CN103276330B - Pulse laser irradiation treatment method for healing fatigue damage of copper thin film part - Google Patents
Pulse laser irradiation treatment method for healing fatigue damage of copper thin film part Download PDFInfo
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- CN103276330B CN103276330B CN201310199346.4A CN201310199346A CN103276330B CN 103276330 B CN103276330 B CN 103276330B CN 201310199346 A CN201310199346 A CN 201310199346A CN 103276330 B CN103276330 B CN 103276330B
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Abstract
The invention relates to a pulse laser irradiation treatment method for healing fatigue damage of a copper thin film part. The pulse laser irradiation treatment method comprises the following steps of: A) providing a laser irradiation healing device, wherein the laser irradiation healing device comprises a pulse laser, a light path device, a guide rail and a test piece fixing device; B) fixing a copper thin film test piece at the center of a metal flat plate; C) causing a laser emitting hole, the light path device and the test piece fixing device to be on the same line by virtue of the guide rail; D) controlling size of a laser spot; E) causing the laser spot to accurately irradiate a gap of a test piece; F) adjusting single pulse energy by virtue of a laser control system, so as to change energy density of lasers, wherein the lasers emitted by the pulse laser are irradiated onto the surface of the copper thin film test piece by virtue of a convex lens in the light path device; and G) taking down the copper thin film test piece from the test piece fixing device. By adopting the pulse laser irradiation treatment method, a heat-affected zone is formed on the surface of a material, so that fatigue damage of the copper thin film test piece can be effectively healed, and fatigue life of the copper thin film test piece can be also greatly prolonged.
Description
Technical field
The present invention relates to machinofacture and laser processing application technical field, refer in particular to a kind of Pulse laser irradiation treatment method of the Copper thin film part fatigue damage that heals.
Background technology
Hardware is everlasting under repeated stress and is on active service, and fatigue damage is inevitable, once failure fracture will cause immeasurable loss.Therefore, if the damaged member taking appropriate means to align under arms is repaired, recover its fatigue property, play effect of lengthening the life, very important practical meaning in engineering will be had.For this reason, many workers have carried out extensive research in Fatigue Damage of Metal reparation, draw a series of important theoretical result, the healing process proposed has annealing, electric pulse, mechanic shot peening and ion-nitridation method etc., healed the fatigue damage of hardware effectively, extend its work-ing life, have practical value and engineering significance.
Laser irradiation process, refers to and laser is directly radiated at metallic surface, utilizes the modification of interaction realization to metal between laser and metallic substance, belongs to the one in the multiple application of Laser Surface Treatment.Transformation hardening and surface melting can be divided into by heat density exercising result, its principle is when laser beam irradiation is to metal material surface, absorbed laser energy thus cause surface temperature to raise rapidly, because irradiation time is shorter and metallic matrix heat conduction very fast, temperature fall off rate is very high, and this rapid heating and cooling process cause metal material surface tissue to change, thus improve many performances of material, such as hardness, wear resistance, fatigue characteristic etc.
Summary of the invention
The object of the invention is the problem solving the healing of copper film material fatigue damage.A kind of method that Copper thin film fatigue damage is healed in novel pulse laser irradiation process is provided.Laser irradiation healing is carried out to the Copper thin film component having produced fatigue damage in military service, improves its fatigue property, extend its work-ing life, thus improve reliability and the security of micromechanics, for the practical problems in engineering practice provides effective solution.
For solving the problems of the technologies described above, the technical solution used in the present invention is: a kind of 1. 1 kinds of healing Copper thin film part fatigue damage heal the Pulse laser irradiation treatment method of Copper thin film part fatigue damage, the steps include:
A) provide laser irradiation device for healing, described laser irradiation device for healing comprises pulsed laser, light path device, guide rail and test piece fixing device; Described light path device comprises convex lens; Described test piece fixing device comprises metal plate and magnet;
B) the Copper thin film test specimen that there is fatigue damage is placed in metal plate center, test specimen adopts magnet to fix, and the strong magnetism between magnet and metal plate keeps the position of Copper thin film test specimen on metal plate to immobilize;
C) be placed on guide rail by light path device and test piece fixing device, Laser emission mouth, light path device and test piece fixing device three are on the same line;
D) according to laser apparatus guidance light adjustment light path device and test piece fixing device, by regulating the distance between light path device and test piece fixing device to control focal length, thus the size of hot spot is changed;
E) according to laser apparatus guidance light adjustment light path device and test piece fixing device, make laser facula exactly irradiation in test specimen indentation, there;
F) adjust single pulse energy by Laser Control System, change the laser energy density acting on surface of test piece; Individual pulse action time was 30 nanoseconds; The convex lens of laser beam in light path device that described pulsed laser is launched are irradiated to Copper thin film surface of test piece;
G) Copper thin film test specimen is taken off from test piece fixing device.
Further, described steps A) described in pulsed laser be UV excimer pulsed laser.
Described step F) in laser energy density be 5KJ/m
2-7KJ/m
2, individual pulse action time was 30 nanoseconds.
Described step F) in before healing, do not need to carry out any surface treatment to test specimen, directly laser beam acted on surface of test piece.
Described step F) in when laser energy density be 5KJ/m
2-7KJ/m
2time, surface of test piece temperature reaches 1200 degrees centigrade, and healing effect is better.
The innovation of healing process of the present invention is: irradiation healing system is built simply, copper film material fatigue damage is healed, the absorption of test specimen to laser energy causes the change of surface temperature, thus cause material surface tissue modification, there is grain refining and tight zone, heal already present fatigue damage, extends the work-ing life of test specimen.
The heal innovation of processing method of the present invention is: before carrying out healing processing, do not need to carry out any surface treatment to test specimen, directly laser beam is acted on surface of test piece, simple process, method is practical, and Be very effective, has very strong application potential in engineering practice.
The beneficial effect of the inventive method is: make metal material surface that micro-fusing occur by adopting above-mentioned laser irradiating method, cause tissue change, there is grain refining and tight zone, improve surface of test piece quality, not only healed the fatigue damage of Copper thin film test specimen effectively, its fatigue lifetime be can also significantly improve, reliability and the security of micro mechanical system work strengthened.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of laser irradiation device for healing in the present invention.
Fig. 2 is the schematic diagram of test specimen process in the present invention.
Fig. 3 is the schematic diagram of light path device in the present invention.
Fig. 4 is the schematic diagram that in the present invention, Copper thin film test specimen is fixing.
Fig. 5 is the structural representation in the present invention after the process of Copper thin film test specimen.
In Fig. 1 to Fig. 5: 1, laser apparatus, 2, light path device, 3, guide rail, 4, test piece fixing device, 5, Copper thin film test specimen, 6, laser facula, 7, heat affected zone, 21, convex lens, 22, convex lens support, 23, convex lens bearing, 41, metal plate, 42, magnet, 43, metal plate support, 44, metal plate bearing, 45, bolt.
Embodiment
Be further elaborated the inventive method below in conjunction with accompanying drawing, refer to Fig. 1 to Fig. 5, a kind of Pulse laser irradiation treatment method of the Copper thin film part fatigue damage that heals, the steps include:
A) provide laser irradiation device for healing, described laser irradiation device for healing comprises pulsed laser 1, light path device 2, guide rail 3 and test piece fixing device 4; Because Copper thin film test specimen 5 pairs of short wavelength laser specific absorptioies are higher, UV excimer pulsed laser selected by described laser apparatus; Described light path device 2 comprises convex lens 21, convex lens support 22, convex lens bearing 23; Described test piece fixing device 4 comprises metal plate 41, magnet 42, metal plate support 43, metal plate bearing 44 and bolt 45;
B) the Copper thin film test specimen 5 that there is fatigue damage is placed in metal plate 41 center, one piece of magnet 42 is respectively placed at test specimen two ends, utilizes the strong magnetism between magnet and metal plate to keep the position of Copper thin film test specimen 5 on metal plate 41 to immobilize; With bolt 45, metal plate 41 is fixed in the groove of metal plate support 43 upper end;
C) lay on guides 3 by light path device 2 and test piece fixing device 4, Laser emission mouth, light path device and test piece fixing device three are on the same line;
D) according to laser apparatus guidance light adjustment light path device 2 and test piece fixing device 4, by regulating the distance between light path device 2 and test piece fixing device 4 to control focal length, thus change the size of laser facula 6, spot size is 1x45mm;
E) according to laser apparatus guidance light adjustment light path device 2 and test piece fixing device 4, by the height of adjustment convex lens support 22 and metal plate support 43 make laser facula 6 exactly irradiation in test specimen indentation, there;
F) adjust single pulse energy by Laser Control System, change the laser energy density acting on surface of test piece; Individual pulse action time was 30 nanoseconds; The convex lens 21 of laser beam in light path device 2 that described pulsed laser 1 is launched are irradiated to Copper thin film test specimen 5 surface;
G) Copper thin film test specimen 5 is taken off from test piece fixing device 4.
The present invention is by adopting the fatigue damage of above-mentioned Pulse laser irradiation treatment method healing copper film material, the energy density of laser is changed by adjustment pulse energy, thus cause the change of surface of test piece temperature, 1200 degrees centigrade have good repair to damage, material is formed certain thickness heat affected zone 7, there is micro-fusing in surface of test piece, there is grain refining and tight zone, surface of test piece quality improves, not only healed the fatigue damage of Copper thin film test specimen effectively, can also significantly improve its fatigue lifetime, original 2-2.5 times can be reached, significantly improve the fatigue characteristic of damage Copper thin film test specimen.
Claims (1)
1. a Pulse laser irradiation treatment method for the Copper thin film part fatigue damage that heals, the steps include:
A) provide laser irradiation device for healing, described laser irradiation device for healing comprises pulsed laser, light path device, guide rail and test piece fixing device; Described light path device comprises convex lens; Described test piece fixing device comprises metal plate and magnet; Described pulsed laser is UV excimer pulsed laser;
B) the Copper thin film test specimen that there is fatigue damage is placed in metal plate center, test specimen adopts magnet to fix, and the strong magnetism between magnet and metal plate keeps the position of Copper thin film test specimen on metal plate to immobilize;
C) be placed on guide rail by light path device and test piece fixing device, Laser emission mouth, light path device and test piece fixing device three are on the same line;
D) according to laser apparatus guidance light adjustment light path device and test piece fixing device, by regulating the distance between light path device and test piece fixing device to control focal length, thus the size of hot spot is changed;
E) according to laser apparatus guidance light adjustment light path device and test piece fixing device, make laser facula exactly irradiation in test specimen indentation, there;
F) single pulse energy is adjusted by Laser Control System; Changing the laser energy density acting on surface of test piece is 5kJ/m
2-7kJ/m
2, individual pulse action time was 30 nanoseconds; The convex lens of laser beam in light path device that described pulsed laser is launched are irradiated to Copper thin film surface of test piece;
G) Copper thin film test specimen is taken off from test piece fixing device.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310199346.4A CN103276330B (en) | 2013-05-25 | 2013-05-25 | Pulse laser irradiation treatment method for healing fatigue damage of copper thin film part |
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| CN201310199346.4A CN103276330B (en) | 2013-05-25 | 2013-05-25 | Pulse laser irradiation treatment method for healing fatigue damage of copper thin film part |
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| CN103276330A CN103276330A (en) | 2013-09-04 |
| CN103276330B true CN103276330B (en) | 2015-05-20 |
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| CN103924177B (en) * | 2014-04-09 | 2016-06-01 | 北京工业大学 | A kind of repeatedly laser irradiation treatment process repairing Copper thin film fatigue damage |
| CN107340162A (en) * | 2017-07-10 | 2017-11-10 | 北京工业大学 | The preparation method of calibration sample during a kind of Barkhausen Noise detection grinding burn |
| CN112359247B (en) * | 2020-11-16 | 2021-11-09 | 福州大学 | Cu-Hf-Si-Ni-Ce copper alloy material and preparation method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103074469A (en) * | 2012-10-30 | 2013-05-01 | 北京工业大学 | Laser shock method for healing fatigue damage of polycrystal rolling copper film |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103074469A (en) * | 2012-10-30 | 2013-05-01 | 北京工业大学 | Laser shock method for healing fatigue damage of polycrystal rolling copper film |
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Granted publication date: 20150520 Termination date: 20210525 |