CN103292917A - Photoelectric receiver time stability test method based on acousto-optical amplitude modulation - Google Patents

Photoelectric receiver time stability test method based on acousto-optical amplitude modulation Download PDF

Info

Publication number
CN103292917A
CN103292917A CN2013101921447A CN201310192144A CN103292917A CN 103292917 A CN103292917 A CN 103292917A CN 2013101921447 A CN2013101921447 A CN 2013101921447A CN 201310192144 A CN201310192144 A CN 201310192144A CN 103292917 A CN103292917 A CN 103292917A
Authority
CN
China
Prior art keywords
frequency
photelectric receiver
light
measured
linearly polarized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN2013101921447A
Other languages
Chinese (zh)
Other versions
CN103292917B (en
Inventor
谭久彬
胡鹏程
杨千惠
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Harbin Institute of Technology
Original Assignee
Harbin Institute of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Harbin Institute of Technology filed Critical Harbin Institute of Technology
Priority to CN201310192144.7A priority Critical patent/CN103292917B/en
Publication of CN103292917A publication Critical patent/CN103292917A/en
Application granted granted Critical
Publication of CN103292917B publication Critical patent/CN103292917B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Optical Communication System (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Abstract

The invention belongs to a laser application technology, and relates to a photoelectric receiver time stability test method based on acousto-optical amplitude modulation. The method includes using a single-frequency laser as a light source, outputting an amplitude-adjustable double-frequency laser after the single-frequency laser passes an acousto-optical modulator, utilizing a non-polarized beam splitting prism for beam splitting, and testing phase difference between a to-be-tested photoelectric receiver and a reference photoelectric receiver. The method has the advantages that in testing, linearly polarized light with the frequencies of v1 and v2 in a reference light beam is transmitted in a coaxial identical-optical-path mode, and linearly polarized light with the frequencies of v1 and v2 in a measurement light beam is transmitted in a coaxial identical-optical-path mode; phases of the two light beams are unaffected by external environmental changes, extra phase errors are not introduced, and test accuracy is high; time stability of photoelectric receivers in different light intensities can be tested by means of adjusting light intensity of the double-frequency laser.

Description

Photelectric receiver time stability method of testing based on acousto-optic amplitude modulation
Technical field
The invention belongs to laser application technique, relate generally to a kind of photelectric receiver time stability method of testing based on acousto-optic amplitude modulation.
Background technology
Laser interferometry with characteristics such as its high sensitivity, high precision and noncontacts in sophisticated industry equipments such as precision and ultraprecise processing, microelectronics equipment, nanometer technology and defence equipment field in occupation of important use status more and more, and be used widely.
In the laser heterodyne interference system, photelectric receiver plays realizes that signal receives, the vital role of signal conversion, and its performance particularly time stability will directly influence measurement stability and the measuring accuracy of whole measuring system.In order to study the time stability of photelectric receiver, Xi'an University of Technology to the noisiness of the core devices photodetector in the photelectric receiver carried out analyzing (Xie Guangyong. the photodetector noisiness is analyzed. the infotech .2008.11 phase).To the noise source of photodetector, mechanism of noise generation etc. have carried out theoretical analysis and research in the article, and authenticity and the stability of the output signal of further research photelectric receiver is laid the foundation.Yet, in the document just the analysis of principle the influence to stability of the noisiness of photodetector and noise, do not calculate the actual parameter of photodetector stability, and in analysis, only considered photodetector, do not consider that the sum of errors introduced in the electric signal processing circuit is to the influence of stability.
Osayd Kharraz with the simulation software analog simulation noisiness (the Osayd Kharraz of two kinds of photodetector PIN and APD, David Forsyth.Performance comparisons between PIN and APD photodetectors for use in optical communication systems.Optic.) theoretical simulation has drawn the noisiness curve of two kinds of photodetectors, and labor the relation of photodetector gain and noise, be conducive to more specifically at length analyze the stability of photelectric receiver.Yet, in the document also a theoretical analysis noisiness and the data of photodetector, the error of introducing in the actual analysis electric signal processing circuit and to the influence of stability not.
In sum, all be to pass through theoretical and The Realization of Simulation to the noise analysis of photelectric receiver and the analysis of stability characteristic at present, the time stability that does not have actual testing photoelectronic receiver, thereby it is make the demarcation to the stability of photelectric receiver only rest on the theoretical analysis stage, and inaccurate; And present analysis is all only analyzed at the stability of the photoelectric detector in the photelectric receiver, the electric signal processing circuit to photelectric receiver does not carry out the time stability analysis, and in the reality, electric signal processing circuit partly can be introduced phase drift in the output signal of photelectric receiver, thereby the time stability to photelectric receiver exerts an influence, and also can influence the demarcation to the working time stability of heterodyne interference system simultaneously to a certain extent.
Summary of the invention
Problem at above-mentioned prior art existence, the present invention proposes a kind of photelectric receiver time stability method of testing based on acousto-optic amplitude modulation, measure and treat the phase stability of photometry electricity receiver by the peak-to-peak value that the phase differential of standard photelectric receiver and photelectric receiver output signal to be measured is changed and carry out integrated testability, and change the light intensity of exporting light signal by acousto-optic modulator, can access the time stability of the photelectric receiver to be measured under different light intensity.
The present invention is achieved through the following technical solutions:
A kind of photelectric receiver time stability method of testing based on acousto-optic amplitude modulation, this method step is as follows:
(1) single-frequency laser sends a branch of single-frequency laser, through the adjustable double-frequency laser of output amplitude behind the acousto-optic modulator, comprises that frequency is respectively v 1And v 2, the polarization direction is respectively the mutually orthogonal linearly polarized light of horizontal direction and vertical direction, and this double-frequency laser light beam is divided into reference beam a and measuring beam b through behind the no inclined to one side Amici prism, and all comprising frequency among reference beam a and the measuring beam b simultaneously is v 1With frequency be v 2Orhtogonal linear polarizaiton light;
(2) reference beam a is transmitted to analyzer a, and the polarization direction of analyzer a is from the horizontal by 45 ° of angles, and reference beam a is behind analyzer a, and the frequency that the output polarization direction is identical is respectively v 1And v 2Linearly polarized light; Frequency is respectively v 1And v 2The identical linearly polarized light in polarization direction produce a branch of beat frequency interference light, phase place is when arriving the standard photelectric receiver
Figure BSA00000899986300021
The standard photelectric receiver receives beat frequency interference light, and output frequency is v 0=| v 1-v 2|, phase place is
Figure BSA00000899986300022
Reference signal; Wherein, the phase stability of standard photelectric receiver is
Figure BSA00000899986300023
(3) measuring beam b is transmitted to analyzer b through plane mirror, and the polarization direction of analyzer b is consistent with analyzer a polarization direction, and measuring beam b is behind analyzer b, and the frequency that the output polarization direction is identical is respectively v 1And v 2Linearly polarized light; Frequency is respectively v 1And v 2The identical linearly polarized light in polarization direction produce a branch of beat frequency interference light, phase place is when arriving photelectric receiver to be measured
Figure BSA00000899986300024
Photelectric receiver to be measured receives beat frequency interference light, and output frequency is v 0=| v 1-v 2|, phase place is
Figure BSA00000899986300031
Measuring-signal; Wherein, the phase stability of photelectric receiver to be measured is
Figure BSA00000899986300032
(4) output signal of standard photelectric receiver and photelectric receiver to be measured is sent into phasometer, gathers the phase differential of the output signal of two photelectric receivers
Figure BSA00000899986300033
Figure BSA00000899986300034
(5) phasometer is with the phase differential result who calculates Send into data acquisition module, in time period 0~t to the phase differential of standard photelectric receiver and photelectric receiver to be measured
Figure BSA00000899986300036
Gather, and the interior phase differential of section 0~t computing time
Figure BSA00000899986300037
The peak-to-peak value that changes
Figure BSA00000899986300038
The phase stability of photelectric receiver to be measured
Figure BSA00000899986300039
For
Figure BSA000008999863000310
(6) amplitude of the double-frequency laser of adjusting acousto-optic modulator output, the phase stability of repeated test photelectric receiver to be measured
Figure BSA000008999863000311
Obtain the phase stability of the photelectric receiver to be measured under difference input light intensity situation.
For using no inclined to one side Amici prism that a branch of double-frequency laser that laser instrument sends is separated, form reference beam a and measuring beam b, all comprising frequency in two light beams simultaneously is v 1With frequency be v 2Orhtogonal linear polarizaiton light, in the transmission course, reference beam a medium frequency is v 1With frequency be v 2Linearly polarized light arrive the light path unanimity of standard photelectric receiver; Measuring beam b medium frequency is v 1With frequency be v 2Linearly polarized light arrive the light path unanimity of photelectric receiver to be measured.
The present invention has following characteristics and good result:
(1) uses no inclined to one side Amici prism to laser beam light splitting among the present invention, can guarantee that reference beam a medium frequency is v 1With frequency be v 2Linearly polarized light coaxial, transfer to the standard photelectric receiver with light path, the light path unanimity of two linearly polarized lights when arriving the standard photelectric receiver; Measuring beam b medium frequency is v 1With frequency be v 2Linearly polarized light coaxial, transfer to photelectric receiver to be measured with light path, arrive the light path unanimity of photelectric receiver to be measured; In transmission course, though variation such as temperature, pressure can cause the variation of air refraction in the light path, but the phase place to the beat frequency interference light beam among reference beam a and the measuring beam b does not exert an influence, and can eliminate standard photelectric receiver and photelectric receiver input signal to be measured phase jitter to the influence of test.
(2) the present invention uses the time stability of the method testing photoelectronic receiver of actual measurement, with the photo-beat of photelectric receiver frequently signal receiving end and photo-beat frequently the time stability of signal processing circuit part want actual the testing out of method for stability by test simultaneously, can accurately record the time stability of photelectric receiver to be measured.
(3) adopt acousto-optic amplitude modulation to produce a branch of double-frequency laser, can in range of adjustment, change the beat frequency light intensity magnitude of the double-frequency laser in the test, the time stability of the photelectric receiver of test under different light intensity.
Description of drawings
Accompanying drawing is the inventive method step synoptic diagram
Among the figure: 1 single-frequency laser, 2 acousto-optic modulators, 3 no inclined to one side Amici prisms, 4 plane mirrors, 5 analyzer a, 6 analyzer b, 7 standard photelectric receivers, 8 photelectric receivers to be measured, 9 phasometers, 10 data acquisition modules.
Embodiment
Below in conjunction with accompanying drawing example of the present invention is described in detail.
A kind of photelectric receiver time stability method of testing based on acousto-optic modulator, this method step is as follows:
(1) single-frequency laser 1 sends beam of laser, and this Shu Jiguang becomes a branch of frequency that comprises and is respectively v through behind the acousto-optic modulator 2 1And v 2The double-frequency laser light beam, the polarization direction is respectively the mutually orthogonal linearly polarized light of horizontal direction and vertical direction, this double-frequency laser light beam is divided into reference beam a and measuring beam b through behind the no inclined to one side Amici prism 3, and all comprising frequency among reference beam a and the measuring beam b simultaneously is v 1With frequency be v 2Orhtogonal linear polarizaiton light;
(2) reference beam a is transmitted to analyzer a5, and the polarization direction of analyzer a5 is from the horizontal by 45 ° of angles, and reference beam a is behind analyzer a5, and the frequency that the output polarization direction is identical is respectively v 1And v 2Linearly polarized light; Frequency is respectively v 1And v 2The identical linearly polarized light in polarization direction produce a branch of beat frequency interference light, and frequency is v 1And v 2Linearly polarized light arrive the light path unanimity of standard photelectric receiver 7, phase place is when arriving standard photelectric receiver 7
Figure BSA00000899986300041
Standard photelectric receiver 7 receives beat frequency interference light, and output frequency is v 0=| v 1-v 2|, phase place is
Figure BSA00000899986300042
Reference signal; Wherein, the phase stability of standard photelectric receiver 7 is
(3) measuring beam b is transmitted to analyzer b6 through plane mirror 4, analyzer a5 polarization direction, the polarization direction unanimity of analyzer b6, and measuring beam b is behind analyzer b6, and the frequency that the output polarization direction is identical is respectively v 1And v 2Linearly polarized light; Frequency is respectively v 1And v 2The identical linearly polarized light in polarization direction produce a branch of beat frequency interference light, and frequency is v 1And v 2Linearly polarized light arrive the light path unanimity of photelectric receiver 8 to be measured, phase place is when arriving photelectric receiver 8 to be measured
Figure BSA00000899986300051
Photelectric receiver 8 to be measured receives beat frequency interference light, and output frequency is v 0=| v 1-v 2|, phase place is
Figure BSA00000899986300052
Measuring-signal; Wherein, the phase stability of photelectric receiver 8 to be measured is
Figure BSA00000899986300053
(4) measuring-signal of the reference signal of standard photelectric receiver 7 outputs and photelectric receiver to be measured 8 outputs is sent into phasometer 9, gathers the phase differential of the output signal of two photelectric receivers
Figure BSA00000899986300054
Figure BSA00000899986300055
(5) phasometer 9 is with the phase differential result who calculates
Figure BSA00000899986300056
Send into data acquisition module 10, in time period 0~t to the phase differential of standard photelectric receiver 7 and photelectric receiver to be measured 8
Figure BSA00000899986300057
Gather, and the interior phase differential of section 0~t computing time
Figure BSA00000899986300058
The peak-to-peak value that changes
Figure BSA00000899986300059
The phase stability of photelectric receiver to be measured
Figure BSA000008999863000510
For
Figure BSA000008999863000511
In the formula
Figure BSA000008999863000512
Be the smallest peaks peak value,
Figure BSA000008999863000513
Be the maximum peak peak value;
(6) frequency of the double-frequency laser of adjusting acousto-optic modulator 2 outputs, the phase stability of repeated test photelectric receiver 8 to be measured
Figure BSA000008999863000514
Obtain the phase stability of the photelectric receiver to be measured under difference input light frequency.

Claims (1)

1. photelectric receiver time stability method of testing based on acousto-optic amplitude modulation is characterized in that this method step is as follows:
(1) single-frequency laser sends a branch of single-frequency laser, is respectively v through the adjustable frequency that comprises of output amplitude behind the acousto-optic modulator 1And v 2Double-frequency laser, the polarization direction is respectively the mutually orthogonal linearly polarized light of horizontal direction and vertical direction, this double-frequency laser light beam is divided into reference beam a and measuring beam b through behind the no inclined to one side Amici prism, and all comprising frequency among reference beam a and the measuring beam b simultaneously is v 1With frequency be v 2Orhtogonal linear polarizaiton light;
(2) reference beam a is transmitted to analyzer a, and the polarization direction of analyzer a is from the horizontal by 45 ° of angles, and reference beam a is behind analyzer a, and the frequency that the output polarization direction is identical is respectively v 1And v 2Linearly polarized light; Frequency is respectively v 1And v 2The identical linearly polarized light in polarization direction produce a branch of beat frequency interference light, and frequency v 1With frequency v 2Linearly polarized light arrive the light path unanimity of standard photelectric receiver, phase place is when arriving the standard photelectric receiver
Figure FSA00000899986200011
The standard photelectric receiver receives beat frequency interference light, and output frequency is v 0=| v 1-v 2|, phase place is
Figure FSA00000899986200012
Reference signal; Wherein, the phase stability of standard photelectric receiver is
Figure FSA00000899986200013
(3) measuring beam b is transmitted to analyzer b through plane mirror, and the polarization direction of analyzer b is consistent with analyzer a polarization direction, and measuring beam b is behind analyzer b, and the frequency that the output polarization direction is identical is respectively v 1And v 2Linearly polarized light; Frequency is respectively v 1And v 2The identical linearly polarized light in polarization direction produce a branch of beat frequency interference light, and frequency v 1With frequency v 2Linearly polarized light arrive the light path unanimity of photelectric receiver to be measured, phase place is when arriving photelectric receiver to be measured Photelectric receiver to be measured receives beat frequency interference light, and output frequency is v 0=| v 1-v 2|, phase place is Measuring-signal; Wherein, the phase stability of photelectric receiver to be measured is
Figure FSA00000899986200016
(4) measuring-signal of the reference signal of standard photelectric receiver output and photelectric receiver to be measured output is sent into phasometer, gathers the phase differential of the output signal of two photelectric receivers
Figure FSA00000899986200017
Figure FSA00000899986200018
(5) phasometer is with the phase differential result who calculates
Figure FSA00000899986200019
Send into data acquisition module, in time period 0~t to the phase differential of standard photelectric receiver and photelectric receiver to be measured
Figure FSA000008999862000110
Gather, and the interior phase differential of section 0~t computing time
Figure FSA000008999862000111
The peak-to-peak value that changes
Figure FSA000008999862000112
The phase stability of photelectric receiver to be measured
Figure FSA000008999862000113
For
Figure FSA00000899986200021
In the formula
Figure FSA00000899986200022
Be the smallest peaks peak value,
Figure FSA00000899986200023
Be the maximum peak peak value;
(6) amplitude of the double-frequency laser of adjusting acousto-optic modulator output, the phase stability of repeated test photelectric receiver to be measured
Figure FSA00000899986200024
Obtain the phase stability of the receiver to be measured under the situation of difference input light intensity.
CN201310192144.7A 2013-05-11 2013-05-11 Based on the photelectric receiver time stability method of testing of acousto-optic amplitude modulation Active CN103292917B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201310192144.7A CN103292917B (en) 2013-05-11 2013-05-11 Based on the photelectric receiver time stability method of testing of acousto-optic amplitude modulation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201310192144.7A CN103292917B (en) 2013-05-11 2013-05-11 Based on the photelectric receiver time stability method of testing of acousto-optic amplitude modulation

Publications (2)

Publication Number Publication Date
CN103292917A true CN103292917A (en) 2013-09-11
CN103292917B CN103292917B (en) 2015-11-25

Family

ID=49094163

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201310192144.7A Active CN103292917B (en) 2013-05-11 2013-05-11 Based on the photelectric receiver time stability method of testing of acousto-optic amplitude modulation

Country Status (1)

Country Link
CN (1) CN103292917B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104037610A (en) * 2014-07-01 2014-09-10 哈尔滨工业大学 Single longitudinal mode laser interlocking method and device based on thermal frequency stabilization and acousto-optic frequency shift
CN104051947B (en) * 2014-07-01 2017-05-17 哈尔滨工业大学 Dual-longitudinal-mode-laser-device interlocking method and device based on piezoelectric effect and acousto-optic frequency shift

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4832489A (en) * 1986-03-19 1989-05-23 Wyko Corporation Two-wavelength phase-shifting interferometer and method
US5883717A (en) * 1996-06-04 1999-03-16 Northeastern University Optical quadrature interferometry utilizing polarization to obtain in-phase and quadrature information
CN101126784A (en) * 2007-09-18 2008-02-20 浙江大学 Photoelectric detector amplitude versus frequency character test method for optical fiber peg-top
CN201191235Y (en) * 2008-04-16 2009-02-04 中国科学院上海光学精密机械研究所 Measuring device for frequency stability of Fabry-Perot interferometer
CN102305591A (en) * 2011-08-17 2012-01-04 哈尔滨工业大学 Multi-frequency synchronization phase laser ranging device and method based on dual-acousto-optic shift frequency
CN102853771A (en) * 2012-09-19 2013-01-02 哈尔滨工业大学 Miniaturization high-speed and ultra-precision laser heterodyne interferometry method and miniaturization high-speed and ultra-precision laser heterodyne interferometry device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4832489A (en) * 1986-03-19 1989-05-23 Wyko Corporation Two-wavelength phase-shifting interferometer and method
US5883717A (en) * 1996-06-04 1999-03-16 Northeastern University Optical quadrature interferometry utilizing polarization to obtain in-phase and quadrature information
CN101126784A (en) * 2007-09-18 2008-02-20 浙江大学 Photoelectric detector amplitude versus frequency character test method for optical fiber peg-top
CN201191235Y (en) * 2008-04-16 2009-02-04 中国科学院上海光学精密机械研究所 Measuring device for frequency stability of Fabry-Perot interferometer
CN102305591A (en) * 2011-08-17 2012-01-04 哈尔滨工业大学 Multi-frequency synchronization phase laser ranging device and method based on dual-acousto-optic shift frequency
CN102853771A (en) * 2012-09-19 2013-01-02 哈尔滨工业大学 Miniaturization high-speed and ultra-precision laser heterodyne interferometry method and miniaturization high-speed and ultra-precision laser heterodyne interferometry device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
陈洪芳等: "激光外差干涉检偏器旋转误差对非线性误差的影响", 《中国激光》 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104037610A (en) * 2014-07-01 2014-09-10 哈尔滨工业大学 Single longitudinal mode laser interlocking method and device based on thermal frequency stabilization and acousto-optic frequency shift
CN104051947B (en) * 2014-07-01 2017-05-17 哈尔滨工业大学 Dual-longitudinal-mode-laser-device interlocking method and device based on piezoelectric effect and acousto-optic frequency shift
CN104037610B (en) * 2014-07-01 2017-08-01 哈尔滨工业大学 Single longitudinal mode laser interlock method and device based on hot frequency stabilization and acousto-optic frequency translation

Also Published As

Publication number Publication date
CN103292917B (en) 2015-11-25

Similar Documents

Publication Publication Date Title
US9835441B2 (en) Absolute distance measurement apparatus and method using laser interferometric wavelength leverage
CN101858822B (en) He-Ne laser frequency stability measuring system and measuring method thereof
CN103926492B (en) The frequency response measurement apparatus and method of high-speed photodetector
CN106969714B (en) A kind of method of precise measurement optical fiber length
US7227645B2 (en) Method and apparatus for measuring polarization mode dispersion
CN105785386B (en) High-precision FM-CW laser ranging system based on F P etalons
CN111277325B (en) Instantaneous frequency measurement method and system with adjustable measurement range based on polarization modulator
CN103674287A (en) Laser wavelength monitoring device based on etalons
CN105203031A (en) Quadruple optical subdivision two-axis heterodyne grating interferometer
CN113503901B (en) Device and method for eliminating measurement signal jitter of white light interferometer
CN101634594B (en) Phase measuring device of beam splitter
CN110530531B (en) Michelson interference-based fountain type atomic gravimeter light beam phase change measuring device and method
CN102353452A (en) System for measuring free spectral range of F-P (Fabry-Perot) cavity
CN102262224A (en) Amplitude-modulated wave phase-locked laser ranging method and device
CN209590271U (en) A kind of measuring device of space length
CN105911605B (en) A kind of closed signal acquisition method in optical interference formula gravimeter
CN212030564U (en) Light source frequency shift calibration auxiliary channel structure and optical fiber vibration measuring device
CN103292917B (en) Based on the photelectric receiver time stability method of testing of acousto-optic amplitude modulation
CN110375779B (en) Device and method for improving OFDR frequency domain sampling rate
CN103292916B (en) Based on the photelectric receiver time stability method of testing of dual-acousto-optic shift
CN103292915B (en) Based on the photelectric receiver temperature coefficient test method of acousto-optic amplitude modulation
CN113607277B (en) Demodulation method of narrow linewidth laser linewidth measurement system
CN104155642A (en) Traceable synchronous measurement ruler-based mixed double-light source laser range finding device and method
CN103292912B (en) Based on the photelectric receiver temperature coefficient test method of dual-acousto-optic shift
CN103292914B (en) Based on the photelectric receiver time stability method of testing of double-frequency laser without inclined light splitting

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant