CN103337983B - A kind of repeated frequency high-voltage microsecond pulse power supply - Google Patents

A kind of repeated frequency high-voltage microsecond pulse power supply Download PDF

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CN103337983B
CN103337983B CN201310241590.2A CN201310241590A CN103337983B CN 103337983 B CN103337983 B CN 103337983B CN 201310241590 A CN201310241590 A CN 201310241590A CN 103337983 B CN103337983 B CN 103337983B
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end
connected
circuit
voltage
switch
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CN103337983A (en
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邵涛
黄伟民
章程
张东东
严萍
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中国科学院电工研究所
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Abstract

A kind of repeated frequency high-voltage microsecond pulse power supply; its resonance multiplication of voltage charge circuit (120) and boosting output circuit (116) cascade; boosting output circuit (116) is connected on the two ends of load (118); auxiliary circuit (110) is connected on the two ends of boosting output circuit (116); absorb the two ends that protective circuit (114) is connected on switch (108), trigger control circuit (112) is connected on one end of switch (108).Resonance multiplication of voltage charge circuit (120) provides inceptive impulse to boosting output circuit (116); boosting output circuit (116) is made to export high pressure microsecond pulse to load (118); auxiliary circuit (110) switches two kinds of charging modes of resonance multiplication of voltage charge circuit (120); absorb the switch in protective circuit (114) protection resonance voltage-multiplying circuit (120); trigger control circuit (112) controls resonance voltage-multiplying circuit (120) breaker in middle and to turn off and open-minded, and realizes the isolation to resonance multiplication of voltage charge circuit (120) and the output circuit (116) that boosts.

Description

A kind of repeated frequency high-voltage microsecond pulse power supply

Technical field

The present invention relates to a kind of high-voltage pulse power source.

Background technology

Low temperature plasma has a wide range of applications in environmental pollution improvement, medical science sterilization, material modification and field such as flowing control etc. and the superiority of uniqueness.Along with the development of plasma technique, plasma excitation source is also constantly reformed, and the low temperature plasma that different driving source produces has different physical features and electrical characteristic.There are high-frequency and high-voltage power supply and pulse power supply in plasma excitation source conventional at present.Compared with interchange driving, the atmospheric pressure plasma that pulsed discharge produces has many advantages, as to the efficiency etc. that can reach better treatment effect and Geng Gao during dielectric surface process.And microsecond pulse is compared with nanosecond pulse, not only have the superiority of pulse power, and energy entrained by individual pulse is larger, some are needed to the application of relatively high power, there are its inherent advantages in microsecond pulse source.

Pulse power supply towards low temperature plasma application also at home and abroad has to be studied widely.As " all solid state high voltage nanosecond pulse power supply " of patent CN101534017, connected by voltage cell and form booster circuit, then export high-voltage pulse by pulse shaping circuit, this device such as power capacitor and solid-state switch is more, is unfavorable for safeguarding and long-time running." having all solid state high voltage power supply that positive negative pulse stuffing exports " of patent CN102035378A, by charged in parallel and the discharged in series output high-voltage pulse of a series of storage capacitor, exports positive or negative high voltage pulse by different switch combinations.The mode adopting electric capacity and solid-state switch to combine this Marx or class Marx type makes power volume comparatively large and cost is higher, and uses pulse transformer to effectively reduce power volume and the pulse power is stable.Electrician research institute adopts pulse transformer to have developed a compact unipolarity repetition pulse power source, voltage magnitude can reach 30kV, repetition rate 2kHz(Shao T, Zhang D, Yu Y, Zhang C, Wang J, Yan P, Zhou Y.Acompact repetitive unipolar nanosecond-pulse generator for dielectric barrier discharge application [J] .IEEETransactions on Plasma Science, 2010,38 (7), 1651-1655).Harbin Institute of Technology is a kind of LCC inversion charging hybrid energy-storing impulse power electrical source (Wang Xiaoming towards design of Treatment of Waste Gas, Zhao Xianning. a kind of LCC inversion charging hybrid energy-storing impulse power electrical source [J]. High-Voltage Electrical Appliances, 2009,45 (5): 48-53), forward position 1.0 μ s, amplitude 30kV, pulsewidth 1.5 μ s(90% amplitude can be realized) high-voltage pulse export, repeated work frequency can reach more than 2.5kHz.But this power supply architecture is more complicated, be unfavorable for realizing miniaturization.Aachen, Germany Fraunhofer (Fraunhofer-institute fiir) laser technology research institute have studied a kind of modularization, low cost, the efficient height of pulse energy, high voltage pulse power source (the Klein J that repetition rate is high, Padberg M.A modular low-cost, high-voltage pulse generator that is highly effective in terms of pulse energy and repetition frequency [J] .Measurement Science and Technology.1995, 6 (5): 550-553), be applied to gas plasma body technique, this supply voltage amplitude reaches 100kV, pulsewidth 1 μ s ~ 3 μ s, repetition rate can reach 15kHz.But the concussion on this clock forward position and rear edge is more.Applying for different plasma the pulse power developed is present in some shortcomings part at present: structure is compact not, volume is comparatively large, and reliability is not high, and the operating time is short, power supply architecture is complicated, failure rate is high, and output voltage amplitude, frequency, adjustable pulse width are not high.

