CN103337983A - Repetition-frequency high-voltage microsecond pulsed power supply - Google Patents

Repetition-frequency high-voltage microsecond pulsed power supply Download PDF

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CN103337983A
CN103337983A CN2013102415902A CN201310241590A CN103337983A CN 103337983 A CN103337983 A CN 103337983A CN 2013102415902 A CN2013102415902 A CN 2013102415902A CN 201310241590 A CN201310241590 A CN 201310241590A CN 103337983 A CN103337983 A CN 103337983A
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circuit
switch
power supply
pulse
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CN103337983B (en
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邵涛
黄伟民
章程
张东东
严萍
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Institute of Electrical Engineering of CAS
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Institute of Electrical Engineering of CAS
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Abstract

The invention relates to a repetition-frequency high-voltage microsecond pulsed power supply. According to the repetition-frequency high-voltage microsecond pulsed power supply, a resonant voltage-multiplying charging loop (120) is in cascade connection with a voltage-increasing output circuit (116); the voltage-increasing output circuit (116) is connected to the two ends of a load (118); an auxiliary circuit (110) is connected to the two ends of the voltage-increasing output circuit (116); an absorbing protection circuit (114) is connected to the two ends of a switch (108); and a trigger control circuit (112) is connected to one end of the switch (108). The resonant voltage-multiplying charging loop (120) provides initial pulse to the voltage-increasing output circuit (116), so that the voltage-increasing output circuit (116) outputs high-voltage microsecond pulse to the load (118); the auxiliary circuit (110) switches two charging modes of the resonant voltage-multiplying charging loop (120); the absorbing protection circuit (114) protects the switch of the resonant voltage-multiplying charging loop (120); and the trigger control circuit (112) controls off and on of the switch of the resonant voltage-multiplying charging loop (120) and realizes isolation between the resonant voltage-multiplying charging loop (120) and the voltage-increasing output circuit (116).

Description

A kind of repeated frequency high-voltage microsecond pulse power supply
Technical field
The present invention relates to a kind of high-voltage pulse power source.
Background technology
Low temperature plasma has in fields such as environmental pollution improvement, medical science sterilization, material modification and the controls of flowing to be used and unique advantages widely.Along with the continuous development of plasma technique, the plasma excitation source is constantly innovation also, and the low temperature plasma that different driving sources produce has different physical features and electrical characteristic.Plasma driving source commonly used at present has high-frequency and high-voltage power supply and pulse power supply.Compare with exchanging to drive, the atmospheric pressure plasma of Pulsed Discharge has many advantages, as the efficient that can reach better treatment effect and Geng Gao when dielectric surface is handled etc.And microsecond pulse is compared with nanosecond pulse, not only has the superiority of pulse power, and the entrained energy of individual pulse is bigger, needs more powerful application for some, and there are its inherent advantages in the microsecond pulse source.
