. 5, Fig. 6 and Fig. 7, be respectively disc MEMS resonator apply structural representation when encouraging to the electrode corresponding without microstructure area and apply structural representation when encouraging to the electrode having microstructure area corresponding, comprise:
Disc resonant element 1, radius 18um, thickness 3um, the material of resonant element 1 is polysilicon, surface is provided with 6 fan-shaped aperture micro-structurals 13, in aperture, outer radius is respectively 4um and 8um, small hole center along the radius of resonant element 1 be 10um wait the distribution of radius even circumferential, multiple electrodes 2 are positioned at the periphery of resonant element 1, be corresponding in turn to microstructure area 6 on resonant element and without microstructure area 7, a gap is had between each electrode, multiple electrode constitutes drive electrode 8 and the detecting electrode 9 of resonant element, electrostatic is adopted to transmit between electrode and resonant element, by changing the relative position of micro-structural 13 and drive electrode 8, to obtain different rate-adaptive pacemaker.
When applying pumping signal to drive electrode 8, this resonant element 1 is operated in 3 rank Echo Wall mode of oscillations (3
rdwGM), when applying excitation to the electrode without microstructure area 7 correspondence, as shown in Figure 4, micro-structural 13 is in modal displacement region, and electrode 9 detects output frequency 140MHz, when applying excitation to the electrode of microstructure area 6 correspondence, as shown in Figure 6, micro-structural 13 is in Large travel range region, and electrode 9 detects output frequency 145MHz, and the frequency-splitting size of structure output shown in Fig. 4 with Fig. 6 is relevant with the number of micro-structural 13, shape size and the position in resonant element 1.
Increase the number of electrode 2 and micro-structural 13, the mode of oscillation of more high-order (the 3 above Echo Wall mode in rank) can be encouraged, thus obtain higher resonance frequency (> 200MHz), in addition, by changing the connected mode between electrode, can encourage the resonance mode of not same order, the resonance frequency obtaining different rank exports.
Above-described specific embodiment; object of the present invention, technical scheme and beneficial effect are further described; be understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any amendment made, equivalent replacement, improvement etc., all should be included in protection scope of the present invention.
Claims (4)
1. a MEMS resonator for frequency-adjustable, comprising:
One resonant element, for disc, annular or symmetric polygonal structure, its center is vibration displacement node, and this resonant element is positioned at the support anchor points support of displacement node by one, and the surface of this resonant element is provided with multiple microstructure area and multiple without microstructure area; Micro-structural on described resonant element distributes along the radius even circumferential that waits of resonant element, micro-structural on this resonant element is aperture or dentalation, by changing the relative position of micro-structural and drive electrode, to encourage different resonance modes, thus obtain different rate-adaptive pacemaker, change the number of micro-structural, shape size and the position in resonant element, thus obtain different frequency-tuning ranges;
Multiple electrode, it is positioned at periphery or the top of resonant element, and be corresponding in turn to described microstructure area on resonant element and described without microstructure area, have a gap between each electrode, each electrode directly contacts with between resonant element or has a gap.
2. the MEMS resonator of frequency-adjustable according to claim 1, wherein the material of resonant element is silica-base material, piezoelectric or sapphire.
3. the MEMS resonator of frequency-adjustable according to claim 1, wherein electrode material is metal or doped semiconductor materials.
4. the MEMS resonator of frequency-adjustable according to claim 1, the gap wherein between electrode and resonant element is that air is filled or solid state medium is filled or air and solid state medium are filled jointly.
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Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104617360B (en) * | 2013-11-05 | 2018-04-27 | 中国科学院半导体研究所 | The MEMS filter of frequency-adjustable |
| CN103716009B (en) * | 2013-12-23 | 2017-06-23 | 汇隆电子（金华）有限公司 | Mems resonator |
| CN103762956A (en) * | 2013-12-31 | 2014-04-30 | 中国科学院半导体研究所 | Frequency switchable micro mechanical resonator and manufacture method thereof |
| CN103913159B (en) * | 2014-04-29 | 2016-05-18 | 重庆大学 | A kind of tunnel type MEMS gyroscope |
| CN107655595B (en) * | 2017-10-19 | 2020-01-14 | 机械工业仪器仪表综合技术经济研究所 | Micro-electromechanical resonance structure, resonator and pressure sensor |
| FI128208B (en) * | 2018-02-08 | 2019-12-31 | Tikitin Oy | Coupled MEMS Resonator |
| CN108955662B (en) * | 2018-04-27 | 2022-08-23 | 苏州大学 | Central axis symmetric resonance gyroscope with frequency difference adjusting structure |
| CN110190826B (en) * | 2019-05-31 | 2020-10-02 | 厦门市三安集成电路有限公司 | Resonant thin film layer, resonator and filter |
| CN112865740A (en) * | 2020-12-31 | 2021-05-28 | 中国科学院半导体研究所 | MEMS resonator based on modal redistribution and adjusting method thereof |
| CN112845002B (en) * | 2020-12-31 | 2022-01-14 | 武汉大学 | MEMS broadband ultrasonic transducer array |
| CN116470880B (en) * | 2023-06-20 | 2023-09-19 | 麦斯塔微电子(深圳)有限公司 | Anti-symmetrically driven mems resonator |
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| CN102388533A (en) * | 2009-04-09 | 2012-03-21 | Nxp股份有限公司 | Mems resonator |
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| US8040207B2 (en) * | 2009-01-15 | 2011-10-18 | Infineon Technologies Ag | MEMS resonator devices with a plurality of mass elements formed thereon |
| US8115573B2 (en) * | 2009-05-29 | 2012-02-14 | Infineon Technologies Ag | Resonance frequency tunable MEMS device |
| JP5667391B2 (en) * | 2010-08-11 | 2015-02-12 | 日本電波工業株式会社 | Disc type MEMS vibrator |
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