CN103306935A - Modularized static vacuum maintaining device - Google Patents
Modularized static vacuum maintaining device Download PDFInfo
- Publication number
- CN103306935A CN103306935A CN2013102418807A CN201310241880A CN103306935A CN 103306935 A CN103306935 A CN 103306935A CN 2013102418807 A CN2013102418807 A CN 2013102418807A CN 201310241880 A CN201310241880 A CN 201310241880A CN 103306935 A CN103306935 A CN 103306935A
- Authority
- CN
- China
- Prior art keywords
- vacuum chamber
- vacuum
- suction pump
- stainless steel
- pump module
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
The invention provides the technical scheme of a modularized static vacuum maintaining device. The modularized static vacuum maintaining device comprises a vacuum chamber cylinder wall, wherein a heating hood is arranged on the outer side surface of the vacuum chamber cylinder wall; a base is arranged on the inner side surface of the vacuum chamber cylinder wall; an air suction pump module is fixed on the base; and a heat guiding block is arranged between the air suction pump module and the inner side surface of the vacuum chamber cylinder wall. The modularized static vacuum maintaining device takes the advantage of own characteristics of an Zr-V-Fe air suction sheet, so that the vacuum environment in a vacuum chamber can be maintained without periodically vacuumizing by using a vacuum unit.
Description
Technical field
What the present invention relates to is the vacuum keeping apparatus in a kind of electrovacuum field, especially a kind of modularization permanent vacuum holding means.
Background technique
In the prior art, known technology is: along with the progress of plasma technique, Pulse Power Techniques and the development of complicated PIC simulation tool, the High-Power Microwave technology also develops by leaps and bounds, especially obtain great progress aspect the development of high-power microwave source, wide variety of different types of High-Power Microwave devices successively occurring.Most High-Power Microwave devices needs to work under vacuum environment, in the laboratory research stage, adopts the vacuum unit that the dynamic vacuum working environment of High-Power Microwave device is provided.Through engineering approaches development along with the High-Power Microwave device, the significance that permanent vacuum is kept technology highlights all the more, and order can be worked under vacuum environment in order to keep device element, need to use the vacuum unit regularly to bleed, maintenance process is comparatively loaded down with trivial details, cost is relatively high simultaneously, and this is the existing deficiency of prior art.
Summary of the invention
Purpose of the present invention, be exactly for the existing deficiency of prior art, and a kind of technological scheme of modularization permanent vacuum holding means is provided, this scheme can be utilized the self-characteristic of zirconium vanadium iron inspiration piece, need not to use the vacuum unit regularly to vacuumize and just can keep the vacuum environment in the vacuum chamber.
This programme is achieved by the following technical measures: a kind of modularization permanent vacuum holding means, include the vacuum chamber barrel, and be provided with heating mantle on the outer side surface of vacuum chamber barrel; Be provided with base on the inner side surface of vacuum chamber barrel; Be fixed with the suction pump module on the base; Be provided with heat-conducting block between suction pump module and the vacuum chamber barrel inner side surface; Vacuum chamber barrel inner side surface, heat-conducting block and suction pump module fit tightly mutually.
Preferred as this programme: the suction pump module includes the stainless steel box body, stainless steel binded mats and zirconium vanadium iron inspiration piece; Zirconium vanadium iron inspiration piece is arranged in the stainless steel box body; Zirconium vanadium iron inspiration piece outer wrap has the stainless steel binded mats.
Preferred as this programme: heating mantle is stainless steel.
Preferred as this programme: the suction pump module is bolted on the base.
The beneficial effect of this programme can be learnt according to the narration to such scheme, owing in this scheme, being fixed with zirconium vanadium iron inspiration piece in the real inside of vacuum, the stainless steel heating mantle that vacuum chamber barrel outer side surface is installed provides zirconium vanadium iron inspiration piece to activate required high temperature, by vacuum chamber barrel, anaerobic copper sheet with temperature conduction to zirconium vanadium iron inspiration piece, activate zirconium vanadium iron inspiration piece, but automatic absorbing gas gets characteristic after utilizing zirconium vanadium iron inspiration piece to activate, the gas that absorption vacuum indoor material discharges is kept the condition of high vacuum degree in the vacuum chamber for a long time.
This shows, the present invention compared with prior art has outstanding substantive distinguishing features and progressive significantly, and the beneficial effect of its enforcement also is apparent.