The pulse power supply of using towards low temperature plasma also has research widely at home and abroad.As " all solid state high voltage nanosecond pulse power supply " of patent CN101534017, form booster circuit by the voltage cell series connection, by pulse shaping circuit output high-voltage pulse, devices such as this power capacitor and solid-state switch are more, are unfavorable for safeguarding and long-time running again." all solid state high voltage power supply with positive negative pulse stuffing output " of patent CN102035378A is by charged in parallel and the discharged in series output high-voltage pulse of a series of storage capacitors, by different switch combination output positive or negative high voltage pulses.The mode that adopts electric capacity and solid-state switch to make up this Marx or class Marx type makes that power volume is big and cost is higher, and the use pulse transformer can effectively reduce power volume and the pulse power is stable.Electrician research institute adopts pulse transformer to develop a compact unipolarity repetition pulse power source, voltage magnitude can reach 30kV, repetition rate 2kHz(Shao T, Zhang D, Yu Y, Zhang C, Wang J, Yan P, Zhou Y.A compact repetitive unipolar nanosecond-pulse generator for dielectric barrier discharge application [J] .IEEE Transactions on Plasma Science, 2010,38 (7), 1651-1655).Harbin Institute of Technology towards design of Treatment of Waste Gas a kind of LCC inversion charging hybrid energy-storing impulse power electrical source (Wang Xiaoming, Zhao Xianning. a kind of LCC inversion charging hybrid energy-storing impulse power electrical source [J]. High-Voltage Electrical Appliances, 2009,45 (5): 48-53), can realize forward position 1.0 μ s, amplitude 30kV, pulsewidth 1.5 μ s(90% amplitudes) high-voltage pulse output, repeating operating frequency can reach more than the 2.5kHz.Yet this power supply architecture is complicated, is unfavorable for realizing miniaturization.A kind of modularization has been studied by Aachen, Germany Fraunhofer (Fraunhofer-institute fiir) laser technology research institute, low-cost, the efficient height of pulse energy, high-voltage pulse power source (the Klein J that repetition rate is high, Padberg M.A modular low-cost, high-voltage pulse generator that is highly effective in terms of pulse energy and repetition frequency [J] .Measurement Science and Technology.1995,6 (5): 550-553), be applied to the gas plasma body technique, this supply voltage amplitude reaches 100kV, pulsewidth 1 μ s~3 μ s, repetition rate can reach 15kHz.But the concussion on this clock forward position and edge, back is more.Use the pulse power of developing at different plasma at present and had the some shortcomings part: structure is compact inadequately, volume is bigger, and reliability is not high, and the operating time is short, power supply architecture complexity, failure rate height, output voltage amplitude, frequency, pulsewidth adjustability are not high.
Summary of the invention
It is short that the object of the invention is to overcome the prior art operating time, and power supply architecture complexity, the shortcoming that failure rate is high propose a kind of high-voltage pulse power source of several microseconds of pulse duration.Compact conformation of the present invention, the operating time is long, failure rate is low, and pulse voltage amplitude is adjustable at 0-40kV, and pulse frequency is adjustable at 0-15kHz.
High pressure microsecond pulse power supply of the present invention comprises following five parts: resonance multiplication of voltage charge circuit, the output circuit that boosts, auxiliary circuit, absorption protective circuit and trigger control circuit.Resonance multiplication of voltage charge circuit and the output circuit cascade of boosting, the output circuit that boosts is connected on the two ends of load, and auxiliary circuit is connected on the two ends of the output circuit that boosts, and absorbs the two ends that protective circuit is connected on first switch, and trigger control circuit is connected on an end of first switch; Resonance multiplication of voltage charge circuit provides inceptive impulse to the output circuit that boosts, and makes the output circuit that boosts to load output high pressure microsecond pulse; Auxiliary circuit switches two kinds of charging modes of resonance multiplication of voltage charge circuit; Absorb the protective circuit realization to the protection of first switch in the resonance voltage-multiplying circuit; Trigger control circuit realizes the control that first switch in the resonance voltage-multiplying circuit is turn-offed and opens and realizes the isolation of resonance multiplication of voltage charge circuit with the output circuit that boosts.
Described resonance multiplication of voltage charge circuit is made up of elementary electric capacity, inductance, second switch (comprising the classes of semiconductors switch) and secondary capacitance, and the break-make by second switch passes to secondary capacitance to the energy of elementary electric capacity.The described output circuit that boosts is made up of pulse transformer and diode, by pulse transformer the energy on the secondary capacitance is passed to load.Described auxiliary circuit is made up of contactor, the time relay, resistance, button and indicator light, reaches the purpose of the charge circuit that switches elementary electric capacity and the elementary capacitive energy of releasing.Described absorption protective circuit is made up of resistance, electric capacity, diode, surge current and peak voltage when absorbing the second switch break-make, protection second switch.Described trigger control circuit route pulse generator, photoelectric conversion section and driving loop are formed, and realize adjusting and isolation to the second switch triggering signal.
Under the repetition working method, elementary electric capacity in the described resonance multiplication of voltage charge circuit must guarantee in time to give the secondary capacitance constant current charge, this requires elementary electric capacity can in time replenish voltage after discharge, require the charging interval of elementary electric capacity short as far as possible, and when beginning to charge, need reduce charging current.Adopt auxiliary circuit to realize the switching of charge circuit, series resistance is cut off resistance by relay to the primary electrical capacity charge after time-delay a period of time when beginning to charge, and directly gives the primary electrical capacity charge, realizes satisfying the purpose of charging interval and charging current requirement.
In the described resonance multiplication of voltage charge circuit, when second switch disconnected, elementary electric capacity, inductance and secondary capacitance constituted charge circuit.Elementary electric capacity, secondary capacitance and inductance series connection, elementary electric capacity to secondary capacitance resonant charging, makes the secondary capacitance charging be approximately 700V by inductance and pulse transformer leakage inductance.When triggering signal control second switch is opened, the loop discharge that secondary capacitance is made of second switch, pulse transformer leakage inductance and the former limit of pulse transformer, to load, portion of energy is to the secondary capacitance reverse charging by the pulse transformer coupled transfer for most of energy in the process of discharge.
Described absorption protective circuit is used for protecting second switch in overcurrent and the overvoltage of interrupting process generation; second switch bears overcurrent and superpotential poor ability; all can there be certain distributed inductance in the electric power loop; when device turn-offs; can induce the voltage consistent with the high-voltage power supply direction on these inductance; all be added on the second switch after these two voltages are superimposed, may cause switching device to bear too high voltage, cause the device permanent damage.And will bear very big surge current and peak voltage in the moment that turns on and off; certainly will cause the power consumption of second switch to strengthen; module is overheated; can make component failure when serious even damage resonance multiplication of voltage charge circuit and the output circuit that boosts; the present invention adopts corresponding RC to absorb circuit, the protection second switch.
Described trigger control circuit is divided into three parts, is respectively pulse generator, photoelectric conversion section and driving loop.Pulse generator adopts the arm chip, produces the pulse of turnable pulse width, frequency, number, by photoelectric conversion section the signal of telecommunication is changed into light signal and changes into the signal of telecommunication again, outputs to drive the loop, and the generation trigger impulse is controlled opening of second switch and disconnected.This design can be kept apart control circuit and resonance multiplication of voltage charge circuit, the output circuit that boosts, and when having avoided second switch to turn on and off, the interference signal of generation is disturbed for trigger impulse, avoids producing false triggering.
The described output circuit that boosts adopts pulse transformer and high-voltage rectifying module output high pressure microsecond pulse, pulse transformer adopts nickel-zinc ferrite as magnetic core, pulse transformer no-load voltage ratio 1/60, the number of turn is reduced to reduce transformer leakage inductance in the former limit of pulse transformer as far as possible, thereby reduce to export the rising edge of pulse, reduce pulse duration.
The present invention can control impuls voltage magnitude, pulse repetition frequency, and several microseconds of pulse duration.
Description of drawings
Fig. 1 is the general structure block diagram of repeated frequency high-voltage microsecond pulse power supply;
Wherein: 100 ac power supply systems, 102 rectifier bridges, 104 elementary electric capacity, 106 secondary capacitance, 108 first switches, 110 auxiliary circuits, 112 switch driving circuits, 114 switch protection circuit, 116 boost output circuit, 118 loads.
Fig. 2 is the circuit diagram of repeated frequency high-voltage microsecond pulse power supply;
Wherein: 200 is the 220V ac power supply system; 202 air switches; 204; 206 overcurrent protectors; 208 voltage regulators; 210; 212 contactor coils; 214 time relay coils; 216; 218; 220; 222; 224 contactor normally opened contacts; 226; 228 contactor normally-closed contacts; 230 contactor normally opened contacts; 232 normally closed buttons; 234 often drive button; 236; 238 indicator lights; 240 rectifier bridges; 242 charging resistors; 244 elementary electric capacity; 246 bleeder resistances; 248 first diodes; 250 inductance; 252 second switches; 254 switch driving circuits; 256; 258 optical-electric modules; 260 pulse generators; 262 absorption resistances; 264 absorb electric capacity; 266 second diodes; 268 secondary capacitance; 270 pulse transformers; 272 high-voltage diodes; 118 loads.
Embodiment
Further specify the present invention below in conjunction with accompanying drawing and concrete mode.
As shown in Figure 1, repeated frequency high-voltage microsecond pulse power supply of the present invention comprises resonance multiplication of voltage charge circuit 120, the output circuit 116 that boosts, auxiliary circuit 110, first switch 108, absorbs protective circuit 114 and trigger control circuit 112.The power supply architecture compactness, stable performance, the operating time is long, and failure rate is low.
Resonance multiplication of voltage charge circuit 120 provides inceptive impulse for the output circuit 116 that boosts; make 116 pairs of loads of output circuit, the 118 output high pressure microsecond pulses that boost; auxiliary circuit 110 switches two kinds of charging modes of resonance multiplication of voltage charge circuit 120; absorb the protection that protective circuit 114 realizes second switch 252 in the resonance voltage-multiplying circuit 120, trigger control circuit 112 realizes switch shutoff and the control of opening and realization in the resonance voltage-multiplying circuit 120 isolation of main circuit.Resonance multiplication of voltage charge circuit 120 and output circuit 116 cascades of boosting; the output circuit 116 that boosts is connected on load 118 two ends; auxiliary circuit 110 is connected on output circuit 116 two ends of boosting, and absorbs protective circuit 114 and is connected on first switch, 108 two ends, and trigger control circuit 112 is connected on first switch, 108 1 ends.
As shown in Figure 2, described resonance multiplication of voltage charge circuit 120 comprises the classes of semiconductors switch by elementary electric capacity 244, inductance 250, second switch 252() and secondary capacitance 268 form.The positive ends of elementary electric capacity 244 links to each other with the anode of first diode 246, one end of the negative electrode of first diode 246 and inductance 250 links to each other, one end of the other end of inductance 250 and second switch 252 links to each other, the other end of second switch 252 links to each other with the other end of elementary electric capacity 244, secondary capacitance 268 is connected in parallel on the two ends of second switch 252 by pulse transformer 270 former limits, and the break-make by second switch 252 passes to secondary capacitance 268 to the energy of elementary electric capacity 244.
The described output circuit 116 that boosts is made up of pulse transformer 270 and high-voltage diode 272.The negative electrode of pulse transformer 270 secondary high-pressure sides and high-voltage diode 272 links to each other, and the anode of high-voltage diode 272 links to each other with pulse transformer 270 secondary low-pressure ends, by pulse transformer 270 energy on the secondary capacitance 268 is passed to load 118.
