CN103162656A - Electron beam current displacement monitor - Google Patents
Electron beam current displacement monitor Download PDFInfo
- Publication number
- CN103162656A CN103162656A CN2013100939265A CN201310093926A CN103162656A CN 103162656 A CN103162656 A CN 103162656A CN 2013100939265 A CN2013100939265 A CN 2013100939265A CN 201310093926 A CN201310093926 A CN 201310093926A CN 103162656 A CN103162656 A CN 103162656A
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- Prior art keywords
- beam current
- control system
- current displacement
- metallic conduit
- dash receiver
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Abstract
The invention relates to an electron beam current displacement monitor. The electron beam current displacement monitor is characterized by comprising a metallic conduit, receiving plates and a matched control system, wherein a flange connected with an electronic accelerator vacuum system through the conduit is fixed at each of two ends of the metallic conduit; a plurality of receiving plates are uniformly distributed in the circumferential direction in the metallic conduit; a temperature sensor probe is arranged in each receiving plate; the temperature sensor probes are connected with the control system through cables; and each temperature sensor probe sends the temperature information of the receiving plate therein to the control system, and the control system compares the temperature deviation condition of a plurality of receiving plates, compares the temperature deviation with a set value and sends an alarm signal when the deviation exceeds the set value. The electron beam current displacement monitor is simple, skilful and reasonable in structure, and can dynamically monitor the electron beam current center displacement of an electronic accelerator and send the alarm signal when the electron beam current displacement exceeds the permissive value.
Description
Technical field
The present invention relates to a kind of electronic beam current displacement monitor.
Background technology
Electron accelerator is in operation, if appearring in the electronic beam current center, displacement do not overlap with the machine center of line induction system, high-octane electronic beam current will be transmitted into the pipeline of vacuum system or the inwall of scanning room or scan box, cause metal melt and then puncture, the metal that perhaps melts punctures the titanium window, accelerator vacuum system, accelerating system and electron emissive system are suffered badly damaged, therefore must the electronic beam current the center displacement of electron accelerator be monitored.
Summary of the invention
The object of the invention is to overcome the deficiencies in the prior art, a kind of electronic beam current displacement monitor is provided, it is simple in structure, ingenious, reasonable, can carry out dynamic surveillance to the electronic beam current the center displacement of electron accelerator, send alerting signal when the electronic beam current displacement surpasses License Value.
according to technical scheme provided by the invention: electronic beam current displacement monitor, it is characterized in that: comprise metallic conduit, dash receiver and supporting control system, described metallic conduit two ends are fixed with the flange that is connected for electron accelerator vacuum system pipeline, the inherent circumferencial direction of described metallic conduit is the some plates that receive only of distribution evenly, dash receiver inside is provided with temperature sensor probe, described temperature sensor probe is connected with control system by cable, each temperature sensor probe sends to control system with the temperature information of its place dash receiver, the temperature deviation situation of more a plurality of dash receivers of control system also compares with setting value, when surpassing setting value, deviation sends alerting signal.
In the present invention, described control system can adopt conventional design of the prior art, and can show by supporting operation desktop picture.
As a further improvement on the present invention, be provided with consistent with dash receiver quantity, that the position is corresponding a plurality of stationary pipes circumferencial direction is uniform on described metallic conduit outer wall, be fixed with a mounting rod in each stationary pipes, described dash receiver is arranged on mounting rod, described mounting rod inner hollow, described cable is located in mounting rod.
As a further improvement on the present invention, described dash receiver has six.
The present invention compared with prior art, advantage is:Electronic beam current displacement monitor of the present invention is simple in structure, ingenious, reasonable, and it can carry out dynamic surveillance to the electronic beam current the center displacement of electron accelerator, sends alerting signal when the electronic beam current displacement surpasses License Value.
Description of drawings
Fig. 1 is the structural representation of the embodiment of the present invention.
Fig. 2 is the side view of Fig. 1.
Embodiment
The invention will be further described below in conjunction with concrete drawings and Examples.
As shown in the figure: the electronic beam current displacement monitor in embodiment is mainly by metallic conduit 1, flange 2, dash receiver 3, stationary pipes 4, mounting rod 5 and supporting composition of the control system.
As shown in Figure 1 and Figure 2, described metallic conduit 1 two ends are welded and fixed and are useful on the flange 2 that is connected with electron accelerator vacuum system pipeline, the inherent circumferencial direction of described metallic conduit 1 evenly distribution six receives only plate 3, dash receiver 3 inside are provided with temperature sensor probe, described temperature sensor probe is connected with control system by cable, each temperature sensor probe sends to control system with the temperature information of its place dash receiver 3, control system compares the temperature deviation situation of six dash receivers 3 and compares with setting value, sends alerting signal when deviation surpasses setting value.Described control system can adopt conventional design of the prior art, and can show by supporting operation desktop picture.
In the embodiment of the present invention, the installation fixed form of described dash receiver 3 as shown in Figure 1, be provided with six stationary pipes 4 corresponding with dash receiver 3 positions circumferencial direction is uniform on described metallic conduit 1 outer wall, be fixed with a mounting rod 5 in each stationary pipes 4, described dash receiver 3 is arranged on mounting rod 5, described mounting rod 5 inner hollow, described cable is located in mounting rod 5.
During concrete the application, electronic beam current displacement monitor connects as one by flange 2 and electron accelerator vacuum system pipeline, and electronic beam current passes through from metallic conduit 1 center of electronic beam current displacement monitor.when electronic beam current during at the center, the temperature uniformity of reflection on each dash receiver 3 in metallic conduit 1, if beam excursion lattice center, part dash receiver 3 in metallic conduit 1 will receive electronic beam current and be converted into temperature, on dash receiver 3, deviation appears in temperature, temperature information is delivered to control system by cable, the position of the relative lattice machine center in operation desktop picture reading beam stream center of control system, when deviation surpasses setting value, control system is sent alerting signal (acoustical signal and/or light signal), remind operating personnel's correcting electronic beam center to overlap with the lattice machine center, to avoid occuring the security incident that electronic beam current punctures vacuum system.
Claims (3)
1. electronic beam current displacement monitor, it is characterized in that: comprise metallic conduit (1), dash receiver (3) and supporting control system, described metallic conduit (1) two ends are fixed with the flange (2) that is connected for electron accelerator vacuum system pipeline, the inherent circumferencial direction of described metallic conduit (1) is the some plates (3) that receive only of distribution evenly, dash receiver (3) inside is provided with temperature sensor probe, described temperature sensor probe is connected with control system by cable, each temperature sensor probe sends to control system with the temperature information of its place dash receiver (3), the temperature deviation situation of more a plurality of dash receivers of control system (3) also compares with setting value, when surpassing setting value, deviation sends alerting signal.
2. electronic beam current displacement monitor as claimed in claim 1, it is characterized in that: be provided with consistent with dash receiver (3) quantity, that the position is corresponding a plurality of stationary pipes (4) circumferencial direction is uniform on described metallic conduit (1) outer wall, be fixed with a mounting rod (5) in each stationary pipes (4), described dash receiver (3) is arranged on mounting rod (5), described mounting rod (5) inner hollow, described cable is located in mounting rod (5).
3. electronic beam current displacement monitor as claimed in claim 1, it is characterized in that: described dash receiver (3) has six.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310093926.5A CN103162656B (en) | 2013-03-21 | 2013-03-21 | Electron beam current displacement monitor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310093926.5A CN103162656B (en) | 2013-03-21 | 2013-03-21 | Electron beam current displacement monitor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103162656A true CN103162656A (en) | 2013-06-19 |
| CN103162656B CN103162656B (en) | 2015-08-19 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310093926.5A Active CN103162656B (en) | 2013-03-21 | 2013-03-21 | Electron beam current displacement monitor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103162656B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105072796A (en) * | 2015-08-31 | 2015-11-18 | 中广核达胜加速器技术有限公司 | Electron beam protection flange |
| CN107155257A (en) * | 2017-07-20 | 2017-09-12 | 中广核达胜加速器技术有限公司 | A kind of accelerator and its beam path on-Line Monitor Device |
Citations (6)
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|---|---|---|---|---|
| JP2002237270A (en) * | 2001-02-09 | 2002-08-23 | Ebara Corp | Charged particle beam deflector and charged particle beam defect inspection device and method using the same |
| US20020125447A1 (en) * | 2000-12-01 | 2002-09-12 | Nikon Corporation | Devices and methods for monitoring respective operating temperatures of components in a microlithography apparatus |
| CN1582067A (en) * | 2004-05-20 | 2005-02-16 | 上海交通大学 | Electron beam heating temperature control method |
| CN201114978Y (en) * | 2007-05-25 | 2008-09-10 | 深圳长园电子材料有限公司 | Dynamitron accelerator chip tube protection device |
| CN101529550A (en) * | 2006-10-23 | 2009-09-09 | 株式会社爱发科 | Method of controlling electron beam focusing of pierce type electron gun and control device therefor |
| CN203163708U (en) * | 2013-03-21 | 2013-08-28 | 无锡爱邦辐射技术有限公司 | Electron beam displacement monitor |
-
2013
- 2013-03-21 CN CN201310093926.5A patent/CN103162656B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020125447A1 (en) * | 2000-12-01 | 2002-09-12 | Nikon Corporation | Devices and methods for monitoring respective operating temperatures of components in a microlithography apparatus |
| JP2002237270A (en) * | 2001-02-09 | 2002-08-23 | Ebara Corp | Charged particle beam deflector and charged particle beam defect inspection device and method using the same |
| CN1582067A (en) * | 2004-05-20 | 2005-02-16 | 上海交通大学 | Electron beam heating temperature control method |
| CN101529550A (en) * | 2006-10-23 | 2009-09-09 | 株式会社爱发科 | Method of controlling electron beam focusing of pierce type electron gun and control device therefor |
| CN201114978Y (en) * | 2007-05-25 | 2008-09-10 | 深圳长园电子材料有限公司 | Dynamitron accelerator chip tube protection device |
| CN203163708U (en) * | 2013-03-21 | 2013-08-28 | 无锡爱邦辐射技术有限公司 | Electron beam displacement monitor |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105072796A (en) * | 2015-08-31 | 2015-11-18 | 中广核达胜加速器技术有限公司 | Electron beam protection flange |
| CN107155257A (en) * | 2017-07-20 | 2017-09-12 | 中广核达胜加速器技术有限公司 | A kind of accelerator and its beam path on-Line Monitor Device |
| CN107155257B (en) * | 2017-07-20 | 2024-02-02 | 中广核达胜加速器技术有限公司 | Accelerator and beam flow path on-line monitoring device thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103162656B (en) | 2015-08-19 |
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