CN103208518A - Asymmetric source-drain self aligned radio-frequency power device and manufacturing method thereof - Google Patents
Asymmetric source-drain self aligned radio-frequency power device and manufacturing method thereof Download PDFInfo
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- CN103208518A CN103208518A CN2013100981652A CN201310098165A CN103208518A CN 103208518 A CN103208518 A CN 103208518A CN 2013100981652 A CN2013100981652 A CN 2013100981652A CN 201310098165 A CN201310098165 A CN 201310098165A CN 103208518 A CN103208518 A CN 103208518A
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- gallium nitride
- aluminum gallium
- drain electrode
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- 238000004519 manufacturing process Methods 0.000 title abstract description 5
- 238000000034 method Methods 0.000 claims abstract description 21
- 238000002161 passivation Methods 0.000 claims abstract description 17
- 229910002601 GaN Inorganic materials 0.000 claims description 46
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 claims description 34
- 238000009413 insulation Methods 0.000 claims description 26
- 229920002120 photoresistant polymer Polymers 0.000 claims description 24
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 14
- 238000005530 etching Methods 0.000 claims description 14
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 12
- 239000011248 coating agent Substances 0.000 claims description 12
- 238000000576 coating method Methods 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 12
- 238000002360 preparation method Methods 0.000 claims description 11
- 230000004888 barrier function Effects 0.000 claims description 10
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 7
- 238000001259 photo etching Methods 0.000 claims description 7
- 239000000377 silicon dioxide Substances 0.000 claims description 7
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 7
- 229910045601 alloy Inorganic materials 0.000 claims description 4
- 239000000956 alloy Substances 0.000 claims description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 229910000449 hafnium oxide Inorganic materials 0.000 claims description 3
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 claims description 3
- -1 silicon ion Chemical class 0.000 claims description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052804 chromium Inorganic materials 0.000 claims description 2
- 239000011651 chromium Substances 0.000 claims description 2
- 238000005468 ion implantation Methods 0.000 abstract description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 4
- 229910001260 Pt alloy Inorganic materials 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000004070 electrodeposition Methods 0.000 description 2
- 238000005566 electron beam evaporation Methods 0.000 description 2
- CHPZKNULDCNCBW-UHFFFAOYSA-N gallium nitrate Chemical compound [Ga+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O CHPZKNULDCNCBW-UHFFFAOYSA-N 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- PCLURTMBFDTLSK-UHFFFAOYSA-N nickel platinum Chemical compound [Ni].[Pt] PCLURTMBFDTLSK-UHFFFAOYSA-N 0.000 description 2
- 238000004151 rapid thermal annealing Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910001080 W alloy Inorganic materials 0.000 description 1
- UQZIWOQVLUASCR-UHFFFAOYSA-N alumane;titanium Chemical compound [AlH3].[Ti] UQZIWOQVLUASCR-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QNHZQZQTTIYAQM-UHFFFAOYSA-N chromium tungsten Chemical compound [Cr][W] QNHZQZQTTIYAQM-UHFFFAOYSA-N 0.000 description 1
- 239000000306 component Substances 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 229940044658 gallium nitrate Drugs 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 1
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Abstract
The invention belongs to the technical field of radio-frequency power devices, and particularly relates to an asymmetric source-drain self aligned radio-frequency power device and a manufacturing method thereof. According to manufacturing method, the radio-frequency power device is manufactured by a gate-first process, and the self alignment of a grid and a source is realized by utilizing grid side walls; and the grid is protected by a passivation layer, so that after the grid is formed, the source and a drain of the device are formed by an ion implantation process. According to the method, the process is simple, the drifting of product parameters is reduced, and the electrical property of the radio-frequency power device is enhanced.
Description
Technical field
The present invention relates to a kind of radio-frequency power device, be specifically related to a provenance and leak asymmetric self aligned radio-frequency power device and preparation method thereof, belong to the radio-frequency power devices field.
Background technology
(High Electron Mobility Transistors HEMT) is generally believed it is one of the most rising high-speed electronic components to High Electron Mobility Transistor.Owing to have ultrahigh speed, low-power consumption, low noise characteristics (especially at low temperatures), can greatly satisfy the specific demand on the purposes such as very-high speed computer and signal processing, satellite communication, so the HEMT device is paid attention to widely.As microwave of new generation and millimetric wave device, the HEMT device is in frequency, gain or is all showing impayable advantage aspect the efficient.Through 10 years of development, the HEMT device has possessed excellent microwave, millimeter wave characteristic, has become the main devices of the microwave and millimeter wave low noise amplifier in the field such as satellite communication, radio astronomy of 2～100 GHz.Simultaneously, the HEMT device also is the core component of making microwave mixer, oscillator and broadband travelling-wave amplifier.
Gallium nitrate based HEMT radio-frequency power device adopts back grid technique manufacturing mostly at present, and the technological process of its manufacturing mainly comprises: at first make source, drain electrode.Photoetching ohmic contact window utilizes electron beam evaporation to form multi-layer electrode structure, and stripping technology forms source, drain contact, uses rapid thermal annealing (RTA) equipment, forms good source under 900 ℃, 30 Sec argon shield conditions, leaks ohmic contact.Make the zone that need etch away then by lithography, and use reactive ion beam etching (RIBE) (RIE) equipment, feed boron chloride, the etching step.Utilize photoetching, electron beam evaporation and stripping technology to form the Schottky barrier gate metal at last again.But along with dwindling of device size, the method for this back grid technique is difficult to realize that the grid of HEMT device aims at the accurate of source electrode, drain locations, causes the drift of product parameters.
Summary of the invention
The objective of the invention is to propose a provenance and leak asymmetric self aligned radio-frequency power device and preparation method thereof, with the grid of realization radio-frequency power device and the autoregistration of source electrode position, reduce the drift of product parameters, strengthen the electric property of radio-frequency power device.
The provenance that the present invention proposes is leaked asymmetric self aligned radio-frequency power device, comprising:
The aluminum gallium nitride resilient coating, gallium nitride channel layer, the aluminum gallium nitride separator that on substrate, form successively;
The gate dielectric layer that on described aluminum gallium nitride separator, forms;
The grid that on described gate dielectric layer, forms and be positioned at passivation layer on the grid;
The grid curb wall that forms in the both sides of described grid;
In described aluminum gallium nitride separator, drain electrode and source electrode that the both sides of described grid form;
The insulating medium layer that between described grid curb wall near drain electrode one side and described drain electrode, forms;
Cover the described field plate that links to each other with described source electrode that forms near the grid curb wall of drain electrode one side, on the orientation of device, described field plate is to described insulating medium layer and be positioned on the passivation layer on the grid and extend.
The invention allows for above-mentioned source and leak asymmetric self aligned radio-frequency power preparation of devices method, concrete steps are as follows:
The resilient coating of deposit aluminum gallium nitride successively, gallium nitride channel layer, aluminum gallium nitride separator on substrate;
Carry out the active area photoetching, with photoresist as etching barrier layer, etching aluminum gallium nitride separator, gallium nitride channel layer, aluminum gallium nitride resilient coating remove photoresist afterwards to be formed with the source region successively;
Deposit ground floor insulation film, ground floor conductive film, second layer insulation film successively on the exposed surface of formed structure;
Carry out photoetching, the position of the grid define device of developing;
With photoresist as etching barrier layer, etch away the second layer insulation film and the ground floor conductive film that expose successively, remove photoresist afterwards, the ground floor conductive film that carves, second layer insulation film form the grid of device and are positioned at passivation layer on the grid;
The three-layer insulated film of deposit on the exposed surface of formed structure, and mask, exposure, development define the source electrode of device and the position of drain electrode, be that etching barrier layer etches away the three-layer insulated film that exposes then with the photoresist, and continue to etch away the ground floor insulation film that exposes to expose formed aluminum gallium nitride separator, remove photoresist afterwards, remaining three-layer insulated film forms at the grid curb wall of grid both sides and between the grid curb wall of close drain electrode one side and the insulating medium layer between the drain electrode;
In the aluminum gallium nitride separator that exposes, inject silicon ion, in the aluminum gallium nitride separator, form source electrode and the drain electrode of device;
The grid curb wall that covers near drain electrode one side forms the field plate that links to each other with source electrode, and on the orientation of device, and this field plate is to formed insulating medium layer and be positioned on the passivation layer on the grid and extend.
Asymmetric self aligned radio-frequency power preparation of devices method is leaked in aforesaid source, described ground floor insulation film is silica, silicon nitride, hafnium oxide or is alundum (Al that described second layer insulation film, three-layer insulated film are silica or are silicon nitride.
Asymmetric self aligned radio-frequency power preparation of devices method is leaked in aforesaid source, and described ground floor conductive film is the alloy that contains chromium or nickeliferous or tungstenic.
The present invention adopts first grid technique to prepare the source to leak asymmetric self aligned radio-frequency power device; utilize grid curb wall to realize the autoregistration of grid and source electrode position; simultaneously; because grid is passivated layer protection; can after forming, grid form source electrode and the drain electrode of device by ion implantation technology; technical process is simple, has reduced the drift of product parameters, has strengthened the electric property of radio-frequency power device.
Description of drawings
Fig. 1 leaks the profile of an embodiment of asymmetric self aligned radio-frequency power device for source disclosed in this invention.Wherein, Fig. 1 a leaks the vertical view schematic diagram of asymmetric self aligned radio-frequency power device for this source, and Fig. 1 b is that structure shown in Fig. 1 a is along the profile of AA direction.
Fig. 2 to Fig. 6 leaks the process chart of an embodiment of asymmetric self aligned radio-frequency power preparation of devices method for source disclosed in this invention.
Embodiment
The present invention is further detailed explanation below in conjunction with accompanying drawing and embodiment, in the drawings, for convenience of description, amplifies or dwindled the thickness in layer and zone, shown in size do not represent actual size.Although the actual size that reflects device that these figure can not entirely accurate, their zones that still has been complete reflection and form mutual alignment between the structure, particularly form between the structure up and down and neighbouring relations.
Fig. 1 leaks an embodiment of asymmetric self aligned radio-frequency power device for source proposed by the invention, and wherein, Fig. 1 a leaks the vertical view schematic diagram of asymmetric self aligned radio-frequency power device for this source, and Fig. 1 b is that structure shown in Fig. 1 a is along the profile of AA direction.As shown in Figure 1, substrate comprises substrate 200 and the gallium nitride resilient coating 201 that forms in substrate 200, is formed with aluminum gallium nitride resilient coating 202, gallium nitride channel layer 203 and aluminum gallium nitride separator 204 on gallium nitride resilient coating 201 successively.On aluminum gallium nitride separator 204, be formed with gate dielectric layer 205, at the grid 206 that is formed with device on the gate dielectric layer 205 and the passivation layer 207 that is positioned on the grid 206.
Be formed with grid curb wall 208a in the both sides of grid 206.
In aluminum gallium nitride separator 204, the source electrode 209 that forms respectively of the both sides of grid 206 and drain 210.
At the grid curb wall 208a of close drain electrode 210 1 sides and the insulating medium layer 208b that drains and form between 210, grid curb wall 208a and insulating medium layer 208b can be formed simultaneously by insulating material 208, and insulating material 208 can or be silicon nitride for silica.
The grid curb wall 208a that covers near drain electrode 210 1 sides is formed with the field plate 211 that links to each other with source electrode 209, and on the orientation of device, field plate 211 is gone up extension to passivation layer 207 and insulating medium layer 208b.
Also be formed with on 210 in grid 206 and drain electrode and be respectively applied to the contact 212 of grid 206 and drain electrode 210 source electrodes that are connected with outer electrode and the contact 213 that drains.
The technological process of an embodiment of asymmetric self aligned radio-frequency power preparation of devices method is leaked in the following source of narrating proposed by the invention.
At first, as shown in Figure 2, deposit forms the aluminum gallium nitride separator 204 that gallium nitride channel layer 203, thickness that aluminum gallium nitride resilient coating 202, thickness that thickness is about 40 nanometers is about 40 nanometers are about 22 nanometers successively on substrate, deposit one deck photoresist and mask, exposure, development define the position of active area on aluminum gallium nitride separator 204 then, be that etching barrier layer etches away the aluminum gallium nitride separator 204 that exposes, gallium nitride channel layer 203, aluminum gallium nitride resilient coating 202 successively to be formed with the source region then with the photoresist, divest photoresist then.Wherein, Fig. 2 a by the vertical view schematic diagram of formation structure, Fig. 2 b is that structure shown in Fig. 2 a is along the profile of AA direction.
Substrate described in the present embodiment comprises substrate 200 and the gallium nitride resilient coating 201 that forms in substrate 200, and substrate 200 can or be alundum (Al for silicon, carborundum.
Next, deposit forms ground floor insulation film 205 successively on the exposed surface of formed structure, ground floor conductive film and second layer insulation film, and on the second layer insulation film deposit one deck photoresist and mask, exposure, develop and define the gate location of device, etch away second layer insulation film and the ground floor conductive film of exposure then successively as etching barrier layer with photoresist, the ground floor conductive film that is not etched away and second layer insulation film form the grid 206 of device respectively and are positioned at passivation layer 207 on the grid, divest behind the photoresist as shown in Figure 3, wherein Fig. 3 a by the vertical view schematic diagram of formation structure, Fig. 3 b is that structure shown in Fig. 3 a is along the profile of AA direction.
Ground floor insulation film 205 can or be alundum (Al for silica, silicon nitride, hafnium oxide, and as the gate dielectric layer of device, its thickness is preferably 8 nanometers.Grid 206 can be for containing the alloy of chromium or nickeliferous or tungstenic, such as being nickel billon, chromium tungsten alloy, Polarium, platinum alloy, nickel platinum alloy or being the NiPdAu alloy.Passivation layer 207 can or be silicon nitride for silica.
Next, deposit forms three-layer insulated film 208 on the exposed surface of formed structure, and deposit one deck photoresist and mask, exposure, development define the position of device source electrode and drain electrode on three-layer insulated film 208, etch away the three-layer insulated film 208 that exposes as etching barrier layer with photoresist then, and continue to etch away the ground floor insulation film 205 that exposes, to expose aluminum gallium nitride separator 204.In the remaining three-layer insulated film 208, the insulation film 208 that is positioned at grid 206 both sides can form the grid curb wall 208a of device, between grid 206 and the drain electrode that is defined insulation film 208 can form between near the grid curb wall 208a of drain electrode one side and the insulating medium layer 208b between the drain electrode, the insulation film 208c that is positioned at the insulation film 208 on the passivation layer 207 partly can be used as the part of the passivation layer 207 that is positioned on the grid 206, divest behind the photoresist as shown in Figure 4, wherein Fig. 4 a by the vertical view schematic diagram of formation structure, Fig. 4 b is that structure shown in Fig. 4 a is along the profile of AA direction.
As mentioned above, when three-layer insulated film 208 is carried out etching, be positioned at the insulation film 208c part that conduct on the passivation layer 207 is positioned at the part of the passivation layer 207 on the grid 206 and also can be etched away, shown in Fig. 4 c.
Next, in the aluminum gallium nitride separator 204 that exposes, inject silicon ion by ion implantation technology, in aluminum gallium nitride separator 204, form source electrode 209 and the drain electrode 210 of device, as shown in Figure 5, wherein Fig. 5 a by the vertical view schematic diagram of formation structure, Fig. 5 b is that structure shown in Fig. 5 a is along the profile of AA direction.
At last, the photoresist that deposit one deck is new on the exposed surface of formed structure also defines the position of device field plate, grid, source electrode and drain electrode by photoetching process, follow deposit second layer conductive film, second layer conductive film can or be the nickel billon for titanium-aluminium alloy, nickel alumin(i)um alloy, nickel platinum alloy.Remove the second layer conductive film that is deposited on the photoresist by the known lift-off technology of industry then, and reservation is not deposited on the second layer conductive film on the photoresist, on the grid curb wall near 210 1 sides that drain, to form the field plate 211 of device, field plate 211 links to each other with source electrode 209, form grid 206 and the contact 212 of drain electrode 210 source electrodes that are connected with outer electrode and the contact 213 of drain electrode simultaneously, as shown in Figure 6.
As mentioned above, under the situation that does not depart from spirit and scope of the invention, can also constitute many very embodiment of big difference that have.Should be appreciated that except as defined by the appended claims, the invention is not restricted at the instantiation described in the specification.
Claims (4)
1. a provenance is leaked asymmetric self aligned radio-frequency power device, comprising:
The aluminum gallium nitride resilient coating, gallium nitride channel layer, the aluminum gallium nitride separator that on substrate, form successively;
The gate dielectric layer that on described aluminum gallium nitride separator, forms;
It is characterized in that, also comprise:
The grid that on described gate dielectric layer, forms and be positioned at passivation layer on the grid;
The grid curb wall that forms in the both sides of described grid;
In described aluminum gallium nitride separator, drain electrode and source electrode that the both sides of described grid form;
The dielectric layer that between described grid curb wall near drain electrode one side and described drain electrode, forms;
Cover the described field plate that links to each other with described source electrode that forms near the grid curb wall of drain electrode one side, and on the orientation of device, described field plate is to described insulating medium layer and be positioned on the passivation layer on the grid and extend.
2. a provenance is leaked asymmetric self aligned radio-frequency power preparation of devices method, it is characterized in that, comprising:
The resilient coating of deposit aluminum gallium nitride successively, gallium nitride channel layer, aluminum gallium nitride separator on substrate;
Carry out the active area photoetching, with photoresist as etching barrier layer, etching aluminum gallium nitride separator, gallium nitride channel layer, aluminum gallium nitride resilient coating remove photoresist afterwards to be formed with the source region successively;
Deposit ground floor insulation film, ground floor conductive film, second layer insulation film successively on the exposed surface of formed structure;
Carry out photoetching, the position of the grid define device of developing;
With photoresist as etching barrier layer, etch away the second layer insulation film and the ground floor conductive film that expose successively, remove photoresist afterwards, the ground floor conductive film that carves, second layer insulation film form the grid of device and are positioned at passivation layer on the grid;
The three-layer insulated film of deposit on the exposed surface of formed structure, and mask, exposure, development define the source electrode of device and the position of drain electrode, be that etching barrier layer etches away the three-layer insulated film that exposes then with the photoresist, and continue to etch away the ground floor insulation film that exposes to expose formed aluminum gallium nitride separator, remove photoresist afterwards, remaining three-layer insulated film forms at the grid curb wall of grid both sides and between the grid curb wall of close drain electrode one side and the insulating medium layer between the drain electrode;
In the aluminum gallium nitride separator that exposes, inject silicon ion, in the aluminum gallium nitride separator, form source electrode and the drain electrode of device;
The grid curb wall that covers near drain electrode one side forms the field plate that links to each other with source electrode, and on the orientation of device, and this field plate is to formed insulating medium layer and be positioned on the passivation layer on the grid and extend.
3. asymmetric self aligned radio-frequency power preparation of devices method is leaked in source as claimed in claim 2, it is characterized in that, described ground floor insulation film is silica, silicon nitride, hafnium oxide or is alundum (Al that described second layer insulation film, three-layer insulated film are silica or are silicon nitride.
4. asymmetric self aligned radio-frequency power preparation of devices method is leaked in source as claimed in claim 2, it is characterized in that, described ground floor conductive film is the alloy that contains chromium or nickeliferous or tungstenic.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310098165.2A CN103208518B (en) | 2013-03-25 | 2013-03-25 | Asymmetric self aligned RF power device of a kind of source and drain and preparation method thereof |
| US14/651,984 US20150333141A1 (en) | 2013-03-25 | 2014-03-24 | A high electron mobility device based on the gate-first process and the production method thereof |
| PCT/CN2014/073943 WO2014154120A1 (en) | 2013-03-25 | 2014-03-24 | High-electron-mobility transistor employing gate first process and manufacturing method for the transistor |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310098165.2A CN103208518B (en) | 2013-03-25 | 2013-03-25 | Asymmetric self aligned RF power device of a kind of source and drain and preparation method thereof |
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| Publication Number | Publication Date |
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| CN103208518A true CN103208518A (en) | 2013-07-17 |
| CN103208518B CN103208518B (en) | 2015-08-26 |
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| WO2014154125A1 (en) * | 2013-03-25 | 2014-10-02 | 复旦大学 | Radio-frequency power device for realizing source-drain gate asymmetrical self-alignment and manufacturing method |
| WO2014154120A1 (en) * | 2013-03-25 | 2014-10-02 | 复旦大学 | High-electron-mobility transistor employing gate first process and manufacturing method for the transistor |
| CN109216437A (en) * | 2017-06-30 | 2019-01-15 | 无锡华润上华科技有限公司 | The self-aligned fabrication method of field plate and the manufacturing method of semiconductor devices |
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| CN103208518B (en) | 2015-08-26 |
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