CN103306935B - A kind of modularization permanent vacuum holding means - Google Patents
A kind of modularization permanent vacuum holding means Download PDFInfo
- Publication number
- CN103306935B CN103306935B CN201310241880.7A CN201310241880A CN103306935B CN 103306935 B CN103306935 B CN 103306935B CN 201310241880 A CN201310241880 A CN 201310241880A CN 103306935 B CN103306935 B CN 103306935B
- Authority
- CN
- China
- Prior art keywords
- vacuum chamber
- stainless steel
- vacuum
- holding means
- suction pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
The invention provides a kind of technological scheme of modularization permanent vacuum holding means, the program is a kind of modularization permanent vacuum holding means, includes vacuum chamber barrel, the outer side surface of vacuum chamber barrel is provided with heating mantle; The inner side surface of vacuum chamber barrel is provided with base; Base is fixed with suction pump module; Heat-conducting block is provided with between suction pump module and vacuum chamber barrel inner side surface.The program can utilize the self-characteristic of zirconium vanadium iron inspiration piece, regularly vacuumizes the vacuum environment that just can maintain in vacuum chamber without the need to using vacuum pump set.
Description
Technical field
What the present invention relates to is a kind of vacuum keeping apparatus of electrovacuum field, especially a kind of modularization permanent vacuum holding means.
Background technique
In the prior art, known technology is: along with the progress of plasma technique, Pulse Power Techniques and the development of complicated PIC simulation tool, High-Power Microwave technology also develops by leaps and bounds, especially in the development of high-power microwave source, achieve great progress, successively occur wide variety of different types of high-power pulsed ion beams.Most high-power pulsed ion beams need work under vacuum conditions, in the laboratory research stage, adopts vacuum pump set to provide the dynamic vacuum working environment of high-power pulsed ion beams.Along with the through engineering approaches of high-power pulsed ion beams is developed, the significance that permanent vacuum maintains technology highlights all the more, and order can work under vacuum conditions in order to maintain device element, need to use vacuum pump set regularly to bleed, maintenance process is comparatively loaded down with trivial details, cost is relatively high simultaneously, and this is the deficiency existing for prior art.
Summary of the invention
Object of the present invention, be exactly for the deficiency existing for prior art, and a kind of technological scheme of modularization permanent vacuum holding means is provided, the program can utilize the self-characteristic of zirconium vanadium iron inspiration piece, regularly vacuumizes the vacuum environment that just can maintain in vacuum chamber without the need to using vacuum pump set.
This programme is achieved by the following technical measures: a kind of modularization permanent vacuum holding means, includes vacuum chamber barrel, the outer side surface of vacuum chamber barrel is provided with heating mantle; The inner side surface of vacuum chamber barrel is provided with base; Base is fixed with suction pump module; Heat-conducting block is provided with between suction pump module and vacuum chamber barrel inner side surface; Vacuum chamber barrel inner side surface, heat-conducting block and suction pump module fit tightly mutually.
Preferred as this programme: suction pump module includes stainless steel box body, stainless steel binded mats and zirconium vanadium iron inspiration piece; Zirconium vanadium iron inspiration piece is arranged in stainless steel box body; Zirconium vanadium iron inspiration piece outer wrap has stainless steel binded mats.
Preferred as this programme: heating mantle is stainless steel.
Preferred as this programme: suction pump module is bolted on base.
The beneficial effect of this programme can be learnt according to describing of such scheme, owing to being fixed with zirconium vanadium iron inspiration piece in the real inside of vacuum in this scenario, the stainless steel heating mantle that vacuum chamber barrel outer side surface is installed provides the high temperature needed for the activation of zirconium vanadium iron inspiration piece, by vacuum chamber barrel, anaerobic copper sheet by temperature conduction to zirconium vanadium iron inspiration piece, activate zirconium vanadium iron inspiration piece, characteristic can be obtained by automatic absorbing gas after utilizing zirconium vanadium iron inspiration piece to activate, the gas that absorption vacuum indoor material discharges, the long-time condition of high vacuum degree maintained in vacuum chamber.
As can be seen here, the present invention compared with prior art, has outstanding substantive distinguishing features and progress significantly, and its beneficial effect implemented also is apparent.
Accompanying drawing explanation
Fig. 1 is the structural representation of the specific embodiment of the invention.
In figure, 1 is vacuum chamber barrel, and 2 is heating mantle, and 3 is base, and 4 is heat-conducting plate, and 5 is suction pump module, and 6 is zirconium vanadium iron inspiration piece.
Embodiment
For the technical characterstic of this programme can be clearly demonstrated, below by an embodiment, and in conjunction with its accompanying drawing, this programme is set forth.
Can be found out by accompanying drawing, the vacuum chamber barrel outer side surface of this programme installs stainless steel heating mantle, oxygen free copper heat-conducting block is installed between suction pump module and vacuum chamber barrel inner side surface, suction pump module is connected by clamping bolt with base, by the pretightening force of clamping bolt, vacuum chamber inner side surface, heat-conducting block and suction pump modular unit is fitted tightly.
Vacuum chamber left end is connected with ceramic metallization sealing-in insulator, and vacuum chamber right-hand member is connected with ceramic metallization sealing-in antenna output window, forms an airtight complete vacuum chamber.
The working principle of modularized vacuum holding means of the present invention is: zirconium vanadium iron inspiration piece is can the getter material of automatic absorbing gas after a kind of activated at.The stainless steel heating mantle that vacuum chamber outer side surface is installed provides the high temperature needed for the activation of zirconium vanadium iron inspiration piece, by vacuum chamber barrel, anaerobic heat-conducting plate by temperature conduction to zirconium vanadium iron inspiration piece, activate zirconium vanadium iron inspiration piece, characteristic can be obtained by automatic absorbing gas after utilizing zirconium vanadium iron inspiration piece to activate, the gas that absorption vacuum indoor material discharges, the long-time condition of high vacuum degree maintained in vacuum chamber.
Main feature of the present invention is that the stainless steel tray interior useful space that zirconium vanadium iron absorbing gas belt is installed by it is carried out cutting, puts into stainless steel box body, stainless steel box body and upper cover are carried out spot welding and reinforces the connection after utilizing 600 object stainless steel sintering felt parcels.Stainless steel box body is opened intensive φ 3 through hole, increase the probability that gas molecule gets to zirconium vanadium iron absorbing gas belt.The sintered alloy that zirconium vanadium iron absorbing gas belt under impact shock environment, its base band is suppressed can produce and come off, the alloy powder parcel utilizing 600 object stainless steel sintering felts to come off, ensures the cleaning in vacuum chamber under not affecting vacuum chamber permanent vacuum to maintain the condition of performance.Modularized vacuum holding means of the present invention have passed the environmental suitability examination of GJB150A " military equipment environmental test method ".
Claims (4)
1. a modularization permanent vacuum holding means, includes vacuum chamber barrel, it is characterized in that: the outer side surface of described vacuum chamber barrel is provided with heating mantle; The inner side surface of described vacuum chamber barrel is provided with base; Described base is fixed with suction pump module; Heat-conducting block is provided with between described suction pump module and vacuum chamber barrel inner side surface; Described vacuum chamber barrel inner side surface, heat-conducting block and suction pump module fit tightly mutually; Described suction pump module includes stainless steel box body, stainless steel binded mats and zirconium vanadium iron inspiration piece; Described zirconium vanadium iron inspiration piece is arranged in stainless steel box body; Described zirconium vanadium iron inspiration piece outer wrap has stainless steel binded mats; Described stainless steel box body is provided with intensive through hole.
2. a kind of modularization permanent vacuum holding means according to claim 1, is characterized in that: described heating mantle is stainless steel.
3. a kind of modularization permanent vacuum holding means according to claim 1, is characterized in that: described suction pump module is bolted on base.
4. a kind of modularization permanent vacuum holding means according to claim 1, is characterized in that: the order number of described stainless steel binded mats is 600 orders.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310241880.7A CN103306935B (en) | 2013-06-19 | 2013-06-19 | A kind of modularization permanent vacuum holding means |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310241880.7A CN103306935B (en) | 2013-06-19 | 2013-06-19 | A kind of modularization permanent vacuum holding means |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103306935A CN103306935A (en) | 2013-09-18 |
| CN103306935B true CN103306935B (en) | 2016-03-30 |
Family
ID=49132536
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310241880.7A Active CN103306935B (en) | 2013-06-19 | 2013-06-19 | A kind of modularization permanent vacuum holding means |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103306935B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106224202B (en) * | 2016-08-31 | 2018-06-22 | 兰州空间技术物理研究所 | A kind of non-evaporable adsorption pump activated using electrical heating |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4534708A (en) * | 1983-09-09 | 1985-08-13 | Siemens Aktiengesellschaft | Getter sorption pump with heat accumulator for high-vacuum and gas discharge systems |
| JP2012225337A (en) * | 2011-04-08 | 2012-11-15 | Shinku Jikkenshitsu:Kk | Non-evaporating type getter pump |
| CN203321777U (en) * | 2013-06-19 | 2013-12-04 | 中国工程物理研究院应用电子学研究所 | Modularized static vacuum maintaining device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT1295340B1 (en) * | 1997-10-15 | 1999-05-12 | Getters Spa | HIGH SPEED GAS ABSORPTION GETTER PUMP |
| CN201467078U (en) * | 2009-07-14 | 2010-05-12 | 北京晨晶电子有限公司 | Constant temperature heating device of vacuum fine adjustment machine |
-
2013
- 2013-06-19 CN CN201310241880.7A patent/CN103306935B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4534708A (en) * | 1983-09-09 | 1985-08-13 | Siemens Aktiengesellschaft | Getter sorption pump with heat accumulator for high-vacuum and gas discharge systems |
| JP2012225337A (en) * | 2011-04-08 | 2012-11-15 | Shinku Jikkenshitsu:Kk | Non-evaporating type getter pump |
| CN203321777U (en) * | 2013-06-19 | 2013-12-04 | 中国工程物理研究院应用电子学研究所 | Modularized static vacuum maintaining device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103306935A (en) | 2013-09-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP2450934A3 (en) | Environmental cell for charged particle beam system | |
| JP2014508927A5 (en) | ||
| CN101083868B (en) | Preionization igniting device based atmosphere pressure discharging cold plasma generators | |
| WO2012091406A3 (en) | Apparatus for processing exhaust fluid | |
| CN103306935B (en) | A kind of modularization permanent vacuum holding means | |
| CN205071427U (en) | Simple and easy atmospheric pressure cold plasma generator | |
| WO2010123741A3 (en) | Quartz window having gas feed and processing equipment incorporating same | |
| CN103298233A (en) | Novel high-density negative pole plasma source | |
| CN203321777U (en) | Modularized static vacuum maintaining device | |
| CN102615682A (en) | Hollow plate edge bonding machine workbench | |
| CN103237402B (en) | Atmosphere plasma processing unit (plant) | |
| ATE549739T1 (en) | MICROWAVE TUBE HAVING A DEVICE FOR EXTRACTING IONS GENERATED IN THE TUBE | |
| CN102933018A (en) | Neutron tube with drive-in target | |
| EP2091066A3 (en) | Processing system | |
| CN105021405B (en) | A kind of ion thruster ground experiment line target | |
| CN112908831B (en) | Laser analysis radio frequency discharge chemical ionization source under atmospheric pressure | |
| CN102478509A (en) | Gas enclosed device for gas analysis meter and analysis meter using the device | |
| CN112185797B (en) | Normal-pressure high-temperature ion cooling focusing device | |
| CN203588970U (en) | Plasma processing apparatus suitable for normal pressure environment material surface | |
| CN108932983B (en) | Device for efficiently transporting plasma of nuclear fusion experimental equipment | |
| US9452410B2 (en) | Fullerene arc source and fullerene production apparatus comprising the same | |
| US10381211B2 (en) | Method and system of atmospheric pressure megavolt electrostatic field ionization desorption (APME-FID) | |
| CN204277634U (en) | A kind of mechanical gripper | |
| CN101585256A (en) | A kind of method of coating mobilephone and equipment thereof | |
| CN202517258U (en) | Rocker switch spring assembly machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |