CN100565953C - A kind of method of polymer-assistant depositing high temperature superconducting coating conductor superconducting layer - Google Patents
A kind of method of polymer-assistant depositing high temperature superconducting coating conductor superconducting layer Download PDFInfo
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- CN100565953C CN100565953C CNB2008100442891A CN200810044289A CN100565953C CN 100565953 C CN100565953 C CN 100565953C CN B2008100442891 A CNB2008100442891 A CN B2008100442891A CN 200810044289 A CN200810044289 A CN 200810044289A CN 100565953 C CN100565953 C CN 100565953C
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- 238000000151 deposition Methods 0.000 title claims abstract description 15
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- XBDQKXXYIPTUBI-UHFFFAOYSA-N dimethylselenoniopropionate Natural products CCC(O)=O XBDQKXXYIPTUBI-UHFFFAOYSA-N 0.000 claims abstract description 8
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- 238000004528 spin coating Methods 0.000 claims description 4
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- 229910052691 Erbium Inorganic materials 0.000 claims description 3
- 229910052693 Europium Inorganic materials 0.000 claims description 3
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- 238000003756 stirring Methods 0.000 claims description 3
- 229910052727 yttrium Inorganic materials 0.000 claims description 3
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- 229910002480 Cu-O Inorganic materials 0.000 description 1
- FJYDCMFJTPPDEY-UHFFFAOYSA-N [Cu]=O.[Ba].[Eu] Chemical compound [Cu]=O.[Ba].[Eu] FJYDCMFJTPPDEY-UHFFFAOYSA-N 0.000 description 1
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- LNYNHRRKSYMFHF-UHFFFAOYSA-K europium(3+);triacetate Chemical compound [Eu+3].CC([O-])=O.CC([O-])=O.CC([O-])=O LNYNHRRKSYMFHF-UHFFFAOYSA-K 0.000 description 1
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- NFSAPTWLWWYADB-UHFFFAOYSA-N n,n-dimethyl-1-phenylethane-1,2-diamine Chemical compound CN(C)C(CN)C1=CC=CC=C1 NFSAPTWLWWYADB-UHFFFAOYSA-N 0.000 description 1
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- Inorganic Compounds Of Heavy Metals (AREA)
Abstract
A kind of method of polymer-assistant depositing high temperature superconducting coating conductor superconducting layer, its practice is: a, with rare earth acetate, barium acetate, copper acetate by rare earth: barium: the stoichiometric proportion of copper is dissolved in propionic acid at 1: 2: 3, precursor aqueous solution; B, be 2-8 by mass ratio: 100 add PVB or PEG or PVP in precursor aqueous solution, the coating colloid; C, the coating colloid is coated on the substrate and heat drying; D, place tube furnace to decompose heat treatment substrate; E, again in the argon gas atmosphere of humidity, furnace temperature is risen to 800-900 ℃ fast, be incubated 5-15 minute; Reduce to 750-780 ℃ again, be incubated 1-3 hour; In argon gas atmosphere, be cooled to 350-500 ℃ then; Carry out low temperature again and ooze the oxygen annealing in process, cooling promptly.This method cost is low, technology is simple, is applicable to suitability for industrialized production; The superconducting layer of preparation has height biaxial texture, surfacing densification, superconductivity is good.
Description
Technical field
The present invention relates to the high temperature superconducting materia preparation method, relate in particular to a kind of preparation method of superconducting layer of conductor of high-temperature superconductor coat.
Background technology
1986 the new high temperature superconductor yttrium barium copper oxide (YBCO) discovery superconducting transition temperature Tc brought up to more than the 90K from original 30K, obtained the important breakthrough that the above superconductor of liquid nitrogen temperature is used.This important discovery is not only at the solid-state physics theoretical side, and opened up new era in the potential application facet of high temperature superconducting materia.But, directly influenced the raising of superconducting critical current density under the magnetic field, thereby limited the practical application category of YBCO bulk because itself there is the weak connectivity problem of crystal boundary in the YBCO bulk.
Compare with the YBCO bulk, two generation band---based on the superconducting layer of biaxial texture, can carry the bigger electric current that transports in the YBCO coating conductor, become the high temperature superconducting materia of promising realistic application.The YBCO coating conductor is mainly used in electric power system.As the superconducting magnet of utilizing superconducting tape to turn to, magnetic field is strong and even, and the incomparable advantage of conventional magnet is arranged.The cryomotor that and for example adopts belt material of high temperature superconduct to turn to also has the advantage that volume is little, power is big, energy consumption is little.
The YBCO coating conductor is by being made of metal base band, resilient coating, superconducting layer and protective layer.The method of the superconducting layer of existing preparation conductor of high-temperature superconductor coat mainly contains original position physical vaporous deposition and dystopy chemical solution deposition two big classes.The original position physical vaporous deposition comprises that mainly pulsed laser deposition (PLD), magnetron sputtering (Magnetic Sputtering), electron beam steam (e-beam co-evaporation), inclination base band deposition methods such as (ISD) altogether.The advantage of these class methods is in-situ preparing films, need not the follow-up phase that sinters into, smooth, fine and close, the non-microcracked generation of the film surface of preparation, and can carry very high critical current.Its shortcoming is: equipment needed thereby involves great expense, and is difficult to realize the large-scale commercial applications application of coating conductor.
Chemical solution deposition mainly comprises methods such as sol-gal process, deposition of metal organic method, mixing method.Chemical solution deposition is by the precise chemical structure metering ratio of metal cation in the initiation material, determine the proportioning of each component in the superconductor, need not required vacuum condition in the physical method preparation, saved production cost greatly, help the large-scale batch production of superconducting coating.But there is following deficiency in the prior preparation method: in the deposition of metal organic method, add content and surpassed 20% macromolecular material, and a large amount of losses of resolving into macromolecular compound quality in the membrane process, can cause the superconducting film surface to form a large amount of hole and micro-crack, thereby reduce the current-carrying performance of superconducting layer.In chemical solution method, the one-tenth phase technology of preparation superconducting layer adopts substantially under argon gas atmosphere furnace temperature is risen to 750-800 ℃, and is incubated the pioneer's film that made in 1 to 3 hour after the decomposition and is converted into REBa
2Cu
3O
7-xThe four directions phase, wherein RE is a kind of among rare earth element y (yttrium), Nd (neodymium), Sm (samarium), Eu (europium), Gd (gadolinium), Dy (dysprosium), Ho (holmium), the Er (erbium), annealing obtains the REBa of superconduction in the oxygen atmosphere of 350-500 ℃ of drying then
2Cu
3O
7-xThe quadrature phase.Adopt the film surface fluctuating is relatively large and existence is more relatively the hole and the micro-crack of this kind one-tenth phase prepared, such surface microstructure makes the superconductivity of film reduce equally.
Summary of the invention
The object of the present invention is to provide a kind of method of polymer-assistant depositing high temperature superconducting coating conductor superconducting layer.This method cost is low, technology is simple, is particularly useful for large-scale industrial production; The high temperature superconducting coating conductor superconducting layer of preparation has height biaxial texture, surfacing densification, superconductivity is good.
The present invention realizes its goal of the invention, and the first kind of technical scheme that is adopted is:
A kind of method of polymer-assistant depositing high temperature superconducting coating conductor superconducting layer, its concrete practice is:
A, preparation of precursor solution: with rare earth acetate, barium acetate, copper acetate in rare earth: barium: 1: 2: 3 ratio of the stoichiometric proportion of copper is dissolved in the propionic acid, precursor aqueous solution;
B, coating colloid for preparing: in a precursor aqueous solution in step, add macromolecular material: polyvinyl butyral resin (PVB) or polyethylene glycol (PEG) or PVP (PVP), the macromolecular material that adds and the mass ratio of precursor aqueous solution are 2-8: 100, fully stir, obtain the coating colloid;
C, coating and dry: the coating colloid of b step preparation is coated on the substrate, forms film on substrate, carry out drying in 100-200 ℃ of temperature range, be 5-20 minute drying time;
D, decompose heat treatment: c is gone on foot dried film place tube furnace, under the argon gas atmosphere protection, rise to 100-150 ℃ from room temperature with the speed of 1-5 ℃/min; In stove, feed dew point then and be 10-20 ℃ water vapour, feed argon gas simultaneously and form moist argon shield atmosphere, be warming up to 450-500 ℃, be incubated 0.5-2 hour with the speed of 0.25-1.5 ℃/min; Again in the argon gas atmosphere of drying, naturally cool to room temperature subsequently;
E, become phase heat treatment: the water vapour that in the d tube furnace in step, feeds dew point again and be 20-50 ℃, and feed argon gas simultaneously, and form moist argon shield atmosphere, furnace temperature is rapidly heated to 800-900 ℃ with 15-40 ℃/min, be incubated 5-15 minute, film is carried out in short-term high-temperature heat treatment; Be cooled to 750-780 ℃ with 1-15 ℃/min again, be incubated 1-3 hour; In the argon shield atmosphere of drying, be cooled to 350-500 ℃ then; At last atmosphere in the stove is changed into dry oxygen, be incubated 1-5 hour, carry out low temperature and ooze the oxygen annealing in process, be cooled to room temperature then, promptly on substrate, make RE, Ba and Cu oxide REBa
2Cu
3O
7-xSuperconducting layer.
Compared with prior art, the beneficial effect of first technical scheme of the present invention is:
One, become in the phase heat treatment process, first 800-900 ℃, on-chip coating is carried out in short-term high-temperature heat treatment, make coating under high temperature action, form partially molten state in short-term, remake annealing in process then.The formation of this molten condition has obviously reduced the formation of hole, and the non-microcracked generation of superconducting film that becomes to obtain has mutually improved the compactness of final superconducting layer greatly, thereby improved the current-carrying performance of superconducting layer.
Two, polyvinyl butyral resin (PVB) or polyethylene glycol (PEG) or three kinds of polymer-assistant depositing materials of PVP (PVP), can effectively regulate the viscosity of precursor aqueous solution, increase the thickness of preparation superconducting layer precursor thin film, make the coating colloid good stability of preparation, and can preserve at normal temperatures for a long time, help the preparation of long band, also make the inventive method be applicable to large-scale commercial Application.
Simultaneously, because adding the amount of macromolecular material only is the 2%-8% of precursor liquid quality less, the amount of the macromolecular material that decomposes in thermal decomposition process seldom, can not form the film surface of porous, superconducting layer after the thermal decomposition heat treatment is smooth, fine and close, provides the foundation for preparing the good superconducting layer of superconductivity.
Three, the material of preparation precursor liquid and the used macromolecular material of preparation colloid are versatile material, and it is cheap, thereby has reduced preparation cost, makes the inventive method especially be suitable for large-scale industrial production.
The concrete grammar of above-mentioned colloid coating is that spin coating (spin coating) or dip-coating (dip coating) or groove are coated with (slot-die coating).
In the above-mentioned preparation of precursor solution, the rare earth element in the rare earth acetate is: a kind of in yttrium (Y) neodymium (Nd), samarium (Sm), europium (Eu), gadolinium (Gd), dysprosium (Dy), holmium (Ho), the erbium (Er).
Below in conjunction with the drawings and specific embodiments the present invention is done further detailed explanation.
Description of drawings
Fig. 1 is the θ-2 θ X ray diffracting spectrum of the yttrium barium copper oxide YBCO superconducting layer of the embodiment of the invention one.
Fig. 2 is the phi scanning X ray diffracting spectrum of the yttrium barium copper oxide YBCO superconducting layer of the embodiment of the invention one.
Fig. 3 is 10000 times of scanning electron microscopy of yttrium barium copper oxide YBCO superconducting layer (SEM) photo of the embodiment of the invention one.
Fig. 4 is the suiperconducting transition curve of the yttrium barium copper oxide YBCO superconducting layer of the embodiment of the invention one.
Fig. 5 is the θ-2 θ X ray diffracting spectrum of the dysprosium barium copper oxygen DBCO superconducting layer of the embodiment of the invention two.
Fig. 6 is the phi scanning X ray diffracting spectrum of the dysprosium barium copper oxygen DBCO superconducting layer of the embodiment of the invention two.
Fig. 7 is dysprosium barium copper oxygen DBCO 10000 times of scanning electron microscopy of superconducting layer (SEM) photo of the embodiment of the invention two.
Fig. 8 is the suiperconducting transition curve of the dysprosium barium copper oxygen DBCO superconducting layer of the embodiment of the invention two.
Among Fig. 1,5, ordinate is diffracted intensity (Intensity), arbitrary unit (a.u.); Abscissa is the angle of diffraction 2 θ, and unit is degree (deg).
Among Fig. 2,6, ordinate is diffracted intensity (Intensity), arbitrary unit (a.u.); Abscissa is the phi scanning angle, and unit is degree (deg).
Among Fig. 4,8, ordinate is resistivity (Resistivity), and unit is electromagnetism unit (Ω .m); Abscissa is a temperature, and unit is Kelvin (K); Wherein, T
c(0) is the zero resistance superconducting transition temperature.
Embodiment:
Embodiment one
A kind of embodiment of the present invention is:
A kind of method of polymer-assistant depositing high temperature superconducting coating conductor superconducting layer, its concrete practice is:
A, preparation of precursor solution: with yttrium acetate, barium acetate, copper acetate in rare earth: barium: 1: 2: 3 ratio of the stoichiometric proportion of copper is dissolved in the propionic acid, precursor aqueous solution.
B, coating colloid for preparing: in precursor aqueous solution, add 3 parts of polyvinyl butyral resins (PVB) polymeric additive, fully stir, obtain homogeneous transparent, have the coating colloid of certain viscosity.
C, colloid coating and dry: adopt spin coating method to apply, be about to colloid drops on substrate,, obtain uniform coated film, then at 100 ℃ of dry 20min with the sol evenning machine rotation.
D, decomposition heat treatment: the speed with 1.5 ℃/min in the argon atmospher of drying is warming up to 115 ℃ from room temperature; in stove, feed dew point then and be 20 ℃ water vapour; feed argon gas simultaneously and form moist argon shield atmosphere; at this moment; speed with 0.5 ℃/min is warming up to 450 ℃; be incubated 0.5 hour, in argon gas atmosphere, be cooled to room temperature subsequently, obtain the brilliant and unformed matrix of cupric oxide nano.
E, the heat treatment of one-tenth phase: upwards feeding dew point in the tube furnace in step is 30 ℃ water vapour, and feeds argon gas simultaneously, forms the argon shield atmosphere of humidity, earlier furnace temperature is rapidly heated to 800 ℃ with 20 ℃/min, is incubated 5 minutes; Be cooled to 770 ℃ with 5 ℃/min again, be incubated 1 hour, in the argon gas of drying, reduce to 450 ℃ at last, then atmosphere in the stove is changed into dry oxygen, be incubated 1 hour, and be cooled to room temperature, promptly get the yttrium barium copper oxide high temperature superconducting coating conductor superconducting layer.
Fig. 1,2 is respectively the X ray diffracting spectrum of the superconducting layer of present embodiment preparation, the good c axle texture of the position description yttrium barium copper oxide at peak among Fig. 1, the good a of the position description yttrium barium copper oxide at peak, b axle texture among Fig. 2; Therefore, Fig. 1,2 shows that the superconducting layer that this example makes has excellent biaxial texture.Fig. 3 makes the stereoscan photograph of superconducting layer for this example, and Fig. 3 shows that superconducting layer that this example makes has the surface topography of smooth densification; The suiperconducting transition curve of the superconducting layer that Fig. 4 makes for this example, Fig. 4 shows that its superconduction zero resistance transition temperature reaches 90K, shows good superconductivity.
Embodiment two
This example is basic identical with embodiment one, and different is:
In a step preparation of precursor solution, the rare earth acetate is the acetate dysprosium.
The d step decomposes in the heat treatment process; speed with 3 ℃/min in the argon atmospher of drying is warming up to 135 ℃ from room temperature; in stove, feed dew point then and be 20 ℃ water vapour; feed argon gas simultaneously and form moist argon shield atmosphere; at this moment; speed with 1 ℃/min is warming up to 450 ℃, is incubated 0.75 hour.
In the one-tenth phase heat treatment in e step, upwards feeding dew point in the tube furnace in step is 30 ℃ water vapour, and feeds argon gas simultaneously, forms moist argon shield atmosphere, and furnace temperature is rapidly heated to 840 ℃ with 25 ℃/min, is incubated 5 minutes; Be cooled to 775 ℃ with 7 ℃/min again, be incubated 1 hour, in the argon gas of drying, reduce to 450 ℃ at last, then atmosphere in the stove is changed into dry oxygen, be incubated 2 hours, and be cooled to room temperature, promptly get dysprosium barium copper oxygen DyBCO high temperature superconducting coating conductor superconducting layer.
Fig. 5,6 is respectively the X ray diffracting spectrum of the superconducting layer of present embodiment preparation, the good c axle texture of the position description dysprosium barium copper oxygen at peak among Fig. 5, good a, the b axle texture of the position description dysprosium barium copper oxygen at peak among Fig. 6, Fig. 5,6 shows that the superconducting layer that this example makes has excellent biaxial texture; Fig. 7 is the stereoscan photograph that makes superconducting layer, and Fig. 7 shows that superconducting layer that this example makes has the surface topography of smooth densification; Fig. 8 is corresponding suiperconducting transition curve, and Fig. 8 shows that superconduction zero resistance transition temperature reaches 90K, shows good superconductivity.。
Embodiment three
This example is basic identical with embodiment one, and different is:
In a step preparation of precursor solution, the rare earth acetate is a gadolinium.
In the b step coating colloid for preparing, in precursor aqueous solution, add 5 parts of polyethylene glycol (PEG) as the macromolecular material additive.
The drying of c in the step is 150 ℃ of dryings 15 minutes.
The d step decomposes in the heat treatment process; speed with 2 ℃/min in the argon atmospher of drying is warming up to 125 ℃ from room temperature; in stove, feed dew point then and be 15 ℃ water vapour; feed argon gas simultaneously and form moist argon shield atmosphere; at this moment; speed with 0.25 ℃/min is warming up to 470 ℃, is incubated 1 hour.
E goes on foot in the phase heat treatment, and feeding dew point in the d tube furnace in step is 35 ℃ water vapour, and feeds argon gas simultaneously, forms moist argon shield atmosphere,, furnace temperature is rapidly heated to 900 ℃ with 40 ℃/min, be incubated 5 minutes; Be cooled to 765 ℃ with 10 ℃/min again, be incubated 1.5 hours, in the argon gas of drying, reduce to 430 ℃ at last, then atmosphere in the stove is changed into dry oxygen, be incubated 2 hours, and be cooled to room temperature, promptly get Gd-Ba-Cu-O GdBCO high temperature superconducting coating conductor superconducting layer.
Embodiment four
This example is basic identical with embodiment one, and different is:
In a step preparation of precursor solution, the rare earth acetate is the acetate samarium.
In the b step coating colloid for preparing, in precursor aqueous solution, add 8 parts of PVPs (PVP) as the macromolecular material additive.
200 ℃ of the temperature of c drying in the step, 5 minutes time.
The d step decomposes in the heat treatment process; speed with 3 ℃/min in the argon atmospher of drying is warming up to 150 ℃ from room temperature; in stove, feed dew point then and be 20 ℃ water vapour; feed argon gas simultaneously and form moist argon shield atmosphere; at this moment; speed with 1 ℃/min is warming up to 500 ℃, is incubated 0.5 hour.
E goes on foot in the phase heat treatment, and feeding dew point in the d tube furnace in step is 40 ℃ water vapour, and feeds argon gas simultaneously, forms moist argon shield atmosphere, and furnace temperature is rapidly heated to 820 ℃ with 20 ℃/min, is incubated 10 minutes; Be cooled to 760 ℃ with 5 ℃/min again, be incubated 2 hours, in the argon gas of drying, reduce to 400 ℃ at last, then atmosphere in the stove is changed into dry oxygen, be incubated 5 hours, and be cooled to room temperature, promptly get samarium barium copper oxygen SmBCO high temperature superconducting coating conductor superconducting layer.
Embodiment five
This example is basic identical with embodiment one, and different is:
In a step preparation of precursor solution, the rare earth acetate is a neodymium acetate.
In the b step coating colloid for preparing, add 2 parts of polyvinyl butyral resins (PVB) polymeric additive.
The temperature of the drying of c in the step is 150 ℃, and the time is 10 minutes.
The d step decomposes in the heat treatment process; speed with 5 ℃/min in the argon atmospher of drying is warming up to 150 ℃ from room temperature; in stove, feed dew point then and be 10 ℃ water vapour; feed argon gas simultaneously and form moist argon shield atmosphere; at this moment; speed with 1.5 ℃/min is warming up to 500 ℃, is incubated 0.75 hour.
E goes on foot in the phase heat treatment, and feeding dew point in the d tube furnace in step is 50 ℃ water vapour, and feeds argon gas simultaneously, forms moist argon shield atmosphere,, furnace temperature is rapidly heated to 810 ℃ with 20 ℃/min, be incubated 15 minutes; Be cooled to 750 ℃ with 5 ℃/min again, be incubated 3 hours, in the argon gas of drying, reduce to 350 ℃ at last, then atmosphere in the stove is changed into dry oxygen, be incubated 4 hours, and be cooled to room temperature, promptly get Nd-Ba-Cu oxygen NdBCO high temperature superconducting coating conductor superconducting layer.
Embodiment six
This example is basic identical with embodiment one, and different is:
In a step preparation precursor liquid, used rare-earth salts is the acetate europium.
In the b step coating colloid for preparing, add 4 parts of polyvinyl butyral resins (PVB) polymeric additive.
In c step coating and the drying, adopt dip-coating method to carry out the coating of colloid coating, 100 ℃ of dryings are 5 minutes then.
D step decomposes in the heat treatment, and the speed with 1 ℃/min in the argon atmospher of drying is warming up to 100 ℃ from room temperature, feeds dew point then and be 20 ℃ water vapour in stove; feed argon gas simultaneously and form moist argon shield atmosphere; at this moment, be warming up to 480 ℃, be incubated 1 hour with the speed of 0.25 ℃/min.
E goes on foot in the phase heat treatment, and feeding dew point in tube furnace is 20 ℃ water vapour, and feeds argon gas simultaneously, forms moist argon shield atmosphere,, furnace temperature is rapidly heated to 880 ℃ with 15 ℃/min, be incubated 15 minutes; Be cooled to 765 ℃ with 1 ℃/min again, be incubated 1 hour, in the argon gas of drying, reduce to 500 ℃ at last, then atmosphere in the stove is changed into dry oxygen, be incubated 3 hours, and be cooled to room temperature, promptly get europium barium copper oxygen EuBCO high temperature superconducting coating conductor superconducting layer.
Embodiment seven
This example is basic identical with embodiment one, and different is:
In a step preparation precursor liquid, used rare-earth salts is the acetate holmium.
In the b step coating colloid for preparing, add 4 parts of polyvinyl butyral resins (PVB) polymeric additive.
In c step, the mode that adopts groove to be coated with is coated on the film that forms on the substrate with the coating colloid, 150 ℃ of dryings 10 minutes.
In the d step thermal decomposition heat treatment process; speed with 4 ℃/min in the argon atmospher of drying is warming up to 125 ℃ from room temperature; in stove, feed dew point then and be 10 ℃ water vapour; feed argon gas simultaneously and form moist argon shield atmosphere; at this moment; speed with 0.75 ℃/min is warming up to 500 ℃, is incubated 2 hours.
E goes on foot in the phase heat treatment, and feeding dew point in tube furnace is 30 ℃ water vapour, and feeds argon gas simultaneously, forms moist argon shield atmosphere, and furnace temperature is rapidly heated to 850 ℃ with 30 ℃/min, is incubated 5 minutes; Be cooled to 760 ℃ with 1 ℃/min again, be incubated 2 hours, in the argon gas of drying, reduce to 380 ℃ at last, then atmosphere in the stove is changed into dry oxygen, be incubated 3 hours, and be cooled to room temperature, promptly get holmium barium copper oxygen HoBCO high temperature superconducting coating conductor superconducting layer.
Embodiment eight
This example is basic identical with embodiment one, and different is:
In a step preparation precursor liquid, used rare-earth salts is the acetate erbium.
In the b step coating colloid for preparing, add 4 parts of polyvinyl butyral resins (PVB) macromolecular material additive.
The drying in c step, 150 ℃ of temperature, the time is 15 minutes.
The d step decomposes in the heat treatment process; speed with 1.5 ℃/min in the argon atmospher of drying is warming up to 150 ℃ from room temperature; in stove, feed dew point then and be 20 ℃ water vapour; feed argon gas simultaneously and form moist argon shield atmosphere; at this moment; speed with 1.5 ℃/min is warming up to 470 ℃, is incubated 1.5 hours.
E goes on foot in the phase heat treatment, and feeding dew point in tube furnace is 30 ℃ water vapour, and feeds argon gas simultaneously, forms moist argon shield atmosphere, and furnace temperature is rapidly heated to 880 ℃ with 35 ℃/min, is incubated 5 minutes; Be cooled to 780 ℃ with 15 ℃/min again, be incubated 1 hour, in the argon gas of drying, reduce to 350 ℃ at last, then atmosphere in the stove is changed into dry oxygen, be incubated 1 hour, and be cooled to room temperature, promptly get erbium barium copper oxygen ErBCO high temperature superconducting coating conductor superconducting layer.
Embodiment nine
This example is basic identical with embodiment one, and different is:
In a step preparation precursor liquid, used rare-earth salts is the acetate erbium.
In the b step coating colloid for preparing, add 2 parts of polyvinyl butyral resins (PVB) macromolecular material additive.
The drying in c step, 200 ℃ of temperature, the time is 20 minutes.
The d step decomposes in the heat treatment process; speed with 1.5 ℃/min in the argon atmospher of drying is warming up to 150 ℃ from room temperature; in stove, feed dew point then and be 20 ℃ water vapour; feed argon gas simultaneously and form moist argon shield atmosphere; at this moment; speed with 1.5 ℃/min is warming up to 500 ℃, is incubated 2 hours.
E goes on foot in the phase heat treatment, and feeding dew point in tube furnace is 30 ℃ water vapour, and feeds argon gas simultaneously, forms moist argon shield atmosphere, and furnace temperature is rapidly heated to 900 ℃ with 40 ℃/min, is incubated 15 minutes; Be cooled to 780 ℃ with 15 ℃/min again, be incubated 3 hours, in the argon gas of drying, reduce to 500 ℃ at last, then atmosphere in the stove is changed into dry oxygen, be incubated 5 hours, and be cooled to room temperature, promptly get erbium barium copper oxygen ErBCO high temperature superconducting coating conductor superconducting layer.
Embodiment ten
This example is basic identical with embodiment one, and different is:
In a step preparation precursor liquid, used rare-earth salts is the acetate holmium.
In the b step coating colloid for preparing, add 8 parts of polyvinyl butyral resins (PVB) macromolecular material additive.
The drying in c step, 100 ℃ of temperature, the time is 5 minutes.
The d step decomposes in the heat treatment process; speed with 5 ℃/min in the argon atmospher of drying is warming up to 100 ℃ from room temperature; in stove, feed dew point then and be 20 ℃ water vapour; feed argon gas simultaneously and form moist argon shield atmosphere; at this moment; speed with 1.5 ℃/min is warming up to 450 ℃, is incubated 0.5 hour.
E goes on foot in the phase heat treatment, and feeding dew point in tube furnace is 50 ℃ water vapour, and feeds argon gas simultaneously, forms moist argon shield atmosphere, and furnace temperature is rapidly heated to 800 ℃ with 20 ℃/min, is incubated 5 minutes; Be cooled to 750 ℃ with 15 ℃/min again, be incubated 1 hour, in the argon gas of drying, reduce to 350 ℃ at last, then atmosphere in the stove is changed into dry oxygen, be incubated 1 hour, and be cooled to room temperature, promptly get holmium barium copper oxygen HoBCO high temperature superconducting coating conductor superconducting layer.
Claims (3)
1, a kind of method of polymer-assistant depositing high temperature superconducting coating conductor superconducting layer, its concrete practice is:
A, preparation of precursor solution: with rare earth acetate, barium acetate, copper acetate in rare earth: barium: 1: 2: 3 ratio of the stoichiometric proportion of copper is dissolved in the propionic acid, precursor aqueous solution;
B, coating colloid for preparing: in a precursor aqueous solution in step, add macromolecular material: polyvinyl butyral resin (PVB) or polyethylene glycol (PEG) or PVP (PVP), the macromolecular material that adds and the mass ratio of precursor aqueous solution are 2-8: 100, fully stir, obtain the coating colloid;
C, coating and dry: the coating colloid of b step preparation is coated on the substrate, forms film on substrate, carry out drying in 100-200 ℃ of temperature range, be 5-20 minute drying time;
D, decompose heat treatment: c is gone on foot dried film place tube furnace, under the argon gas atmosphere protection, rise to 100-150 ℃ from room temperature with the speed of 1-5 ℃/min; In stove, feed dew point then and be 10-20 ℃ water vapour, feed argon gas simultaneously and form moist argon shield atmosphere, be warming up to 450-500 ℃, be incubated 0.5-2 hour with the speed of 0.25-1.5 ℃/min; Again in the argon gas atmosphere of drying, naturally cool to room temperature subsequently;
E, become phase heat treatment: the water vapour that in the d tube furnace in step, feeds dew point again and be 20-50 ℃, and feed argon gas simultaneously, and form moist argon shield atmosphere, furnace temperature is rapidly heated to 800-900 ℃ with 15-40 ℃/min, be incubated 5-15 minute, film is carried out in short-term high-temperature heat treatment; Be cooled to 750-780 ℃ with 1-15 ℃/min again, be incubated 1-3 hour; In the argon shield atmosphere of drying, be cooled to 350-500 ℃ then; At last atmosphere in the stove is changed into dry oxygen, be incubated 1-5 hour, carry out low temperature and ooze the oxygen annealing in process, be cooled to room temperature then, promptly on substrate, make RE, Ba and Cu oxide REBa
2Cu
3O
7-xSuperconducting layer.
2, the method for a kind of polymer-assistant depositing high temperature superconducting coating conductor superconducting layer as claimed in claim 1 is characterized in that: described c in the step concrete grammar of coating be that spin coating or dip-coating or groove are coated with.
3, the method for a kind of polymer-assistant depositing high temperature superconducting coating conductor superconducting layer as claimed in claim 1, it is characterized in that: in the preparation of precursor solution step in described a step, the rare earth element in the rare earth acetate is: a kind of in yttrium (Y), neodymium (Nd), samarium (Sm), europium (Eu), gadolinium (Gd), dysprosium (Dy), holmium (Ho), the erbium (Er).
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CN101456726B (en) * | 2009-01-07 | 2012-03-21 | 西南交通大学 | Method for preparing high critical current density yttrium barium copper oxide superconducting film |
CN101723659B (en) * | 2009-09-18 | 2012-04-25 | 西北有色金属研究院 | Method for preparing superconductive layer of coated conductor by organic deposition of low-fluorine metal |
CN101857429A (en) * | 2010-06-30 | 2010-10-13 | 西南交通大学 | Method for preparing superconducting layer of high-temperature superconducting coated conductor by depositing fluorine-free chemical solution |
CN103086722B (en) * | 2013-01-31 | 2015-04-15 | 清华大学 | Preparation method of high temperature superconducting film |
CN105609212A (en) * | 2015-12-18 | 2016-05-25 | 常熟市东方特种金属材料厂 | Preparation method of composite superconducting material |
CN106451390A (en) * | 2016-11-15 | 2017-02-22 | 广东电网有限责任公司电力科学研究院 | Resistor type superconductive current limiter with adjustable operation volume and current limiting resistance |
CN109727720A (en) * | 2019-02-28 | 2019-05-07 | 西北有色金属研究院 | A kind of preparation method of Bi2212 high-temperature superconductor powder |
CN112863762A (en) * | 2021-01-20 | 2021-05-28 | 东北大学 | Method for preparing large-size high-temperature superconducting film |
CN114164490A (en) * | 2021-11-05 | 2022-03-11 | 上海大学 | Method for preparing high-temperature superconducting oxide ceramic epitaxial film by heating through induction method |
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