CN103184437A - Heating system - Google Patents
Heating system Download PDFInfo
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- CN103184437A CN103184437A CN2011104612427A CN201110461242A CN103184437A CN 103184437 A CN103184437 A CN 103184437A CN 2011104612427 A CN2011104612427 A CN 2011104612427A CN 201110461242 A CN201110461242 A CN 201110461242A CN 103184437 A CN103184437 A CN 103184437A
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- heating system
- module
- purge gas
- electrode
- coupling place
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Abstract
The invention relates to a heating system. The heating system comprises at least one heating component, at least one electrode and a gas blow-off module, wherein one end of the heating component and the electrode are coupled at a coupling position; and the gas blow-off module is arranged around the coupling position so as to prevent corrosive gas from contacting the coupling position. The heating system can prevent deterioration of the coupling position of the heating component and the electrode caused by contact between the coupling position and the corrosive gas and ensures that each coupling position has high electric conductivity.
Description
Technical field
The present invention relates to the heating system of a kind of heating system, particularly a kind of chemical vapor deposition unit.
Background technology
So-called chemical vapour deposition (chemical vapor deposition, CVD) refer to utilize heat energy, electricity to starch the energy of forms such as discharge or UV-irradiation, make gaseous substance at solid surface chemical reaction take place, and deposit on this surface, form the process of stable, solid film.The chemical vapor deposition (CVD) technology is to use utmost point film growth method widely in the semi-conductor IC technology, as thin-film materials such as dielectric substance, semi-conductor, conductors, almost can both finish with the CVD technology.
See also Fig. 1, be existing Metalorganic chemical vapor deposition schematic representation of apparatus.As shown in the figure, general Metalorganic chemical vapor deposition (MOCVD) device includes an air inlet head (shower head) 12, one reaction chamber 14, a graphite base 18, a well heater 19 and at least one vent line 17.After one load plate 16 is set on the graphite base 18, again substrate 15 is placed heating on the load plate 16.After reactant gases enters reaction chamber 14 by air inlet 12, produce reaction with high-temperature substrates 15 and on substrate 15, form the settled layer of target material.Reacted residual gas is then got rid of by vent line 17.
See also Fig. 2 and Fig. 3, be respectively the resistor disc synoptic diagram of existing well heater and the part sectioned view of well heater.Existing well heater includes a plurality of resistor discs 22,24, and each resistor disc 22,24 is distributed in a flat heated 20 usually.Each resistor disc 22,24 includes one first end 221,241 and 1 second end 223,243 respectively, as shown in Figure 2.
Summary of the invention
Technical problem to be solved by this invention provides a kind of heating unit that prevents and goes bad because contacting with corrosive gases with coupling place of electrode, guarantees that each coupling place all has the heating system of favorable conductive rate.
To achieve these goals, the invention provides a kind of heating system, comprise: at least one heating unit; At least one electrode, with an end electrical couplings of heating unit in coupling place; And a purge gas module, the purge gas module is around coupling place, to avoid corrosive gases contact coupling place.
Above-mentioned heating system, heating unit comprise the two ends that a planar resistor sheet and two vertical junction line ends distinctly connect the planar resistor sheet.
Above-mentioned heating system, planar resistor sheet and two vertical junction line ends are formed in one.
Above-mentioned heating system, planar resistor sheet and two vertical junction line ends are separating component.
Above-mentioned heating system also comprises a conduction stuck-module, in order to fixedly heating unit and electrode, and provides both conductive contact surfaces to amass.
Above-mentioned heating system, the conduction stuck-module comprises a screw lock member.
Above-mentioned heating system, the conduction stuck-module comprises at least one element that grips.
Above-mentioned heating system, the conduction stuck-module comprises one first and grips element with the clamping heating unit, and one second grips element with holding electrode, and first grips element and second grips element to pass through a connect elements fixed to one another.
Above-mentioned heating system has a plurality of heating units and a plurality of electrode, and an end electrical couplings of each electrode and each heating unit is in coupling place, and the purge gas module has at least one gas passage, and each gas passage is in order to center on coupling place.
Above-mentioned heating system also comprises a refrigerating module, is arranged between heating unit and the purge gas module.
Above-mentioned heating system, refrigerating module have a plurality of cooling passages.
Above-mentioned heating system, refrigerating module and purge gas module are formed in one.
Above-mentioned heating system, refrigerating module and purge gas module are separating component.
Above-mentioned heating system, purge gas module also comprise one first air outlet, and first air outlet is gone out by heating unit one effluent after coupling place so that the guiding purge gas is flowed through around the heating unit of contiguous coupling place again.
Above-mentioned heating system, purge gas module also comprise one second air outlet, and second air outlet is gone out by electrode one effluent behind the electrical couplings place so that the guiding purge gas is flowed through around the electrode of contiguous coupling place again.
Technique effect of the present invention is: utilize heating system of the present invention, can prevent that heating unit from going bad because contacting with corrosive gases with coupling place of electrode, guarantee that each coupling place all has the favorable conductive rate, can not produce the situation of extra energy dissipation because of coupling place deterioration.
Describe the present invention below in conjunction with the drawings and specific embodiments, but not as a limitation of the invention.
Description of drawings
Fig. 1 is the Metalorganic chemical vapor deposition schematic representation of apparatus;
Fig. 2 is the synoptic diagram of existing heater resistance sheet;
Fig. 3 is the part sectioned view of existing well heater;
Fig. 4 is perspective view of an embodiment of the present invention;
Fig. 5 is the part sectioned view of one embodiment of the invention;
Fig. 6 is the part sectioned view of another embodiment of the present invention;
Fig. 7 is the part sectioned view of further embodiment of this invention.
Wherein, Reference numeral
10 Metalorganic chemical vapor deposition devices
12 air inlets, 14 reaction chamber
15 substrates, 16 load plates
17 vent lines, 18 graphite bases
19 well heaters
20 flat heated, 22 resistor discs
221 first ends, 223 second ends
24 resistor discs, 241 first ends
243 second ends
321 conductive poles, 341 conductive poles
361 perforation of 36 dividing plates
363 gaps, 38 electrodes
386 contacts, 39 pneumatic tubes
391 puff ports
40 heating systems, 42 heating units
421 planar resistor sheets, 423 vertical junction line ends
442 couplings place of 44 electrodes
45 screw lock members, 46 purge gas modules
461 gas passages, 465 first air outlets
466 second air outlets, 467 upper cover plates
469 lower covers, 48 airways
66 refrigerating modules, 661 cooling passages
72 grip element 721 first grips element
723 second grip element 76 purge gas modules
761 gas passages
Embodiment
Below in conjunction with accompanying drawing structural principle of the present invention and principle of work are done concrete description:
See also Fig. 4 and Fig. 5, be respectively perspective view of an embodiment of the present invention and part sectioned view.As shown in the figure, heating system 40 of the present invention includes: at least one heating unit 42, at least one electrode 44 and a purge gas module 46.Wherein, an end of heating unit 42 and electrode 44 electrical couplings are in coupling place 442, and 46 of purge gas modules center on this coupling place 442 and arrange, and contact this coupling place 442 in order to avoid corrosive gases.
In one embodiment of this invention, this heating system 40 can include a plurality of heating units 42 and a plurality of electrode 44.Each heating unit 42 includes a planar resistor sheet 421 and two vertical junction line ends 423 respectively.Wherein, each planar resistor sheet 421 is distributed in a plane, and each vertical junction line end 423 is located at the two ends of each planar resistor sheet 421 respectively, and forms the loop in coupling place 442 with corresponding each electrode 44 electrical couplings respectively.Purge gas module 46 has at least one gas passage 461, and each gas passage 461 is around coupling place 442.
Wherein, the planar resistor sheet 421 of each heating unit 42 can be formed in one with corresponding two vertical junction line ends 423, also can be separating component, can select appropriate form heating unit 42 according to system requirements for use.Each heating unit 42 can interfix by a conduction stuck-module with corresponding electrode 44, and for example the screw lock member 45, fix and provides both conductive contact surfaces to amass.
In one embodiment of this invention, this purge gas module 46 can comprise one first air outlet 465.This first air outlet 465 is around heating unit 42 or its vertical junction line end 423 of contiguous coupling place 442, can guide purge gas and flow through after coupling place 442, gone out by heating unit 42 1 effluents via this first air outlet 465 again.Wherein, this first air outlet 465 can arrange a upper cover plate 467, in order to control the size of first air outlet 465.
In one embodiment of this invention, this purge gas module 46 can include one second air outlet 466.This second air outlet 466 is around the electrode 44 of contiguous coupling place 442, can guide purge gas and flow through after coupling place 442, gone out by electrode 44 1 effluents via this second air outlet 466 again.Wherein, this second air outlet 466 can arrange a lower cover 469, in order to control the size of second air outlet 466.
In one embodiment of this invention, an air feeder (not shown) and at least one airway 48 can be set.Make airway 48 connect air feeder and purge gas module 46, continue to provide purge gas to purge gas module 46 by air feeder.
See also Fig. 6, be the part sectioned view of another embodiment of the present invention.As shown in the figure, the structure of present embodiment heating system and embodiment illustrated in fig. 5 roughly the same, but present embodiment is set up a refrigerating module 66 in heating system.
Wherein, refrigerating module 66 is arranged between this heating unit 42 and the purge gas module 46.This refrigerating module 66 can include a plurality of cooling passages 661.By import various refrigerant in cooling passage 661, for example water, oil or refrigerant etc. with protection lower electrode 44, reach the effect that cools.
In one embodiment of this invention, this refrigerating module 66 may be selected to be one-body molded with purge gas module 46 or for separating component, all can reach purpose of the present invention.
See also Fig. 7, be the part sectioned view of further embodiment of this invention.As shown in the figure, implement with the form that grips element 72 in conjunction with heating unit 42 (vertical junction line end 423) and the conduction stuck-module of electrode 44 in the present embodiment.Wherein, the gas passage 761 of purge gas module 76 can center on the whole adjacent domain that includes coupling place 442 that grips element 72.
In one embodiment of this invention, this grips element 72 and can include one first and grip element 721, one second and grip element 723 and a connect elements (not shown).Wherein, this first grips element 721 in order to this heating unit 42 of clamping (vertical junction line end 423), this second grips element 723 in order to this electrode 44 of clamping, connects by this connect elements and fix this first to grip element 721 and this second and grip element 723.
Utilize heating system of the present invention, can prevent that heating unit 42 from going bad because contacting with corrosive gases with coupling place 442 of electrode 44, guarantee that each coupling place 442 all has the favorable conductive rate, can not produce the situation of extra energy dissipation because of coupling place 442 deteriorations.
Certainly; the present invention also can have other various embodiments; under the situation that does not deviate from spirit of the present invention and essence thereof; those of ordinary skill in the art work as can make various corresponding changes and distortion according to the present invention, but these corresponding changes and distortion all should belong to the protection domain of the appended claim of the present invention.
Claims (15)
1. a heating system is characterized in that, comprises:
At least one heating unit;
At least one electrode, with an end electrical couplings of this heating unit in coupling place; And
One purge gas module, this purge gas module contacts this coupling place around this coupling place to avoid corrosive gases.
2. heating system as claimed in claim 1 is characterized in that, this heating unit comprises the two ends that a planar resistor sheet and two vertical junction line ends distinctly connect this planar resistor sheet.
3. heating system as claimed in claim 2 is characterized in that, this planar resistor sheet and two these vertical junction line ends are formed in one.
4. heating system as claimed in claim 2 is characterized in that, this planar resistor sheet and two these vertical junction line ends are separating component.
5. heating system as claimed in claim 1 is characterized in that, also comprises a conduction stuck-module, in order to fixing this heating unit and this electrode, and provides both conductive contact surfaces to amass.
6. heating system as claimed in claim 5 is characterized in that, this conduction stuck-module comprises a screw lock member.
7. heating system as claimed in claim 5 is characterized in that, this conduction stuck-module comprises at least one element that grips.
8. heating system as claimed in claim 5, it is characterized in that, this conduction stuck-module comprises one first and grips element with this heating unit of clamping, one second grips element with this electrode of clamping, and this first grips element and this second to grip element fixed to one another by a connect elements.
9. heating system as claimed in claim 1 is characterized in that, has a plurality of heating units and a plurality of electrode, and an end electrical couplings of each electrode and each heating unit is in coupling place.
10. heating system as claimed in claim 1 is characterized in that, this purge gas module has at least one gas passage, and each gas passage is around coupling place.
11. heating system as claimed in claim 9 is characterized in that, also comprises a refrigerating module, is arranged between this heating unit and this purge gas module.
12. heating system as claimed in claim 11 is characterized in that, this refrigerating module and this purge gas module are formed in one.
13. heating system as claimed in claim 11 is characterized in that, this refrigerating module and this purge gas module are separating component.
14. heating system as claimed in claim 1, it is characterized in that, this purge gas module also comprises one first air outlet, and this first air outlet is gone out by this heating unit one effluent after this coupling place so that the guiding purge gas is flowed through around this heating unit of contiguous this coupling place again.
15. heating system as claimed in claim 1, it is characterized in that, this purge gas module also comprises one second air outlet, and this second air outlet is gone out by this electrode one effluent after this coupling place so that the guiding purge gas is flowed through around this electrode of contiguous this coupling place again.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011104612427A CN103184437A (en) | 2011-12-30 | 2011-12-30 | Heating system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011104612427A CN103184437A (en) | 2011-12-30 | 2011-12-30 | Heating system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103184437A true CN103184437A (en) | 2013-07-03 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011104612427A Pending CN103184437A (en) | 2011-12-30 | 2011-12-30 | Heating system |
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| Country | Link |
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| CN (1) | CN103184437A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101191202A (en) * | 2006-12-01 | 2008-06-04 | 甘志银 | Heating system for metal organic substance chemical gaseous phase deposition device reaction cavity |
| CN101494189A (en) * | 2009-03-06 | 2009-07-29 | 北京七星华创电子股份有限公司 | Apparatus and method for holding plate-like object |
| JP2010267782A (en) * | 2009-05-14 | 2010-11-25 | Nuflare Technology Inc | Film deposition device |
-
2011
- 2011-12-30 CN CN2011104612427A patent/CN103184437A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101191202A (en) * | 2006-12-01 | 2008-06-04 | 甘志银 | Heating system for metal organic substance chemical gaseous phase deposition device reaction cavity |
| CN101494189A (en) * | 2009-03-06 | 2009-07-29 | 北京七星华创电子股份有限公司 | Apparatus and method for holding plate-like object |
| JP2010267782A (en) * | 2009-05-14 | 2010-11-25 | Nuflare Technology Inc | Film deposition device |
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Application publication date: 20130703 |