Summary of the invention

It is short that the object of the invention is to overcome the prior art operating time, and the shortcoming that power supply architecture is complicated, failure rate is high, proposes the high-voltage pulse power source of the several microsecond of a kind of pulse duration.Compact conformation of the present invention, longevity of service, failure rate is low, pulse voltage amplitude is adjustable at 0-40kV, and pulse frequency is adjustable at 0-15kHz.

High pressure microsecond pulse power supply of the present invention comprises following five parts: resonance multiplication of voltage charge circuit, boosting output circuit, auxiliary circuit, absorption protective circuit and trigger control circuit.Resonance multiplication of voltage charge circuit and the cascade of boosting output circuit, boosting output circuit is connected on the two ends of load, and auxiliary circuit is connected on the two ends of boosting output circuit, and absorb the two ends that protective circuit is connected on the first switch, trigger control circuit is connected on one end of the first switch; Resonance multiplication of voltage charge circuit provides inceptive impulse to boosting output circuit, makes boosting output circuit export high pressure microsecond pulse to load; Auxiliary circuit switches two kinds of charging modes of resonance multiplication of voltage charge circuit; Absorb the protection of protective circuit realization to the first switch in resonance voltage-multiplying circuit; Trigger control circuit realizes the first switch OFF in resonance voltage-multiplying circuit and the control of opening and realizes the isolation of resonance multiplication of voltage charge circuit with boosting output circuit.

Described resonance multiplication of voltage charge circuit is made up of elementary electric capacity, inductance, second switch (comprising classes of semiconductors switch) and secondary capacitance, by the break-make of second switch the energy transferring of elementary electric capacity to secondary capacitance.Described boosting output circuit is made up of pulse transformer and diode, by pulse transformer the energy transferring in secondary capacitance to load.Described auxiliary circuit is made up of contactor, the time relay, resistance, button and indicator light, reaches the object of charge circuit and the elementary capacitive energy of releasing switching elementary electric capacity.Described absorption protective circuit is made up of resistance, electric capacity, diode, surge current during absorption second switch break-make and peak voltage, protection second switch.Described trigger control circuit route pulse generator, photoelectric conversion section and drive circuit composition, realizes the adjustment to second switch triggering signal and isolation.

Under repetition working method, elementary electric capacity in described resonance multiplication of voltage charge circuit must guarantee in time to secondary capacitance constant current charge, this requires that elementary electric capacity can supplement voltage in time after electric discharge, require that the charging interval of elementary electric capacity is as far as possible short, and need when starting to charge to reduce charging current.Adopt auxiliary circuit to realize the switching of charge circuit, when starting to charge, series resistance is to primary electrical capacity charge, and time delay cuts off resistance by relay after a period of time, directly to primary electrical capacity charge, realizes the object meeting charging interval and charging current requirement.

In described resonance multiplication of voltage charge circuit, when second switch disconnects, elementary electric capacity, inductance and secondary capacitance form charge circuit.Elementary electric capacity, secondary capacitance and inductance are connected, and elementary electric capacity to secondary capacitance resonant charging by inductance and pulse transformer leakage inductance, is made secondary capacitance charge and is approximately 700V.When triggering signal control second switch is opened, the loop electric discharge that secondary capacitance is made up of second switch, pulse transformer leakage inductance and the former limit of pulse transformer, in the process of electric discharge, most of energy is by pulse transformer coupled transfer to load, and portion of energy is to secondary capacitance reverse charging.

The overcurrent that described absorption protective circuit is used for protecting second switch to produce at interrupting process and overvoltage; second switch bears overcurrent and superpotential poor ability; all certain distributed inductance can be there is in electric power loop; when device turns off; these inductance can induce the voltage consistent with high-voltage power supply direction; these two voltage superposition together after be all added on second switch, switching device may be caused to bear too high voltage, cause device permanent damage.And very large surge current and peak voltage will be born in the moment turned on and off; the power consumption of second switch certainly will be caused to strengthen; module is overheated; component failure can be made time serious even to damage resonance multiplication of voltage charge circuit and boosting output circuit; the present invention adopts corresponding RC absorbing circuit, protection second switch.

Described trigger control circuit is divided into three parts, is respectively pulse generator, photoelectric conversion section and drive circuit.Pulse generator adopts arm chip, produces the pulse of turnable pulse width, frequency, number, by photoelectric conversion section, the signal of telecommunication is changed into light signal and change into the signal of telecommunication again, output to drive circuit, produces trigger impulse and controls opening and disconnecting of second switch.This design can be kept apart control circuit and resonance multiplication of voltage charge circuit, boosting output circuit, and avoid second switch when turning on and off, the interference signal of generation is disturbed for trigger impulse, avoids producing false triggering.

Described boosting output circuit adopts pulse transformer and high-voltage rectifying module to export high pressure microsecond pulse, pulse transformer adopts nickel-zinc ferrite as magnetic core, pulse transformer no-load voltage ratio 1/60, the number of turn is reduced to reduce transformer leakage inductance in the former limit of pulse transformer as far as possible, thus reduce the rising edge exporting pulse, reduce pulse duration.

The present invention can voltage magnitude, the pulse repetition frequency of control impuls, and the several microsecond of pulse duration.

Accompanying drawing explanation

Fig. 1 is the general structure block diagram of repeated frequency high-voltage microsecond pulse power supply;

Wherein: 100 ac power supply systems, 102 rectifier bridges, 104 elementary electric capacity, 106 secondary capacitance, 108 first switches, 110 auxiliary circuits, 112 switch driving circuits, 114 switch protecting circuits, 116 boosting output circuits, 118 loads.

Fig. 2 is the circuit diagram of repeated frequency high-voltage microsecond pulse power supply;

Wherein: 200 is 220V ac power supply system, 202 air switches, 204, 206 overcurrent protectors, 208 voltage regulators, 210, 212 contactor coils, 214 time relay coils, 216, 218, 220, 222, 224 contactor normally opened contacts, 226, 228 contactor normally-closed contacts, 230 contactor normally opened contacts, 232 normally closed buttons, 234 often drive button, 236, 238 indicator lights, 240 rectifier bridges, 242 charging resistors, 244 elementary electric capacity, 246 bleeder resistances, 248 first diodes, 250 inductance, 252 second switches, 254 switch driving circuits, 256, 258 optical-electric modules, 260 pulse generators, 262 absorption resistances, 264 Absorption Capacitances, 266 second diodes, 268 secondary capacitance, 270 pulse transformers, 272 high-voltage diodes, 118 loads.

Embodiment

The present invention is further illustrated below in conjunction with accompanying drawing and concrete mode.

As shown in Figure 1, repeated frequency high-voltage microsecond pulse power supply of the present invention comprises resonance multiplication of voltage charge circuit 120, boosting output circuit 116, auxiliary circuit 110, first switch 108, absorbs protective circuit 114 and trigger control circuit 112.Power supply architecture is compact, stable performance, longevity of service, failure rate is low.

Resonance multiplication of voltage charge circuit 120 provides inceptive impulse to boosting output circuit 116; the 116 pairs of loads 118 of boosting output circuit are made to export high pressure microsecond pulse; auxiliary circuit 110 switches two kinds of charging modes of resonance multiplication of voltage charge circuit 120; absorption protective circuit 114 realizes the protection to second switch 252 in resonance voltage-multiplying circuit 120, and trigger control circuit 112 realizes the control turning off resonance voltage-multiplying circuit 120 breaker in middle and open and the isolation realized main circuit.Resonance multiplication of voltage charge circuit 120 and the cascade of boosting output circuit 116; boosting output circuit 116 is connected on load 118 two ends; auxiliary circuit 110 is connected on boosting output circuit 116 two ends, and absorb protective circuit 114 and be connected on the first switch 108 two ends, trigger control circuit 112 is connected on first switch 108 one end.

As shown in Figure 2, described resonance multiplication of voltage charge circuit 120 comprises classes of semiconductors switch by elementary electric capacity 244, inductance 250, second switch 252() and secondary capacitance 268 form.The positive ends of elementary electric capacity 244 is connected with the anode of the first diode 246, the negative electrode of the first diode 246 is connected with one end of inductance 250, the other end of inductance 250 is connected with one end of second switch 252, the other end of second switch 252 is connected with the other end of elementary electric capacity 244, secondary capacitance 268 is connected in parallel on the two ends of second switch 252 by the former limit of pulse transformer 270, by the break-make of second switch 252 the energy transferring of elementary electric capacity 244 to secondary capacitance 268.

Described boosting output circuit 116 is made up of pulse transformer 270 and high-voltage diode 272.Pulse transformer 270 secondary high-pressure side is connected with the negative electrode of high-voltage diode 272, and the anode of high-voltage diode 272 is connected with pulse transformer 270 secondary low-pressure end, by pulse transformer 270 the energy transferring in secondary capacitance 268 to load 118.

Described auxiliary circuit 110 is made up of contactor, the time relay, resistance, button and indicator light.Contactor is made up of coil and main contacts, auxiliary contact, and main contacts is generally normally opened contact, and auxiliary contact comprise normally opened contact and normally-closed contact, and when contactor coil is by electric current, normally opened contact closes, and normally-closed contact disconnects.The time relay and contactor construction similar, when just coil is by electric current, after time delay a period of time, normally opened contact closes, and normally-closed contact disconnects.In auxiliary circuit 110; the A end of Alternating Current Power Supply 200 is connected by overcurrent protector 206 one end with normally closed button 232; the other end of normally closed button 232 is connected with one end of Chang Kai button 234; the other end often driving button 234 is connected with one end of the first contactor 210 coil, and the other end of the first contactor 210 coil is connected with the N end of Alternating Current Power Supply 200.One end of overcurrent protector 206 is connected with normally opened contact 222 one end of the first contactor 210; the other end of normally opened contact 222 is connected with one end of red light 236; the other end of red light 236 is connected with Alternating Current Power Supply N end, and normally opened contact 222 is connected in parallel on often opens button 234 two ends.One end of overcurrent protector 206 is connected with one end of the normally-closed contact 220 of the first contactor 210, and the other end of normally-closed contact 220 is connected with one end of green light 238, and the other end of green light 238 is connected with the N end of Alternating Current Power Supply 200.One end of overcurrent protector 206 is connected with one end of the normally opened contact 220 of the first contactor 210, and the other end of normally opened contact 220 is connected with one end of the second contactor 212 coil, and the other end of the second contactor 212 is connected with the N end of Alternating Current Power Supply 200.One end of overcurrent protector 206 is connected with one end of the first contactor 210 normally opened contact 224; the other end of normally opened contact 224 is connected with one end of the time relay 214 coil; the other end of the time relay 214 coil is connected with the N end of Alternating Current Power Supply 200; one end of first contactor 210 normally opened contact 216,218 is connected on the two ends of voltage regulator 208 respectively, and the other end of normally opened contact 216,218 is connected on the input of rectifier bridge 240 respectively.The normally opened contact 230 of the second contactor 212 is connected in parallel on the two ends of charging resistor 242, normally-closed contact 228 and the bleeder resistance 246 of the first contactor 210 are connected, be connected in parallel on elementary electric capacity 244 two ends again, reach the object of charge circuit and the elementary capacitive energy of releasing switching elementary electric capacity.

Described absorption protective circuit 114 is made up of resistance, electric capacity, diode.Absorption resistance 262 and the parallel connection of the second diode 266, then connect with Absorption Capacitance 264, be subsequently connected in parallel on the two ends of second switch 252, surge current during absorption switch on and off and peak voltage, protection second switch 252.

Described trigging control loop 112 is made up of pulse generator, photoelectric conversion section and drive circuit, one end of pulse generator 260 is connected with one end of optical-electric module 258, the other end of optical-electric module 258 is connected with one end of optical-electric module 256, the other end of optical-electric module 256 is connected with one end of driving switch 254, the other end of driving switch 254 is connected with one end of switch 252, realizes the adjustment to switch triggering signal and isolation.

Alternating Current Power Supply 100 provides power-frequency voltage to rectifier bridge 102, produces direct voltage by rectifier bridge 102, provides direct voltage to resonance voltage-multiplying circuit 120.Resonance voltage-multiplying circuit 120 produces voltage multiplication, and forms discharge loop with boosting output circuit 116, produces high pressure microsecond pulse to the pulse of load 118 transferring high voltage.

