CN103268381B - 一种基于虚拟现实技术的双工件台半物理仿真方法 - Google Patents
一种基于虚拟现实技术的双工件台半物理仿真方法 Download PDFInfo
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- CN103268381B CN103268381B CN201310203935.5A CN201310203935A CN103268381B CN 103268381 B CN103268381 B CN 103268381B CN 201310203935 A CN201310203935 A CN 201310203935A CN 103268381 B CN103268381 B CN 103268381B
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
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- Y02T10/80—Technologies aiming to reduce greenhouse gasses emissions common to all road transportation technologies
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CN201310203935.5A CN103268381B (zh) | 2013-05-28 | 2013-05-28 | 一种基于虚拟现实技术的双工件台半物理仿真方法 |
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CN103268381B true CN103268381B (zh) | 2016-02-10 |
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Families Citing this family (4)
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CN103761996B (zh) * | 2013-10-18 | 2016-03-02 | 中广核检测技术有限公司 | 基于虚拟现实技术的无损检测机器人智能检测方法 |
CN104317204A (zh) * | 2014-10-17 | 2015-01-28 | 哈尔滨工业大学 | 基于虚拟现实技术的二次平台半物理仿真系统及方法 |
CN105005324A (zh) * | 2015-08-06 | 2015-10-28 | 哈尔滨工业大学 | 一种二次平台的水平跟踪系统 |
CN107132911A (zh) * | 2017-03-13 | 2017-09-05 | 杭州虚之实科技有限公司 | 基于虚拟现实万向行走器的运动光学检测设备 |
Citations (2)
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CN101458532A (zh) * | 2008-07-11 | 2009-06-17 | 华中科技大学 | 一种超精密双层宏微运动平台的同步控制系统 |
CN102707577A (zh) * | 2012-05-23 | 2012-10-03 | 哈尔滨工业大学 | 宏微双机构伺服控制系统及其控制方法 |
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AU2002331786A1 (en) * | 2001-08-31 | 2003-03-18 | The Board Of Regents Of The University And Community College System, On Behalf Of The University Of | Coordinated joint motion control system |
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CN101458532A (zh) * | 2008-07-11 | 2009-06-17 | 华中科技大学 | 一种超精密双层宏微运动平台的同步控制系统 |
CN102707577A (zh) * | 2012-05-23 | 2012-10-03 | 哈尔滨工业大学 | 宏微双机构伺服控制系统及其控制方法 |
Non-Patent Citations (2)
Title |
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"双工件台光刻机换台过程的轨迹规划及控制";武志鹏等;《哈尔滨工业大学学报》;20130331;第45卷(第3期);第7-13页 * |
"基于VxWorks辅助时钟的高速网络通信";王公峰等;《自动化技术与应用》;20121231;第31卷(第12期);第32-38页 * |
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Inventor after: Liu Yang Inventor after: Fu Xuewei Inventor after: Fu Zhenxian Inventor after: Chen Xinglin Inventor after: Zhang Changjiang Inventor before: Liu Yang Inventor before: Wang Gongfeng Inventor before: Chen Xinglin Inventor before: Wu Yongchao Inventor before: Liu Chuan Inventor before: Wang Weifeng Inventor before: Zhang Xu |
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Effective date of registration: 20190619 Address after: 150000 Heilongjiang Harbin Dalian economic and Trade Zone, the North Road and Xingkai Road intersection Patentee after: HIT ROBOT GROUP Co.,Ltd. Address before: 150001 No. 92 West straight street, Nangang District, Heilongjiang, Harbin Patentee before: Harbin Institute of Technology |
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