CN103276330A - Pulse laser irradiation treatment method for healing fatigue damage of copper thin film part - Google Patents
Pulse laser irradiation treatment method for healing fatigue damage of copper thin film part Download PDFInfo
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- CN103276330A CN103276330A CN2013101993464A CN201310199346A CN103276330A CN 103276330 A CN103276330 A CN 103276330A CN 2013101993464 A CN2013101993464 A CN 2013101993464A CN 201310199346 A CN201310199346 A CN 201310199346A CN 103276330 A CN103276330 A CN 103276330A
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Abstract
The invention relates to a pulse laser irradiation treatment method for healing fatigue damage of a copper thin film part. The pulse laser irradiation treatment method comprises the following steps of: A) providing a laser irradiation healing device, wherein the laser irradiation healing device comprises a pulse laser, a light path device, a guide rail and a test piece fixing device; B) fixing a copper thin film test piece at the center of a metal flat plate; C) causing a laser emitting hole, the light path device and the test piece fixing device to be on the same line by virtue of the guide rail; D) controlling size of a laser spot; E) causing the laser spot to accurately irradiate a gap of a test piece; F) adjusting single pulse energy by virtue of a laser control system, so as to change energy density of lasers, wherein the lasers emitted by the pulse laser are irradiated onto the surface of the copper thin film test piece by virtue of a convex lens in the light path device; and G) taking down the copper thin film test piece from the test piece fixing device. By adopting the pulse laser irradiation treatment method, a heat-affected zone is formed on the surface of a material, so that fatigue damage of the copper thin film test piece can be effectively healed, and fatigue life of the copper thin film test piece can be also greatly prolonged.
Description
Technical field
The present invention relates to machinofacture and laser processing applied technical field, refer in particular to a kind of pulse laser irradiation treatment process of the copper thin-film member fatigue damage that heals.
Background technology
Hardware is everlasting and is on active service under the repeated stress, and fatigue damage is inevitable, in case the fracture of losing efficacy will cause immeasurable loss.Therefore, if the damage member of taking appropriate means to align is under arms repaired, recover its fatigue property, play the effect of lengthening the life, will have very important practical meaning in engineering.For this reason, many workers are carrying out broad research aspect the reparation of metallic substance fatigue damage, draw a series of important theory achievements, the healing process that proposes has annealing, electric pulse, mechanic shot peening and ion-nitridation method etc., the fatigue damage of the hardware that healed effectively, prolong its work-ing life, had practical value and engineering significance.
Laser irradiation is handled, and refers to the laser direct irradiation to utilize the interaction between laser and the metallic substance to realize the modification of metal is handled in the metallic surface, belongs to a kind of in the multiple application of Laser Surface Treatment.Can be divided into transformation hardening and surface melting by the heat density exercising result, its principle is when laser beam irradiation during to metal material surface, thereby the absorbed laser energy causes surface temperature to raise rapidly, because irradiation time is short and metallic matrix heat conduction is very fast, the temperature fall off rate is very high, and this rapid heating and cooling process cause the metal material surface tissue to change, thereby improve many performances of material, hardness for example, wear resistance, fatigue characteristic etc.
Summary of the invention
The objective of the invention is to solve the problem of copper film material fatigue damage healing.Provide a kind of novel pulse laser irradiation to handle the method for healing copper film fatigue damage.The copper film member that has produced fatigue damage in being on active service is carried out the laser irradiation healing, improve its fatigue property, prolong its work-ing life, thereby improve reliability and the security of micromechanics, for the practical problems in the engineering practice provides effective solution.
For solving the problems of the technologies described above, the technical solution used in the present invention is: the heal pulse laser irradiation treatment process of copper thin-film member fatigue damage of a kind of 1. 1 kinds of healing copper thin-film member fatigue damage the steps include:
A) provide laser irradiation healing device, described laser irradiation healing device comprises pulsed laser, light path device, guide rail and test specimen stationary installation; Described light path device comprises convex lens; Described test specimen stationary installation comprises metal plate and magnet;
B) will exist the copper film test piece of fatigue damage to place the metal plate center, test specimen adopts magnet to fix, and the strong magnetism between magnet and the metal plate keeps the stationkeeping of copper film test piece on metal plate constant;
C) light path device and test specimen stationary installation are placed on the guide rail, the Laser emission mouth, light path device and test specimen stationary installation three are on same straight line;
D) adjust light path device and test specimen stationary installation according to the laser apparatus guidance light, control focal length by the distance of regulating between light path device and the test specimen stationary installation, thereby change the size of hot spot;
E) adjust light path device and test specimen stationary installation according to the laser apparatus guidance light, make laser facula exactly irradiation in the test specimen indentation, there;
F) adjust single pulse energy by the laser apparatus Controlling System, change the laser energy density that acts on the test specimen surface; Individual pulse action time was 30 nanoseconds; The convex lens of the laser beam that described pulsed laser is launched in light path device shine copper film test piece surface;
G) the copper film test piece is taken off from the test specimen stationary installation.
Further, the pulsed laser described steps A) is the ultraviolet excimer pulse laser.
Described step F) laser energy density is 5KJ/m in
2-7KJ/m
2, individual pulse action time was 30 nanoseconds.
Described step F) before healing, do not need test specimen is carried out any surface treatment in, directly laser beam is acted on the test specimen surface.
Described step F) working as laser energy density in is 5KJ/m
2-7KJ/m
2The time, the test specimen surface temperature reaches about 1200 degrees centigrade, and healing effect is better.
The innovation of healing process of the present invention is: irradiation healing system building is simple, the copper film material fatigue damage is healed, test specimen causes the variation of surface temperature to the absorption of laser energy, thereby cause the material surface tissue modification, grain refining and tight zone appear, the already present fatigue damage that heals prolongs work-ing life of test specimen.
The heal innovation of processing method of the present invention is: heal handle before, do not need test specimen is carried out any surface treatment, directly laser beam is acted on the test specimen surface, technology is easy, the method practicality, effect is remarkable, and very strong application potential is arranged in engineering practice.
The beneficial effect of the inventive method is: make metal material surface that little fusing take place by adopting above-mentioned laser irradiating method, cause tissue to change, grain refining and tight zone appear, improve the test specimen surface quality, the fatigue damage of copper film test piece has effectively not only healed, can also significantly improve its fatigue lifetime, strengthen reliability and the security of micro mechanical system work.
Description of drawings
Fig. 1 is laser irradiation healing schematic representation of apparatus among the present invention.
The synoptic diagram that Fig. 2 handles for test specimen among the present invention.
Fig. 3 is the synoptic diagram of light path device among the present invention.
Fig. 4 is the fixing synoptic diagram of copper film test piece among the present invention.
Fig. 5 is the structural representation after the copper film test piece is handled among the present invention.
Among Fig. 1 to Fig. 5: 1, laser apparatus, 2, light path device, 3, guide rail, 4, test specimen stationary installation, 5, the copper film test piece, 6, laser facula, 7, heat affected zone, 21, convex lens, 22, the convex lens support, 23, convex lens bearing, 41, metal plate, 42, magnet, 43, the metal plate support, 44, metal plate bearing, 45, bolt.
Embodiment
Below in conjunction with accompanying drawing the inventive method is further elaborated, sees also Fig. 1 to Fig. 5, a kind of pulse laser irradiation treatment process of the copper thin-film member fatigue damage that heals the steps include:
A) provide laser irradiation healing device, described laser irradiation healing device comprises pulsed laser 1, light path device 2, guide rail 3 and test specimen stationary installation 4; Because 5 pairs of short wavelength laser specific absorptioies of copper film test piece are higher, described laser apparatus is selected the ultraviolet excimer pulse laser for use; Described light path device 2 comprises convex lens 21, convex lens support 22, convex lens bearing 23; Described test specimen stationary installation 4 comprises metal plate 41, magnet 42, metal plate support 43, metal plate bearing 44 and bolt 45;
B) will exist the copper film test piece 5 of fatigue damage to place metal plate 41 centers, one piece of magnet 42 is respectively placed at the test specimen two ends, utilizes the strong magnetism between magnet and the metal plate to keep the stationkeeping of copper film test piece 5 on metal plate 41 constant; Metal plate 41 is fixed in the groove of metal plate support 43 upper ends with bolt 45;
C) light path device 2 and test specimen stationary installation 4 are placed on the guide rail 3, the Laser emission mouth, light path device and test specimen stationary installation three are on same straight line;
D) adjust light path device 2 and test specimen stationary installation 4 according to the laser apparatus guidance light, control focal length by the distance of regulating between light path device 2 and the test specimen stationary installation 4, thereby change the size of laser facula 6, spot size is 1x45mm;
E) adjust light path device 2 and test specimen stationary installation 4 according to the laser apparatus guidance light, by the height of adjusting convex lens support 22 and metal plate support 43 make laser facula 6 exactly irradiation in the test specimen indentation, there;
F) adjust single pulse energy by the laser apparatus Controlling System, change the laser energy density that acts on the test specimen surface; Individual pulse action time was 30 nanoseconds; The convex lens 21 of the laser beam that described pulsed laser 1 is launched in light path device 2 shine copper film test piece 5 surfaces;
G) copper film test piece 5 is taken off from test specimen stationary installation 4.
The present invention is by adopting the fatigue damage of above-mentioned pulse laser irradiation treatment process healing copper film material, by adjusting the energy density that pulse energy changes laser, thereby cause the variation of test specimen surface temperature, about 1200 degrees centigrade damage had repair preferably, form certain thickness heat affected zone 7 at material, little fusing takes place in the test specimen surface, grain refining and tight zone appear, the test specimen surface quality improves, the fatigue damage of copper film test piece has effectively not only healed, can also significantly improve its fatigue lifetime, can reach original 2-2.5 times, greatly improve the fatigue characteristic of damage copper film test piece.
Claims (2)
1. pulse laser irradiation treatment process of copper thin-film member fatigue damage that heals is characterized in that step is as follows:
A) provide laser irradiation healing device, described laser irradiation healing device comprises pulsed laser, light path device, guide rail and test specimen stationary installation; Described light path device comprises convex lens; Described test specimen stationary installation comprises metal plate and magnet;
B) will exist the copper film test piece of fatigue damage to place the metal plate center, test specimen adopts magnet to fix, and the strong magnetism between magnet and the metal plate keeps the stationkeeping of copper film test piece on metal plate constant;
C) light path device and test specimen stationary installation are placed on the guide rail, the Laser emission mouth, light path device and test specimen stationary installation three are on same straight line;
D) adjust light path device and test specimen stationary installation according to the laser apparatus guidance light, control focal length by the distance of regulating between light path device and the test specimen stationary installation, thereby change the size of hot spot;
E) adjust light path device and test specimen stationary installation according to the laser apparatus guidance light, make laser facula exactly irradiation in the test specimen indentation, there;
F) adjust single pulse energy by the laser apparatus Controlling System, changing the laser energy density that acts on the test specimen surface is 5KJ/m
2-7KJ/m
2Individual pulse action time was 30 nanoseconds; The convex lens of the laser beam that described pulsed laser is launched in light path device shine copper film test piece surface;
G) the copper film test piece is taken off from the test specimen stationary installation.
2. the pulse laser irradiation treatment process of a kind of copper thin-film member fatigue damage that heals according to claim 1, it is characterized in that: the pulsed laser described steps A) is the ultraviolet excimer pulse laser.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310199346.4A CN103276330B (en) | 2013-05-25 | 2013-05-25 | Pulse laser irradiation treatment method for healing fatigue damage of copper thin film part |
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| CN201310199346.4A CN103276330B (en) | 2013-05-25 | 2013-05-25 | Pulse laser irradiation treatment method for healing fatigue damage of copper thin film part |
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| CN103276330B CN103276330B (en) | 2015-05-20 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103924177A (en) * | 2014-04-09 | 2014-07-16 | 北京工业大学 | Multiple laser radiation treatment method for repairing fatigue damage of copper thin film |
| CN107340162A (en) * | 2017-07-10 | 2017-11-10 | 北京工业大学 | The preparation method of calibration sample during a kind of Barkhausen Noise detection grinding burn |
| CN112359247A (en) * | 2020-11-16 | 2021-02-12 | 福州大学 | Cu-Hf-Si-Ni-Ce copper alloy material and preparation method thereof |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103074469A (en) * | 2012-10-30 | 2013-05-01 | 北京工业大学 | Laser shock method for healing fatigue damage of polycrystal rolling copper film |
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2013
- 2013-05-25 CN CN201310199346.4A patent/CN103276330B/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103074469A (en) * | 2012-10-30 | 2013-05-01 | 北京工业大学 | Laser shock method for healing fatigue damage of polycrystal rolling copper film |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103924177A (en) * | 2014-04-09 | 2014-07-16 | 北京工业大学 | Multiple laser radiation treatment method for repairing fatigue damage of copper thin film |
| CN103924177B (en) * | 2014-04-09 | 2016-06-01 | 北京工业大学 | A kind of repeatedly laser irradiation treatment process repairing Copper thin film fatigue damage |
| CN107340162A (en) * | 2017-07-10 | 2017-11-10 | 北京工业大学 | The preparation method of calibration sample during a kind of Barkhausen Noise detection grinding burn |
| CN112359247A (en) * | 2020-11-16 | 2021-02-12 | 福州大学 | Cu-Hf-Si-Ni-Ce copper alloy material and preparation method thereof |
| CN112359247B (en) * | 2020-11-16 | 2021-11-09 | 福州大学 | Cu-Hf-Si-Ni-Ce copper alloy material and preparation method thereof |
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| CN103276330B (en) | 2015-05-20 |
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