CN103296572A - 一种采用环形腔结构的气体激光器放大系统 - Google Patents
一种采用环形腔结构的气体激光器放大系统 Download PDFInfo
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- CN103296572A CN103296572A CN2013102205035A CN201310220503A CN103296572A CN 103296572 A CN103296572 A CN 103296572A CN 2013102205035 A CN2013102205035 A CN 2013102205035A CN 201310220503 A CN201310220503 A CN 201310220503A CN 103296572 A CN103296572 A CN 103296572A
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- 230000008878 coupling Effects 0.000 claims abstract description 7
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- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 5
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CN201310220503.5A CN103296572B (zh) | 2013-06-05 | 2013-06-05 | 一种采用环形腔结构的气体激光器放大系统 |
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CN201310220503.5A CN103296572B (zh) | 2013-06-05 | 2013-06-05 | 一种采用环形腔结构的气体激光器放大系统 |
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CN103296572A true CN103296572A (zh) | 2013-09-11 |
CN103296572B CN103296572B (zh) | 2015-07-15 |
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CN201310220503.5A Expired - Fee Related CN103296572B (zh) | 2013-06-05 | 2013-06-05 | 一种采用环形腔结构的气体激光器放大系统 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104993364A (zh) * | 2015-07-22 | 2015-10-21 | 中国科学院光电研究院 | 一种具有环形腔结构的准分子激光系统 |
WO2017012079A1 (zh) * | 2015-07-22 | 2017-01-26 | 中国科学院光电研究院 | 一种具有环形腔结构的准分子激光系统 |
CN110824852A (zh) * | 2018-08-13 | 2020-02-21 | 台湾积体电路制造股份有限公司 | 激光系统以及光刻设备 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020154668A1 (en) * | 1999-12-10 | 2002-10-24 | Knowles David S. | Very narrow band, two chamber, high rep rate gas discharge laser system |
US20040182838A1 (en) * | 2001-04-18 | 2004-09-23 | Das Palash P. | Very high energy, high stability gas discharge laser surface treatment system |
JP2006165484A (ja) * | 2004-11-09 | 2006-06-22 | Komatsu Ltd | 多段増幅型レーザシステム |
CN102187533A (zh) * | 2008-10-21 | 2011-09-14 | 西默股份有限公司 | 极高功率激光腔光学改进 |
CN102810810A (zh) * | 2012-03-02 | 2012-12-05 | 中国科学院光电研究院 | 单腔双电极放电腔及准分子激光器 |
-
2013
- 2013-06-05 CN CN201310220503.5A patent/CN103296572B/zh not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020154668A1 (en) * | 1999-12-10 | 2002-10-24 | Knowles David S. | Very narrow band, two chamber, high rep rate gas discharge laser system |
US20040182838A1 (en) * | 2001-04-18 | 2004-09-23 | Das Palash P. | Very high energy, high stability gas discharge laser surface treatment system |
JP2006165484A (ja) * | 2004-11-09 | 2006-06-22 | Komatsu Ltd | 多段増幅型レーザシステム |
CN102187533A (zh) * | 2008-10-21 | 2011-09-14 | 西默股份有限公司 | 极高功率激光腔光学改进 |
CN102810810A (zh) * | 2012-03-02 | 2012-12-05 | 中国科学院光电研究院 | 单腔双电极放电腔及准分子激光器 |
Non-Patent Citations (1)
Title |
---|
姚永邦等: "KrCl准分子激光振荡-放大系统的研究", 《应用激光》, vol. 4, no. 6, 31 December 1984 (1984-12-31) * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104993364A (zh) * | 2015-07-22 | 2015-10-21 | 中国科学院光电研究院 | 一种具有环形腔结构的准分子激光系统 |
WO2017012079A1 (zh) * | 2015-07-22 | 2017-01-26 | 中国科学院光电研究院 | 一种具有环形腔结构的准分子激光系统 |
CN110824852A (zh) * | 2018-08-13 | 2020-02-21 | 台湾积体电路制造股份有限公司 | 激光系统以及光刻设备 |
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CN103296572B (zh) | 2015-07-15 |
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Effective date of registration: 20200813 Address after: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee after: Institute of Microelectronics of the Chinese Academy of Sciences Address before: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee before: Aerospace Information Research Institute,Chinese Academy of Sciences Effective date of registration: 20200813 Address after: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee after: Aerospace Information Research Institute,Chinese Academy of Sciences Address before: 100094, No. 9 Deng Nan Road, Beijing, Haidian District Patentee before: Academy of Opto-Electronics, Chinese Academy of Sciences |
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