CN103302326A - Surface coating cutting tool of hard coating layer having excellent anti-tipping performance - Google Patents
Surface coating cutting tool of hard coating layer having excellent anti-tipping performance Download PDFInfo
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- CN103302326A CN103302326A CN2013100774313A CN201310077431A CN103302326A CN 103302326 A CN103302326 A CN 103302326A CN 2013100774313 A CN2013100774313 A CN 2013100774313A CN 201310077431 A CN201310077431 A CN 201310077431A CN 103302326 A CN103302326 A CN 103302326A
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- 239000011248 coating agent Substances 0.000 title claims abstract description 44
- 238000000576 coating method Methods 0.000 title claims abstract description 44
- 238000005520 cutting process Methods 0.000 title claims abstract description 42
- 239000011247 coating layer Substances 0.000 title claims abstract description 21
- 239000010410 layer Substances 0.000 claims abstract description 207
- 239000002245 particle Substances 0.000 claims abstract description 78
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 28
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 27
- 239000001301 oxygen Substances 0.000 claims abstract description 27
- 150000001875 compounds Chemical class 0.000 claims abstract description 19
- 238000009826 distribution Methods 0.000 claims abstract description 8
- 239000013078 crystal Substances 0.000 claims description 77
- 239000010936 titanium Substances 0.000 claims description 40
- 238000005259 measurement Methods 0.000 claims description 10
- 230000015572 biosynthetic process Effects 0.000 claims description 9
- 238000001887 electron backscatter diffraction Methods 0.000 claims description 9
- 238000000227 grinding Methods 0.000 claims description 8
- 238000005229 chemical vapour deposition Methods 0.000 claims description 5
- 229910052719 titanium Inorganic materials 0.000 claims description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- 241000446313 Lamella Species 0.000 claims description 3
- PIZYHTQSHRQOBI-UHFFFAOYSA-N [C].O=[N] Chemical compound [C].O=[N] PIZYHTQSHRQOBI-UHFFFAOYSA-N 0.000 claims description 3
- 150000004767 nitrides Chemical class 0.000 claims description 3
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims description 2
- 239000000843 powder Substances 0.000 description 19
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 18
- 230000008020 evaporation Effects 0.000 description 15
- 238000001704 evaporation Methods 0.000 description 15
- 238000006243 chemical reaction Methods 0.000 description 9
- 238000003754 machining Methods 0.000 description 8
- 239000000203 mixture Substances 0.000 description 8
- 239000000853 adhesive Substances 0.000 description 7
- 230000001070 adhesive effect Effects 0.000 description 7
- 229910000831 Steel Inorganic materials 0.000 description 6
- 230000014509 gene expression Effects 0.000 description 6
- 230000007774 longterm Effects 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 239000010959 steel Substances 0.000 description 6
- 229910001018 Cast iron Inorganic materials 0.000 description 5
- 229910002091 carbon monoxide Inorganic materials 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 229910052726 zirconium Inorganic materials 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 238000005245 sintering Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 229910007926 ZrCl Inorganic materials 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910000975 Carbon steel Inorganic materials 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910001141 Ductile iron Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000000498 ball milling Methods 0.000 description 1
- 239000010962 carbon steel Substances 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000013081 microcrystal Substances 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 239000012188 paraffin wax Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
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- 150000003754 zirconium Chemical class 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
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- Chemical Vapour Deposition (AREA)
Abstract
The invention provides a surface coating cutting tool of a hard coating layer having an excellent anti-tipping performance. According to the surface coating cutting tool, a lower layer is a Ti compound layer, and an upper layer is an alfa A12O3 layer containing Zr. An outmost surface of the lower layer is provided with a TiCN layer having a thickness of more than 500nm, and a depth area in the 500nm thickness direction of the TiCN layer comprises oxygen having an average content of 0.5-3 atom%. The scanning type electronic microscope and an electronic backscatter diffraction device can be used to detect the particle size distribution of the upper layer surface containing the alfa A12O3 grain of Zr, and the particle size in a range from 0.3 to 0.7(mu)m and the particle size in a range from 1.5 to 3.0(mu)m are the peak value. In the particles having a size more than 1(mu)m, the inclined angle between the normal of the (0001) surface and the normal of the tool base surface is in a range from 0-10degrees, and the particles in the range are more than 79 area%. On the other hand, in the particles having the size lower than 1(mu)m, the inclined angle between the normal of the (11-20) surface and the normal of the tool base surface is in a range from 0-10degrees, and the particles are more than 70 area%.
Description
Technical field
The present invention relates to a kind of surface-coated cutting tool (below, be called coating tool), even its at a high speed and intermittence/impact load act on the machining of carrying out various steel or cast iron etc. under the interrupted cut condition of cutting edge, when hard coating layer is also brought into play excellent adhesive strength, show the excellent anti-cutter that collapses, and through the excellent cutting ability of long-term performance.
Background technology
In the past, known have usually by tungsten carbide (below, represent with WC) base cemented carbide or titanium carbonitride (below, representing with TiCN) evaporation forms the coating tool that is formed by following (a) and the hard coating layer that (b) consists of on the surface of the matrix that consists of of based ceramic metal (below, they are referred to as tool base):
(a) lower layer be by the carbide of Ti (below, represent with TiC) layer, nitride (below, represent with TiN) layer, carbonitride (below, represent with TiCN) layer, oxycarbide (below, represent with TiCO) layer and carbon nitrogen oxide (below, represent with TiCNO) one deck or the two-layer above Ti compound layer that consists of in the layer
(b) upper layer for the alumina layer that has ɑ type crystalline texture under the state of chemical vapor deposition (below, with Al
2O
3Layer expression.) or have ɑ type crystalline texture and contain micro-Zr contain the Zr alumina layer (below, to contain the Al of Zr
2O
3Layer expression).
But, although above-mentioned coating tool in the past is such as the excellent mar proof of performance in the continuous cutting of various steel or cast iron etc. or interrupted cut, with this during for the high speed interrupted cut, easily produce the cutter that collapses of clad, have the problem that shortens life tools.
Therefore, in order to improve anti-cutter, anti-fissility, the mar proof etc. of collapsing of clad, proposed hard coating layer is carried out the coating tool of various improvement.
For example, shown in patent documentation 1, proposed to be coated with ɑ type alumina layer in tool base, coat above it the coating tool of zirconium-containing alumina layer, wherein, the zirconium-containing alumina layer contains ɑ type alumina layer and zirconia, and in ɑ type alumina layer and this zirconium-containing alumina layer, the crystal grain of ɑ type aluminium oxide is continuous, and the crystal grain of the ɑ type aluminium oxide of zirconium-containing alumina layer is the lengthwise growth on film thickness direction, and, zirconia forms in the intercrystalline mode of filling ɑ type aluminium oxide, thereby has improved toughness and the anti-cutter that collapses.
And, for example, shown in patent documentation 2, proposed on the surface of tool base evaporation and be formed with as the Ti compound layer of lower layer with as the Al that contains Zr of upper layer
2O
3Coating tool, wherein, upper layer forms: this contains the Al of Zr
2O
3Grain structure structure with dull and stereotyped polygon and lengthwise shape, and, in the crystal grain of upper layer, count the inside of the crystal grain more than 60% with area ratio by the total morphotic crystal lattice interface of the lattice-site institute of the constituting atom disjunction with Σ 3 expressions by at least more than one, thereby improved the mar proof in the processing of high speed heavy cut.
Patent documentation 1: Japanese Patent Publication 2009-45729 communique
Patent documentation 2: Japanese Patent Publication 2009-172748 communique
In recent years, the high performance of topping machanism is remarkable, on the other hand, Labor-saving and energy-saving for machining, further the requirement of cost degradation is strong, with this, machining is high speed more, and there is the tendency that cutting edge is applied high load capacity, but the present situation at above-mentioned in the past coating tool is, with this be used for steel or cast iron etc. under usual conditions continuous cutting or do not have problems during interrupted smear metal, but especially when this being followed high heat produce and cutting edge is applied to use under the high speed interrupted cut condition of intermittence/impact load, the lower layer that is consisted of by the Ti compound layer that consists of hard coating layer with by the Al that contains Zr
2O
3The upper layer that consists of be close to intensity and insufficient because the generation of peeling off, collapsing the Abnormal damages such as cutter between upper layer and the lower layer and within than the short period, arrive service life.
Summary of the invention
Therefore, the inventor etc. from the above point of view, in order to improve the lower layer that consisted of by the Ti compound layer and by the Al that contains Zr
2O
3The close property of the upper layer that consists of prevents from thus peeling off, collapsing the generation of the Abnormal damages such as cutter and seeks the long lifetime of life tools and conduct in-depth research, and it found that following opinion:
Be formed with the lower layer that consisted of by the Ti compound layer and by the Al that contains Zr in coating
2O
3In the coating tool of the upper layer that consists of, contain the Al of Zr by control
2O
3Particle diameter distribute, and by the Al that contains Zr
2O
3Size of microcrystal control orientation, thereby can improve the close property of upper layer and lower layer, and can keep high temperature hardness and the elevated temperature strength of upper layer integral body, therefore namely be used in when cutting edge applied the high speed interrupted cut of intermittence/impact load, also can suppress the generation of peeling off, collapsing the Abnormal damages such as cutter between upper layer and the lower layer, and can access the coating tool through the excellent cutting ability of long-term use performance.
