CN103322950B - Edge detection method based on ultrasonic wave - Google Patents

Edge detection method based on ultrasonic wave Download PDF

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Publication number
CN103322950B
CN103322950B CN201310249802.1A CN201310249802A CN103322950B CN 103322950 B CN103322950 B CN 103322950B CN 201310249802 A CN201310249802 A CN 201310249802A CN 103322950 B CN103322950 B CN 103322950B
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China
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transducer
move
ultrasonic wave
ultrasonic signal
ultrasonic
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CN103322950A (en
Inventor
连军莉
魏鹏
付纯鹤
周庆亚
黄晓鹏
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Beijing Semiconductor Equipment Institute
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Beijing Semiconductor Equipment Institute
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Abstract

The invention relates to an edge detection method based on ultrasonic waves, which comprises the following steps: step 11: placing a transducer above a device to be tested, and starting the transducer; step 12: moving the transducer in a plane; step 13: and recording the position of the transducer when the ultrasonic signal received by the transducer changes, and executing the step 12. The method utilizes the characteristic that the ultrasonic wave meets interface reflection, and obtains the edge position of the device by monitoring the change of the ultrasonic signal sent to the surface of the device by the transducer, thereby improving the accuracy of the detection of the edge position of the device, improving the detection efficiency and saving the manpower.

Description

Edge detection method based on ultrasonic wave
Technical field
The invention belongs to fields of measurement, it is related to the edge detection method based on ultrasonic wave.
Background technology
It is thus necessary to determine that the size of device under test before device carries out nondestructive inspection test.In prior art, the chi of device Very little being usually manually is estimated or is determined according to the basic document of device under test.But by way of artificial range estimation, can make Become to produce very big error in actual mechanical process, specifically need to manipulate nondestructiving inspecting equipment through multiple repetition ability Find the substantially edge of device although can find, but be reduction of the efficiency of detection, waste time and energy.And according to device under test The size to determine device for the basic document, again can due in the case of losing in the stock of device it is still desirable to artificial Range estimation carries out the mensure of device size.
Content of the invention
It is an object of the invention to provide a kind of edge detection method based on ultrasonic wave, in order to carry out nondestructive inspection in device The size of device under test is accurately determined before test.
In order to reach foregoing invention purpose, the invention provides a kind of edge detection method based on ultrasonic wave, including:
Step 11:Transducer is placed in above device under test, starts described transducer;
Step 12:In one plane move described transducer;
Step 13:Record described transducer and receive the position being located when ultrasonic signal changes, execution step 12.
Preferred as technique scheme, methods described also includes:Step 14:Calculate the distance between two positions, Obtain the size in the rectilinear direction corresponding to two positions.
Preferred as technique scheme, described transducer be located at described plane initial position for described device in institute State within projection in plane.
Preferred as technique scheme, described transducer receives the position being located when ultrasonic signal changes It is specially:Described transducer receives the ultrasonic signal generation position that step is located when beating from big to small.
Preferred as technique scheme, described move described transducer in the plane and include:
The size measuring described device first direction is:Move described transducer in the first direction or against first direction, when When described transducer receives ultrasonic signal and changes, move backward described transducer, until described transducer receives The ultrasonic signal marginal check that then completes on first direction when changing.
Preferred as technique scheme, when having pore structure in the middle of described device, the maximum of described pore structure is straight Footpath is D, described move described transducer in the plane and includes:
The size measuring described device first direction is:Move described transducer in the first direction or against first direction, when When described transducer receives ultrasonic signal and changes, continue to move to described transducer apart from L:
If the described ultrasonic signal that described transducer receives is initial level, continue to move to described transducer;
Step from big to small is occurred to beat compared with initial level if described transducer receives described ultrasonic signal, Then record described transducer and receive position when ultrasonic signal changes, and move backward described transducer;
Wherein, described L>D.
Preferred as technique scheme, described device under test is horizontal positioned, and described transducer is placed in described to be measured The top of device.
Preferred as technique scheme, it is provided with couplant, institute between described device under test and described transducer State couplant and include deionized water or absolute alcohol.
Present invention also offers a kind of edge detecting device based on ultrasonic wave, including:Controller and transducer;
Described controller is connected with impulse sender, and described impulse sender is connected to the sending port of described transducer;
The receiving port of described transducer is connected with pulse receiver, and described pulse receiver is connected to data collecting card, Described data collecting card is connected to described controller.
Preferred as technique scheme, described transducer is further fixed on mobile power unit, described mobile power list The control end of unit is connected to described controller, for controlling described mobile power unit to drive described transducer to move.
Effect of the invention is that:
The edge detection method based on ultrasonic wave that the present invention provides, by transducer is placed in above device under test, and In one plane move described transducer;Record described transducer and receive the position being located when ultrasonic signal changes Put.The technical scheme that the present invention provides runs into the characteristic of interface reflection using ultrasonic wave, is sent to device by monitoring transducer The ultrasonic signal change on surface carrys out the marginal position of acquisition device, the method increases the accuracy of device edge position detection And improve the efficiency of detection, save manpower.
The edge detecting device based on ultrasonic wave that the present invention provides, is connected with impulse sender, pulse by controller Transmitter is connected to the sending port of transducer;The receiving port of transducer is connected with pulse receiver, described pulse receiver It is connected to data collecting card, described data collecting card is connected to described controller.The technical scheme that the present invention provides utilizes ultrasonic Ripple runs into the characteristic of interface reflection, carrys out acquisition device by the ultrasonic signal change that monitoring transducer is sent to device surface Marginal position, the method increases the accuracy of device edge position detection and improves the efficiency of detection, save manpower.
Brief description
By the description below in conjunction with the accompanying drawings its exemplary embodiment being carried out, the utility model features described above and advantage will Can become more fully apparent with easy to understand.
A kind of schematic flow sheet of edge detection method based on ultrasonic wave that Fig. 1 provides for one embodiment of the invention.
Fig. 2 is the schematic diagram of a scenario of the rim detection in Fig. 1 based on ultrasonic wave.
Fig. 3 is the mobile route of transducer in Fig. 1.
A kind of structural representation of edge detecting device based on ultrasonic wave that Fig. 4 provides for further embodiment of this invention.
Wherein, 1- controller;2- transducer;3- impulse sender;4- pulse receiver;5- data collecting card;6- moves Power unit.
Specific embodiment
Below in conjunction with the accompanying drawings the present invention is described in further detail.
Ultrasonic wave is the sound wave that frequency is more than 20Khz, because its wavelength is very short, straightline propagation the same with light wave.Super In interface, some can be reflected sound wave, and some can be through this interface.In interface ultrasonic reflections with the relative intensity that passes through It is to be determined by the acoustic impedance of interface both sides material.Ultrasonic wave has high-resolution, highly sensitive advantage, is visited using ultrasonic wave Wound real-time detection can go out the size of fine defects, location and shape.Ultrasonic wave is usually used in nondestructive inspection test equipment (such as:Super Ultra sonic scanner microscope), look for submarine and the shoal of fish, physical examination equipment, supersonic wave cleaning machine (15 ~ 50KHz), ultrasonic with sonar Ripple humidifier, ultrasonic bonding (15 ~ 40KHz) etc..
A kind of schematic flow sheet of edge detection method based on ultrasonic wave that Fig. 1 provides for one embodiment of the invention, knot Close shown in Fig. 1, present embodiments provide a kind of edge detection method based on ultrasonic wave, including:
Step 11:Transducer is placed in above device under test, starts transducer.The device under test that the present embodiment adapts to is permissible Including:The device of smooth surface, the device of surface irregularity, but be totally in same level, or surface slightly tilts Device.
This device under test can select horizontal direction to place it is also possible to select vertical direction fixed placement.If this device Place for horizontal direction, then place a transducer at the top of this device, by faced by the receiving port of ultrasonic wave and sending port This device.If this device is vertical direction fixed placement, before transducer placement and this device, by the receiving terminal of ultrasonic wave Mouth and sending port are in the face of this device.No matter device under test selects which kind of modes of emplacement, ultrasonic transmission direction and device under test The plane that is located of surface to be measured of device under test between for being vertically arranged.Preferably device under test is carried out water in the present embodiment Square to placement, thus need not specific fixing device.