Description of drawings
Fig. 1 is the structural representation of the specific embodiment of the invention.
Among the figure, 1 is the vacuum chamber barrel, and 2 is heating mantle, and 3 is base, and 4 is heat-conducting plate, and 5 is the suction pump module, and 6 is zirconium vanadium iron inspiration piece.
Embodiment
For clearly demonstrating the technical characterstic of this programme, below by an embodiment, and in conjunction with its accompanying drawing, this programme is set forth.
Can find out by accompanying drawing, the stainless steel heating mantle is installed on the vacuum chamber barrel outer side surface of this programme, the oxygen free copper heat-conducting block is installed between suction pump module and the vacuum chamber barrel inner side surface, the suction pump module is connected by clamping bolt with base, and the pretightening force by clamping bolt fits tightly vacuum chamber inner side surface, heat-conducting block and suction pump modular unit.
The vacuum chamber left end is connected with ceramic metallization sealing-in insulator, and the vacuum chamber right-hand member is connected with ceramic metallization sealing-in antenna output window, forms an airtight complete vacuum chamber.
The working principle of modularized vacuum holding means of the present invention is: but zirconium vanadium iron inspiration piece is the getter material of automatic absorbing gas behind a kind of activated at.The stainless steel heating mantle that the vacuum chamber outer side surface is installed provides zirconium vanadium iron inspiration piece to activate required high temperature, by vacuum chamber barrel, anaerobic heat-conducting plate with temperature conduction to zirconium vanadium iron inspiration piece, activate zirconium vanadium iron inspiration piece, but automatic absorbing gas gets characteristic after utilizing zirconium vanadium iron inspiration piece to activate, the gas that absorption vacuum indoor material discharges is kept the condition of high vacuum degree in the vacuum chamber for a long time.
Main feature of the present invention is that zirconium vanadium iron absorbing gas belt is carried out cutting by the inner useful space of the stainless steel box body of its installation, puts into the stainless steel box body after utilizing 600 purpose stainless steel sintering felts parcel, stainless steel box body and loam cake is carried out spot welding reinforce the connection.Open intensive φ 3 through holes on the stainless steel box body, increase the probability that gas molecule is got to zirconium vanadium iron absorbing gas belt.The zirconium vanadium iron absorbing gas belt sintered alloy that its base band is suppressed under the impact shock environment can produce and come off, utilize the alloy powder parcel that 600 purpose stainless steel sintering felts will come off, under not affecting the vacuum chamber permanent vacuum and keep the condition of performance, guarantee the cleaning in the vacuum chamber.Modularized vacuum holding means of the present invention has passed through the environmental suitability examination of GJB150A " military equipment environmental test method ".
Claims (4)
1. a modularization permanent vacuum holding means includes the vacuum chamber barrel, it is characterized in that: be provided with heating mantle on the outer side surface of described vacuum chamber barrel; Be provided with base on the inner side surface of described vacuum chamber barrel; Be fixed with the suction pump module on the described base; Be provided with heat-conducting block between described suction pump module and the vacuum chamber barrel inner side surface; Described vacuum chamber barrel inner side surface, heat-conducting block and suction pump module fit tightly mutually.
2. a kind of modularization permanent vacuum holding means according to claim 1, it is characterized in that: described suction pump module includes the stainless steel box body, stainless steel binded mats and zirconium vanadium iron inspiration piece; Described zirconium vanadium iron inspiration piece is arranged in the stainless steel box body; Described zirconium vanadium iron inspiration piece outer wrap has the stainless steel binded mats.
3. a kind of modularization permanent vacuum holding means according to claim 1, it is characterized in that: described heating mantle is stainless steel.