The present invention is based on above-mentioned opinion and finishes, it is characterized in that,
(1) a kind of surface-coated cutting tool, on the surface of the tool base that is consisted of by tungsten carbide base carbide alloy or base titanium carbonitride, coating is formed with the hard coating layer that is made of following (a) and (b), and this surface-coated cutting tool is characterised in that
(a) lower layer is the Ti compound layer, the one deck in its carbide lamella by Ti, nitride layer, carbonitride layer, oxycarbide layer and the carbon nitrogen oxide layer or two-layer more than consist of and have the overall average bed thickness of 3~20 μ m,
(b) upper layer is the α type Al that contains Zr
2O
3Layer, it has the average bed thickness of 2~15 μ m and have ɑ type crystalline texture under the state of chemical vapor deposition, (wherein, with atomic ratio measuring, ratio Zr/(Al+Zr+O) is 0.0001~0.003),
(c) the Ti carbonitride layer of the bed thickness more than the 500nm consists of the superficial layer of above-mentioned lower layer by having at least, only contain aerobic at the interface from this Ti carbonitride layer and upper layer to the depth areas till the bed thickness direction 500nm of this Ti carbonitride layer, and the averaged oxygen content that contains in this depth areas is 0.5~3 atom % of the total content of the Ti, the C that contain in this depth areas, N, O
(d) about above-mentioned upper layer, by using scanning electron microscope and EBSD device, each crystal grain irradiation electron ray with hexagoinal lattice that is present in the measurement range of this upper layer surface grinding face is come specific die, and measure the α type Al of the above-mentioned Zr of containing
2O
3When the particle diameter of crystal grain distributes, be the peak value of the scope of 0.3~0.7 μ m and this two places formation particle diameter distribution of scope that particle diameter is 1.5~3.0 μ m at particle diameter.
(2) such as above-mentioned (1) described surface-coated cutting tool, it is characterized in that,
About above-mentioned upper layer, use scanning electron microscope and EBSD device, each crystal grain irradiation electron ray with hexagoinal lattice that is present in the measurement range of this upper layer surface grinding face is come specific die, and measure the α type Al of the above-mentioned Zr of containing
2O
3The particle diameter of crystal grain, and at the normal to a surface of measuring with respect to described tool base, during inclination angle that the inclination angle that becomes as the normal of { 0001 } face of the crystal plane of described crystal grain and the normal of { 11-20 } face become, particle diameter is in the above crystal grain of 1 μ m, { 0001 } area ratio of the crystal grain of inclination angle in the scope of 0~10 degree that becomes with respect to the normal of tool base of the normal of face accounts for more than the 70 area % of area ratio integral body, and, particle diameter is lower than in the crystal grain of 1 μ m, and the normal of { 11-20 } face accounts for more than the 70 area % of area ratio integral body with respect to the area ratio of the crystal grain of inclination angle in the scope of 0~10 degree that the normal to a surface of tool base becomes.
Below, the structure sheaf of the hard coating layer of coating tool of the present invention is elaborated.
(a) Ti compound layer (lower layer):
Ti compound layer (for example, TiC layer, TiN layer, TiCN layer, TiCO layer and TiCNO layer) is basically as the Al that contains Zr
2O
3The lower layer of layer and existing, the elevated temperature strength of the excellence that possesses by itself makes hard coating layer possess elevated temperature strength, in addition, all is close to tool base and contains the Al of Zr
2O
3Layer, have and keep hard coating layer for the effect of the close property of tool base, but when its overall average bed thickness is lower than 3 μ m, can't give full play to described effect, on the other hand, if its overall average bed thickness surpasses 20 μ m, then especially in following high thermogenetic high speed interrupted cut, easily cause pyroplastic deformation, because this is to cause eccentric wear, therefore its overall average bed thickness is decided to be 3~20 μ m.
(b) the superficial layer of lower layer:
The for example following formation of superficial layer of the lower layer of this invention.Namely, at first, use common chemical evaporation plating device evaporation form by the one deck in TiC layer, TiN layer, TiCN layer, TiCO layer and the TiCNO layer or two-layer more than the various Ti compound layers that consist of (in addition, only evaporation forms the TiCN layer) afterwards, same this common chemical evaporation plating device that uses carries out chemical vapor deposition under the following conditions, as the superficial layer of lower layer, for example formation contains below the TiCN(of aerobic, is called and contains oxygen TiCN) layer.
Reacting gas forms (capacity %): TiCl
42.5~10%, CH
3CN0.5~1.0%, N
240~60%, remainder H
2,
The reaction atmosphere temperature: 800~900 ℃,
Reaction atmosphere pressure: 6~10kPa.
At this moment, during 5 minutes~30 minutes before obtaining the required evaporation time end of predetermined bed thickness, add CO gas in the mode that becomes 1~5 capacity % with respect to the overall reaction gas flow and carry out chemical vapor deposition, thus evaporation only form the depth areas till bed thickness direction 500nm contain 0.5~3 atom % oxygen contain oxygen TiCN layer.
By the superficial layer that contains above-mentioned lower layer that oxygen TiCN layer consists of, for example, in order on it, to form the Al that preferably contains Zr
2O
3Crystal grain (with reference to aftermentioned (c)) and form the above bed thickness of 500nm at least, and preferably consist of by containing oxygen TiCN layer, this contains in the oxygen TiCN layer, only the depth areas till the bed thickness direction 500nm that contains oxygen TiCN layer along this contains the oxygen of 0.5~3 atom % at the interface that contains oxygen TiCN layer and upper layer from this, and is oxygen-free in surpassing the depth areas of 500nm.
At this, why be defined as above averaged oxygen content in the depth areas till the 500nm that contains oxygen TiCN layer and be because, if containing aerobic along the depth direction of the film zone darker than 500nm, then can't obtain the Al that contains Zr of desired upper layer
2O
3The particle diameter of crystal grain distributes and orientation.
And, if the averaged oxygen content till the depth areas 500nm is lower than 0.5 atom %, then can't expect the raising of the adhesive strength of upper layer and lower layer TiCN layer, on the other hand, if the averaged oxygen content in this depth areas surpasses 3 atom %, then can't obtain particle diameter is the Al that contains Zr of this particle diameter of 0.3~0.7 μ m
2O
3Crystal grain, in addition, particle diameter is in the above crystal grain of 1 μ m, and the normal of { 0001 } face is lower than 70 whole area % with respect to the Area Ratio regular meeting of the crystal grain of inclination angle in the scope of 0~10 degree that the normal to a surface of tool base becomes, and the elevated temperature strength of upper layer descends.
At this, averaged oxygen content be with from the interface of the above-mentioned TiCN layer that consists of the superficial layer of lower layer and upper layer to the depth areas till the bed thickness direction 500nm of this TiCN layer, oxygen (O) is shared content in the total content of titanium (Ti), carbon (C), nitrogen (N) and oxygen (O), with atom %(=O/(Ti+C+N+O) * 100%) expression value.
(c) Al that contains Zr of upper layer
2O
3Crystal grain:
On the surface that contains oxygen TiCN layer of the oxygen that contains 0.5~3 atom % by above-mentioned (b) evaporation, for example, under the following conditions, by CO and CO
2Mist carries out oxidation processes, thereby generates ɑ-Al by making
2O
3It is the most surperficial that the nuclear of examining required Al compound is dispersed in the Ti compound layer, thereby can be at Al
2O
3In the operation before the karyogenesis, make ɑ-Al
2O
3It is the most surperficial that nuclear is dispersed in the Ti compound layer.
Reacting gas forms (capacity %): CO5~10%, CO
25~10%, remainder H
2,
The reaction atmosphere temperature: 900~960 ℃,
Reaction atmosphere pressure: 3~10kPa,
Time: 2~5min,
Then, for example under the following conditions, evaporation contains the Al of Zr
2O
3,
Reacting gas forms (capacity %): AlCl
31~3%, CO
21~5%, ZrCl
40.1~1.0%, remainder H
2,
The reaction atmosphere temperature: 900~960 ℃,
Reaction atmosphere pressure: 3~10kPa,
Time: 5~30min.
Then, under the following conditions, carry out evaporation and come evaporation upper layer of the present invention.
Reacting gas forms (capacity %): AlCl
31~3%, ZrCl
40.1~1.0%, CO
21~3%, HCl1~5%, H
2S0.1~0.5%, remainder H
2,
The reaction atmosphere temperature: 860~960 ℃,
Reaction atmosphere pressure: 3~10kPa,
Time: (until reaching upper layer target bed thickness).
Above-mentioned film forming by the Al that contains Zr of the present invention
2O
3In the upper layer that layer consists of, by using scanning electron microscope and EBSD device, each is present in the crystal grain irradiation electron ray with hexagoinal lattice in the measurement range of its surface grinding face, thereby specific die contains the Al of Zr in mensuration
2O
3When the particle diameter of crystal grain distributes, be the peak height of the scope of 0.3~0.7 μ m and this two places formation particle diameter distribution of scope that particle diameter is 1.5~3.0 μ m at particle diameter.
And, this upper layer has along the lengthwise columnar structure of film thickness direction growth, and use scanning electron microscope and EBSD device, each is present in specific each crystal grain of crystal grain irradiation electron ray with hexagoinal lattice in the measurement range of its surface grinding face, and measures the Al that contains Zr
2O
3The particle diameter of crystal grain, and measure the normal to a surface with respect to tool base, during inclination angle that the inclination angle that becomes as the normal of { 0001 } face of the crystal plane of described crystal grain and the normal of { 11-20 } face become, particle diameter is in the above crystal grain of 1 μ m, { 0001 } area ratio of the crystal grain of inclination angle in the scope of 0~10 degree that becomes with respect to the tool base normal to a surface of the normal of face accounts for more than the 70 area % of area ratio integral body, and, particle diameter is lower than in the crystal grain of 1 μ m, and the normal of { 11-20 } face accounts for more than the 70 area % of area ratio integral body with respect to the area ratio of the crystal grain of inclination angle in the scope of 0~10 degree that the normal to a surface of tool base becomes.
The Al that contains Zr of above-mentioned (c)
2O
3In the layer, improve high temperature hardness and the heat resistance of this layer as the Al of its constituent, and, trace in layer (with shared ratio in the total content of Al and O, Zr/(Al+Zr+O) being 0.0001~0.003(atomic ratio)) and the Zr composition raising that contains contains the Al of Zr
2O
3Grain-boundary strength/the elevated temperature strength of layer itself.
But, if containing of Zr composition proportionally is lower than 0.0001, then can't expect above-mentioned effect, on the other hand, containing of Zr composition proportionally surpasses at 0.003 o'clock, the Zirconium oxide particle is separated out and grain-boundary strength descends in layer, thus the Zr composition with the total content of Al composition and O composition in the shared ratio that contains proportional (Zr/(Al+Zr+O)) be decided to be 0.0001~0.003(atomic ratio).
The Al that contains Zr of above-mentioned (c)
2O
3Although crystal grain as the growth of lengthwise columnar structure, contains (containing the cross section) Al of Zr along the bed thickness direction on the surface of upper layer
2O
3The particle diameter of crystal grain distributes different.
The Al that contains Zr
2O
3The particle diameter of crystal grain mainly is subject to the particle diameter on Ti compound surface of lower layer or the Al that contains Zr of upper layer
2O
3The impact of reaction condition, when for example the particle diameter on Ti compound surface is fine, the Al that contains Zr of lower layer top
2O
3The particle diameter of crystal grain diminishes, on the other hand, when the particle diameter on Ti compound surface is coarse grain, the Al that contains Zr of lower layer top
2O
3It is large that the particle diameter of crystal grain becomes.
Among the present invention, at the Al that contains Zr of upper layer
2O
3Layer, being formed on particle diameter is 0.3~0.7 μ m(the 1st peak value) scope and particle diameter be 1.5~3.0 μ m(the 2nd peak values) this two place of scope particle diameter of forming the peak height that particle diameter distributes distribute, it be the reasons are as follows.
By the Al that contains Zr in upper layer
2O
3Have the particle diameter that forms the peak height of particle diameter distribution at two places in the layer and distribute, thus the intercrystalline adhesion in the raising layer, and improve the anti-cutter that collapses.
On the other hand, if the lower limit of the particle size values of the 1st peak value is lower than 0.3 μ m, then particle diameter becomes fine, and for the concavo-convex fillibility variation on Ti compound surface, lower layer top, therefore with upper layer Al
2O
3The adhesive strength of crystal grain dies down.
If the upper limit of the particle size values of the 1st peak value surpasses 0.7 μ m, the then Al of upper layer
2O
3It is large that the size of crystal grain becomes relatively, forms the Al of upper layer
2O
3Shi Rongyi forms hole, so the hardness of upper layer, intensity descends, and the adhesive strength between upper layer and the intermediate layer descends.And simultaneously the lower limit of the particle size values of the 2nd peak value is lower than 1.5 μ m, and the particle diameter that therefore can't obtain forming at two places particle diameter distribution peak value distributes, and its result contains the Al of Zr
2O
3Adhesion between the crystal grain in the layer dies down, and anti-ly collapses cutter decline.
And, if the upper limit of the particle size values of the 2nd peak value surpasses 3.0 μ m, the then Al of upper layer
2O
3The crystal grain coarse causes containing the Al of Zr
2O
3The anti-of layer collapsed cutter decline.
And, among the present invention, if form the upper layer that above-mentioned particle diameter distributes with above-mentioned membrance casting condition, then can form the upper layer with following orientation tissue, be that particle diameter is in the above crystal grain of 1 μ m, { 0001 } area ratio of the crystal grain of inclination angle in the scope of 0~10 degree that becomes with respect to the tool base normal to a surface of the normal of face accounts for more than the 70 whole area %, and, particle diameter is lower than in the crystal grain of 1 μ m, and the normal of { 11-20 } face accounts for more than the 70 area % of area ratio integral body with respect to the area ratio of the crystal grain of inclination angle in the scope of 0~10 degree that the tool base normal to a surface becomes.
So particle diameter is in the above crystal grain of 1 μ m, the area ratio of the crystal grain of the inclination angle that the normal of { 0001 } face becomes in the scope of 0~10 degree accounts for more than the 70 area % of area ratio integral body, thus upper layer Al
2O
3High temperature hardness, elevated temperature strength be maintained, have good mar proof.And, particle diameter is lower than in the crystal grain of 1 μ m, the area ratio of the crystal grain of the inclination angle that the normal of { 11-20 } face becomes in the scope of 0~10 degree accounts for more than the 70 area % of area ratio integral body, thereby improves the adhesive strength of lower layer and upper layer, improves the anti-cutter that collapses.
Among the present invention, if by the Al that contains Zr
2O
3The average thickness of the upper layer integral body that crystal grain consists of is lower than 2 μ m, then can't bring into play excellent elevated temperature strength and high temperature hardness in long-term the use, on the other hand, then easily collapse cutter if surpass 15 μ m, so the average bed thickness of upper layer is decided to be 2~15 μ m.
The coating tool of this invention contains oxygen TiCN layer by the most surperficial formation of lower layer at hard coating layer, and forms the Al that contains Zr of upper layer
2O
3The predetermined particle diameter of crystal grain distributes, and, by forming predetermined crystalline orientation tissue, thereby can improve the adhesive strength of upper layer and lower layer, and can keep high temperature hardness, the elevated temperature strength of upper layer, therefore even with at a high speed and cutting edge is applied the machining of carrying out various steel or cast iron etc. under the high speed interrupted cut condition of intermittence/impact load, also demonstrate excellent elevated temperature strength and high temperature hardness, and without the generation of collapsing cutter, peeling off of hard coating layer, through the long-term excellent cutting ability of performance of using.
Description of drawings
Fig. 1 represents the upper layer about coating tool 1 of the present invention, contains the Al of Zr
2O
3The logarithm value of grain size is transverse axis, with the Al that contain Zr of transverse axis to be comprised in the scale interval range of uniformly-spaced cutting apart
2O
3One example of the particle diameter distribution graph the when quantity of crystal grain is the longitudinal axis.
The specific embodiment
Then, according to embodiment coating tool of the present invention is carried out specific description.
[embodiment]
As material powder, preparation all has WC powder, TiC powder, ZrC powder, TaC powder, NbC powder, the Cr of the average grain diameter of 1~3 μ m
3C
2Powder, TiN powder and Co powder, these material powders are cooperated with the mix proportion shown in the table 1, further add paraffin, ball milling mixed 24 hours in acetone, carry out after the drying under reduced pressure, pressed compact take the pressure punch forming of 98MPa as reservation shape, with this pressed compact in the vacuum of 5Pa, carry out vacuum-sintering with the condition that kept 1 hour under the predetermined temperature in 1370~1470 ℃ scope, behind the sintering, process by the cutting edge reconditioning of implementing R:0.07mm at the cutting blade and to produce respectively WC base cemented carbide tool base A processed with blade shapes of stipulating among the ISOCNMG120408~E.
And as material powder, the TiCN(for preparing all to have the average grain diameter of 0.5~2 μ m is TiC/TiN=50/50 by quality ratio) powder, Mo
2The C powder, the ZrC powder, the NbC powder, the TaC powder, WC powder, Co powder and Ni powder, these material powders are cooperated with the mix proportion shown in the table 2, with ball mill wet mixed 24 hours, after the drying, take the pressure punch forming of 98MPa as pressed compact, with this pressed compact in the blanket of nitrogen of 1.3kPa, carry out sintering with the condition that under 1540 ℃ temperature, kept 1 hour, behind the sintering, by partly implementing width: 0.1mm at cutting edge, angle: the cutting edge reconditioning of 20 degree processes to produce the TiCN based ceramic metal tool base a processed of the blade shapes with iso standard CNMG160412~e.
Then, these tool base A~E and tool base a~e are respectively charged into common chemical evaporation plating device,
(a) at first, in addition the formation condition that represents the TiCN layer of holding lengthwise growth crystalline structure described in the Japanese Patent Publication 6-8010 communique with the 1-TiCN in the table 3(table 3 represents the formation condition of common granular crystal tissue) shown in the condition evaporation formed the Ti compound layer of the target bed thickness shown in the table 6.
(b) with the condition shown in the table 4, form with the target bed thickness shown in the table 6 and to contain oxygen TiCN layer (namely as the superficial layer of lower layer, only the depth areas till from the surface of this layer to 500nm contains 0.5~3 atom %(O/(Ti+C+N+O) * 100%) oxygen)
(c) then, with the condition shown in the table 5, form the Al that contains Zr of upper layer with the target bed thickness shown in the table 6
2O
3Thereby, produce respectively coating tool 1~10 of the present invention.
And, take relatively as purpose, do not carry out the invention described above coating tool 1,2,6,7 above-mentioned operation (b), in addition to produce the comparison coating tool 1,2,6,7 shown in the table 7 with coating tool 1 of the present invention, 2,6,7 identical condition film forming.
In addition, for relatively, contain aerobic with the condition (being expressed as the present invention in the table 4 outer) of the above-mentioned operation (b) that breaks away from the invention described above coating tool 3~5,8~10, and, the Al that contains Zr formed with the condition (being expressed as the present invention in the table 5 outer) that breaks away from (c) equally
2O
3Layer is in addition to produce the comparison coating tool 3~5,8~10 shown in the table 7 with coating tool 3~5 of the present invention, 8~10 identical condition film forming.
Then, about the invention described above coating tool 1~10 and comparison coating tool 1~10, TiCN layer for the superficial layer that consists of lower layer, calculate averaged oxygen content in the depth areas till the bed thickness direction 500nm of this TiCN layer (=O/(Ti+C+N+O) * 100) with following method, and surpass averaged oxygen content in the depth areas of 500nm (=O/(Ti+C+N+O) * 100), namely, use the auger electron spectroscopic analysis device, in the abradant surface of the cross section of coating tool from the electron ray of the scope irradiation diameter 10nm of the most surperficial distance to being equivalent to Ti carbide lamella thickness of lower layer Ti carbonitride layer, measure Ti, C, N, the intensity at the Auger peak of O calculates the ratio at the Auger peak of O thus with atom % from their summation of peak intensity.In their value shown in the table 6,7.
And, for the invention described above coating tool 1~10 and comparison coating tool 1~10, use scanning electron microscope and EBSD device to measure the Al that contains Zr of upper layer
2O
3The particle diameter of crystal grain is obtained the peak that particle diameter distributes by making grading curve figure.
More specifically, as described below.
The Al that contains Zr for the upper layer surface
2O
3Crystal grain, use scanning electron microscope and EBSD device, by the crystal grain irradiation electron ray with hexagoinal lattice in the measurement range that each is present in this upper layer surface grinding face, with observe 5000 times of mensuration of multiplying power in length and breadth in any line segment in the scope of 20 μ m the particle diameter of contained particle make grading curve figure, obtain the peak value that particle diameter distributes from this curve map.At this moment, the particle diameter with an interval lower end of block diagram is made as r
1, the particle diameter of upper end is made as r
2, make r
2/ r
1=1.15, calculate thus the population in the measurement range.That is, with the mode setting range of the every increase by 15% of particle diameter, thereby uniformly-spaced set by logarithm.
In their value shown in the table 6,7.In addition, for comparing coating tool 1~10, do not form the coating tool of the peak value of particle diameter distribution at two places, only the peak with 1 place is shown in the 1st peak value one hurdle.
The Al that contains Zr of the upper layer for coating tool 1 of the present invention shown in Figure 1
2O
3The example of the grading curve figure that measures and make.And, the position of particle diameter peak value be use the expression local maximum bar chart front and back totally 3 populations the relation of particle diameter is set as function 2 times, the position of the peak value of these 2 functions of expression is obtained as the particle diameter peak.
Then, at coating tool 1~10 of the present invention, relatively in the upper layer of the hard coating layer of coating tool 1~10, about the ɑ type Al that contains Zr of { 0001 } orientation of the above crystal grain of particle diameter 1 μ m
2O
3The area ratio of crystal grain and particle diameter are lower than the Al that contains Zr of { 11-20 } orientation of 1 μ m crystal grain
2O
3The area ratio of crystal grain, use scanning electron microscope and EBSD device, with similarly above-mentioned, measure particle diameter by the crystal grain irradiation electron ray with hexagoinal lattice in the measurement range that each is present in its surface grinding face, and the inclination angle that becomes with respect to the tool base normal to a surface as the normal of { 0001 } of the crystal plane of described crystal grain and { 11-20 } face by this particle size determination, and measure crystal grain { 0001 } that each inclination angle is 0~10 degree or the Al that contains Zr of { 11-20 } orientation
2O
3The area ratio of crystal grain is obtained.
In their value shown in the table 6,7.
And, use scanning electron microscope, to observe multiplying power 2, the thickness of each structure sheaf of the hard coating layer of 000 times of observation (longitudinal section mensuration) coating tool 1~10 of the present invention, comparison coating tool 1~10 all demonstrates identical with the target bed thickness in fact average bed thickness (measuring the mean values of five points).
And, contain the Al of Zr for upper layer
2O
3Zr in the crystal grain contains proportional, uses ion microprobe to measure through the surface of mirror ultrafinish processing, will be with the mean value of observing lower different five points in visual field of 10,000 times of multiplying powers as measured value.
[table 1]
[table 2]
[table 3]
[table 4]
[table 5]
(in the table, symbol ※ represents to carry out evaporation until become upper layer target bed thickness)
[table 6]
[table 7]
Then, various coating tools to the invention described above coating tool 1~10, comparison coating tool 1~10, all the leading section at instrument steel lathe tool utilizes under the fastening state of stationary fixture, carry out the wet type high speed interrupted cut test (common cutting speed is as 250m/min) of carbon steel take following condition (being called machining condition A)
On the length direction of workpiece: JISS30C with uniformly-spaced be formed with 8 pods,
Cutting speed: 400m/min.,
Cutting-in amount: 1.5mm,
Feed speed: 0.3mm/rev,
Cutting time: 5 minutes,
Carry out the firm wet type high speed interrupted cut test of chrome molybdenum with following condition (being called machining condition B), (common cutting speed is 200m/min),
The length direction of workpiece material: JISSCM440 uniformly-spaced be formed with 8 pods,
Cutting speed: 360m/min.,
Cutting-in amount: 1.5mm,
Feed speed: 0.3mm/rev,
Cutting time: 5 minutes,
Carry out the wet type high speed interrupted cut test of spheroidal graphite cast-iron with following condition (being called machining condition C), (common cutting speed is 250m/min),
The length direction of workpiece material: JISFCD450 uniformly-spaced be formed with 8 pods,
Cutting speed: 350m/min.,
Cutting-in amount: 2.0mm,
Feed speed: 0.3mm/rev,
Cutting time: 5 minutes,
All measured the wear of the tool flank width of cutting edge in arbitrary cutting test.
In its measurement result shown in the table 8.
[table 8]
(in the table, symbol ※ is illustrated in that hard coating layer occurs peels off, symbol ※ ※ is illustrated in that hard coating layer occurs collapsing cutter and reach cutting time till service life)
From the result shown in table 6~8 as can be known, coating tool 1~10 of the present invention, all the most surperficial formation at lower layer contains oxygen TiCN crystal grain, and by the Al that contains Zr
2O
3The upper layer that consists of forms predetermined particle diameter and distributes, and form predetermined crystalline orientation tissue, thereby can improve the adhesive strength of upper layer and lower layer, and can keep high temperature hardness, the elevated temperature strength of upper layer, therefore show excellent elevated temperature strength and high temperature hardness, and collapsing cutter, peeling off of hard coating layer can not occur, through the long-term excellent cutting ability of performance of using.
Yet, relatively clearer and more definite in the coating tool 1~10, in the processing of high speed interrupted cut, because collapsing cutter, peeling off of hard coating layer occuring, within the shorter time, arrive service life.
Utilizability on the industry
As above-mentioned, the coating tool of this invention is continuous cutting or the interrupted cut under the usual conditions of various steel or cast iron etc. not only, even following high heat to occur, and cutting edge is applied under the severe like this condition of intermittence/impact load, collapsing cutter, peeling off of hard coating layer can not occur yet, the excellent cutting ability of performance in long-term the use, Labor-saving, energy-saving and the cost degradation that therefore can tackle fully contentedly topping machanism high performance and machining.
Claims (2)
1. surface-coated cutting tool, on the surface of the tool base that is consisted of by tungsten carbide base carbide alloy or base titanium carbonitride, coating is formed with the hard coating layer that is made of following (a) and (b), and this surface-coated cutting tool is characterised in that
(a) lower layer is the Ti compound layer, by the one deck in carbide lamella, nitride layer, carbonitride layer, oxycarbide layer and the carbon nitrogen oxide layer of Ti or two-layer more than consist of and have the overall average bed thickness of 3~20 μ m,
(b) upper layer is the α type Al that contains Zr
2O
3Layer has the average bed thickness of 2~15 μ m and have ɑ type crystalline texture under the state of chemical vapor deposition, and wherein, with atomic ratio measuring, ratio Zr/(Al+Zr+O) is 0.0001~0.003,
(c) the Ti carbonitride layer of the bed thickness more than the 500nm consists of the superficial layer of above-mentioned lower layer by having at least, only the interface from this Ti carbonitride layer and upper layer contains aerobic to the depth areas till the bed thickness direction 500nm of this Ti carbonitride layer, and the averaged oxygen content that contains in this depth areas is 0.5~3 atom % of the total content of the Ti, the C that contain in this depth areas, N, O
(d) about above-mentioned upper layer, by using scanning electron microscope and EBSD device, each crystal grain irradiation electron ray with hexagoinal lattice that is present in the measurement range of this upper layer surface grinding face is come specific die, and measure the α type Al of the above-mentioned Zr of containing
2O
3When the particle diameter of crystal grain distributes, be the peak value of the scope of 0.3~0.7 μ m and this two places formation particle diameter distribution of scope that particle diameter is 1.5~3.0 μ m at particle diameter.
2. surface-coated cutting tool as claimed in claim 1 is characterized in that,
About above-mentioned upper layer, use scanning electron microscope and EBSD device, each crystal grain irradiation electron ray with hexagoinal lattice that is present in the measurement range of this upper layer surface grinding face is come specific die, and measure the α type Al of the above-mentioned Zr of containing
2O
3The particle diameter of crystal grain, and measure the normal to a surface with respect to described tool base, during inclination angle that the inclination angle that becomes as the normal of { 0001 } face of the crystal plane of described crystal grain and the normal of { 11-20 } face become, particle diameter is in the above crystal grain of 1 μ m, { 0001 } area ratio of the crystal grain of inclination angle in the scope of 0~10 degree that becomes with respect to the tool base normal to a surface of the normal of face accounts for more than the 70 area % of area ratio integral body, and, particle diameter is lower than in the crystal grain of 1 μ m, and the normal of { 11-20 } face accounts for more than the 70 area % of area ratio integral body with respect to the area ratio of the crystal grain of inclination angle in the scope of 0~10 degree that the tool base normal to a surface becomes.
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JP2012-056661 | 2012-03-14 |
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CN104511731A (en) * | 2013-09-30 | 2015-04-15 | 三菱综合材料株式会社 | Surface-coated cutting tool with hard coated layer exerting excellent chipping resistance |
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CN111940769B (en) * | 2019-05-14 | 2022-10-25 | 株式会社泰珂洛 | Coated cutting tool |
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CN103302326B (en) | 2017-03-01 |
JP2013188833A (en) | 2013-09-26 |
JP5831707B2 (en) | 2015-12-09 |
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