CN103162656B - Electron beam current displacement monitor - Google Patents
Electron beam current displacement monitor Download PDFInfo
- Publication number
- CN103162656B CN103162656B CN201310093926.5A CN201310093926A CN103162656B CN 103162656 B CN103162656 B CN 103162656B CN 201310093926 A CN201310093926 A CN 201310093926A CN 103162656 B CN103162656 B CN 103162656B
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- Prior art keywords
- dash receiver
- control system
- beam current
- metallic conduit
- temperature sensor
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Abstract
The present invention relates to a kind of electron beam current displacement monitor, it is characterized in that: comprise metallic conduit, dash receiver and supporting control system, described metallic conduit two ends are fixed with the flange for being connected with electron accelerator vacuum system pipeline, the inherent circumferencial direction of described metallic conduit is uniformly distributed and somely receives only plate, dash receiver inside is provided with temperature sensor probe, described temperature sensor probe is connected with control system by cable, the temperature information of its place dash receiver is sent to control system by each temperature sensor probe, the temperature deviation situation of the more multiple dash receiver of control system also compares with setting value, alerting signal is sent when deviation exceedes setting value.Structure of the present invention is simple, ingenious, reasonable, and it can carry out dynamic surveillance to the electronic beam current the center displacement of electron accelerator, sends alerting signal when electron beam current displacement amount exceedes License Value.
Description
Technical field
The present invention relates to a kind of electron beam current displacement monitor.
Background technology
Electron accelerator is in operation, if electronic beam current center occurs that displacement does not overlap with the machine center of line induction system, high-octane electronic beam current will be transmitted into the pipeline of vacuum system or the inwall of scanning room or scan box, cause metal melt and then puncture, or the metal melted punctures titanium window, accelerator vacuum system, accelerating system and electron emissive system are suffered badly damaged, therefore must be monitored the electronic beam current the center displacement of electron accelerator.
Summary of the invention
The object of the invention is to overcome the deficiencies in the prior art, a kind of electron beam current displacement monitor is provided, its structure is simple, ingenious, reasonable, dynamic surveillance can be carried out to the electronic beam current the center displacement of electron accelerator, send alerting signal when electron beam current displacement amount exceedes License Value.
According to technical scheme provided by the invention: electron beam current displacement monitor, it is characterized in that: comprise metallic conduit, dash receiver and supporting control system, described metallic conduit two ends are fixed with the flange for being connected with electron accelerator vacuum system pipeline, the inherent circumferencial direction of described metallic conduit is uniformly distributed and somely receives only plate, dash receiver inside is provided with temperature sensor probe, described temperature sensor probe is connected with control system by cable, the temperature information of its place dash receiver is sent to control system by each temperature sensor probe, the temperature deviation situation of the more multiple dash receiver of control system also compares with setting value, alerting signal is sent when deviation exceedes setting value.
In the present invention, described control system can adopt conventional design of the prior art, and can supporting operation desktop picture display.
As a further improvement on the present invention, described metallic conduit outer wall is provided with consistent with dash receiver quantity, that position is corresponding multiple stationary pipes circumferencial direction is uniform, each stationary pipes internal fixtion has a mounting rod, described dash receiver is arranged on mounting rod, described mounting rod inner hollow, described cable is located in mounting rod.
As a further improvement on the present invention, described dash receiver has six.
compared with prior art, advantage is in the present invention:electron beam current displacement monitor structure of the present invention is simple, ingenious, reasonable, and it can carry out dynamic surveillance to the electronic beam current the center displacement of electron accelerator, sends alerting signal when electron beam current displacement amount exceedes License Value.
Accompanying drawing explanation
Fig. 1 is the structural representation of the embodiment of the present invention.
Fig. 2 is the side view of Fig. 1.
Embodiment
Below in conjunction with concrete drawings and Examples, the invention will be further described.
As shown in the figure: the electron beam current displacement monitor in embodiment forms primarily of metallic conduit 1, flange 2, dash receiver 3, stationary pipes 4, mounting rod 5 and supporting control system.
As shown in Figure 1 and Figure 2, described metallic conduit 1 two ends are welded with the flange 2 for being connected with electron accelerator vacuum system pipeline, the inherent circumferencial direction of described metallic conduit 1 is uniformly distributed six and receives only plate 3, dash receiver 3 inside is provided with temperature sensor probe, described temperature sensor probe is connected with control system by cable, the temperature information of its place dash receiver 3 is sent to control system by each temperature sensor probe, control system compares the temperature deviation situation of six dash receivers 3 and compares with setting value, sends alerting signal when deviation exceedes setting value.Described control system can adopt conventional design of the prior art, and can supporting operation desktop picture display.
In the embodiment of the present invention, the installation fixed form of described dash receiver 3 as shown in Figure 1, described metallic conduit 1 outer wall is provided with six stationary pipes 4 corresponding with dash receiver 3 position circumferencial direction is uniform, each stationary pipes 4 internal fixtion has a mounting rod 5, described dash receiver 3 is arranged on mounting rod 5, described mounting rod 5 inner hollow, described cable is located in mounting rod 5.
During embody rule, electron beam current displacement monitor is connected as one by flange 2 and electron accelerator vacuum system pipeline, and electronic beam current passes through from metallic conduit 1 center of electron beam current displacement monitor.When electronic beam current is at center, on each dash receiver 3 in metallic conduit 1, the homogeneous temperature of reflection is consistent, if beam excursion lattice center, part dash receiver 3 in metallic conduit 1 will receive electronic beam current and be converted into temperature, on dash receiver 3 there is deviation in temperature, temperature information is delivered to control system by cable, the position at the relative beam system mechanics center, operation desktop picture reading beam stream center of control system, when deviation exceedes setting value, control system then sends alerting signal (acoustical signal and/or light signal), operating personnel's correcting electronic beam center is reminded to overlap with lattice machine center, to avoid the security incident that electronic beam current punctures vacuum system occurs.
Claims (2)
1. electron beam current displacement monitor, it is characterized in that: comprise metallic conduit (1), dash receiver (3) and supporting control system, described metallic conduit (1) two ends are fixed with the flange (2) for being connected with electron accelerator vacuum system pipeline, described metallic conduit (1) inherent circumferencial direction is uniformly distributed and somely receives only plate (3), dash receiver (3) inside is provided with temperature sensor probe, described temperature sensor probe is connected with control system by cable, the temperature information of its place dash receiver (3) is sent to control system by each temperature sensor probe, the temperature deviation situation of the more multiple dash receiver of control system (3) also compares with setting value, alerting signal is sent when deviation exceedes setting value,
Described metallic conduit (1) outer wall is provided with consistent with dash receiver (3) quantity, that position is corresponding multiple stationary pipes (4) circumferencial direction is uniform, each stationary pipes (4) internal fixtion has a mounting rod (5), described dash receiver (3) is arranged on mounting rod (5), described mounting rod (5) inner hollow, described cable is located in mounting rod (5).
2. electron beam current displacement monitor as claimed in claim 1, is characterized in that: described dash receiver (3) has six.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310093926.5A CN103162656B (en) | 2013-03-21 | 2013-03-21 | Electron beam current displacement monitor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310093926.5A CN103162656B (en) | 2013-03-21 | 2013-03-21 | Electron beam current displacement monitor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103162656A CN103162656A (en) | 2013-06-19 |
| CN103162656B true CN103162656B (en) | 2015-08-19 |
Family
ID=48585948
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310093926.5A Active CN103162656B (en) | 2013-03-21 | 2013-03-21 | Electron beam current displacement monitor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103162656B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105072796A (en) * | 2015-08-31 | 2015-11-18 | 中广核达胜加速器技术有限公司 | Electron beam protection flange |
| CN107155257B (en) * | 2017-07-20 | 2024-02-02 | 中广核达胜加速器技术有限公司 | Accelerator and beam flow path on-line monitoring device thereof |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002170761A (en) * | 2000-12-01 | 2002-06-14 | Nikon Corp | System and method for exposure and method of manufacturing device |
| JP2002237270A (en) * | 2001-02-09 | 2002-08-23 | Ebara Corp | Charged particle beam deflector and charged particle beam defect inspection device and method using the same |
| CN100391312C (en) * | 2004-05-20 | 2008-05-28 | 上海交通大学 | Electron beam heating temperature control method |
| CN101529550B (en) * | 2006-10-23 | 2011-09-21 | 株式会社爱发科 | Method of controlling electron beam focusing of pierce type electron gun and control device therefor |
| CN201114978Y (en) * | 2007-05-25 | 2008-09-10 | 深圳长园电子材料有限公司 | Dynamitron accelerator chip tube protection device |
| CN203163708U (en) * | 2013-03-21 | 2013-08-28 | 无锡爱邦辐射技术有限公司 | Electron beam displacement monitor |
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2013
- 2013-03-21 CN CN201310093926.5A patent/CN103162656B/en active Active
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| Publication number | Publication date |
|---|---|
| CN103162656A (en) | 2013-06-19 |
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