CN103236390B - A kind of short millimeter wave travelling wave tube diamond delivery of energy window and manufacture method thereof - Google Patents
A kind of short millimeter wave travelling wave tube diamond delivery of energy window and manufacture method thereof Download PDFInfo
- Publication number
- CN103236390B CN103236390B CN201310131910.9A CN201310131910A CN103236390B CN 103236390 B CN103236390 B CN 103236390B CN 201310131910 A CN201310131910 A CN 201310131910A CN 103236390 B CN103236390 B CN 103236390B
- Authority
- CN
- China
- Prior art keywords
- window
- diamond
- delivery
- energy
- energy window
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
A kind of diamond delivery of energy window of short millimeter wave travelling wave tube, belong to vacuum electronics technology field, comprise delivery of energy window, connect waveguide and sealing-in window-frame, two parts up and down of this diamond delivery of energy window are symmetrical placements and the sealing-in window-frame be connected with waveguide, and diamond window is gripped at their middle part hermetically.Be that a selects substrate silicon chip according to above the manufacture method stating diamond delivery of energy window; B loads microwave plasma CVD equipment; C is filled with hydrogen; D starts plasma discharge; E improves air pressure and microwave power, and substrate temperature reaches 850 ~ 950 ° of C; F adds methane, starts adamantine growth; G terminates growth, takes out diamond; H grinds, polishing with being laser-cut into window; I window metallizes; J window welds with window-frame centering.Matching performance and the loss of this delivery of energy window are all better than sapphire window.
Description
Technical field
The invention belongs to vacuum electronics technology field, particularly a kind of diamond delivery of energy window of short millimeter wave travelling wave tube and manufacture method thereof.
Background technology
Terahertz (THz) vacuum device of millimere-wave band and more high band has the advantages such as power is large, bandwidth, is widely applied in radar, guidance, tactics and strategic communicaton, electronic countermeasures, remote sensing, radiation measurement etc.Because the frequency of this travelling wave tube is relatively high, the size of parts is less, brings the processing and manufacturing of the stricter part of these dimensional requirements of all difficulties, particularly slow wave structure, attenuator and microwave energy transmission window to product development.Delivery of energy window is one of vitals in short millimeter band (such as W-waveband) travelling wave tube.In order to make travelling wave tube energy steady operation, and provide good unit for electrical property parameters, delivery of energy window must have the features such as standing wave is low, loss is little, and should have enough structural strengths and vacuum seal performance.Microwave energy transmission window has various structures form.Wherein Pill-Box Window is the most frequently used a kind of structure, have bear that power capacity is large, bandwidth and structure simple, and technics comparing is ripe, and sapphire is one of conventional window materials.Such as, but for short millimeter wave, W-waveband travelling wave tube, there is series of problems in sapphire window.First, its dielectric constant 9.5 is higher.If window-frame wants to make WR10 standard waveguide mouth, the thickness of the sapphire window calculated according to dielectric constant and wavelength is less than 0.1mm, insufficient strength, is difficult to realize.In addition on the one hand, sapphire window is compared with diamond window, and lossy microwave is relatively large.And high quality diamond material, being dielectric material the most excellent in known materials, having the characteristics such as low-k, low lossy microwave, high rigidity and high thermal conductivity, is microwave vacuum device, the delivery of energy window material that particularly short millimeter wave travelling wave tube is desirable.According to calculating, if window-frame makes WR10 standard waveguide mouth, the thickness of diamond window reaches 0.16 ~ 0.2mm, can meet the real requirement of intensity.The more important thing is that the loss of diamond window is low, be conducive to the power output improving short millimeter wave device; And it has better matching performance, lower reflection loss, is conducive to the reflection vibration suppressing travelling wave tube, obtains stable service behaviour.Therefore, the application selects diamond instead of sapphire.
Summary of the invention
The technical problem that the present invention solves is that, for making short millimeter wave travelling wave tube steady operation, the short millimeter wave delivery of energy window material usually selected is sapphire, but sapphire Problems existing to be dielectric constant high, insufficient strength, matching performance difference and the defect such as loss is large.In order to overcome these weak points, just need develop a kind of diamond delivery of energy window and seek its manufacture method.
The object of the invention is, a kind of short millimeter wave travelling wave tube diamond delivery of energy window and manufacture method thereof are provided.In order to realize object of the present invention, the technical scheme taked is as follows, a kind of diamond delivery of energy window of short millimeter wave travelling wave tube, comprise delivery of energy window, connect waveguide and sealing-in window-frame, it is characterized in that, two parts up and down of this diamond delivery of energy window are symmetrical placements and the sealing-in window-frame be connected with waveguide, and a slice diamond window is gripped at their middle part hermetically.According to above the manufacture method stating diamond delivery of energy window, it is characterized in that, carry out as follows,
A. select substrate silicon chip, its surface is adopted bortz powder polishing forming core;
B. substrate loads microwave plasma CVD equipment, system is evacuated to≤1x10
-1pa;
C. hydrogen-flow 100 ~ 600sccm is filled with, air pressure 400 ~ 800Pa;
D. add microwave power 1000W, start plasma discharge;
E. improve air pressure and microwave power to 10 ~ 16KPa and 2 ~ 3KW, substrate temperature reaches 850 ~ 950 ° of C;
F. add methane-1 ~ 6sccm, start adamantine growth;
G. terminate growth, take out the diamond of growth;
H. diamond grinds, polishing with being laser-cut into window;
I. window metallization;
J. window and window-frame centering with weld.
The manufacturing process of diamond delivery of energy window relates to the metallization at window edge, and with the welding of window-frame.First, rf magnetron sputtering filming equipment is used to carry out the metallization at window edge.Then, window and upper and lower window-frame centering are fixed, and carries out disposable soldering.
The invention has the beneficial effects as follows, utilize the loss of diamond window and reflection loss low, the feature of matching performance excellence, improves the power output of short millimeter wave travelling wave tube, and the reflection vibration of effective suppression device, obtains stable service behaviour.
Accompanying drawing explanation
Fig. 1 is a kind of schematic diagram of diamond delivery of energy window of short millimeter wave travelling wave tube.
Fig. 2 is the flow chart that diamond delivery of energy window manufactures
Embodiment
With reference to Fig. 1, represent a kind of diamond delivery of energy window schematic diagram of W-waveband travelling wave tube, in figure, parts 2 are diamond window, and it and upper window-frame 1 and lower window-frame 3 pass through, together with brazing, to form vacuum seal.The preparation of critical piece diamond window sheet material operates according to following steps:
A. select substrate silicon chip, its surface is adopted bortz powder polishing forming core;
B. substrate loads microwave plasma CVD equipment, system is evacuated to≤1x10
-1pa;
C. hydrogen-flow 100 ~ 600sccm is filled with, air pressure 400 ~ 800Pa;
D. add microwave power 1000W, start plasma discharge;
E. improve air pressure and microwave power to 10 ~ 16KPa and 2 ~ 3KW, substrate temperature reaches 850 ~ 950 ° of C;
F. add methane-1 ~ 6sccm, start adamantine growth;
When g. terminating growth, take out the diamond of growth;
Then be processing and the encapsulation of diamond window, carry out according to the following steps:
H. diamond grinds, polishing with being laser-cut into window;
I. window metallization;
J. window and window-frame centering with weld.
Claims (1)
1. the diamond delivery of energy window of a short millimeter wave travelling wave tube, comprise delivery of energy window, connect waveguide and sealing-in window-frame, it is characterized in that, two parts up and down of this diamond delivery of energy window are symmetrical placements and the sealing-in window-frame be connected with waveguide, and a slice diamond window is gripped at their middle part hermetically;
Manufacture described diamond delivery of energy window to carry out as follows,
A. select substrate silicon chip, its surface is adopted bortz powder polishing forming core;
B. substrate loads microwave plasma CVD equipment, system is evacuated to≤1x10
-1pa;
C. hydrogen flowing quantity 100 ~ 600sccm is filled with, air pressure 400 ~ 800Pa;
D. add microwave power 1000W, start plasma discharge;
E. improve air pressure and microwave power to 10 ~ 16KPa and 2 ~ 3KW, substrate temperature reaches 850 ~ 950 DEG C;
F. add methane 1 ~ 6sccm, start adamantine growth;
G. terminate growth, take out the diamond of growth;
H. diamond grinds, polishing with being laser-cut into window;
I. window metallization;
J. window and window-frame centering with weld.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310131910.9A CN103236390B (en) | 2013-04-16 | 2013-04-16 | A kind of short millimeter wave travelling wave tube diamond delivery of energy window and manufacture method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310131910.9A CN103236390B (en) | 2013-04-16 | 2013-04-16 | A kind of short millimeter wave travelling wave tube diamond delivery of energy window and manufacture method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103236390A CN103236390A (en) | 2013-08-07 |
| CN103236390B true CN103236390B (en) | 2016-02-24 |
Family
ID=48884424
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310131910.9A Active CN103236390B (en) | 2013-04-16 | 2013-04-16 | A kind of short millimeter wave travelling wave tube diamond delivery of energy window and manufacture method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103236390B (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103779154B (en) * | 2014-01-10 | 2016-03-30 | 中国电子科技集团公司第十二研究所 | A kind of diamond delivery of energy window of terahertz wave band vacuum device and manufacture method thereof |
| CN104485271A (en) * | 2014-12-10 | 2015-04-01 | 中国电子科技集团公司第十二研究所 | Round flange box type window for space traveling-wave tube and manufacturing method thereof |
| CN105185677A (en) * | 2015-08-07 | 2015-12-23 | 南京三乐电子信息产业集团有限公司 | Millimeter wave traveling wave tube diamond energy transmission window and processing method |
| CN107393790A (en) * | 2017-07-20 | 2017-11-24 | 中国科学院电子学研究所 | The method for metallising of electron tube dielectric disk in window |
| CN107611554B (en) * | 2017-09-07 | 2020-02-18 | 中科迪高微波系统有限公司 | Manufacturing method of high-performance airtight waveguide sealing window |
| CN109712856B (en) * | 2018-12-29 | 2020-04-21 | 电子科技大学 | Electric vacuum energy transmission window structure |
| CN109727835B (en) * | 2018-12-29 | 2021-06-29 | 中国电子科技集团公司第十二研究所 | Inner conductor for coaxial energy transmission window, coaxial energy transmission window and traveling wave tube |
| CN110416039B (en) * | 2019-07-30 | 2021-08-10 | 中国电子科技集团公司第十二研究所 | Energy transmission window sheet for terahertz waveband vacuum device and preparation method thereof |
| CN111243920B (en) * | 2020-01-21 | 2021-07-13 | 电子科技大学 | Planar microwave energy transmission window |
| CN113512719B (en) * | 2021-06-10 | 2022-09-09 | 上海铂世光半导体科技有限公司 | Composite window structure for improving heat resistance of microwave CVD window |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201717234U (en) * | 2010-05-26 | 2011-01-19 | 安徽华东光电技术研究所 | Energy transfer window structure for X-waveband space traveling-wave tube |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001338588A (en) * | 2000-05-30 | 2001-12-07 | Japan Atom Energy Res Inst | Gyrotron and its manufacturing method |
| JP3799385B2 (en) * | 2002-02-06 | 2006-07-19 | 独立行政法人 日本原子力研究開発機構 | High-frequency vacuum window and gyrotron device |
-
2013
- 2013-04-16 CN CN201310131910.9A patent/CN103236390B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201717234U (en) * | 2010-05-26 | 2011-01-19 | 安徽华东光电技术研究所 | Energy transfer window structure for X-waveband space traveling-wave tube |
Non-Patent Citations (2)
| Title |
|---|
| A Study of Free Standing Diamond Films for mm TWTs;Ming Q. Ding, et al.;《2011IEEE International Vacuum Electronics Conference》;20111231;第387-388页 * |
| CVD金刚石在电真空器件中的应用;李新宇等;《真空电子技术》;20090825(第4期);全文 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103236390A (en) | 2013-08-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103236390B (en) | A kind of short millimeter wave travelling wave tube diamond delivery of energy window and manufacture method thereof | |
| Donaldson et al. | A W-band multi-layer microwave window for pulsed operation of gyro-devices | |
| CN105161390B (en) | New meta-materials high-power microwave source | |
| CN103779154B (en) | A kind of diamond delivery of energy window of terahertz wave band vacuum device and manufacture method thereof | |
| Cook et al. | Broadband 220-GHz vacuum window for a traveling-wave tube amplifier | |
| CN105489975A (en) | Microwave output window and manufacturing method thereof | |
| CN107230815A (en) | A kind of design method of the broadband high-average power medium microwave window with cooling layer | |
| CN103526187A (en) | Large-area microwave plasma chemical vapor deposition system | |
| CN111371410A (en) | Terahertz quartic harmonic mixer | |
| CN102568985A (en) | Application of broadband high-power ridge waveguide seal window | |
| CN109148243B (en) | Broadband high-power energy transmission structure suitable for helix traveling wave tube | |
| CN103606744B (en) | Dual concentric opening circular patch antenna | |
| CN203631481U (en) | Waveguide-box-shaped output window of ultra wideband travelling wave tube | |
| Li et al. | Combining gigawatt level X-band high power microwave beams with an overmoded circular waveguide diplexer | |
| WO2021098064A1 (en) | Full-band terahertz quadruplicated frequency module | |
| CN201838555U (en) | High-frequency window applying molybdenum-copper-nickel alloy | |
| CN201918353U (en) | Energy transmitting window structure for broad band traveling wave pipe | |
| JP2006279199A (en) | High-frequency line/waveguide converter | |
| CN106450637A (en) | Coupling apparatus and microwave heating apparatus | |
| CN202940214U (en) | Travelling wave tube input/output interface | |
| CN113390900A (en) | Microwave technology-based device and method for detecting substance metallization transition under high pressure | |
| CN103647128B (en) | A kind of high power RADIAL hermetyic window | |
| Zheng et al. | Design of a compact and high performance 263 GHz SB-TWT circuit | |
| Chua et al. | PIC simulation for W-band planar helix with straight-edge connections | |
| KR101874203B1 (en) | Wideband vacuum feedthrough for high vacuum |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |