CN100391312C - Electron beam heating temperature control method - Google Patents
Electron beam heating temperature control method Download PDFInfo
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- CN100391312C CN100391312C CNB200410018475XA CN200410018475A CN100391312C CN 100391312 C CN100391312 C CN 100391312C CN B200410018475X A CNB200410018475X A CN B200410018475XA CN 200410018475 A CN200410018475 A CN 200410018475A CN 100391312 C CN100391312 C CN 100391312C
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- temperature
- threshold values
- programming rate
- workpiece
- electron beam
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
Abstract
The present invention relates to an electron beam heating temperature control method used in the field of material processing. The present invention adopts a temperature rise speed as a control datum. In the process of heating an electron beam, the temperature rise speed of a work piece is measured; the temperature rise speed is compared with a setting range; the flow value of the electron beam is adjusted, which leads the actual temperature rise speed of the work piece to be in the setting range, or the temperature threshold is set, and in the process of heating the electron beam, the temperature of the work piece is detected. The measuring value of the temperature of the work piece is compared with the set temperature threshold. When the measuring value of the temperature of the work piece is less than the set temperature threshold, beam current is continuously outputted to heat the work piece; when the measuring value of the temperature of the work piece is equal to the set threshold, the beam current is immediately cut off, or the two methods can be used in a combination mode. The measuring value of the temperature of the work piece is compared with the set value of the temperature threshold; if the measuring value of the temperature of the work piece is less than the set value of the temperature threshold, the temperature is raised, and the speed is controlled; if the measuring value of the temperature of the work piece is equal to the set value of the temperature threshold, the beam current is immediately cut off, the heating process is stopped, the temperature rise is stopped, and the speed control is stopped.
Description
Technical field
What the present invention relates to is a kind of electron beam heating and temperature control method, and particularly a kind of electron beam heating-up temperature rate of climb and temperature threshold values control method are used for material processing field.
Background technology
Adopt electron beam material to be added man-hour as thermal source, the precision control of heating-up temperature is significant, owing to electron beam energy density height, in vacuum chamber, scan when heating workpiece temperature and change fast, workpiece programming rate and transient temperature halved tie flow valuve are very sensitive, therefore in order to improve temperature control precision, need to adopt suitable control index to come halved tie stream to control.
Find by literature search, Chinese invention patent title: electron beam scanning heating-up temperature closed loop control method, number of patent application: 03116992.9, this patent is the control index with the heating-up temperature, keeps the constant of workpiece temperature according to the detection of workpiece temperature, the adjusting of line.According to the method that this patent provided, in electron beam heating process, temperature value and the set point that records compared, before the observed temperature value rises to set point, do not change line value size; Start-up temperature closed-loop control when the observed temperature value rises to set point, according to the comparative result of observed temperature value and set point, electronic beam current is regulated: if measured value greater than set point, then reduces the electron beam flow valuve, if measured value less than set point, then increases the electron beam flow valuve; If measured value equates with set point, then keep the electron beam flow valuve constant, to keep test point temperature constant on the workpiece.The deficiency of this method is: on the one hand, because electron beam energy density height, workpiece programming rate and transient temperature halved tie flow valuve are very sensitive, it is more suitable that this method requires line value to choose ground, and bigger if the line value is chosen, then the workpiece programming rate is very fast, thereby easily cause in the structural member temperature gradient excessive and make its distortion, decreased performance, because thermal inertia can make the temperature of workpiece exceed the bigger numerical value of set point, temperature control precision is reduced simultaneously; And if the line value that adopts is less, programming rate will be very slow, and productivity ratio is reduced.Deficiency on the other hand is, electron beam heating to heat sensitivity material and heat-sensitive device, production practices require its heating process to be sometimes: under a certain suitable programming rate, cut off line when being warmed up to set point immediately, i.e. setting by a certain temperature threshold values, when detecting workpiece temperature and reached this threshold values, cut off line immediately.This patent of such control method does not provide yet.
Summary of the invention
The objective of the invention is at disadvantages of background technology and defective, for improving temperature-controlled precision, a kind of electron beam heating-up temperature rate of climb and threshold values control method are provided, can in whole electron beam heating process, regulate programming rate, the actual programming rate of workpiece is within the set scope, and can be at the different programming rates of the interval employing of different temperatures; The temperature threshold values control method that is proposed can realize cutting off the function of line immediately when workpiece temperature reaches the setting threshold values; These two kinds of methods can be used respectively, also can unite use.
The present invention is achieved by the following technical solutions, the present invention is the control index with the rate of rise in temperature, in electron beam heating process, record the programming rate of workpiece, and compare with design temperature rate of climb scope, regulate the electron beam flow valuve, the actual programming rate of workpiece is within the set scope, i.e. rate of rise in temperature control method; Perhaps pass through the setting of temperature threshold values, in electron beam heating process, workpiece temperature is detected, and workpiece temperature measured value and set temperature threshold values compared, when the workpiece temperature measured value is lower than set temperature threshold values, then continuing the output line heats workpiece, when reaching set threshold values computer-chronograph output control command, the workpiece temperature measured value cuts off line immediately, i.e. temperature threshold values control method; Perhaps above-mentioned two kinds of methods are united use, at first carry out the comparison of workpiece temperature measured value and the temperature threshold values value of setting, if the former is lower than the latter, then carry out rate of rise in temperature control again, if the workpiece temperature measured value reaches the temperature threshold values value of setting, then cut off line immediately, stop heating process, and stop to carry out rate of rise in temperature control.
Below the present invention is further illustrated, method is as follows:
One, rate of rise in temperature control method
(1) the rate of rise in temperature scope of workpiece is set;
(2) at electron beam workpiece is carried out in the heating process, carry out circular flow by computer program, in each circulation, by the temperature signal on the temperature collecting device collection workpiece, the input computer changes temperature value again into after A/D converter changes digital quantity into, and record acquisition constantly, according to the temperature value and the time interval accounting temperature rate of climb that collect for adjacent twice, and compare with design temperature rate of climb scope, regulate according to comparative result halved tie stream: if calculated value is than set rate of rise in temperature range limit height, then reduce line, if calculated value is lower than set rate of rise in temperature lower limit, then increase line, if calculated value is in the set rate of rise in temperature scope, then line remains unchanged.
When utilizing this method, in electron beam heating process,, then the adjusting of workpiece programming rate is carried out according to adjusted rate of rise in temperature scope if the rate of rise in temperature scope is adjusted.Therefore,, can adopt different programming rates,,, can adopt bigger programming rate, and between the high-temperature region, can adopt less programming rate, so that improve temperature-controlled precision for boosting productivity as at low-temperature range in different temperature ranges.
Two, temperature threshold values control method
(1) the temperature threshold values of workpiece is set;
(2) at electron beam workpiece is carried out in the heating process, by computer program circular flow, in each circulation, by the temperature signal on the temperature collecting device collection workpiece, the input computer changes temperature value again into after A/D converter changes digital quantity into, the temperature value and the temperature threshold values set point that record are compared, if measured temperature is lower than temperature threshold values set point, then continuing the output line heats workpiece, if measured temperature reaches temperature threshold values set point, then computer output control command is cut off line immediately, stops heating process.
When utilizing this method, in electron beam heating process, when measured temperature is lower than temperature threshold values set point,, then temperature value and the adjusted temperature threshold values that records compared if the temperature threshold values is adjusted.Therefore, when workpiece temperature did not reach set temperature threshold values, temperature threshold values set point can be carried out online adjusting.
Three, two kinds of methods are united use
(1) the rate of rise in temperature scope and the temperature threshold values of workpiece are set;
(2) at electron beam workpiece is carried out in the heating process, by computer program circular flow, in each circulation, by the temperature signal on the temperature collecting device collection workpiece, the input computer changes the temperature value and the record acquisition moment again into after A/D converter changes digital quantity into;
(3) temperature value and the temperature threshold values set point that records compared, if measured temperature is lower than temperature threshold values set point, then continuing the output line heats workpiece, according to the temperature value and the time interval accounting temperature rate of climb that collect for adjacent twice, and compare with setting range, regulate according to comparative result halved tie stream: if calculated value is than set rate of rise in temperature range limit height, then reduce line, if calculated value is lower than set rate of rise in temperature lower limit, then increase line, if calculated value is in the set rate of rise in temperature scope, then line remains unchanged; If measured temperature reaches temperature threshold values set point, then cut off line immediately, stop heating process.
In electron beam heating process, when measured temperature is lower than temperature threshold values set point,, then the adjusting of workpiece programming rate is carried out according to adjusted rate of rise in temperature scope if the rate of rise in temperature scope is adjusted; In electron beam heating process, when measured temperature is lower than temperature threshold values set point,, then temperature value and the adjusted temperature threshold values that records compared if the temperature threshold values is adjusted.
Embodiment
In conjunction with the content of the inventive method, unite to use with the control of rate of rise in temperature and temperature threshold values and be example, following examples are provided; Heat in order to adapt in the electron beam vacuum, the energy density height, the workpiece firing rate is fast, characteristics such as variations in temperature is fast, the present invention has adopted double color infrared temperature measuring instrument that workpiece temperature in the electron beam heating process is detected, electron beam welding machine is controlled by Programmable Logic Controller and industrial control computer, industrial control computer is as host computer, the good Control Software of operation off-line editing, finish the communication of industrial control computer and Programmable Logic Controller by means of Control Software, realize the automatic control of electron beam welding machine, comprise the control of the size adjustment of line and break-make, and finish the detection etc. of temperature and rate of rise in temperature.
Concrete steps are as follows:
(1) opens double color infrared temperature measuring instrument;
(2) Control Software in the operation host computer in the enterprising line parameter setting of software interface, comprises accelerating voltage, line, focus current, the rate of rise in temperature upper limit (T
Vmax), lower limit (T
Vmin), temperature threshold values (T
Max) etc.;
(3) the unlocking electronic line heats workpiece;
(4) in electron beam heating process, by computer program circular flow, in each circulation, record the workpiece temperature signal by double color infrared temperature measuring instrument, change into behind the digital quantity by data acquisition unit collection and A/D converter and to change temperature value again in the input computer, and record acquisition constantly; Four variable: T are set
I-1, T
i, t
I-1, t
i, being used for preserving adjacent twice measured temperature and the corresponding collection moment respectively, subscript i-1 represents previous moment, i represents back one constantly.With T
iWith T
MaxRelatively, work as T
i＜T
MaxThe time, calculate programming rate T
Vi=(T
i-T
I-1)/(t
i-t
I-1); With T
ViWith the value of setting T
VmaxAnd T
VminCompare, regulate according to comparative result halved tie stream: if T
Vi＞T
Vmax, show that the programming rate currency greater than higher limit, then reduces line; If T
Vi＜T
Vmin, show that the programming rate currency less than lower limit, then increases line, if T
Vmin≤ T
Vi≤ T
Vmax, show that programming rate is in the scope of setting, then line remains unchanged; When detecting T
iReach T
MaxThe time, cut off electronic beam current immediately, heating process finishes.
The present invention serves as that the control index is carried out temperature control with the rate of rise in temperature and the temperature threshold values of workpiece in the electron beam heating process, for the temperature-controlled precision that improves electron beam processing provides a kind of effective measures, have substantial characteristics and marked improvement, setting and control by rate of rise in temperature, the actual programming rate of workpiece is within the set scope, avoided prior art owing to the uncontrollable generation that easily causes situations such as structural member distortion, decreased performance or productivity ratio are lower of programming rate, and temperature-controlled precision is significantly improved; By the setting and the control of temperature threshold values, can realize when workpiece temperature reaches the setting threshold values, cutting off the function of line immediately, make the reliable guarantee of being processed with of heat sensitivity material and heat-sensitive device.By method proposed by the invention, the temperature-controlled precision of electron beam heating is significantly improved.
Claims (7)
1. electron beam heating and temperature control method, it is characterized in that, with the programming rate is the control index, in electron beam heating process, record the programming rate of workpiece, and with set the programming rate scope and compare, regulate the electron beam flow valuve, the actual programming rate of workpiece is within the set scope, be i.e. programming rate control method; Perhaps pass through the setting of temperature threshold values, in electron beam heating process, workpiece temperature is detected, and workpiece temperature measured value and set temperature threshold values compared, when the workpiece temperature measured value is lower than set temperature threshold values, then continuing the output line heats workpiece, when reaching set threshold values, the workpiece temperature measured value cuts off line immediately, i.e. temperature threshold values control method; Perhaps above-mentioned two kinds of methods are united use, at first carry out the comparison of workpiece temperature measured value and the temperature threshold values value of setting, if the former is lower than the latter, then carry out programming rate control again, if the workpiece temperature measured value reaches the temperature threshold values value of setting, then cut off line immediately, stop heating process, and stop to carry out programming rate control.
2. electron beam heating and temperature control method according to claim 1 is characterized in that, described programming rate control method, and concrete steps are as follows:
The first, the programming rate scope of workpiece is set;
Second, at electron beam workpiece is carried out in the heating process, carry out circular flow by computer program, in each circulation, by the temperature signal on the temperature collecting device collection workpiece, the input computer changes temperature value again into after A/D converter changes digital quantity into, and record acquisition constantly, calculate programming rate according to the temperature value that collects for adjacent twice and the time interval, and with set the programming rate scope and compare, regulate according to comparative result halved tie stream: if calculated value is than set programming rate range limit height, then reduce line,, then increase line if calculated value is lower than set programming rate lower limit, if calculated value is in the set programming rate scope, then keep line.
3. electron beam heating and temperature control method according to claim 1 and 2, it is characterized in that, when using programming rate control method, in electron beam heating process, the programming rate scope is adjusted, then the adjusting of workpiece programming rate is carried out according to adjusted programming rate scope.
4. electron beam heating and temperature control method according to claim 1 is characterized in that, described temperature threshold values control method, and concrete steps are as follows:
The first, the temperature threshold values of workpiece is set;
Second, at electron beam workpiece is carried out in the heating process, by computer program circular flow, in each circulation, by the temperature signal on the temperature collecting device collection workpiece, the input computer changes temperature value again into after A/D converter changes digital quantity into, the temperature value and the temperature threshold values set point that record are compared, if measured temperature is lower than temperature threshold values set point, then continuing the output line heats workpiece, if measured temperature reaches temperature threshold values set point, then computer output control command is cut off line immediately, stops heating process.
5. according to claim 1 or 4 described electron beam heating and temperature control methods, it is characterized in that, during serviceability temperature threshold values control method, in electron beam heating process, when measured temperature is lower than temperature threshold values set point, the temperature threshold values is adjusted, then temperature value and the adjusted temperature threshold values that records compared.
6. electron beam heating and temperature control method according to claim 1 is characterized in that, the described associating used programming rate control method, temperature threshold values control method, and its concrete steps are as follows:
The first, the programming rate scope and the temperature threshold values of workpiece are set;
Second, at electron beam workpiece is carried out in the heating process, by computer program circular flow, in each circulation, by the temperature signal on the temperature collecting device collection workpiece, the input computer changes the temperature value and the record acquisition moment again into after A/D converter changes digital quantity into;
The 3rd, the temperature value and the temperature threshold values set point that record are compared, if measured temperature is lower than temperature threshold values set point, then continuing the output line heats workpiece, calculate programming rate according to the temperature value that collects for adjacent twice and the time interval, and with set the programming rate scope and compare, regulate according to comparative result halved tie stream: if calculated value is than set programming rate range limit height, then reduce line, if calculated value is lower than set programming rate lower limit, then increase line,, then keep line if calculated value is in the set programming rate scope; If measured temperature reaches temperature threshold values set point, then cut off line immediately, stop heating process.
7. according to claim 1 or 6 described electron beam heating and temperature control methods, it is characterized in that, unite when using programming rate control method, temperature threshold values control method, in electron beam heating process, when measured temperature is lower than temperature threshold values set point, the programming rate scope is adjusted, then the adjusting of workpiece programming rate is carried out according to adjusted programming rate scope; In electron beam heating process, when measured temperature is lower than temperature threshold values set point, the temperature threshold values is adjusted, then temperature value and the adjusted temperature threshold values that records compared.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200410018475XA CN100391312C (en) | 2004-05-20 | 2004-05-20 | Electron beam heating temperature control method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200410018475XA CN100391312C (en) | 2004-05-20 | 2004-05-20 | Electron beam heating temperature control method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1582067A CN1582067A (en) | 2005-02-16 |
| CN100391312C true CN100391312C (en) | 2008-05-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB200410018475XA Expired - Fee Related CN100391312C (en) | 2004-05-20 | 2004-05-20 | Electron beam heating temperature control method |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101620448B (en) * | 2009-07-29 | 2013-07-17 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Temperature monitoring method and device of production line device |
| CN103162656B (en) * | 2013-03-21 | 2015-08-19 | 无锡爱邦辐射技术有限公司 | Electron beam current displacement monitor |
| CN112540640B (en) * | 2020-12-04 | 2022-06-17 | 北京北方华创微电子装备有限公司 | Heating component power control method and semiconductor process equipment |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN87105479A (en) * | 1986-08-09 | 1988-02-17 | 菲利蒲光灯制造公司 | The Method and circuits device that depends on brightness and temperature controlling of lamp of LCD is specifically used for throwing light on |
| JPH0749024A (en) * | 1993-08-06 | 1995-02-21 | Zexel Corp | Heating method by electromagnetic wave and electromagnetic wave absorbing heating body |
| CN1472613A (en) * | 2003-05-16 | 2004-02-04 | 上海交通大学 | Electron beam scanning heating temperature closed loop control method |
-
2004
- 2004-05-20 CN CNB200410018475XA patent/CN100391312C/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN87105479A (en) * | 1986-08-09 | 1988-02-17 | 菲利蒲光灯制造公司 | The Method and circuits device that depends on brightness and temperature controlling of lamp of LCD is specifically used for throwing light on |
| JPH0749024A (en) * | 1993-08-06 | 1995-02-21 | Zexel Corp | Heating method by electromagnetic wave and electromagnetic wave absorbing heating body |
| CN1472613A (en) * | 2003-05-16 | 2004-02-04 | 上海交通大学 | Electron beam scanning heating temperature closed loop control method |
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|---|---|
| CN1582067A (en) | 2005-02-16 |
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Granted publication date: 20080528 Termination date: 20110520 |