CN103177983B - Detection device and method - Google Patents
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- CN103177983B CN103177983B CN201310065100.8A CN201310065100A CN103177983B CN 103177983 B CN103177983 B CN 103177983B CN 201310065100 A CN201310065100 A CN 201310065100A CN 103177983 B CN103177983 B CN 103177983B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
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Abstract
The present invention open one detection device and method, described detection device comprises a light source, an optical filter, at least one guard, a spectroscope and an image acquisition unit.Described light source provides a light；Described optical filter is arranged on described light source front, to filter described light；Described at least one guard is arranged on described optical filter front, and has several regularly arranged mesh, and the light after described optical filtering becomes a network diaphragm by described mesh；Described spectroscope is obliquely installed in described guard front, so that the reflection of described network diaphragm is projected to a surface to be measured；Described image acquisition unit is arranged at above described spectroscope, to capture by the reflection of described surface to be measured and through a described spectroscopical reflected image, for judging whether have a defect on described surface to be measured.
Description
Technical field
The invention relates to a kind of detection device and method, in particular to a kind of semiconductor subassembly
Detection device and method.
Background technology
Now, semiconductor packaging industry, in order to meet the demand of various consumption electronic products, gradually develops
Going out the encapsulation design of various different types, wherein flip-chip (flip chip) is often employed in various difference
Packaging structure in, and be arranged on base plate for packaging (substrate) or lead frame (leadframe).General and
Speech, the Making programme of flip chip package structure approximately as: first make a wafer, and active at it
Projection (bumps) is made on surface；Then, wafer is made after being inverted on another loading plate and adhesive tape by wafer
The back side upward, the back side of cutting crystal wafer and be separated into several chip；Afterwards, vacsorb head is utilized to incite somebody to action
Chip takes off one by one, and is placed on a support plate, such as base plate for packaging bar or lead frame；Subsequently, heating makes
The weld tabs of chip is attached to the connection pad on support plate；Then, between chip and support plate, primer is injected
(underfill), and make it solidify, utilize packaging adhesive material that chip is packaged if desired；Finally, cutting
Support plate (and packaging adhesive material), can complete flip chip package structure.
Furthermore, in order to ensure the yields of above-mentioned flip-chip, typically after chip is welded on support plate,
All the flip-chip back side upward first can be carried out the program of one surface defects detection.Existing surface lacks
Fall into detection mode to be typically to be utilized low range optical microscope that it directly carries out visual detection by operator.
But, when the slight crack of chip back or the surface defect such as burst apart undersized, operator passes through low power
Rate optical microscope also cannot the most significantly judge with naked eyes to find out these minor surface defect.Above-mentioned
The result that detection correctness is on the low side will cause the flip-chip with surface defect surprisingly to pass through to survey
Examination, and be mixed in substantial amounts of finished product, thus affect service life and the reliability of product.
Therefore, it is necessary to provide one detection device and method, to solve the problem existing for prior art.
Summary of the invention
In view of this, the present invention provides a kind of detection device and method, to solve existing for prior art
Detection correctness problem on the low side.
Present invention is primarily targeted at offer one detection device and method, it utilizes light source and has net
On the guard projection network diaphragm extremely surface to be measured in hole, in order to make reflected image can highlight lacking of surface to be measured
Fall into position, thus can relatively improve detection correctness.
The secondary objective of the present invention is to provide a kind of detection device and method, and it can be arranged in pairs or groups further and make
With image process unit to carry out image binary conversion treatment technology, and by rule background video selective removal,
Further to highlight the defect position on surface to be measured, thus just can further improve detection
Really property and convenience.
Another object of the present invention is to provide a kind of detection device and method, it can be directly installed on and treat
Survey and use on the product line of semi-finished product (as having the support plate bar of flip-chip), it is achieved produce (on line) on line and immediately examine
Survey operation, be not required to move to semi-finished product to be measured produce outside line separately detect, thus can relatively improve production and inspection
Survey efficiency, and reduce testing cost.
For reaching the object defined above of the present invention, one embodiment of the invention provides one detection device, Qi Zhongsuo
State detection device to comprise a light source, an optical filter, at least one guard, a spectroscope and an image and pick
Taking unit, wherein said light source provides a light；Described optical filter is arranged on described light source front, with right
Described light filters；Described at least one guard is arranged on described optical filter front, and it is impermeable to have one
Light plate body and several mesh, described mesh is ordered on described light tight plate body, after described optical filtering
Light becomes a network diaphragm by described mesh；Described spectroscope is obliquely installed in described guard front, with
The reflection of described network diaphragm is projected to a surface to be measured；Described image acquisition unit is arranged at described spectroscope
Top, to capture by the reflection of described surface to be measured and through a described spectroscopical reflected image, for sentencing
On disconnected described surface to be measured, whether there is a defect.
Furthermore, another embodiment of the present invention provides a kind of detection method, and wherein said detection method comprises
One detection device is provided, there is a light source, at least one guard and an image acquisition unit；There is provided one to be measured
Thing is placed on below described detection device；Being thered is provided a light by described light source, described light passes through described net
Cover several mesh and become a network diaphragm, described network diaphragm is projected to described surface to be measured；And utilize
Described image acquisition unit captures the reflected image reflected to form by described surface to be measured, for judging
State and whether there is on surface to be measured a defect.
For the foregoing of the present invention can be become apparent, preferred embodiment cited below particularly, and coordinate institute
Accompanying drawings, is described in detail below:
Accompanying drawing explanation
Fig. 1 is the sectional view of the detection device of one embodiment of the invention.
Fig. 2 is the top view of the guard of one embodiment of the invention.
Fig. 3 is the top view of the oblique arrangement formula guard of another embodiment of the present invention.
Fig. 4 A and 4B is the top view of the combined type guard of further embodiment of this invention.
Fig. 5 A and 5B is the top view of the combined type guard of yet another embodiment of the invention.
Fig. 6 A and 6B is the top view of the concentric rows column guard of another two embodiments of the present invention.
Fig. 7 is the use schematic diagram of the detection device of one embodiment of the invention.
Fig. 8 A is to regard photographic view in Fig. 7 of the present invention on the material object of determinand.
Fig. 8 B is the back projection formed after the surface to be measured of the determinand of Fig. 8 A of the present invention is projected by network diaphragm
As figure.
Fig. 8 C is the reflected image of Fig. 8 B of the present invention striograph after binary conversion treatment.
Fig. 8 D is that the reflected image of Fig. 8 C of the present invention is further by after rule background video selective removal
Striograph.
Detailed description of the invention
The explanation of following embodiment is graphic with reference to add, may be used to enforcement in order to illustrate the present invention
Specific embodiment.Furthermore, the direction term that the present invention is previously mentioned, the most upper and lower, top, the end, front,
Afterwards, left and right, inside and outside, side, surrounding, central authorities, level, laterally, vertically, longitudinally, axially,
Radially, the superiors or orlop etc., be only the direction with reference to annexed drawings.Therefore, the direction of use is used
Language is to illustrate and understand the present invention, and is not used to limit the present invention.
Refer to shown in Fig. 1, it discloses the detection device 100 of one embodiment of the invention, and it mainly comprises:
One casing 10, light source 11, optical filter 12, an at least guard 13, spectroscope 14 and a shadow
As acquisition unit 15, it is one to be measured that wherein said detection device 100 can be applicable to optical detection one determinand
Whether surface has any defect, and the most small slight crack, depression, thrust, foreign body stick or corner
Bursting apart of place.The present invention will be above-mentioned respectively in describing each embodiment one by one in detail below with Fig. 1 to 8D
The detail structure of element, assembled relation and operation principles thereof.
As it is shown in figure 1, the casing 10 of the present embodiment is the hollow, rectangular shell being made up of several plate bodys, described
The material of plate body is not any limitation as, such as, can be selected from metallic plate or plastic plate etc., and described casing 10
Inwall preferably there is an anti-reflecting layer (not illustrating), such as one black coating.The bottom of described casing 10
And top respectively offers one first opening 101 and one second opening 102, first and second opening 101 described,
102 lower section substantially laying respectively at described spectroscope 14 and tops.
The most a piece of circuit being provided with several light emitting diode (LED) packaging bodies of the light source 11 of the present embodiment
Plate, described circuit board can be fixed on the one of described casing 10 by modes such as screw, draw-in groove or tight fits
On medial wall (such as the medial wall of right), described light source 11 is in order to provide a light, such as by white light or red
White light that light LED package is sent or HONGGUANG, but it is not limited to this.LED on foregoing circuit plate
Can not be any limitation as with array arrangement and its quantity.It addition, described light source 11 is also selected from other luminescences
Assembly, such as CCFL cold-cathode tube etc..
The optical filter 12 of the present embodiment is an atomizing piece, in it is arranged on described casing 10 and be positioned at described
The dead ahead of light source 11, for the light through described optical filter 12 being filtered and atomization process,
To make described light penetrate forward leveling off to the form of directional light.The circuit board of described light source 11 and institute
State the almost parallel configuration of optical filter 12, the light that described light source 11 provides then with described optical filter 12
Between there is the angle of one 90 degree, that is there is arranged perpendicular relation.
At least one guard 13 of the present embodiment is to be offered by single light tight plate body 131 to form several mesh
132 are formed, and have a frame 133.Described at least one guard 13 and described optical filter 12
Almost parallel configuration, and described guard 13 is preferably directly against being connected on described optical filter 12.Described light
The light that source 11 provides is at light tight plate body 131 with described guard 13 after described optical filter 12
Between there is the angle of one 90 degree, that is there is arranged perpendicular relation.Light after above-mentioned optical filtering can pass through
Described mesh 132 thus become a network diaphragm.
The spectroscope 14 of the present embodiment is an eyeglass with half reflection and half transmission characteristic, and it is arranged on described
In casing 10, and it is obliquely installed in described guard 13 front, and is pointed to first and second opening described
101,102, wherein said spectroscope 14 be relative to described casing 10 upper surface (or side surface) with
Being arranged in described casing 10 of 45 degree of overturning angles, the incidence of the network diaphragm that the most described light source 11 provides
There is as between direction (horizontal direction) with described spectroscope 14 angle of one 45 degree.Described spectroscope
14 in order to be projected to the surface to be measured of a determinand after being reflected by described network diaphragm.
The image acquisition unit 15 of the present embodiment can be such as CCD (charge-coupled image sensor) type or
The pick-up lens of CMOS (complementary metal oxide semiconductors (CMOS)) type, it is arranged at described spectroscope 14 and
The surface of two openings 102, to capture by the reflection of described surface to be measured and through the one of described spectroscope 14
Reflected image, and sentences at the upper visualization reflected image of screen (not illustrating) of a computer for operator
On disconnected described surface to be measured, whether there is a defect.In the present embodiment, above-mentioned light source 11, optical filter 12,
It is parallel that the set-up mode of guard 13 spectroscope 14 and image acquisition unit 15 substantially collectively forms one
The transmission path of light and the reflection path of an axis light.
Furthermore, if automatic detection function to be arranged in pairs or groups, the most described image acquisition unit 15 can connect further
To a computer (not illustrating), described computer is as an image process unit, with to described reflected image
Carry out binaryzation (binarization) to process, and the rule background video in described reflected image is selected
Property remove, to highlight the position of the defect on described surface to be measured.Above-mentioned binaryzation refers in reflected image
The gray value of pixel be set to 0 or 255, namely by whole reflected image with the most black, white
Double-colored contrast visual effect present (or be further processed into other contrast color, the most black, red)；And advise
Then background video is then to be stored in advance in computer not have defective surface to be measured reflected image, for
The background standard deleted as a comparison.
Refer to shown in Fig. 2, the described light tight plate body 131 of described at least one guard 13 is such as selected from
Metallic plate or plastic plate, it is possible to select the mode using laser, punching press and/or chemical etching to form institute
Stating mesh 132, optimal way system first forms mesh 132 with laser, then removes mesh 132 with chemical etching
On because of laser formed residue；Described mesh 132 is to be ordered on described light tight plate body 131, on
State regularly arranged mode can be various equidistantly or be uniformly distributed or the arrangement mode of array, such as with
The side being parallel to described frame 133 makees the mode etc. of longitudinally, laterally equidistantly array arrangement.Described net
Hole 132 is selected from square opening, rectangular opening, circular port, eye-shaped hole, tri-angle-holed or regular polygon hole, example
As being square opening in 1 embodiment.
In more detail, described guard 13 can have into following design and size, but is not limited to this:
In one embodiment, described light tight plate body 131 can be a square or plate body for rectangle, and length and width chi
Very little is 70 to 80mm (millimeter) × 70 to 80mm, but can by determinand size and to be irradiated to be measured
Thing quantity adjusts；The thickness of described light tight plate body 131, and can about between 0.5mm to 5mm
With thinning as far as possible under topic before lighttight, pass through in order to light；The aperture of described mesh 132 between
Between 0.01mm to 5mm, such as 0.05,0.1,0.5,1,2 or 2.5 etc., if above-mentioned aperture is little
In 0.01mm, unfavorable light is passed through, if will be difficult to highlight in subsequent reflection image more than 5mm
The position of defect；The area of described mesh 132 accounts for the gross area of described light tight plate body 131 about 1/2
To 1/5, for example, 1/3 or 1/4.Spacing (i.e. the width of support bar between mesh) between described mesh 132
About between 0.1mm to 8mm, such as 0.2,0.5,1,2 or 5mm etc., if above-mentioned spacing
Will be unable to form network diaphragm less than 0.1mm, if hiding there may be thick strip shade more than 8mm
Live whole defect and cannot be carried out detection；The width of described frame 133 can with 0.1mm to 0.5mm,
If narrow, structural strength is the best, if the widest, can reduce valid analysing range.
Refer to shown in Fig. 3 to Fig. 6 B, it discloses the various types guard 13 of other embodiments of the invention
Top view.
As it is shown on figure 3, another embodiment of the present invention can provide the guard 13 of a kind of oblique arrangement formula, wherein
Described mesh 132 is that array is arranged in described frame 133, and an arrangement side of described mesh 132
Accompanying an inclination angle to the side with described frame 133, described inclination angle is not any limitation as, and such as may be used
Between 30 to 60 degree, it can be such as 45 degree.The advantage of the mesh 132 of described oblique arrangement formula is,
When surface to be measured has the slight crack being parallel to determinand side, use the mesh 132 of Fig. 2 parallel column
The network diaphragm formed, may hide because of the support bar shade that described guard 131 is parallel in reflected image
This kind of parallel slight crack and cannot substantially differentiate the presence or absence of slight crack, therefore use Fig. 3 oblique arrangement formula mesh
132 tools formed tilt the network diaphragms of striped, are conducive to highlighting this kind in reflected image and parallel split
The position of trace.
As shown in fig. 4 a and 4b, further embodiment of this invention can provide the guard 13 of a kind of combined type,
It comprises the one first guard 13A and one second guard 13B mutually amplexiformed, described first guard 13A tool
There is several first perforate 132A；Described second guard 13B has several second perforate 132B, and described
One and second perforate 132A, 132B Heterogeneous Permutation, therefore can be combined the described mesh 132 of composition.Example
As, the shape of described first and second perforate 132A, 132B can be respectively the square of transverse direction and longitudinal direction arrangement
Shape elongate aperture, can be combined the square or mesh 132 of rectangle of composition after Heterogeneous Permutation.
As shown in Fig. 5 A and 5B, yet another embodiment of the invention then provides the guard 13 of another kind of combined type,
It is similar in appearance to the guard 13 of Fig. 4 A and 4B, but the shape of described first and second perforate 132A, 132B
Number row's circular port of transverse direction and longitudinal direction array arrangement can be respectively, in Heterogeneous Permutation (the most a part of overlapping)
After can be combined composition eye-shaped or the mesh 132 of approximate ellipsoidal.
As shown in Fig. 6 A and 6B, another two embodiments of the present invention can provide the guard of a kind of concentric rows column
13, the light tight plate body 131 of wherein said guard 13 there is several mesh so that concentric circular fashion is regularly arranged
132, the shape of described mesh 132 can be other mesh form circular or mentioned above.Fig. 6 A's
Guard 13 has 4 groups with the regularly arranged mesh 132 of concentric circular fashion, it is provided that a network diaphragm is simultaneously
Detecting 2 × 2 determinands being disposed adjacent, above-mentioned group of number can be adjusted according to the determinand quantity being intended to detect simultaneously
Whole；And the guard 13 of Fig. 6 B only have 1 group with the regularly arranged mesh 132 of concentric circular fashion, for still
A network diaphragm can be provided to detect 2 × 2 determinands being disposed adjacent simultaneously, the most every 1/4 circle region
Network diaphragm is in order to irradiate 1 determinand.
Refer to shown in Fig. 7, when using the detection device 100 of one embodiment of the invention to a determinand 20
A surface 21 to be measured when carrying out optical detection, its detection method substantially comprises following step:
First, it is provided that a detection device 100, it at least has light source 11, an at least guard 13 and
Image acquisition unit 15；
Then, it is provided that a determinand 20 be placed on the first opening 101 of described detection device 100 just under
Side, wherein said determinand 20 has a surface 21 to be measured, a back side of e.g. one flip-chip,
Described flip-chip is installed on a support plate bar 22 with controlled collapsible chip connec-tion the most in advance, for example, base plate for packaging
Or lead frame；
Afterwards, described light source 11 providing a light (such as collimated white light), described light passes through described guard
Several mesh 132 of 13 and become a network diaphragm, described network diaphragm is projected to treating of described determinand 20
Survey surface 21；And
Subsequently, described image acquisition unit 15 is utilized to capture reflected to form by described surface 21 to be measured
Reflected image, for judging whether to have a defect 211,212,213 on described surface to be measured 21.
In the step that described detection device 100 is provided, if desired, an optical filter 12 and can be set
Spectroscope 14, to constitute the optical path of axis light, is provided with described optical filter 12 at described light source
11 fronts, to filter described light, and described guard 13 is arranged on described optical filter 12 front；
And, it is obliquely installed described spectroscope 14 in described guard 13 front, the reflection of described network diaphragm to be thrown
It is incident upon described surface to be measured 21, and described image acquisition unit 15 is arranged at above described spectroscope 14,
To capture the described reflected image being reflected and passing described spectroscope 14 by described surface 21 to be measured.
Refer to shown in Fig. 8 A to Fig. 8 D, it discloses when the detection device using one embodiment of the invention
Material object when 100 (as shown in Figure 7) carried out optical detection to a determinand 20 above regards photographic view and shadow thereof
As figure.
As shown in Figure 8 A, described determinand 20 has a surface 21 to be measured, e.g. one flip-chip
One back side, described flip-chip is installed on a support plate bar 22 with controlled collapsible chip connec-tion, for example, the most in advance
Base plate for packaging or lead frame, the present embodiment system presents with 2 × 2 adjacent set-up modes, but is not limited to
This.Furthermore, although there is tiny flaw (such as Fig. 7 institute in the surface to be measured 21 of the most described determinand 20
Show), but operator there is no method by low range optical microscope at present the most significantly judges with naked eyes to find
Go out the position of these tiny flaws.
As shown in 8B, it is i.e. that to utilize described image acquisition unit 15 to capture by described surface 21 to be measured anti-
Penetrate a reflected image of formation, for judging whether to have on described surface to be measured 21 defect 211.By
Described surface to be measured 21 can be caused to have irregular surface undulation, the most described defect in described defect 211
211 can cause angle during light line reflection different from the reflection angle of other flat surfaces, and then can be
Reflected image highlights the defect position (i.e. having the position of light abnormal reflection) on surface to be measured,
Thus can relatively improve detection correctness and convenience.
As shown in Figure 8 C, after capturing described reflected image, a following step can separately be comprised: provide
One image process unit (does not illustrates), so that described reflected image is carried out binary conversion treatment, with by whole instead
Projection picture presents (such as black/white or black/red) with obvious double-colored contrast visual effect.
As in fig. 8d, then by the rule background video selective removal in described reflected image,
To highlight the position of the defect 211 on described surface to be measured 21, therefore automatic optics inspection can be further provided for
Function.
It addition, when described surface 21 to be measured have be parallel to described determinand 20 side defect 212,
Time 213 (i.e. slight crack shown in Fig. 7), can select to use the guard 13 of oblique arrangement formula, with by its net
The tool that hole 132 is formed tilts the network diaphragm of striped, highlights this kind of parallel slight crack in reflected image
Position.Additionally, when described surface 21 to be measured has the marker 23 of laser or ink print,
The experiment proved that described marker 23 substantially has no effect on operator and visually judges that (or computer examines automatically
Survey) position of the defect 211,212,213 on described surface 21 to be measured, and also can will reflect as mentioned above
Marker 23 in image is considered as rule background video selective removal.
As it has been described above, be typically to be utilized low range optical microscope by operator compared to existing detection mode
It directly carries out visual detection be difficult to directly judge the shortcomings such as small surface defect, the basis of Fig. 1 to 7
Invention detection device and method is by utilizing light source and having meshed guard projection network diaphragm to surface to be measured
On, therefore reflected image can be made to highlight the defect position on surface to be measured, thus can relatively improve inspection
Survey correctness and convenience.If desired, it is possible to collocation uses image process unit to carry out image further
Binary conversion treatment technology, and by rule background video selective removal, in order to further highlight to be measured
The defect position on surface, thus can further improve detection correctness and convenience.Furthermore, this
The detection device of invention can be directly installed on the product line of semi-finished product to be measured (as having the support plate bar of flip-chip)
Upper use, it is achieved produce (on line) on line and immediately detect operation, is not required to move to semi-finished product to be measured produce outside line another
Detect, thus can relatively improve production and detection efficiency, and reduce testing cost.
The present invention is been described by by above-mentioned related embodiment, but above-described embodiment only implements the present invention
Example.It must be noted that, it has been disclosed that embodiment be not limiting as the scope of the present invention.On the contrary,
The amendment and the equalization that are contained in the spirit and scope of claims arrange and are all included in the scope of the present invention
In.
Claims (15)
1. a detection device, it is characterised in that: described detection device comprises:
One light source a, it is provided that light；
One optical filter, is arranged on described light source front, to filter described light；
At least one guard, is arranged on described optical filter front, and has a light tight plate body and several mesh, and described mesh is ordered on described light tight plate body, and the light after described optical filtering becomes a network diaphragm by described mesh；
One spectroscope, is obliquely installed in described guard front, to be projected to be arranged at the surface to be measured of below described spectroscope by the reflection of described network diaphragm；And
One image acquisition unit, is arranged at above described spectroscope, to capture by the reflection of described surface to be measured and through a described spectroscopical reflected image, for judging, on described surface to be measured, whether there is a defect,
Wherein said spectroscope, described image acquisition unit and described surface to be measured collectively form the optical path of an axis light.
Detect device the most as claimed in claim 1, it is characterised in that: there is between light and the light tight plate body of described guard that described light source provides the angle of one 90 degree.
Detect device the most as claimed in claim 1, it is characterised in that: there is between network diaphragm and described spectroscope that described light source provides the angle of one 45 degree.
Detect device the most as claimed in claim 1, it is characterised in that: described guard is directly against being connected on described optical filter.
Detect device the most as claimed in claim 1, it is characterised in that: described at least one guard comprises one first guard and one second guard mutually amplexiformed, and described first guard has several first perforate；Described second guard has several second perforate, and first and second perforate Heterogeneous Permutation described is with the described mesh of compound composition.
Detect device the most as claimed in claim 5, it is characterised in that: first and second perforate described be shaped as elongate aperture or circular port.
7. the detection device as described in claim 1 or 5, it is characterised in that: described mesh is selected from square opening, rectangular opening, circular port, eye-shaped hole, tri-angle-holed or regular polygon hole.
Detect device the most as claimed in claim 1, it is characterised in that: the aperture of described mesh is between 0.01 millimeter to 5 millimeter.
Detect device the most as claimed in claim 1, it is characterised in that: described light tight plate body has several frame, and described mesh is to be ordered in described frame, and an orientation of described mesh accompanies an inclination angle with described frame.
Detect device the most as claimed in claim 1, it is characterized in that: described detection device additionally comprises an image process unit, so that described reflected image is carried out binary conversion treatment, and by the rule background video selective removal in described reflected image, to highlight the position of the defect on described surface to be measured.
11. detect device as claimed in claim 1, it is characterised in that: described surface to be measured is a back side of a flip-chip.
12. 1 kinds of detection methods, it is characterised in that: described detection method comprises step:
Thering is provided a detection device, have a light source, at least one guard, a spectroscope and an image acquisition unit, described image acquisition unit is arranged at above described spectroscope；
A determinand is provided to be placed on below described image acquisition unit and described spectroscope；
Being thered is provided a light, described light to become a network diaphragm by several mesh of described guard by described light source, the reflection of described network diaphragm is projected to described surface to be measured by described spectroscope；And
Utilize described image acquisition unit to capture and reflected, by described surface to be measured, the reflected image formed through described spectroscope, for judging, on described surface to be measured, whether there is a defect,
Wherein said spectroscope, described image acquisition unit and described surface to be measured collectively form the optical path of an axis light.
13. detection methods as claimed in claim 12, it is characterised in that: after capturing described reflected image, additionally comprise: an image process unit is provided, so that described reflected image is carried out binary conversion treatment.
14. detection methods as claimed in claim 13, it is characterised in that: after carrying out binary conversion treatment, additionally comprise: by the rule background video selective removal in described reflected image, to highlight the position of the defect on described surface to be measured.
15. detection methods as claimed in claim 12, it is characterised in that: in the step that described detection device is provided, additionally comprise: an optical filter is set in described light source front, so that described light to be filtered, and described guard is set in described optical filter front；And described spectroscope is obliquely installed in described guard front, so that the reflection of described network diaphragm is projected to described surface to be measured.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310065100.8A CN103177983B (en) | 2013-03-01 | 2013-03-01 | Detection device and method |
| CN201610720734.6A CN106206353B (en) | 2013-03-01 | 2013-03-01 | Detection device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310065100.8A CN103177983B (en) | 2013-03-01 | 2013-03-01 | Detection device and method |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610720734.6A Division CN106206353B (en) | 2013-03-01 | 2013-03-01 | Detection device and method |
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| Publication Number | Publication Date |
|---|---|
| CN103177983A CN103177983A (en) | 2013-06-26 |
| CN103177983B true CN103177983B (en) | 2016-09-28 |
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| CN201310065100.8A Active CN103177983B (en) | 2013-03-01 | 2013-03-01 | Detection device and method |
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|---|---|---|---|---|
| CN104484072B (en) * | 2014-12-30 | 2018-02-27 | 合肥鑫晟光电科技有限公司 | Detect detection plate, detection components and the detection method of touch-screen ripple |
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| CN106206353B (en) | 2021-04-16 |
| CN103177983A (en) | 2013-06-26 |
| CN106206353A (en) | 2016-12-07 |
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