In resonance voltage-multiplying circuit 120, direct voltage give elementary electric capacity 104 charge, produce trigger impulse by drive circuit 112, control the first switch 108 open and disconnect.When the first switch 108 disconnects, by controlling auxiliary circuit 110, elementary electric capacity 104 charges to secondary capacitance 106.When the first switch 108 is opened, secondary capacitance 106 and boosting output loop 116 form discharge loop and produce high pressure microsecond pulse.Protective loop 114 absorbs the surge current and peak voltage that switch produces when turning on and off.Alternating Current Power Supply 100 provides power frequency ac voltage to auxiliary circuit and drive circuit simultaneously.

During repeated frequency high-voltage microsecond pulse power work of the present invention; industrial frequency AC is powered and 200 is provided power frequency ac voltage by air switch 202 to the whole pulse power; be divided into two-way; 10A overcurrent protector 204 of leading up to is powered to main circuit, leads up to 3A overcurrent protector 206 to auxiliary circuit and drive circuitry.When air switch closes, the green light 238 of auxiliary circuit is connected, and presses the button 234, contactor 1 coil 210 is connected, and contactor 1 normally opened contact 222 closes, and forms locking contactor 1 is connected always to button 234, green light 236 is connected, and contactor 1 normally-closed contact 226 disconnects, and green light 238 disconnects.Normally opened contact 224 closes, and the time relay 214 coil is connected, and normally-closed contact 228 disconnects, and bleeder resistance and elementary electric capacity 244 disconnect.Contactor normally-closed contact 216 and 218 closes, and Alternating Current Power Supply regulates input voltage by voltage regulator 208, then obtains direct voltage by rectifier bridge 240, and the direct voltage after rectification charges to elementary electric capacity 244 by buffer resistance 242.Within 5 seconds, normally opened contact 220 is closed later in time relay time delay, and contactor 2 coil 212 is connected, and contactor 2 normally opened contact 230 is connected, and makes buffer resistance 242 short circuit, and direct voltage charges directly to elementary electric capacity 244.Elementary electric capacity 244 charges to secondary capacitance 268 by the first diode 248, inductance 250, the former limit 270 of pulse transformer.Pulse generator 260 produces pulse signal, by optical-electric module 258, the signal of telecommunication is changed into light signal, by optical-electric module 256, light signal is changed into the signal of telecommunication again, Signal transmissions to driving switch 254, control second switch 252 conducting, at this time secondary capacitance 268 passes through second switch 252, the former limit of pulse transformer 270 by Energy Coupling to pulse transformer secondary, then by rectification 272, potential pulse is transferred to load 274.

When described repeated frequency high-voltage microsecond pulse power supply quits work, regulate voltage regulator 208 to minimum, press the button 232, contactor 1 coil 210 disconnects, contactor 1 normally opened contact 216, 218 disconnect, normally-closed contact 222 closes, red light 236 is connected, normally-closed contact 226 closes, green light 238 disconnects, normally opened contact 224 disconnects, the time relay 214 coil disconnects, time relay normally opened contact 220 disconnects, contactor 2 coil 212 disconnects, contactor 2 normally opened contact 230 disconnects, contactor 1 normally-closed contact 228 closes, elementary electric capacity 244 is released by bleeder resistance 246 and tentaculum 1 normally-closed contact 228.

This execution mode is simple to operate, power good failure rate is low, absorption resistance 262, Absorption Capacitance 264 and the second diode 266 absorb second switch 252 open and closed time surge current and peak voltage.

Claims (5)

1. a repeated frequency high-voltage microsecond pulse power supply, it is characterized in that, the described pulse power comprises resonance multiplication of voltage charge circuit (120), boosting output circuit (116), auxiliary circuit (110), the first switch (108), absorbs protective circuit (114) and trigger control circuit (112), resonance multiplication of voltage charge circuit (120) and boosting output circuit (116) cascade, boosting output circuit (116) is connected on the two ends of load (118), auxiliary circuit (110) is connected on the two ends of boosting output circuit (116), absorb the two ends that protective circuit (114) is connected on the first switch (108), trigger control circuit (112) is connected on one end of the first switch (108), resonance multiplication of voltage charge circuit (120) provides inceptive impulse to boosting output circuit (116), boosting output circuit (116) is made to export high pressure microsecond pulse to load (118), auxiliary circuit (110) switches two kinds of charging modes of resonance multiplication of voltage charge circuit (120), absorb the first switch in protective circuit (114) protection resonance voltage-multiplying circuit (120), trigger control circuit (112) to control in resonance voltage-multiplying circuit (120) the first switch OFF and open-minded, and the isolation realized resonance multiplication of voltage charge circuit (120) and boosting output circuit (116),
In described auxiliary circuit (110), the A end of Alternating Current Power Supply (200) is connected by overcurrent protector (206) one end with normally closed button (232), the other end of normally closed button (232) is connected with one end of Chang Kai button (234), the other end often driving button (234) is connected with one end of the first contactor (210) coil, and the other end of the first contactor (210) coil is connected with the N end of Alternating Current Power Supply (200), one end of overcurrent protector (206) is connected with one end of the normally opened contact 222 of the first contactor (210), the other end of normally opened contact 222 is connected with one end of red light (236), the other end of red light (236) is connected with Alternating Current Power Supply N end, and normally opened contact 222 is connected in parallel on the two ends of often opening button (234), one end of overcurrent protector (206) is connected with one end of the normally-closed contact 226 of the first contactor (210), the other end of normally-closed contact 226 is connected with one end of green light (238), the other end of green light (238) is connected with the N end of Alternating Current Power Supply (200), one end of overcurrent protector (206) is connected with one end of the normally opened contact 220 of the first contactor (210), the other end of normally opened contact 220 is connected with one end of the second contactor (212) coil, the other end of the second contactor (212) is connected with the N end of Alternating Current Power Supply (200), one end of overcurrent protector (206) is connected with one end of the first contactor (210) normally opened contact 224, the other end of normally opened contact 224 is connected with one end of the time relay (214) coil, the other end of the time relay (214) coil is connected with the N end of Alternating Current Power Supply (200), one end of two normally opened contacts 216,218 of the first contactor (210) is connected on voltage regulator (208) two ends respectively, and the other end is connected on the input of rectifier bridge (240) respectively, the normally opened contact 230 of the second contactor (212) is connected in parallel on the two ends of charging resistor (242), the normally-closed contact 228 of the first contactor (210) and bleeder resistance (246) series connection, then be connected in parallel on the two ends of elementary electric capacity (244).
2. according to repeated frequency high-voltage microsecond pulse power supply according to claim 1, it is characterized in that, described resonance multiplication of voltage charge circuit (120) is made up of elementary electric capacity (244), inductance (250), the first switch (108) and secondary capacitance (268), the positive ends of elementary electric capacity (244) is connected with the anode of the first diode (248), the negative electrode of the first diode (248) is connected with one end of inductance (250), the other end of inductance (250) is connected with one end of the first switch (108), the other end of the first switch (108) is connected with the other end of elementary electric capacity (244), secondary capacitance (268) is connected in parallel on the two ends of the first switch (108) by pulse transformer (270) former limit, by the break-make of the first switch (108) the energy transferring of elementary electric capacity (244) to secondary capacitance (268).
3. according to repeated frequency high-voltage microsecond pulse power supply according to claim 1, it is characterized in that, described boosting output circuit (116) is made up of pulse transformer (270) and high-voltage diode (272); The secondary high-pressure side of pulse transformer (270) is connected with the negative electrode of high-voltage diode (272), the anode of high-voltage diode (272) is connected with pulse transformer (270) secondary low-pressure end, by pulse transformer (270) the energy transferring in secondary capacitance (268) to load (118).
4. according to repeated frequency high-voltage microsecond pulse power supply according to claim 1; it is characterized in that; in described absorption protective circuit (114); absorption resistance (262) and the second diode (266) parallel connection; again with Absorption Capacitance (264) series connection, be then connected in parallel on the two ends of the first switch (108).
5. according to repeated frequency high-voltage microsecond pulse power supply according to claim 1, it is characterized in that, described trigger control circuit (112) is made up of pulse generator and photoelectric conversion module, one end of pulse generator (260) is connected with one end of photoelectric conversion module (258), the other end of photoelectric conversion module (258) is connected with one end of photoelectric conversion module (256), the other end of photoelectric conversion module (256) is connected with one end of driving switch (254), the other end of driving switch (254) is connected with one end of second switch (252).
CN201310241590.2A 2013-06-18 2013-06-18 A kind of repeated frequency high-voltage microsecond pulse power supply CN103337983B (en)

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