CN103318837A - Flexible noise reduction bionic mebrane with blocking property and preparation method thereof - Google Patents

Abstract

The invention discloses a flexible noise reduction bionic mebrane with a blocking property and a preparation method thereof, and belongs to the field of noise reduction and coupling bionic technologies. The flexible noise reduction bionic mebrane comprises a multi-layer bionic night owl noise reduction refined structure and a bionic gecko adhesion structure with a cavity, and the two structures are integrated through a chemical bond. The multi-layer bionic night owl noise reduction refined structure comprises a top-layer bionic cilium array and a bottom-layer lattice structure; the bionic gecko adhesion structure comprises an upper-layer cavity array and a lower-layer micrometer adhesion array; the membrane is made of flexible SU8 and flexible PDMS (polydimethylsiloxane). The bionic cilium array of the bionic membrane is capable of eliminating noises; the lattice structure and the cavity array are combined to form a micropore array capable of absorbing sound and lowering noises; the micrometer adhesion array is capable of performing dry adhesion. According to the invention, the flexible noise reduction bionic mebrane combines the noise elimination structure with the sound absorption and noise lowering structure to realize the effect of coupling and noise reduction, and in addition, the adhesion array is integrated, so that convenience in mounting is facilitated.

Description

A kind of bionical diaphragm of flexible and denoising with adhesion property and preparation method thereof

Technical field:

The invention belongs to noise reduction and coupling bionics techniques field, particularly a kind of bionical diaphragm of flexible and denoising with adhesion property and preparation method thereof.

Background technology:

Evolution through 3,500,000,000 years, the earth is showed and has been dissolved the various biological species of counting with ten million kind, these biomorphs, ability are different, but their common ground is to have possessed tissue, organ and the structure that adapts with living environment, and this technological innovation for the mankind provides unlimited imagination space.The formed marvellous function of organism structure long-term evolution such as the quiet flight of cat owl and the remarkable functions such as hand walk of gecko, mostly comes from the multi-level exquisite structure on the relevant organ micro/nano-scale.This synergy and mechanism of striding the micro/nano-scale structure will provide important enlightenment for the mankind design function element of new generation.The bionic principle of application engineering and method realize some function under some specific operation, and this is not only the basic task of engineering bionics, also is the actual demand of numerous engineering fields.

Summary of the invention:

The purpose of this invention is to provide a kind of bionical diaphragm of flexible and denoising with adhesion property and preparation method thereof, the bionical diaphragm of this flexible and denoising can stick to curved surface, play noise elimination, sound absorption, for the stealthy equipment of the civilian mechanical harmony of development low noise provides core devices.

A kind of bionical diaphragm of flexible and denoising with adhesion property provided by the present invention is made of imitative cat owl noise reduction multilayer fine structure and imitative gecko adhesion arrangement two structure bondings; Described imitative cat owl noise reduction multilayer fine structure is comprised of the imitative cilium array of top layer and the lattice structure of bottom; Described imitative gecko adhesion arrangement is comprised of the micron adhesion Array with array of cavities, and described array of cavities is on the upper strata, and described micron adhesion Array is in lower floor.

Cilium is of a size of in the described imitative cilium array: diameter 20～200 μ m, length 100～2000 μ m, spacing 200～4000 μ m.

Lattice dimensions is in the described lattice structure: diameter 20～100 μ m, spacing 200～4000 μ m.

Described imitative cat owl noise reduction multilayer fine structure is by the thick glue manufacturing of SU8.

Described array of cavities is of a size of: length and width 5～20mm, the degree of depth 5～10mm, spacing 1～5mm.

Described micron adhesion Array is by the polydimethylsiloxane manufacturing.

Preparation method's concrete steps of a kind of bionical diaphragm of flexible and denoising with adhesion property provided by the present invention are as follows:

(1) at the bottom of silicon wafer-based, apply one deck photoresist, this photoresist is carried out the standard photolithography process flow process: front baking, overall exposing, rear baking, this photoresist makes things convenient for detaching structure as sacrifice layer;

(2) rotary coating SU8 glue, front baking is exposed with mask, and rear baking is developed, and obtains imitative cat owl multilayer grid loose structure;

(3) on bottom SU8 architecture basics, make again the imitative ciliary structures of large ratio of height to width, step is the same;

(4) photoresist of removal step (1) obtains imitative cat owl noise reduction multilayer fine structure;

(5) use silica as mask, adopt inductively coupled plasma ICP dry etching technology to make the silicon micropore template of large ratio of height to width;

(6) rotary coating PDMS left standstill 10～20 minutes, then was placed on vacuum chamber and vacuumized, and PDMS flows in the micropore, keeps vacuum environment 30～60 minutes;

(7) adopt the template stamping technique, impress out array of cavities on the PDMS top layer;

(8) 65 ℃ of temperature, heat PDMS is solidified, peel manually obtains imitative gecko adhesion arrangement from PDMS;

(9) imitative gecko adhesion arrangement two structures that the imitative cat owl noise reduction multilayer fine structure that step (4) is obtained and step (8) obtain are synthetic whole by bonding, and concrete bonding process is as follows:

The APTES steam that the oxygen base is rich in utilization carries out silanization, the silanization time 2 h to described imitative cat owl noise reduction multilayer fine structure; Utilize oxygen gas plasma that described imitative gecko adhesion arrangement is activated, activate power 400W, activationary time 15s; Then with the imitative cat owl noise reduction multilayer fine structure behind the silanization with activate after imitative gecko adhesion arrangement aim at, at temperature 70 C, apply under the pressure of 30N～60N heating and finished bonding in 10 minutes, obtain the bionical diaphragm of described flexible and denoising.

The imitative cilium array that can adhere to the bionical diaphragm of flexible and denoising plays the noise elimination effect; Lattice structure and array of cavities are combined into microwell array and play the sqouynd absorption lowering noise effect; The micron adhesion Array plays the rigidity adhesive attraction.Manufactured materials is SU8 and PDMS, is flexibility.

Beneficial effect of the present invention: will eliminate the noise and be in the same place with the sqouynd absorption lowering noise textural association, and reach the coupling denoise effect, integrated adhesion Array is conveniently installed simultaneously.Manufactured materials is flexibility, makes it to adapt to curved surface.

Description of drawings:

Fig. 1 is the structural representation of the bionical diaphragm of flexible and denoising of the present invention;

Fig. 2 is imitative cat owl noise reduction multilayer fine structure schematic diagram among the present invention;

Fig. 3 is gecko adhesion arrangement schematic diagram among the present invention;

Fig. 4 is the imitative cat owl noise reduction multilayer fine structure manufacturing process schematic diagram among the present invention;

Fig. 5 is the imitative gecko adhesion arrangement manufacturing process schematic diagram among the present invention.

Among the figure: 1: imitative cilium array, 2: lattice structure, 3: array of cavities, 4: micron adhesion Array, 5: substrate of glass, 6: photoresist, 7: bottom SU8,8: top layer SU8,9: silicon, 10:PDMS.

The specific embodiment:

A kind of bionical diaphragm of flexible and denoising with adhesion property provided by the present invention is made of imitative cat owl noise reduction multilayer fine structure and imitative gecko adhesion arrangement two structure bondings; Described imitative cat owl noise reduction multilayer fine structure is comprised of the imitative cilium array of top layer and the lattice structure of bottom; Described imitative gecko adhesion arrangement is comprised of the micron adhesion Array with array of cavities, and described array of cavities is on the upper strata, and described micron adhesion Array is in lower floor.

The preparation of imitative cat owl noise reduction multilayer fine structure is referring to Fig. 2 and Fig. 4, and concrete steps are as follows:

1, at the bottom of silicon wafer-based, applies one deck photoresist, this photoresist is carried out the standard photolithography process flow process: front baking, overall exposing, rear baking.This photoresist makes things convenient for detaching structure as sacrifice layer, sees Fig. 4 (a).

2, rotary coating SU8 glue, front baking is exposed with mask, rear baking is developed, and obtains imitative cat owl multilayer grid loose structure, sees Fig. 4 (b), 4(c).

3, on bottom SU8 architecture basics, make again the imitative ciliary structures of large ratio of height to width, step is the same, sees Fig. 4 (d), 4(e).

4, remove the photoresist of step 1, obtain imitative cat owl noise reduction multilayer fine structure, see Fig. 4 (f).

The preparation of imitative gecko adhesion arrangement is referring to Fig. 3 and Fig. 5, and concrete steps are as follows:

1, uses silica as mask, adopt inductively coupled plasma ICP dry etching technology to make the silicon micropore template of large ratio of height to width, see Fig. 5 (a).

2, rotary coating PDMS left standstill 10～20 minutes, then was placed on vacuum chamber and vacuumized, and PDMS flows in the micropore, kept vacuum environment half an hour to 1 hour, saw Fig. 5 (b).

3, adopt the template stamping technique, impress out array of cavities on the PDMS top layer, see Fig. 5 (c).

4,60 degree heating were solidified PDMS in 4 hours, manually peeled off PDMS, obtained the imitative gecko adhesion arrangement with array of cavities, saw Fig. 5 (d).

The imitative cat owl noise reduction multilayer fine structure and imitative gecko adhesion arrangement two structures that obtain are synthetic whole by bonding, and concrete bonding process is as follows:

The first-selected silane steam (such as APTES APS) that is rich in the oxygen base that utilizes carries out silanization, time 2 h to SU8; Utilize oxygen gas plasma (400W, 15s) that PDMS is activated, then aim at, last 70 degree heating 10 minutes apply under the pressure of 30N～60N and carry out bonding, obtain the bionical diaphragm of described flexible and denoising.

Claims (7)

1. the bionical diaphragm of flexible and denoising with adhesion property is characterized in that described bionical diaphragm is made of imitative cat owl noise reduction multilayer fine structure and imitative gecko adhesion arrangement two structure bondings; Described imitative cat owl noise reduction multilayer fine structure is comprised of the imitative cilium array of top layer and the lattice structure of bottom; Described imitative gecko adhesion arrangement is comprised of the micron adhesion Array with array of cavities, and described array of cavities is on the upper strata, and described micron adhesion Array is in lower floor.

2. the bionical diaphragm of flexible and denoising according to claim 1 is characterized in that cilium is of a size of in the described imitative cilium array: diameter 20～200 μ m, length 100～2000 μ m, spacing 200～4000 μ m.

3. the bionical diaphragm of flexible and denoising according to claim 1 is characterized in that lattice dimensions is in the described lattice structure: diameter 20～100 μ m, spacing 200～4000 μ m.

4. the bionical diaphragm of flexible and denoising according to claim 1 is characterized in that described imitative cat owl noise reduction multilayer fine structure is by the thick glue manufacturing of SU8.

5. the bionical diaphragm of flexible and denoising according to claim 1 is characterized in that described array of cavities is of a size of: length and width 5～20mm, the degree of depth 5～10mm, spacing 1～5mm.

6. the bionical diaphragm of flexible and denoising according to claim 1 is characterized in that described micron adhesion Array is by the polydimethylsiloxane manufacturing.

7. the preparation method of the bionical diaphragm of flexible and denoising claimed in claim 1 is characterized in that described preparation method's concrete steps are as follows:

(1) at the bottom of silicon wafer-based, apply one deck photoresist, this photoresist is carried out the standard photolithography process flow process: front baking, overall exposing, rear baking, this photoresist makes things convenient for detaching structure as sacrifice layer;

(2) rotary coating SU8 glue, front baking is exposed with mask, and rear baking is developed, and obtains imitative cat owl multilayer grid loose structure;

(3) on bottom SU8 architecture basics, make again the imitative ciliary structures of large ratio of height to width, step is the same;

(4) photoresist of removal step (1) obtains imitative cat owl noise reduction multilayer fine structure;

(5) use silica as mask, adopt inductively coupled plasma ICP dry etching technology to make the silicon micropore template of large ratio of height to width;

(6) rotary coating PDMS left standstill 10～20 minutes, then was placed on vacuum chamber and vacuumized, and PDMS flows in the micropore, keeps vacuum environment 30～60 minutes;

(7) adopt the template stamping technique, impress out array of cavities on the PDMS top layer;

(8) 65 ℃ of temperature, heat PDMS is solidified, peel manually obtains imitative gecko adhesion arrangement from PDMS;

(9) imitative gecko adhesion arrangement two structures that the imitative cat owl noise reduction multilayer fine structure that step (4) is obtained and step (8) obtain are synthetic whole by bonding, and concrete bonding process is as follows:

The APTES steam that the oxygen base is rich in utilization carries out silanization, the silanization time 2 h to described imitative cat owl noise reduction multilayer fine structure; Utilize oxygen gas plasma that described imitative gecko adhesion arrangement is activated, activate power 400W, activationary time 15s; Then with the imitative cat owl noise reduction multilayer fine structure behind the silanization with activate after imitative gecko adhesion arrangement aim at, at temperature 70 C, apply under the pressure of 30N～60N heating and finished bonding in 10 minutes, obtain the bionical diaphragm of described flexible and denoising.

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