Step 12:In one plane move transducer.For the movement of transducer, can be by using motor, pneumatic Or hydraulic means etc. to move it is also possible to move manually to control.During movement, transducer is constantly launched ultrasonic wave and is arrived Reach device under test direction.Judged between the position that transducer and device surface are got along according to the acoustic signals that device surface returns Relation, transducer is placed in above device under test, both can be in the surface range of device under test or to be measured Outside the surface range of device.If in the case that transducer is placed in the surface range of device under test, transducer sends ultrasonic wave Signal, to the surface of this device, can receive the ultrasonic signal of device front surface reflection, continues to move to surpass when transducer is mobile Go out the surface of device, the ultrasonic reflections signal receiving can change, for example ultrasonic reflections blackout or connect The ultrasonic reflections signal receiving weakens, and all in all, the waveform of the ultrasonic signal reflecting occurs the situation of step; Similar with above-mentioned situation, if in the case that transducer is placed in outside the surface range of device under test, transducer sends ultrasonic wave Outside the surface of device, when transducer moves to reach the surface of device, ultrasonic reflections signal step to signal can occur.Always It, no matter which kind of metering system, in the marginal portion on device under test surface, the ultrasonic signal that transducer receives can become Change.The whole edges finding device under test if necessary can move transducer by the move mode of such as progressive scan.
Step 13:Record transducer receives the position being located when ultrasonic signal changes.In the present embodiment, handle changes The position that the ultrasonic signal of energy device reception device under test surface reflection changes is defined as the edge of device.Repeat above-mentioned step Suddenly, the edge of all directions needed for device under test can be found.
Determine the edge of device by judging the reflection case on device under test surface for the ultrasonic wave, specially work as ultrasonic wave Identical material is propagated, does not launch, when ultrasonic wave runs into layering it may occur that launching.
This method is the method at a kind of efficient, the intelligent autodetector part edge based on ultrasonic wave, convenient and swift.This The edge detection method based on ultrasonic wave that embodiment provides is by being placed in transducer above device under test and flat at one Mobile described transducer on face;Record described transducer and receive the position being located when ultrasonic signal changes.This enforcement The technical scheme that example provides runs into the characteristic of interface reflection using ultrasonic wave, is sent to the super of device surface by monitoring transducer Acoustic signals change carrys out the marginal position of acquisition device, the method increases the accuracy of device edge position detection and improves The efficiency of detection, saves manpower.
Preferred as technique scheme, method also includes:Step 14:Calculate the distance between two positions, obtain The size in rectilinear direction corresponding to two positions.After the edge position information getting device, ask for certain if necessary The size of the device on individual direction just can be passed through the distance between this direction Shang Liangge position and obtain, and be specifically referred to In plane right-angle coordinate, distance between two points asks for mode.Dimensional measurement due to only needing to device under normal circumstances is usual Only need to the size of X, Y-direction, so the device size of this both direction can be carried out by the positional information at X, the edge of Y-direction Ask for.
Preferred as technique scheme, the initial position that transducer is located at plane projects it in the plane for device Interior.Within transducer projects in the plane positioned at device, then the moving range of transducer is confined to device and projects it in the plane Interior, compared to the external margin of measurement device, the distance of relative movement little, save edge-detection time, and for measurement one Size on individual direction moves backward after only needing to an edge is detected and can detect that another edge, so this two sides As long as the size on the direction of edge place asks for the distance between two marginal positions can ask for.
Preferred as technique scheme, it is concrete that transducer receives the position being located when ultrasonic signal changes For:Transducer receives the ultrasonic signal generation position that step is located when beating from big to small.When transducer is located at plane Initial position for device project in the plane within when, transducer original state receive device under test surface reflection ultrasonic Wave reflection signal, when the ultrasonic reflections signal that transducer in the planar range of removal device receives can produce step, so It can be assumed that receiving, for transducer, the edge that ultrasonic signal occurs the position that step is located when beating from big to small to be device Position.
Preferred as technique scheme, move transducer in the plane and include:
The size of measurement device first direction is:Move transducer, when transducer connects in the first direction or against first direction When receiving ultrasonic signal and changing, move backward transducer, until the ultrasonic signal that transducer receives changes Shi Ze completes the marginal check on first direction.Specific operating procedure is taking the description below as a example:Device under test is kept flat, will Transducer moves to above device under test.Because ultrasonic wave can reflect in any layering interfaces, by judging device under test The situation on surface is determining the edge of device.Mobile transducer, it is possible to use motor control is moving it is also possible to move manually. During movement, constantly transmitting ultrasonic wave reaches device surface, judges to change according to the acoustic signals that device surface returns Whether also above device surface, the position that device under test surface acoustic wave signal is disappeared is defined as the edge of device to energy device.Weight Multiple above-mentioned steps, can find the edge of device under test all directions.According to two edges on same straight line it may be determined that device Part size in this direction.
Preferred as technique scheme, it is provided with couplant between device under test and transducer, this couplant Deionized water or absolute alcohol etc. can be included.Propagated in atmosphere due to ultrasonic wave and can there is layering or absciss layer, propagation condition Poor, and be placed in water propagation and can accurately reflect when running into interface, it is easy to the accuracy of device edge detection.
The core content of the present embodiment is:Device under test is lain in couplant, moves transducer to above device, Find the reflection sound wave of device surface.Transducer is moved by industrial computer controlled motor, is first moved to the left, real-time judge device table The situation of face reflection sound wave, if surface reflected sonic signals are strong, continues to move to, and otherwise stops moving, and records transducer Current location, is defined as the left side edge of device.Transducer is controlled to move right, the feelings of real-time judge device surface reflection sound wave Condition the position of recording surface reflection sound wave disappearance, are defined as the right side edge of device.Right side edge position is deducted left side Edge position, the as size of device horizontal direction.In the same manner, transducer is moved up and down, you can obtain in device vertical direction Edge and size.
Fig. 2 is the schematic diagram of a scenario of the rim detection in Fig. 1 based on ultrasonic wave, and Fig. 3 is the mobile road of transducer in Fig. 1 Footpath, in conjunction with shown in Fig. 2 and Fig. 3, the edge detecting step that the present embodiment provides can be:
Step 101:Device is lain in couplant, transducer moves at the top p1 of device, when transducer exists At p1 above device under test, ultrasonic wave reaches device surface by couplant, runs into unlike material, reflects, transducer Receive reflected signal;
Step 102:First look for the edge of horizontal direction, transducer moves to p2 direction, in moving process, sentences in real time Disconnected surface reflected sonic signals, if reflected signal is stronger, continue to move to same direction, if ultrasonic reflections signal is sent out Raw step, then record the current location of transducer, as one marginal position p2;
Step 103:Look for another edge of horizontal direction, after finding an edge, control transducer counter motion, equally exist When there is step in ultrasonic reflections signal, the current location of record transducer, it is another marginal position p3;
Step 104:Calculating device size in this direction, two marginal positions are subtracted each other, and that is, p3-p2 is device in this water Size square upwards;
Step 105:In the same manner, move up transducer in the side perpendicular with above-mentioned horizontal direction, device can be found Top edge and lower limb are it is possible to the size of the direction of calculating device.
Step 106:To calculate the size on remaining direction, device can be placed so that treating according to certain position Survey consistent with the direction of motion of transducer or with transducer the direction of motion in direction perpendicular.
It will usually include the device that some have pore structure in the device carrying out nondestructive inspection using ultrasonic wave, these Device due to including inward flange, so preferred as technique scheme, when there is pore structure in the middle of device, pore structure Maximum gauge is D, moves transducer in the plane and includes:
The size of measurement device first direction is:Move transducer, when transducer connects in the first direction or against first direction When receiving ultrasonic signal and changing, continue to move to transducer apart from L:
If the ultrasonic signal that transducer receives is initial level, continue to move to transducer;
Step from big to small is occurred to beat compared with initial level if transducer receives ultrasonic signal, record changes Energy device receives position when ultrasonic signal changes, and moves backward transducer;
Wherein, L>D.
Pore structure on specific such as device under test is the through hole of a circle, and a diameter of 10cm of its maximum then continues Mobile transducer can be, for example, the suitable scope such as 12cm, 15cm apart from L.
Centre is had to the device under test of pore structure, can arrange surface disappearance apart from tolerance, equally can determine and treat Survey the positions and dimensions of device.Specifically, the middle device with hole is lain in couplant, this couplant can select Select deionized water or absolute alcohol, specifically can be selected accordingly according to device under test, mobile transducer is in device It is not the top of hole site, find the reflection sound wave of device surface, and arranged apart from tolerance L according to the diameter D of largest hole.Pass through Industrial computer controlled motor moves transducer, is first moved to the left, the situation of real-time judge device surface reflection sound wave, if surface is anti- Penetrate ultrasonic signal to change, continue to move to.Because this device has inner hole structure, for being should in place of preventing this signal intensity Whether the edge of inner hole structure, need to continue to move to transducer apart from tolerance L, and judge the ultrasonic reflections signal receiving with just There is step and beat in beginning signal, if there are then stopping moving, and record the position that the received ultrasonic signal of transducer changes Put, be defined as the left side edge of device;If the ultrasonic reflections signal receiving behind the position of mobile L and initial signal phase There is step than not to beat, then need to continue to move to transducer, find left side edge, in method and above-described embodiment, there is not hole The device edge detection method of structure is identical, will not be described here.Edge method on the right side of detection device and detection left side edge Method identical, referring to said process.Right side edge position is deducted left side edge position, the as chi of device horizontal direction Very little.In the same manner, transducer is moved up and down, you can obtain the edge in device vertical direction and size.
The method comprises the following steps:
Step 201:To have pore structure device and lie in couplant, transducer will move to the upper of device no hole site At square p1;
Step 202:First look for the edge of horizontal direction, transducer moves to p2 direction, in moving process, sentences in real time Disconnected surface reflected sonic signals.If reflected signal is stronger, continue to move to same direction, if ultrasonic reflections signal is sent out Raw step, continues to move to a segment distance, if the distance that surface disappears is more than the current location recording transducer apart from tolerance L, It is a marginal position p2;If the distance that surface disappears is less than apart from tolerance L, i.e. device surface reflectance ultrasound ripple signal weight again Newly reach initial level, then continue to move to, until the distance that surface disappears is more than till tolerance L, record working as of transducer Front position, as one marginal position p2;
Step 203:Look for another edge of horizontal direction, after finding an edge, control transducer counter motion, equally super When sound wave reflected signal occurs step to beat, continue to move to a segment distance, if the distance that surface disappears is more than apart from tolerance L, The current location of record transducer, as one marginal position p3;If the distance that surface disappears is less than apart from tolerance L, i.e. device Surface reflectance ultrasound ripple signal reaches initial level again, then continue to move to, until the distance that surface disappears is more than distance appearance Till difference L, the current location of record transducer, it is another marginal position p3;
Step 204:Calculating device size in this direction, two marginal positions are subtracted each other, and that is, p3-p2 is device in the party Size upwards;
Step 205:In the same manner, move up transducer in the side perpendicular with above-mentioned horizontal direction, device can be found Top edge and lower limb are it is possible to the size of the vertical direction of calculating device;
Step 206:To calculate the size on remaining direction, device can be placed so that treating according to certain position Survey consistent with the direction of motion of transducer or with transducer the direction of motion in direction perpendicular.
A kind of structural representation of edge detecting device based on ultrasonic wave that Fig. 4 provides for further embodiment of this invention, In conjunction with shown in Fig. 4, it is somebody's turn to do the edge detecting device based on ultrasonic wave, including:Controller 1 and transducer 2;
Controller 1 is connected with impulse sender 3, and impulse sender 3 is connected to the sending port of transducer 2;
The receiving port of transducer 2 is connected with pulse receiver 4, and pulse receiver 4 is connected to data collecting card 5, data Capture card 5 is connected to controller 1.Dotted arrow line in wherein Fig. 4 shows the direction of transfer of ultrasonic signal, runs into device table Reflect during face.
If ultrasonic reflections signal is weaker, it is connected to pulse receiver 4 and transducer 2 using amplifier, and pulse Between transmitter and transducer 2, carry out the amplification of ultrasonic signal, do not show in the accompanying drawings.
Preferred as technique scheme, transducer 2 is further fixed on mobile power unit 6, the control of mobile power unit 6 End processed is connected to controller 1, for controlling mobile power unit 6 to drive transducer 2 mobile.This mobile power unit can be electricity Motivation, pneumatic, hydraulic power unit, to provide power for transducer.
The specific using method of the edge detecting device based on ultrasonic wave providing in the present embodiment and realization are to device The method of rim detection refers to the introduction of the above-mentioned edge detection method based on ultrasonic wave, will not be described here.
The exhaustion of above-described embodiment not specific embodiment, also can have other embodiments, above-described embodiment purpose exists In the explanation present invention, rather than limit the scope of the invention, all applications being come by simple change of the present invention all fall within this In the protection domain of invention.
This patent specification goes to show the present invention using example, including optimal mode, and makes to be familiar with this area Technical staff manufactures and uses the present invention.This invents delegatable scope and includes in the content and specification of claims Specific embodiment and the content of other embodiments.These other examples also should belong to the scope of claims of the present invention, As long as they contain the technical characteristic described by the identical written language of claim, or they include no real with claim The technical characteristic described by similar literal language of matter difference.
All patents, the full content of patent application and other bibliography should be incorporated by reference into present specification.But It is if one of the application term and the term phase conflict having included bibliography, preferential with the term of the application.
All scopes disclosed herein all include end points, and are to combine independently of one another between end points.
It should be noted that " first ", " second " or similar vocabulary are not offered as any order, quality or importance, It is used only to distinguish different technical characteristics.The qualifier " about " that combined amount uses comprises described value and content context refers to Fixed implication.(For example:It includes error during measurement specific quantity).

Claims (6)

1. a kind of edge detection method based on ultrasonic wave is it is characterised in that include:
Step 11:Transducer is placed in above device under test, starts described transducer;
Step 12:In one plane move described transducer;
Step 13:Record described transducer and receive the position being located when ultrasonic signal changes, execution step 12;
Described transducer be located at described plane initial position project on the plane for described device within;
When having pore structure in the middle of described device, the maximum gauge of described pore structure is D, described move in the plane described in change Can device include:
The size measuring described device first direction is:Move described transducer, when described in the first direction or against first direction When transducer receives ultrasonic signal and changes, continue to move to described transducer apart from L:
If the described ultrasonic signal that described transducer receives is initial level, continue to move to described transducer;
Occur step from big to small to beat compared with initial level if described transducer receives described ultrasonic signal, remember Record described transducer and receive position when ultrasonic signal changes, and move backward described transducer;
Wherein, described L>D.
2. the edge detection method based on ultrasonic wave according to claim 1 is it is characterised in that methods described also includes: Step 14:Calculate the distance between two described positions, obtain the size in the rectilinear direction corresponding to two positions.
3. the edge detection method based on ultrasonic wave according to claim 1 is it is characterised in that described transducer receives The position being located when ultrasonic signal changes is specially:Described transducer receives ultrasonic signal and rank from big to small occurs The position that jump is located when beating.
4. the edge detection method based on ultrasonic wave according to claim 1 is it is characterised in that described move in the plane Described transducer includes:
The size measuring described device first direction is:Move described transducer, when described in the first direction or against first direction When transducer receives ultrasonic signal and changes, move backward described transducer, until described transducer receive super The marginal check on first direction is then completed when acoustic signals change.
5. the edge detection method based on ultrasonic wave according to claim 1 is it is characterised in that described device under test is water Placing flat, described transducer is placed in the top of described device under test.
6. the edge detection method based on ultrasonic wave according to claim 1 is it is characterised in that described device under test and institute State and be provided with couplant between transducer, described couplant includes deionized water or absolute alcohol.
CN201310249802.1A 2013-06-21 2013-06-21 Edge detection method based on ultrasonic wave Expired - Fee Related CN103322950B (en)

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