4. a kind of modularization permanent vacuum holding means according to claim 1, it is characterized in that: described suction pump module is bolted on the base.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310241880.7A CN103306935B (en) | 2013-06-19 | 2013-06-19 | A kind of modularization permanent vacuum holding means |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310241880.7A CN103306935B (en) | 2013-06-19 | 2013-06-19 | A kind of modularization permanent vacuum holding means |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103306935A true CN103306935A (en) | 2013-09-18 |
| CN103306935B CN103306935B (en) | 2016-03-30 |
Family
ID=49132536
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310241880.7A Active CN103306935B (en) | 2013-06-19 | 2013-06-19 | A kind of modularization permanent vacuum holding means |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103306935B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106224202A (en) * | 2016-08-31 | 2016-12-14 | 兰州空间技术物理研究所 | A kind of non-evaporable adsorption pump utilizing electrical heating to activate |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4534708A (en) * | 1983-09-09 | 1985-08-13 | Siemens Aktiengesellschaft | Getter sorption pump with heat accumulator for high-vacuum and gas discharge systems |
| US6149392A (en) * | 1997-10-15 | 2000-11-21 | Saes Getters S.P.A. | Getter pump with high gas sorption velocity |
| CN201467078U (en) * | 2009-07-14 | 2010-05-12 | 北京晨晶电子有限公司 | Constant temperature heating device of vacuum fine adjustment machine |
| JP2012225337A (en) * | 2011-04-08 | 2012-11-15 | Shinku Jikkenshitsu:Kk | Non-evaporating type getter pump |
| CN203321777U (en) * | 2013-06-19 | 2013-12-04 | 中国工程物理研究院应用电子学研究所 | Modularized static vacuum maintaining device |
-
2013
- 2013-06-19 CN CN201310241880.7A patent/CN103306935B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4534708A (en) * | 1983-09-09 | 1985-08-13 | Siemens Aktiengesellschaft | Getter sorption pump with heat accumulator for high-vacuum and gas discharge systems |
| US6149392A (en) * | 1997-10-15 | 2000-11-21 | Saes Getters S.P.A. | Getter pump with high gas sorption velocity |
| CN201467078U (en) * | 2009-07-14 | 2010-05-12 | 北京晨晶电子有限公司 | Constant temperature heating device of vacuum fine adjustment machine |
| JP2012225337A (en) * | 2011-04-08 | 2012-11-15 | Shinku Jikkenshitsu:Kk | Non-evaporating type getter pump |
| CN203321777U (en) * | 2013-06-19 | 2013-12-04 | 中国工程物理研究院应用电子学研究所 | Modularized static vacuum maintaining device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106224202A (en) * | 2016-08-31 | 2016-12-14 | 兰州空间技术物理研究所 | A kind of non-evaporable adsorption pump utilizing electrical heating to activate |
| CN106224202B (en) * | 2016-08-31 | 2018-06-22 | 兰州空间技术物理研究所 | A kind of non-evaporable adsorption pump activated using electrical heating |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103306935B (en) | 2016-03-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| GB201303775D0 (en) | High Efficiency Power Generation Apparatus, Refrigeration/Heat Pump Apparatus, and method system therefor | |
| CN203321777U (en) | Modularized static vacuum maintaining device | |
| CN103306935A (en) | Modularized static vacuum maintaining device | |
| CN102615682A (en) | Hollow plate edge bonding machine workbench | |
| WO2006097089A3 (en) | Method and device for improving the efficiency of energy conversion units | |
| CN103237402B (en) | Atmosphere plasma processing unit (plant) | |
| CN102179881A (en) | System for adsorbing and fixing plane thin plate | |
| CN109979638B (en) | Vacuum target changing mechanism | |
| RU112956U1 (en) | COMPRESSOR STATION | |
| CN103639602A (en) | Sheet laser welding clamping system | |
| CN210434552U (en) | Automatic thermal desorption device | |
| CN103381604A (en) | Operating mechanism used for industrial high heat treatment workpiece sorting work | |
| CN102478509A (en) | Gas enclosed device for gas analysis meter and analysis meter using the device | |
| CN216696048U (en) | Device for assisting direct-reading spectrometer in component detection | |
| CN103770101A (en) | Operation mechanism for sorting of industrial high-heat treatment work-pieces | |
| CN209943032U (en) | Intelligent management device of vacuum pump | |
| CN210691909U (en) | LED display screen with good heat dissipation performance | |
| US9452410B2 (en) | Fullerene arc source and fullerene production apparatus comprising the same | |
| CN112858190A (en) | Device for assisting direct-reading spectrometer in component detection | |
| CN202481549U (en) | Plate-shaped structure part vacuum-pumping packing device | |
| CN203231640U (en) | Rail-type pressure furnace capable of raising and lowering temperature | |
| CN102001644A (en) | Automatic packing type electric arc synthetic furnace | |
| CN101585256A (en) | A kind of method of coating mobilephone and equipment thereof | |
| CN201935779U (en) | Electric logging window | |
| CN214314190U (en) | Prefabricated cabin of ventilation for transformer substation |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |