CN103265280A - Method for preparing YBCO (yttrium barium copper oxide) film by use of low-fluorine MOD (metal organic deposition) process - Google Patents
Method for preparing YBCO (yttrium barium copper oxide) film by use of low-fluorine MOD (metal organic deposition) process Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 37
- 229910021521 yttrium barium copper oxide Inorganic materials 0.000 title claims abstract description 20
- 230000008569 process Effects 0.000 title claims abstract description 12
- 229910052731 fluorine Inorganic materials 0.000 title claims abstract description 11
- 239000011737 fluorine Substances 0.000 title claims abstract description 11
- 239000002184 metal Substances 0.000 title claims description 6
- 229910052751 metal Inorganic materials 0.000 title claims description 6
- BTGZYWWSOPEHMM-UHFFFAOYSA-N [O].[Cu].[Y].[Ba] Chemical compound [O].[Cu].[Y].[Ba] BTGZYWWSOPEHMM-UHFFFAOYSA-N 0.000 title description 2
- 230000008021 deposition Effects 0.000 title description 2
- 239000010408 film Substances 0.000 claims abstract description 41
- 239000000654 additive Substances 0.000 claims abstract description 12
- 239000002243 precursor Substances 0.000 claims abstract description 11
- 238000005245 sintering Methods 0.000 claims abstract description 8
- 239000010409 thin film Substances 0.000 claims abstract description 3
- 229920002873 Polyethylenimine Polymers 0.000 claims abstract 6
- 238000002390 rotary evaporation Methods 0.000 claims abstract 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims description 48
- 239000000084 colloidal system Substances 0.000 claims description 11
- 239000007788 liquid Substances 0.000 claims description 10
- 230000000996 additive effect Effects 0.000 claims description 9
- 238000002360 preparation method Methods 0.000 claims description 9
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 8
- 239000011248 coating agent Substances 0.000 claims description 7
- 238000000576 coating method Methods 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 7
- DTQVDTLACAAQTR-UHFFFAOYSA-N Trifluoroacetic acid Chemical compound OC(=O)C(F)(F)F DTQVDTLACAAQTR-UHFFFAOYSA-N 0.000 claims description 6
- XBDQKXXYIPTUBI-UHFFFAOYSA-N dimethylselenoniopropionate Natural products CCC(O)=O XBDQKXXYIPTUBI-UHFFFAOYSA-N 0.000 claims description 6
- 239000010949 copper Substances 0.000 claims description 5
- 238000003756 stirring Methods 0.000 claims description 5
- ITHZDDVSAWDQPZ-UHFFFAOYSA-L barium acetate Chemical compound [Ba+2].CC([O-])=O.CC([O-])=O ITHZDDVSAWDQPZ-UHFFFAOYSA-L 0.000 claims description 3
- 238000009835 boiling Methods 0.000 claims description 3
- 235000019260 propionic acid Nutrition 0.000 claims description 3
- IUVKMZGDUIUOCP-BTNSXGMBSA-N quinbolone Chemical compound O([C@H]1CC[C@H]2[C@H]3[C@@H]([C@]4(C=CC(=O)C=C4CC3)C)CC[C@@]21C)C1=CCCC1 IUVKMZGDUIUOCP-BTNSXGMBSA-N 0.000 claims description 3
- 239000002904 solvent Substances 0.000 claims description 3
- 238000004528 spin coating Methods 0.000 claims description 3
- 238000000137 annealing Methods 0.000 claims description 2
- 238000000354 decomposition reaction Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 150000001768 cations Chemical class 0.000 claims 1
- OPQARKPSCNTWTJ-UHFFFAOYSA-L copper(ii) acetate Chemical compound [Cu+2].CC([O-])=O.CC([O-])=O OPQARKPSCNTWTJ-UHFFFAOYSA-L 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- NFSAPTWLWWYADB-UHFFFAOYSA-N n,n-dimethyl-1-phenylethane-1,2-diamine Chemical compound CN(C)C(CN)C1=CC=CC=C1 NFSAPTWLWWYADB-UHFFFAOYSA-N 0.000 claims 1
- 230000006698 induction Effects 0.000 abstract description 3
- 229910021645 metal ion Inorganic materials 0.000 abstract description 2
- RXUSTVIGZPRAQZ-UHFFFAOYSA-N 2,2,2-trifluoroacetic acid;yttrium Chemical compound [Y].OC(=O)C(F)(F)F.OC(=O)C(F)(F)F.OC(=O)C(F)(F)F RXUSTVIGZPRAQZ-UHFFFAOYSA-N 0.000 abstract 1
- BQJILRFOGPBJQJ-UHFFFAOYSA-L barium(2+);2,2,2-trifluoroacetate Chemical compound [Ba+2].[O-]C(=O)C(F)(F)F.[O-]C(=O)C(F)(F)F BQJILRFOGPBJQJ-UHFFFAOYSA-L 0.000 abstract 1
- LZJJVTQGPPWQFS-UHFFFAOYSA-L copper;propanoate Chemical compound [Cu+2].CCC([O-])=O.CCC([O-])=O LZJJVTQGPPWQFS-UHFFFAOYSA-L 0.000 abstract 1
- 239000011148 porous material Substances 0.000 abstract 1
- 238000000197 pyrolysis Methods 0.000 abstract 1
- 239000000203 mixture Substances 0.000 description 4
- 238000010025 steaming Methods 0.000 description 4
- 239000004372 Polyvinyl alcohol Substances 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 229920002451 polyvinyl alcohol Polymers 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- OWMNIIXIMJDZDV-UHFFFAOYSA-N 2,2,2-trifluoroacetic acid;yttrium Chemical compound [Y].OC(=O)C(F)(F)F OWMNIIXIMJDZDV-UHFFFAOYSA-N 0.000 description 2
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 2
- 229910002651 NO3 Inorganic materials 0.000 description 2
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 2
- DUSUCKWNBGMKRV-UHFFFAOYSA-N acetic acid;yttrium Chemical compound [Y].CC(O)=O DUSUCKWNBGMKRV-UHFFFAOYSA-N 0.000 description 2
- KEGWJVHGHGSCSO-UHFFFAOYSA-N barium;2,2,2-trifluoroacetic acid Chemical compound [Ba].OC(=O)C(F)(F)F KEGWJVHGHGSCSO-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000005587 bubbling Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- NWFNSTOSIVLCJA-UHFFFAOYSA-L copper;diacetate;hydrate Chemical compound O.[Cu+2].CC([O-])=O.CC([O-])=O NWFNSTOSIVLCJA-UHFFFAOYSA-L 0.000 description 2
- QVLQKWQNKGVECJ-UHFFFAOYSA-N copper;propanoic acid Chemical compound [Cu].CCC(O)=O QVLQKWQNKGVECJ-UHFFFAOYSA-N 0.000 description 2
- 230000007123 defense Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 150000001457 metallic cations Chemical class 0.000 description 2
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 2
- 229920000036 polyvinylpyrrolidone Polymers 0.000 description 2
- 239000001267 polyvinylpyrrolidone Substances 0.000 description 2
- 235000013855 polyvinylpyrrolidone Nutrition 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- OBETXYAYXDNJHR-SSDOTTSWSA-M (2r)-2-ethylhexanoate Chemical compound CCCC[C@@H](CC)C([O-])=O OBETXYAYXDNJHR-SSDOTTSWSA-M 0.000 description 1
- YPIFGDQKSSMYHQ-UHFFFAOYSA-N 7,7-dimethyloctanoic acid Chemical compound CC(C)(C)CCCCCC(O)=O YPIFGDQKSSMYHQ-UHFFFAOYSA-N 0.000 description 1
- 206010049244 Ankyloglossia congenital Diseases 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 1
- CZMRCDWAGMRECN-UGDNZRGBSA-N Sucrose Chemical compound O[C@H]1[C@H](O)[C@@H](CO)O[C@@]1(CO)O[C@@H]1[C@H](O)[C@@H](O)[C@H](O)[C@@H](CO)O1 CZMRCDWAGMRECN-UGDNZRGBSA-N 0.000 description 1
- 229930006000 Sucrose Natural products 0.000 description 1
- DHKHKXVYLBGOIT-UHFFFAOYSA-N acetaldehyde Diethyl Acetal Natural products CCOC(C)OCC DHKHKXVYLBGOIT-UHFFFAOYSA-N 0.000 description 1
- 150000001241 acetals Chemical class 0.000 description 1
- OBETXYAYXDNJHR-UHFFFAOYSA-N alpha-ethylcaproic acid Natural products CCCCC(CC)C(O)=O OBETXYAYXDNJHR-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000000536 complexating effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229940120693 copper naphthenate Drugs 0.000 description 1
- SEVNKWFHTNVOLD-UHFFFAOYSA-L copper;3-(4-ethylcyclohexyl)propanoate;3-(3-ethylcyclopentyl)propanoate Chemical compound [Cu+2].CCC1CCC(CCC([O-])=O)C1.CCC1CCC(CCC([O-])=O)CC1 SEVNKWFHTNVOLD-UHFFFAOYSA-L 0.000 description 1
- HVAQEDZZHIPFOM-UHFFFAOYSA-N copper;nonanoic acid Chemical compound [Cu].CCCCCCCCC(O)=O HVAQEDZZHIPFOM-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000002427 irreversible effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000008204 material by function Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- -1 polyoxyethylene Polymers 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
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Abstract
本发明涉及一种低氟MOD法制备YBCO薄膜的方法。该方法在含有三氟乙酸钇、三氟乙酸钡和丙酸铜的混合前驱液中添加聚乙烯亚胺（PEI），使聚乙烯亚胺在前驱液中经反复旋蒸与金属离子发生络合，控制溶液的粘度，增加溶液稳定性。通过调整添加剂的用量，采用一步烧结工艺，经过低温热分解和高温烧结，成功制备得到表面无裂纹、具有双轴织构、晶粒取向优良的YBCO薄膜。薄膜表面无裂纹，孔洞极小，厚度可达到500~600nm，根据THEVADUNUSCHICHTTECHNIKGMBH的CRYOSCAN扫描感应临界电流测试仪在假定薄膜厚度为200nm的条件下，测得临界电流密度Jc最高可达到4.5MA/cm2（77K，0T）。
The invention relates to a method for preparing a YBCO thin film by a low-fluorine MOD method. In this method, polyethyleneimine (PEI) is added to the mixed precursor solution containing yttrium trifluoroacetate, barium trifluoroacetate and copper propionate, so that polyethyleneimine is complexed with metal ions through repeated rotary evaporation in the precursor solution , Control the viscosity of the solution and increase the stability of the solution. By adjusting the amount of additives and adopting one-step sintering process, through low-temperature pyrolysis and high-temperature sintering, a YBCO film with no surface cracks, biaxial texture and excellent grain orientation was successfully prepared. There are no cracks on the surface of the film, the pores are extremely small, and the thickness can reach 500~600nm. According to the CRYOSCAN scanning induction critical current tester of THEVADUNUSCHICHTTECHNIKGMBH, under the assumption that the film thickness is 200nm, the measured critical current density J c can reach up to 4.5MA/cm 2 (77K, 0T).
Description
Technical field
The present invention relates to the method that a kind of low fluorine MOD legal system is equipped with ybco film, belong to the high temperature superconducting materia preparing technical field.
Background technology
Coating conductor is the multilayered structure section bar material that is made of metal substrate, buffer layer, superconducting layer, protective layer etc., mainly contains first-generation Bi system and s-generation Y system.Compare the YBCO(yttrium barium copper oxide with Bi frenulum material) superconducting tape has higher irreversible and higher current load ability, can make band at the flexible metal substrate surface epitaxial growth film that contains buffer layer.Because narrow, the magnetic field lower critical current density height of critical temperature height, width of transition of YBCO band, people have produced greatly interest to the research of YBCO coating conductor in recent years, mainly can be applicable to the fields such as manufacturing of transmission, high-efficiency electric motor and the generator of military affairs, medical science and high-power electric current.
Preparing ybco film with the general physical method compares, metal organic deposit method (MOD) does not need vacuum system, and can accurately control the composition of precursor liquid, be easy to realize the deposition of large area film, effectively reducing industrial cost, is now for the preparation of one of main stream approach of YBCO coating conductor.Although the TFA-MOD method has plurality of advantages, when the single application thickness that traditional TFA-MOD legal system is equipped with ybco film surpassed 500 nm, film very easily cracked, hole, and critical current density is sharply descended.And thicker YBCO coating helps the electric current that makes the superconducting tape transmission bigger, thereby it is thicker and have a YBCO coating of certain critical current density to make rete as far as possible by single application or the mode that repeatedly applies.If each coating thickness is at 200-300 nm, just can obtains thickness and reach 1.5 μ m, surperficial uncracked ybco film (Chinese patent application number 200810240067.7) by applying for 5 times.Even select neodecanoic acid copper, different n-nonanoic acid copper, 2 ethyl hexanoic acid copper and copper naphthenate etc. as raw material, adopt low fluorine MOD legal system to be equipped with ybco film, single application thickness also only is 300 nm(Chinese patent Granted publication CN100392770C).
Adding that it is generally acknowledged additive helps the performance of ybco film to improve and viscosity controller, common have polyvinyl alcohol (PVA) (Chinese patent Granted publication CN102173777B), polyvinyl butyral acetal (PVB) (Chinese patent Granted publication CN101456726B), a polyvinylpyrrolidone (PVP) (Chinese patent Granted publication CN100415680C) etc., and performance is also uneven.People such as tight military defense are that raw material, water are solvent with nitrate, add additives polyvinyl alcohol, polyoxyethylene glycol and sucrose and prepare ybco film, and critical current density is about 1 MA/cm
2(77 K, self-fields) (Chinese patent Granted publication CN102173777B; Tight military defense, Zhang Chengxiao, Wang Pengfei etc. nitrate PAD method prepares YBCO superconducting thin film research [J] functional materials .2012,43 (8): 984-986.) fast.Other has the situation that adds the additive diethanolamine in precursor liquid, and the monolayer film thickness that makes can reach 1 μ m, generates and BaCO but still there is a small amount of a axialite grain
3Intermediate phase residual, the integral sintered time needs 10.5 hours (Chinese patent Granted publication CN101719399B; Tang Xiao, Suo Hongli, Ye Shuai, Liu Min, Wu Ziping, Zhou Meiling. low fluorine TFA-MOD technology prepares research [J] the Journal of Inorganic Materials .2010 of YBCO superconducting thick-film, 25 (9): 971-974.) fast.Although additive is early had report for the preparation of the method for ybco film, but adopt the resultant ybco film of above-mentioned additive to have thickness then to ftracture or problem such as performance is not good, single application thickness also is no more than 500 nm basically, does not have employing polymine (PEI) to be used for the report that low fluorine MOD legal system is equipped with ybco film as additive in addition as yet.
Summary of the invention
The object of the present invention is to provide a kind of low fluorine MOD legal system to be equipped with the method for ybco film, this method can effectively improve thickness and the critical current density of ybco film, can overcome surface crack and thickness problem that traditional TFA-MOD legal system is equipped with ybco film, it is low to have fluorine content, the characteristics that chemical stability is high.
For achieving the above object, the present invention adopts and add additive polymine (PEI) in the precursor liquid of trifluoroacetic acid yttrium, trifluoroacetic acid barium and propionic acid copper, by adjusting the consumption of additive, adopt a step sintering process, prepare excellent performance, ybco film that rete is thicker.Adopt following technical scheme preparation:
A. acetic acid yttrium and barium acetate are dissolved in methyl alcohol by the mol ratio of 1:2 and the trifluoroacetic acid of excessive 10 % mol ratios, adopt the Rotary Evaporators desolventizing, obtain the water white transparency colloidal liquid;
B. neutralized verdigris and propionic acid are dissolved in methyl alcohol in 1:4 ~ 6 in molar ratio, adopt the Rotary Evaporators desolventizing, obtain the green transparent colloid;
C. steps A is mixed by the mol ratio of Y:Ba:Cu=1:2:3 with the solution that B obtains, revolve steaming repeatedly under 85 ℃, obtain pure blue-greenish colour transparent colloid, the gel of gained adds methyl alcohol, stirs, and obtains the blue-greenish colour clear solution;
D. the polymine (PEI) with quality 0.2 ~ 1.0 g is dissolved in a certain amount of methyl alcohol, stirs, and obtains colourless transparent solution;
E. polymine-methanol solution that step D is obtained joins in the blue-greenish colour clear solution that step C makes, and both volume ratios are 1:2, revolve steaming under 85 ℃ repeatedly, and with the bubbling boiling phenomenon, obtain the mazarine transparent colloid;
F. in the mazarine transparent colloid that step e makes, add methyl alcohol, make the solution that metallic cation concentration is 1.5 mol/L;
G. the precursor liquid that step F is made is coated on the substrate by spin-coating method;
H. will adopt a step sintering process through the coated substrate of step G, experience low-temperature decomposition process, high-temperature heat treatment process and annealing process prepare ybco film.
The present invention adds polymine (PEI) in the precursor liquid that contains trifluoroacetic acid yttrium, trifluoroacetic acid barium and propionic acid copper, polymine is steamed and metal ion generation complexing through revolving repeatedly in precursor liquid, and the viscosity of control solution increases stability of solution.By adjusting the consumption of additive, adopt a step sintering process, through low temperature thermal decomposition and high temperature sintering, successfully prepare ybco film.Adopt the thickness of the ybco film that this method makes to reach 500 ~ 600 nm, the film surface flawless, hole is minimum, CRYOSCAN scanning induction critical current tester according to THEVA DUNUSCHICHTTECHNIK GMBH is under the condition of 200 nm at the supposition film thickness, records critical current density
JC can reach 4.5 MA/cm
2(77 K, 0 T).
Description of drawings
Fig. 1 is the X ray diffracting spectrum of the ybco film of embodiment 1 preparation;
Fig. 2 is the thermal field emission scan electron microscope picture of the ybco film of embodiment 1 preparation;
Fig. 3 is the ybco film of embodiment 1 preparation
JThe c test shows figure;
Fig. 4 is the ybco film of embodiment 1 preparation
JC take off data figure.
Embodiment
The present invention is described in detail below in conjunction with embodiment:
Embodiment one
Concrete steps are as follows:
A. acetic acid yttrium and barium acetate are dissolved in methyl alcohol by the mol ratio of 1:2 and the trifluoroacetic acid of excessive 10 % mol ratios, adopt the Rotary Evaporators desolventizing, obtain the water white transparency colloidal liquid;
B. neutralized verdigris and propionic acid are dissolved in methyl alcohol in 1:4 ~ 6 in molar ratio, adopt the Rotary Evaporators desolventizing, obtain the green transparent colloid;
C. steps A is mixed by the mol ratio of Y:Ba:Cu=1:2:3 with the solution that B obtains, revolve steaming repeatedly under 85 ℃, obtain pure blue-greenish colour clear gel, the gel of gained adds methyl alcohol, stirs, and obtains the blue-greenish colour clear solution;
D. the polymine (PEI) that with quality is 0.5 g is dissolved in a certain amount of methyl alcohol, stirs, and obtains colourless transparent solution;
E. polymine-methanol solution that step D is obtained joins in the blue-greenish colour clear solution that step C makes, and both volume ratios are 1:2, revolve steaming under 85 ℃ repeatedly, and with the bubbling boiling phenomenon, obtain the mazarine transparent colloid;
F. in the mazarine transparent colloid that step e makes, add methyl alcohol, make the solution that metallic cation concentration is 1.5 mol/L.
G. the precursor liquid that step F is made is spin-coated on the LAO monocrystal chip with the speed of 5000 rpm/min, and the spin coating time is 40 s;
H. will be put in through the coated substrate of step G and place tube furnace on the quartz plate.At dried pure O
2Speed with 10 ℃/min under the atmosphere rises to 200 ℃ fast by room temperature, and the speed with 2 ℃/min rises to 365 ℃ by 200 ℃ again, and is incubated 10 min, and then atmosphere transfers wet O to
2, be warming up to 550 ℃ with the speed of 5 ℃/min.At 770 ℃ of sintering 90 min, wherein preceding 60 min are wet Ar/O with forerunner's noncrystal membrane
2Gas mixture atmosphere, back 30 min are for doing Ar/O
2Gas mixture atmosphere.At last at dried Ar/O
2When cooling to 525 ℃ in the gas mixture atmosphere, be changed to pure O
2, at 450 ℃ of insulation 60 min, make the YBCO oxygen uptake of cubic phase change the YBCO that quadrature has superconductivity mutually into, sample is at pure O subsequently
2Cool to room temperature with the furnace under the atmosphere.The integral sintered time is about 7.5 hours.
Show from the X ray collection of illustrative plates (Fig. 1) of the ybco film of the present embodiment preparation, ybco film c orientation obviously, each diffraction peak-to-peak is stronger, and assorted peak is few.Adopt field emission scanning electron microscope that the sample surfaces pattern is observed, the result shows the smooth flawless of YBCO thick film surface, no a axle orientation crystal grain (Fig. 2).CRYOSCAN scanning induction critical current tester according to THEVA DUNUSCHICHTTECHNIK GMBH is under the condition of 200 nm at the supposition film thickness, carries out the critical current density test of film.Can see that from the test pattern of Fig. 3 prepared ybco film has higher superconductivity,
JC can reach 4.5 MA/cm
2(77 K, 0 T) (Fig. 4), the actual (real) thickness of single application can reach 500-600 nm.
Claims (2)
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| CN107311641A (en) * | 2017-07-25 | 2017-11-03 | 东北大学 | A kind of method that step Technology for Heating Processing prepares boron doped YBCO superconducting film |
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| CN101501787A (en) * | 2006-07-17 | 2009-08-05 | 麻省理工学院 | Method for making high Jc superconducting films and polymer-nitrate solutions used therefore |
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| CN107311641A (en) * | 2017-07-25 | 2017-11-03 | 东北大学 | A kind of method that step Technology for Heating Processing prepares boron doped YBCO superconducting film |
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