CN103267492B - Array super large caliber planar optical elements surface shape detection apparatus and method - Google Patents
Array super large caliber planar optical elements surface shape detection apparatus and method Download PDFInfo
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- CN103267492B CN103267492B CN201310172925.XA CN201310172925A CN103267492B CN 103267492 B CN103267492 B CN 103267492B CN 201310172925 A CN201310172925 A CN 201310172925A CN 103267492 B CN103267492 B CN 103267492B
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Abstract
The invention discloses a kind of array super large caliber planar optical elements surface shape detection apparatus and method, the constant current driver sub-system (2), fes signal acquisition subsystem (3) and the face shape that comprise DVD/CD optical head array (1), optical head array are detected control and processing subsystem (4), and DVD/CD optical head array (1) is for detection of the face shape in tested region; Fes signal acquisition subsystem (3) is for the face shape discrepancy in elevation of Real-time Collection DVD/CD optical head array (1) institute surveyed area; Face shape is detected and is controlled with processing subsystem (4) for the signals collecting to DVD/CD optical head array (1), the reconstruct of face shape and drafting. Adopt array to arrange DVD/CD optical head, promote the face shape precision and efficiency of detecting of face shape checkout equipment. The equal price of face shape equipment that listed angular difference method, interferometric method etc. are developed in background technology is high, and equipment is huge, adopts the present invention can greatly reduce the development cost of equipment.
Description
Technical field
The invention belongs to machine vision technique detection field, relate generally to a kind of super large caliber planar optical elementsThe apparatus and method that face shape is detected, its design utilizes DVD/CD optical head to carry out super large caliber planar optical elementsThe apparatus and method that surface face shape is detected.
Background technology
Face shape technology mainly contains the methods such as angular difference method, LTP, Transient Interferometer and Hartmann's detection. Angular difference methodPrinciple is that the variation of face shape can reflect by the variable quantity of its each point normal direction angle, adopts high accuracy to surveyThe face shape of the method reconstructing element of examination angle variable quantity, Xinan Science and Technology Univ. has developed optical elements of large caliberSurface shape detection apparatus, accuracy of detection reaches 1/3 wavelength. LTP adopts light pencil interferometry principle, if quiltDetection faces is relatively perpendicular to the plane inclination certain angle of optical axis, the interference on the focus planardetector of LTPStriped just has movement, by its displacement of accurate measurement, just can obtain the change curve of bank error,Just can obtain height error curve to this curvilinear integral, its measuring accuracy can reach 1/20 wavelength. Transient state is dryRelating to instrument is that space bit is modulated to the interference that Gong road shearing interferometer technology combines with digitized wave surface technology mutuallySystem, can adopt near-infrared as testing light source, and certainty of measurement can reach wavefront root mean square and be better than 1/15 wavelength.Hartman test is the detection method that has the corrugated of some apertures to sample by, is subject to extraneous shadowSound is little, and testing environment is required to require low than the testing environment of interferometer; But the heavy caliber Hart needing in experimentOptical System Design, the Structural Design Requirement of graceful beam-expanding system are high, and cost is also high. Adopt interferometric method to detectingEnvironmental requirement is high, and the online testing conditions in ICF laboratory is difficult to meet the requirement of Transient Interferometer or LTP,And can not carry out the detection of face shape to the optical element in different heeling conditions.
Fan Yong, Chen Niannian etc., the surface shape detection apparatus of heavy-calibre planar optical elements and method, China's inventionPatent, 2011, ZL200910058280.0, this scheme is utilized the measured optical unit for reference substance and is utilized fiveThe one dimension consistency of prism, has overcome traditional angular difference method and can not effectively deduct motion platform because of mechanical movement or vibrationDeng the measure error problem of bringing. Simultaneously owing to having adopted two in (row) test in the vertical direction to restraint reference lighies,Can effectively deduct the impact that vibration brings, simultaneously also using the measured optical unit as absolute reference, thereby can also detainExcept the error of bringing because of foundation vibration, atmosphere vibration etc.; The advantage of this scheme: apparatus structure is simple, only needsA branch of independent test optics produces multi beam directional light and incides element after the optical element such as spectroscope, pentaprismSurface, without the parallel light path that regulates multi beam incident light, is easy to quick adjustment, and apparatus of the present invention also can be led to simultaneouslyCross the integral inclination of two dimensional motion control platform, the face shape of the optical element of test in different heeling conditions, justIn online detection, be convenient to industrialization promotion, also have simultaneously cost lower, be easy to industrializing implementation application, numberAccording to processing the advantages such as fast.
Owing to adopting gantry structure, for the detection of super large optical element, its bodily form is huge, under different attitudesDebug time longer, accuracy of detection only has 1/3 wavelength. Simultaneously owing to adopting " from top to bottom, from left to right "Point by point scanning mode, cause the time of testing super large optical element about 2～5 hours.
Summary of the invention
Technical problem to be solved by this invention is to provide a kind of array super large mouth for the deficiencies in the prior artFootpath planar optical elements surface shape detection apparatus and method.
Technical scheme of the present invention is as follows:
A kind of array super large caliber planar optical elements surface shape detection apparatus, comprises DVD/CD optical head array(1), the constant current driver sub-system (2) of optical head array, fes signal acquisition subsystem (3) and the inspection of face shapeObserving and controlling system and processing subsystem (4), DVD/CD optical head array (1) is for detection of the face shape in tested region;The constant current driver sub-system (2) of optical head array for give optical head array stable current drives is provided, withGuarantee that in optical head, the power output of laser instrument is constant; Fes signal acquisition subsystem (3) is for Real-time CollectionThe face shape discrepancy in elevation of DVD/CD optical head array (1) institute surveyed area; Face shape is detected and is controlled and processing subsystem (4)For signals collecting, the reconstruct of face shape and drafting to DVD/CD optical head array (1); Wherein DVD/CD lightLearn head array (1) and comprise the DVD/CD optical head (12) and the height thereof that detect pedestal (11), array layoutPrecision adjusting bracket (13).
The method that described surface shape detection apparatus is measured, comprises the following steps: (1) is placed on this deviceOn the good measuring optical platform of anti-vibration performance, open surface shape detection apparatus power supply, with this checkout gear opticsHead is benchmark, adjusts the distance of DVD/CD optical head array and the measured optical unit, until the FES of this optical headValue is zero;
(2) record the FES value of optical head ij in DVD/CD optical head array, demarcate by this optical headFES curve, calculates the height h of this optical head from focussing planeij；
(3) error causing due to optical head is installed and production technology etc., debugs in process and demarcates according to deviceThe flatness Δ h of array focussing planeij, this optical head the face shape discrepancy in elevation of corresponding measured point be: hij+Δhij；
(4) repeating step 2～3 is measured 5～10 times, adopts the ripe algorithm filter in data error Processing AlgorithmExcept singular value, finally adopt mean value method to obtain the face shape discrepancy in elevation of the each measurement point of optical element, its objective is deductionThe small sample perturbations that ground vibrations and air agitation etc. bring;
(5) adopt principle of least square method, the face shape discrepancy in elevation that the 4th step is obtained is processed, deductionThe malalignment of the measured optical unit and checkout gear, obtains actual the shape discrepancy in elevation of this optical element.
Beneficial effect of the present invention:
(1) adopt array to arrange DVD/CD optical head, promote face shape checkout equipment face shape accuracy of detection andEfficiency.
(2) the equal price of face shape equipment that listed angular difference method, interferometric method etc. are developed in background technology is high, equipmentHuge, adopt the present invention can greatly reduce the development cost of equipment.
Brief description of the drawings
Fig. 1 is surface shape detection apparatus composition schematic diagram;
Fig. 2 is DVD/CD optical head array;
Fig. 3 is for demarcating single optical head FES curvilinear structures schematic diagram;
Fig. 4 is that the flatness of the focussing plane of DVD/CD optical head array is demarcated schematic diagram;
Detailed description of the invention
Below in conjunction with specific embodiment, the present invention is described in detail.
The internal structure reference of dvd pickup read head: Li Ruijun etc., a large amount of based on dvd pickup head read headJourney high accuracy scanning head, HeFei University of Technology's journal (natural science edition), 2011,34 (12). Application certainlyKinetic power control circuit is the red laser light beam that laser diode is launched the 650nm wavelength of about 0.5mW, through lightAfter grid diffraction, form three beams and detect light, then through spectroscope, collimation lens, laser beam is become to collimated light beam,Collimated light beam just focuses on (on the measured optical unit) on the surface of emission after condenser lens. Through reflecting surfaceThe light beam of reflection through criterion lens, spectroscope and cylinder astigmatic lens, is transmitted to four-quadrant photoelectricity along original optical pathOn diode sensor A, B, C, D. Four-quadrant photoelectric diode sensor according to luminous point at 4 quadrantsOn distribution, output one focusing error voltage signal FES (focuserrorsignal). This focusing errorSignal, through operation amplifier, compensation deals, drives voice coil motor VCM (voicecoilmotor) and drivesCondenser lens moves along optical axis direction together, until focus point overlaps with reflecting surface just, thereby reaches automatic lockingBurnt object.
As shown in Figure 1, surface shape detection apparatus comprises the constant current of DVD/CD optical head array 1, optical head arrayDriver sub-system 2, fes signal acquisition subsystem 3 and face shape are detected and are controlled and processing subsystem 4, DVD/CDOptical head array 1 is for detection of the face shape in tested region; The constant current driver sub-system 2 of optical head array is for givingOptical head array provides stable current drives, to guarantee that in optical head, the power output of laser instrument is constant; FESSignals collecting subsystem 3 is for the face shape discrepancy in elevation of 1 surveyed area of Real-time Collection DVD/CD optical head array;Face shape is detected to control with processing subsystem 4 and is weighed for the signals collecting to DVD/CD optical head array 1, face shapeStructure and drafting; Wherein DVD/CD optical head array 1 comprises the DVD/CD that detects pedestal 11, array layoutOptical head 12 and high accuracy adjusting bracket 13 thereof, as shown in Figure 2.
Debuging with calibration process of this surface shape detection apparatus is as follows:
(1) machining of detection pedestal 11, requires the axiality mismachining tolerance in the hole that optical head is installed 2In micron.
(2) adopt schematic diagram as shown in Figure 3, to the each optical head in DVD/CD optical head array respectivelyDemarcate (power supply while requiring the actual use of power supply and equipment is consistent), measure the FES song of each optical head(reference: Li Ruijun etc., based on the large range high precision scanning head of dvd pickup head read head, Hefei work for lineIndustry college journal (natural science edition), 2011,34 (12)).
(3) adopt principle of device schematic diagram as shown in Figure 2, DVD/CD optical head array is tentatively pacifiedDress.
(4) as Fig. 4 adopts the standard flat light of surface figure accuracy higher than 2～5 times of checkout gear face shape accuracy of detectionLearning the flatness of the focussing plane of element to DVD/CD optical head array proofreaies and correct. Cause owing to debuging errorIn DVD/CD optical head array, the focussing plane of each optical head not in one plane, adopts " from top to bottom,Order from left to right " is proofreaied and correct the focussing plane at each optical head place respectively; First to optical headOne dimension adjusting bracket carries out precision adjustment, until its FES value is zero, then this optical head is carried out to bolt and viscose glueFixing.
(5) detect that panel is preliminary and proofread and correct after indoor placement 24 hours, poly-to DVD/CD optical head arrayThe flatness of focal plane is demarcated. As shown in Figure 3, detect the FES value of each optical head, this value is lightLearn deviation (or flatness error of focussing plane) the Δ h that an ij (the capable j row of i) departs from array focussing planeij。
Measurement procedure:
(1) this device is placed on the good measuring optical platform of anti-vibration performance, opens surface shape detection apparatusPower supply, taking this checkout gear optical head (as first optical head in DVD/CD optical head array) as benchmark,Adjust the distance of DVD/CD optical head array and the measured optical unit, until the FES value of this optical head is zero.
(2) record the FES value of optical head ij in DVD/CD optical head array, demarcate by this optical headFES curve, calculates the height h of this optical head from focussing planeij。
(3) error causing due to optical head is installed and production technology etc., debugs in process and demarcates according to deviceThe flatness Δ h of array focussing planeij, this optical head the face shape discrepancy in elevation of corresponding measured point be: hij+Δhij。
(4) repeating step 2～3 is measured 5～10 times, adopts the ripe algorithm filter in data error Processing AlgorithmExcept singular value, finally adopt mean value method to obtain the face shape discrepancy in elevation of the each measurement point of optical element. Its objective is deductionThe small sample perturbations that ground vibrations and air agitation etc. bring.
(5) adopt principle of least square method, the face shape discrepancy in elevation that the 4th step is obtained is processed, deductionThe malalignment of the measured optical unit and checkout gear, obtains actual the shape discrepancy in elevation of this optical element.
Should be understood that, for those of ordinary skills, can be improved according to the above description orConversion, and all these improvement and conversion all should belong to the protection domain of claims of the present invention.
Claims (2)
1. an array super large caliber planar optical elements surface shape detection apparatus, is characterized in that, comprises DVD/CD opticsConstant current driver sub-system (2), fes signal acquisition subsystem (3) and the face shape of head array (1), optical head array are detectedControl and processing subsystem (4), DVD/CD optical head array (1) is for detection of the face shape in tested region; Optical head arrayConstant current driver sub-system (2) for stable current drives being provided to optical head array, to guarantee laser instrument in optical headPower output is constant; Fes signal acquisition subsystem (3) detects for Real-time Collection DVD/CD optical head array (1)The face shape discrepancy in elevation in region; Face shape is detected and is controlled with processing subsystem (4) for the letter to DVD/CD optical head array (1)Number gather, the reconstruct of face shape and drafting; Wherein DVD/CD optical head array (1) comprises detection pedestal (11), array clothThe DVD/CD optical head (12) of putting and high accuracy adjusting bracket (13) thereof.
2. the method that surface shape detection apparatus according to claim 1 is measured, is characterized in that, comprises following stepRapid:
(1) this device is placed on the good measuring optical platform of anti-vibration performance, opens surface shape detection apparatus power supply, withThis checkout gear optical head is benchmark, adjusts the distance of DVD/CD optical head array and the measured optical unit, until this lightThe FES value of learning head is zero;
(2) record the FES value of optical head ij in DVD/CD optical head array, the FES song of demarcating by this optical headLine, calculates the height h of this optical head from focussing planeij；
(3), due to the error that optical head is installed and production technology causes, debug according to device the array of demarcating in process and focus on flatThe flatness Δ h of faceij, this optical head the face shape discrepancy in elevation of corresponding measured point be: hij+Δhij；
(4) repeating step 2～3 is measured 5～10 times, adopts the ripe algorithm filtering in data error Processing Algorithm unusualValue, finally adopts mean value method to obtain the face shape discrepancy in elevation of the each measurement point of optical element, its objective is that deduction ground shakes and air is disturbedThe moving small sample perturbations bringing;
(5) adopt principle of least square method, the face shape discrepancy in elevation that the 4th step is obtained is processed, and deduction is by photometry unitThe malalignment of part and checkout gear, obtains actual the shape discrepancy in elevation of this optical element.
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| CN112577446B (en) * | 2020-12-23 | 2021-11-16 | 中国科学院西安光学精密机械研究所 | In-place surface shape splicing measuring device and method for large-caliber planar optical element |
Citations (4)
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| US6975576B1 (en) * | 1999-07-13 | 2005-12-13 | Kabushiki Kaisha Toshiba | Optical head device and disk drive system having first and second light sources for emitting light beams of different wavelengths |
| CN1779810A (en) * | 2004-09-30 | 2006-05-31 | 惠普开发有限公司 | Array-based optical head |
| CN101750645A (en) * | 2008-11-28 | 2010-06-23 | 日本冲信息株式会社 | Lens array unit, optical head and information apparatus |
| CN102506748A (en) * | 2011-10-21 | 2012-06-20 | 李志扬 | Laser-probe-array-based three-dimensional measurement method and device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US7489393B2 (en) * | 2005-03-02 | 2009-02-10 | Kla-Tencor Technologies Corporation | Enhanced simultaneous multi-spot inspection and imaging |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6975576B1 (en) * | 1999-07-13 | 2005-12-13 | Kabushiki Kaisha Toshiba | Optical head device and disk drive system having first and second light sources for emitting light beams of different wavelengths |
| CN1779810A (en) * | 2004-09-30 | 2006-05-31 | 惠普开发有限公司 | Array-based optical head |
| CN101750645A (en) * | 2008-11-28 | 2010-06-23 | 日本冲信息株式会社 | Lens array unit, optical head and information apparatus |
| CN102506748A (en) * | 2011-10-21 | 2012-06-20 | 李志扬 | Laser-probe-array-based three-dimensional measurement method and device |
Non-Patent Citations (3)
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| 大口径光学平面镜面形检测系统初步研究;范勇等;《计算机测量与控制》;20101231;第18卷(第3期);第785-788页 * |
| 大口径光学组件面形检测系统研究;陈念年等;《测控技术》;20101231;第29卷(第3期);第13-17,22页 * |
| 大口径精密光学元件表面疵病快速检测方法;杨程等;《计算机工程与设计》;20120630;第33卷(第6期);第2476-2480页 * |
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