Described auxiliary circuit 110 is made up of contactor, the time relay, resistance, button and indicator light.Contactor is made of coil and main contacts, auxiliary contact, and main contacts is generally normally opened contact, and auxiliary contact comprise normally opened contact and normally-closed contact, when contactor coil passes through electric current, and the normally opened contact closure, normally-closed contact disconnects.The time relay and contactor construction are similar, when just coil is by electric current, and after time-delay a period of time, the normally opened contact closure, normally-closed contact disconnects.In the auxiliary circuit 110; the A end of Alternating Current Power Supply 200 is connected by an end of overcurrent protector 206 and normally closed button 232; one end of the other end of normally closed button 232 and Chang Kai button 234 is connected; often open the other end of button 234 and an end of first contactor, 210 coils and be connected, the other end of first contactor, 210 coils and the N of Alternating Current Power Supply 200 end are connected.Normally opened contact 222 1 ends of one end of overcurrent protector 206 and first contactor 210 are connected; one end of the other end of normally opened contact 222 and red light 236 is connected; the other end of red light 236 is connected with Alternating Current Power Supply N end, and normally opened contact 222 is connected in parallel on and often opens button 234 two ends.One end of overcurrent protector 206 is connected with an end of the normally-closed contact 220 of first contactor 210, and an end of the other end of normally-closed contact 220 and green light 238 is connected, and the N end of the other end of green light 238 and Alternating Current Power Supply 200 is connected.One end of overcurrent protector 206 is connected with an end of the normally opened contact 220 of first contactor 210, and the other end of normally opened contact 220 is connected with an end of second contactor, 212 coils, and the N end of the other end of second contactor 212 and Alternating Current Power Supply 200 is connected.One end of overcurrent protector 206 is connected with an end of first contactor, 210 normally opened contacts 224; the other end of normally opened contact 224 is connected with an end of the time relay 214 coils; the other end of the time relay 214 coils is connected with the N of Alternating Current Power Supply 200 end; first contactor, 210 normally opened contacts 216, an end of 218 are connected on the two ends of voltage regulator 208 respectively, and normally opened contact 216,218 the other end are connected on the input of rectifier bridge 240 respectively.The normally opened contact 230 of second contactor 212 is connected in parallel on the two ends of charging resistor 242, the normally-closed contact 228 of first contactor 210 and bleeder resistance 246 series connection, be connected in parallel on elementary electric capacity 244 two ends again, reach the purpose of the charge circuit that switches elementary electric capacity and the elementary capacitive energy of releasing.
Described absorption protective circuit 114 is made up of resistance, electric capacity, diode.Absorption resistance 262 and 266 parallel connections of second diode again with 264 series connection of absorption electric capacity, are connected in parallel on the two ends of second switch 252, surge current and peak voltage when absorbing switch on and off, protection second switch 252 more then.
Described triggering control loop 112 is made up of pulse generator, photoelectric conversion section and driving loop, one end of pulse generator 260 is connected with an end of optical-electric module 258, one end of the other end of optical-electric module 258 and optical-electric module 256 is connected, one end of the other end of optical-electric module 256 and driving switch 254 is connected, one end of the other end of driving switch 254 and switch 252 is connected, and realizes adjusting and isolation to the switch triggering signal.
Alternating Current Power Supply 100 provides power-frequency voltage to rectifier bridge 102, produces direct voltage by rectifier bridge 102, direct voltage is provided for resonance voltage-multiplying circuit 120.Resonance voltage-multiplying circuit 120 produces voltage multiplication, and constitutes discharge loops with the output circuit 116 that boosts, and produces the high pressure microsecond pulse to load 118 transferring high voltage pulses.
In resonance voltage-multiplying circuit 120, direct voltage is given elementary electric capacity 104 chargings, produces trigger impulses by drive circuit 112, control first switch 108 open and disconnect.When first switch 108 disconnected, by control auxiliary circuit 110, elementary electric capacity 104 gave secondary capacitance 106 chargings.When first switch 108 was opened, secondary capacitance 106 and the output loop 116 that boosts constituted discharge loop and produce the high pressure microsecond pulse.Protection loop 114 absorbs surge current and the peak voltage that switch produces when turning on and off.Alternating Current Power Supply 100 provides power frequency ac voltage for simultaneously auxiliary circuit and drive circuit.
During repeated frequency high-voltage microsecond pulse power work of the present invention; industrial frequency AC power supply 200 provides power frequency ac voltage for the whole pulse power by air switch 202; be divided into two-way; lead up to 10A overcurrent protector 204 to the main circuit power supply, and the 3A overcurrent protector 206 of leading up to is given auxiliary circuit and drive circuitry.When air switch was closed, the green light 238 of auxiliary circuit was connected, and presses the button 234, contactor 1 coil 210 is connected, and contactor 1 normally opened contact 222 closures form locking to button 234 and make contactor 1 connect always, green light 236 is connected, and contactor 1 normally-closed contact 226 disconnects, and green light 238 disconnects.Normally opened contact 224 closures, the time relay 214 coils are connected, and normally-closed contact 228 disconnects, and bleeder resistance and elementary electric capacity 244 disconnect.Contactor normally-closed contact 216 and 218 closures, Alternating Current Power Supply is regulated input voltage by voltage regulator 208, obtains direct voltage by rectifier bridge 240 again, and the direct voltage after the rectification is given elementary electric capacity 244 chargings by buffer resistance 242.Time relay time-delay normally opened contact 220 closures after 5 seconds, contactor 2 coils 212 are connected, and contactor 2 normally opened contacts 230 are connected, and make buffer resistance 242 short circuits, direct voltage directly give elementary electric capacity 244 chargings.Elementary electric capacity 244 gives secondary capacitance 268 chargings by first diode 248, inductance 250, the former limit 270 of pulse transformer.Pulse generator 260 produces pulse signals and by optical-electric module 258 signal of telecommunication is changed into light signal, by optical-electric module 256 light signal is changed into the signal of telecommunication again, signal is transferred to driving switch 254,252 conductings of control second switch, at this time secondary capacitance 268 is coupled to the pulse transformer secondary by second switch 252, pulse transformer 270 former limits with energy, by rectification 272 potential pulse is transferred to load 274 again.
When described repeated frequency high-voltage microsecond pulse power supply quits work, regulate voltage regulator 208 to minimum, press the button 232, contactor 1 coil 210 disconnects, contactor 1 normally opened contact 216,218 disconnect, normally-closed contact 222 closures, red light 236 is connected normally-closed contact 226 closures, green light 238 disconnects, normally opened contact 224 disconnects, and the time relay 214 coils disconnect, and time relay normally opened contact 220 disconnects, contactor 2 coils 212 disconnect, contactor 2 normally opened contacts 230 disconnect, contactor 1 normally-closed contact 228 closures, and elementary electric capacity 244 is released by bleeder resistance 246 and tentaculum 1 normally-closed contact 228.
This execution mode is simple to operate, and it is low that power supply is stablized failure rate, absorption resistance 262, absorbs electric capacity 264 and second diode 266 and absorbs second switches 252 and opening and surge current and peak voltage when closed.

Claims (6)

1. repeated frequency high-voltage microsecond pulse power supply, it is characterized in that the described pulse power comprises resonance multiplication of voltage charge circuit (120), the output circuit that boosts (116), auxiliary circuit (110), first switch (108), absorbs protective circuit (114) and trigger control circuit (112); Resonance multiplication of voltage charge circuit (120) and the output circuit that boosts (116) cascade, the output circuit (116) that boosts is connected on the two ends of load (118), auxiliary circuit (110) is connected on the two ends of the output circuit that boosts (116), absorb the two ends that protective circuit (114) is connected on first switch (108), trigger control circuit (112) is connected on an end of switch (108); Resonance multiplication of voltage charge circuit (120) provides inceptive impulse for the output circuit (116) that boosts; make the output circuit that boosts (116) to load (118) output high pressure microsecond pulse; auxiliary circuit (110) switches two kinds of charging modes of resonance multiplication of voltage charge circuit (120); absorb the switch in protective circuit (114) the protection resonance voltage-multiplying circuit (120); switch shutoff and open-minded in trigger control circuit (112) the control resonance voltage-multiplying circuit (120), and realization is to the isolation of resonance multiplication of voltage charge circuit (120) and the output circuit that boosts (116).
2. according to the described repeated frequency high-voltage microsecond pulse of claim 1 power supply, it is characterized in that described resonance multiplication of voltage charge circuit (120) is made up of elementary electric capacity (244), inductance (250), second switch (252) and secondary capacitance (268); The positive ends of elementary electric capacity (244) links to each other with the anode of first diode (246), the negative electrode of first diode (246) links to each other with an end of inductance (250), the other end of inductance (250) links to each other with an end of second switch (252), the other end of second switch (252) links to each other with the other end of elementary electric capacity (244), secondary capacitance (268) is connected in parallel on the two ends of second switch (252) by the former limit of pulse transformer (270), and the break-make by second switch (252) passes to secondary capacitance (268) to the energy of elementary electric capacity (244).
3. according to the described repeated frequency high-voltage microsecond pulse of claim 1 power supply, it is characterized in that the described output circuit that boosts (116) is made up of pulse transformer (270) and high-voltage diode (272); The secondary high-pressure side of pulse transformer (270) links to each other with the negative electrode of high-voltage diode (272), the anode of high-voltage diode (272) links to each other with pulse transformer (270) secondary low-pressure end, by pulse transformer (270) energy on the secondary capacitance (268) is passed to load (118).
4. according to the described repeated frequency high-voltage microsecond pulse of claim 1 power supply, it is characterized in that, in the described auxiliary circuit (110), the A end of Alternating Current Power Supply (200) is connected by an end of overcurrent protector (206) and normally closed button (232), (2320 the other end is connected with an end of Chang Kai button (234) normally closed button, often open the other end of button (234) and an end of first contactor (210) coil and be connected, the other end of first contactor (210) coil is connected with the N of Alternating Current Power Supply (200) end; One end of the normally opened contact (222) of one end of overcurrent protector (206) and first contactor (210) is connected, the other end of normally opened contact (222) is connected with an end of red light (236), the other end of red light (236) is connected with Alternating Current Power Supply N end, and normally opened contact (222) is connected in parallel on the two ends of often opening button (234); One end of the normally-closed contact (220) of one end of overcurrent protector (206) and contactor (210) is connected, the other end of normally-closed contact (220) is connected with an end of green light (238), the N end of the other end of green light (238) and Alternating Current Power Supply (200) is connected, one end of the normally opened contact (220) of one end of overcurrent protector (206) and first contactor (210) is connected, the other end of normally opened contact (220) is connected with an end of second contactor (212) coil, and the N end of the other end of second contactor (212) and Alternating Current Power Supply (200) is connected; One end of overcurrent protector (206) is connected with an end of first contactor (210) normally opened contact (224), the other end of normally opened contact (224) is connected with an end of the time relay (214) coil, the other end of the time relay (214) coil is connected with the N of Alternating Current Power Supply (200) end, one end of two normally opened contacts (216,218) of first contactor (210) is connected on voltage regulator (208) two ends respectively, and the other end is connected on the input of rectifier bridge (240) respectively; The normally opened contact (230) of second contactor (212) is connected in parallel on the two ends of charging resistor (242), and the normally-closed contact (228) of first contactor (210) and bleeder resistance (246) are connected, and is connected in parallel on the two ends of elementary electric capacity (244) again.
5. according to the described repeated frequency high-voltage microsecond pulse of claim 1 power supply; it is characterized in that; in the described absorption protective circuit (114); absorption resistance (262) and second diode (266) parallel connection; with absorption electric capacity (264) series connection, be connected in parallel on the two ends of second switch (252) then again.
6. according to the described repeated frequency high-voltage microsecond pulse of claim 1 power supply, it is characterized in that, described triggering control loop (112) is made up of pulse generator and photoelectric conversion module, one end of pulse generator (260) is connected with an end of photoelectric conversion module (258), the other end of photoelectric conversion module (258) is connected with an end of photoelectric conversion module (256), the other end of photoelectric conversion module (256) is connected with an end of driving switch (254), and the other end of driving switch (254) is connected with an end of second switch (252).
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CN103683981A (en) * 2014-01-02 2014-03-26 中国工程物理研究院流体物理研究所 Unipolarity low-temperature plasma power supply
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CN109995265B (en) * 2019-04-25 2020-06-19 山东大学 Program-controlled high-voltage repetition frequency nanosecond pulse power supply, system and control method
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