CN103184403A - 等离子成膜装置 - Google Patents
等离子成膜装置 Download PDFInfo
- Publication number
- CN103184403A CN103184403A CN2011104436321A CN201110443632A CN103184403A CN 103184403 A CN103184403 A CN 103184403A CN 2011104436321 A CN2011104436321 A CN 2011104436321A CN 201110443632 A CN201110443632 A CN 201110443632A CN 103184403 A CN103184403 A CN 103184403A
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- CN
- China
- Prior art keywords
- plasma
- gas
- forming device
- film forming
- gas current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Chemical Vapour Deposition (AREA)
- Plasma Technology (AREA)
Abstract
Description
等离子成膜装置 | 100 |
成膜室 | 10 |
入气口 | 11 |
抽真空端口 | 12 |
等离子发生器 | 20 |
发射口 | 21 |
气体导入口 | 22 |
阴极 | 23 |
阳极 | 24 |
磁场线圈 | 25 |
壳体 | 26 |
旋转支撑架 | 30 |
旋转轴 | 31 |
被镀物放置部 | 32 |
气体载流板 | 40 |
本体 | 41 |
腔室 | 42 |
进气口 | 43 |
出气孔 | 44 |
膜料提供模组 | 50 |
等离子射流区域 | P |
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201110443632.1A CN103184403B (zh) | 2011-12-27 | 2011-12-27 | 等离子成膜装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201110443632.1A CN103184403B (zh) | 2011-12-27 | 2011-12-27 | 等离子成膜装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103184403A true CN103184403A (zh) | 2013-07-03 |
CN103184403B CN103184403B (zh) | 2016-12-07 |
Family
ID=48675846
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201110443632.1A Expired - Fee Related CN103184403B (zh) | 2011-12-27 | 2011-12-27 | 等离子成膜装置 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN103184403B (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108770169A (zh) * | 2018-07-23 | 2018-11-06 | 大连海事大学 | 一种引入保护气的大气压非平衡等离子体射流装置 |
CN112974013A (zh) * | 2021-02-08 | 2021-06-18 | 厦门佰顺兴自动化科技有限公司 | 一种延长等离子喷枪的喷嘴使用寿命的方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05306192A (ja) * | 1992-05-07 | 1993-11-19 | Fujitsu Ltd | ダイヤモンド膜の合成方法および装置 |
EP0645584A1 (en) * | 1993-03-08 | 1995-03-29 | Kabushiki Kaisha Kobe Seiko Sho | Plasma fusion furnace and method of its operation |
US5935459A (en) * | 1996-12-21 | 1999-08-10 | Deutsches Zentum Fur Luft Und Raumfahrt E.V. | Test device for impinging a sample with a high-energy gas jet |
GB2357090A (en) * | 1999-12-10 | 2001-06-13 | Saint Gobain Ceramics | System and method for coating non-planar surfaces of objects with diamond film. |
-
2011
- 2011-12-27 CN CN201110443632.1A patent/CN103184403B/zh not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05306192A (ja) * | 1992-05-07 | 1993-11-19 | Fujitsu Ltd | ダイヤモンド膜の合成方法および装置 |
EP0645584A1 (en) * | 1993-03-08 | 1995-03-29 | Kabushiki Kaisha Kobe Seiko Sho | Plasma fusion furnace and method of its operation |
US5935459A (en) * | 1996-12-21 | 1999-08-10 | Deutsches Zentum Fur Luft Und Raumfahrt E.V. | Test device for impinging a sample with a high-energy gas jet |
GB2357090A (en) * | 1999-12-10 | 2001-06-13 | Saint Gobain Ceramics | System and method for coating non-planar surfaces of objects with diamond film. |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108770169A (zh) * | 2018-07-23 | 2018-11-06 | 大连海事大学 | 一种引入保护气的大气压非平衡等离子体射流装置 |
CN108770169B (zh) * | 2018-07-23 | 2023-06-06 | 大连海事大学 | 一种引入保护气的大气压非平衡等离子体射流装置 |
CN112974013A (zh) * | 2021-02-08 | 2021-06-18 | 厦门佰顺兴自动化科技有限公司 | 一种延长等离子喷枪的喷嘴使用寿命的方法 |
Also Published As
Publication number | Publication date |
---|---|
CN103184403B (zh) | 2016-12-07 |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20171017 Address after: No. 889, Foxconn Road, Yushan Town, Kunshan, Jiangsu Patentee after: Fuyu precise component (Kunshan) Co., Ltd. Address before: 518109 Guangdong city of Shenzhen province Baoan District Longhua Town Industrial Zone tabulaeformis tenth East Ring Road No. 2 two Co-patentee before: Hon Hai Precision Industry Co., Ltd. Patentee before: Hongfujin Precise Industry (Shenzhen) Co., Ltd. |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161207 Termination date: 20201227 |