CN103154712B - 传感器元件及其制备方法和包括所述传感器元件的传感器装置 - Google Patents

传感器元件及其制备方法和包括所述传感器元件的传感器装置 Download PDF

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Publication number
CN103154712B
CN103154712B CN201180047568.3A CN201180047568A CN103154712B CN 103154712 B CN103154712 B CN 103154712B CN 201180047568 A CN201180047568 A CN 201180047568A CN 103154712 B CN103154712 B CN 103154712B
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conductive electrode
sensor element
conductive
electrode
sensor
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CN103154712A (zh
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M·C·帕拉佐托
S·H·格里斯卡
P·F·鲍德
姜明灿
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3M Innovative Properties Co
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/416Systems
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/128Microapparatus

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  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
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  • Pathology (AREA)
  • Molecular Biology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
CN201180047568.3A 2010-09-30 2011-09-07 传感器元件及其制备方法和包括所述传感器元件的传感器装置 Expired - Fee Related CN103154712B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US38814610P 2010-09-30 2010-09-30
US61/388,146 2010-09-30
PCT/US2011/050609 WO2012050686A1 (en) 2010-09-30 2011-09-07 Sensor element, method of making the same, and sensor device including the same

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CN103154712A CN103154712A (zh) 2013-06-12
CN103154712B true CN103154712B (zh) 2015-11-25

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US (1) US10228344B2 (https=)
EP (1) EP2622333B1 (https=)
JP (2) JP2013542422A (https=)
CN (1) CN103154712B (https=)
WO (1) WO2012050686A1 (https=)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5932806B2 (ja) 2010-09-30 2016-06-08 スリーエム イノベイティブ プロパティズ カンパニー センサー素子、その製造方法、及びそれを含むセンサー装置
US9506888B2 (en) 2011-04-13 2016-11-29 3M Innovative Properties Company Vapor sensor including sensor element with integral heating
WO2012141925A1 (en) 2011-04-13 2012-10-18 3M Innovative Properties Company Method of detecting volatile organic compounds
KR101968999B1 (ko) 2011-04-13 2019-04-15 쓰리엠 이노베이티브 프로퍼티즈 컴파니 흡수 센서 요소를 사용하는 방법
EP2718706B1 (en) 2011-06-08 2015-03-11 3M Innovative Properties Company Humidity sensor and sensor element therefor
WO2013090188A1 (en) 2011-12-13 2013-06-20 3M Innovative Properties Company Method for identification and quantitative determination of an unknown organic compound in a gaseous medium
EP2856128B1 (en) 2012-05-29 2016-09-14 3M Innovative Properties Company Humidity sensor and sensor element
CN104583763B (zh) * 2012-06-25 2017-03-08 3M创新有限公司 传感器元件及其制备和使用方法
JP6263179B2 (ja) 2012-08-02 2018-01-17 スリーエム イノベイティブ プロパティズ カンパニー 携帯用電子装置及び蒸気センサカード
US9317068B2 (en) * 2012-09-24 2016-04-19 Donaldson Company, Inc. Venting assembly and microporous membrane composite
WO2015047750A1 (en) 2013-09-26 2015-04-02 3M Innovative Properties Company Vapor sensor suitable for detecting alcoholic residue at a skin site
WO2015130548A1 (en) 2014-02-27 2015-09-03 3M Innovative Properties Company Sub-ambient temperature vapor sensor and method of use
EP3111202B1 (en) 2014-02-27 2021-07-14 3M Innovative Properties Company Flexible sensor patch and method of using the same
KR101709329B1 (ko) * 2015-06-05 2017-02-22 숭실대학교산학협력단 커패시터형 후각 센서 및 제조 방법
US11183737B2 (en) 2017-08-11 2021-11-23 Lg Chem, Ltd. Electrode assembly, method of manufacturing the same and secondary battery including the same
US10953369B2 (en) 2018-03-08 2021-03-23 Georgia Tech Research Corporation Spirocentric compounds and polymers thereof
CN108802110B (zh) * 2018-05-31 2021-06-22 广东联城住工装备信息科技有限公司 用于测量灌浆套筒灌浆密实度的检测装置及其检测方法
CN109952154B (zh) * 2018-06-26 2022-05-13 京东方科技集团股份有限公司 样本分析芯片及其制造方法
CN110208329B (zh) * 2019-06-24 2021-07-20 徐豫青 一种套筒灌浆密实度检测方法及装置
US20230392254A1 (en) * 2022-06-06 2023-12-07 Uchicago Argonne, Llc Inorganic porous coatings and methods of making the same
CN116753832B (zh) * 2023-08-21 2023-10-27 电子科技大学 一种离子梯度发电型拉伸应变传感器及其制备方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040128823A1 (en) * 2001-03-09 2004-07-08 Mole Terrence James Electrochemical gas sensor
US20060246273A1 (en) * 2003-07-26 2006-11-02 Mckeown Neil B Microporous polymer material
US20070292957A1 (en) * 2004-03-31 2007-12-20 Chua Soo J Sensor for Measuring Gas Permeability of a Test Material
CN101815936A (zh) * 2007-10-05 2010-08-25 3M创新有限公司 包含微孔聚合物的有机化学传感器及使用方法
CN101836108A (zh) * 2007-10-05 2010-09-15 3M创新有限公司 具有等离子体沉积微孔层的有机化学传感器及其制备和使用方法

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0212047A (ja) 1988-06-30 1990-01-17 Toshiba Corp 容量変化型感湿素子およびその製造方法
EP0426989B1 (de) * 1989-11-04 1994-02-02 Dornier Gmbh Selektiver Gassensor
JPH05312754A (ja) 1992-05-11 1993-11-22 Nok Corp 湿度センサ
JPH06281610A (ja) 1993-01-29 1994-10-07 Nok Corp 湿度センサ、アルコ−ルセンサまたはケトンセンサ
US6673533B1 (en) * 1995-03-10 2004-01-06 Meso Scale Technologies, Llc. Multi-array multi-specific electrochemiluminescence testing
DE10031976C2 (de) * 2000-06-30 2003-11-27 Daimler Chrysler Ag Hochtemperaturstoffsensor
US20020142478A1 (en) * 2001-03-28 2002-10-03 Hiroyuki Wado Gas sensor and method of fabricating a gas sensor
JP2002328110A (ja) 2001-04-27 2002-11-15 Yamatake Corp 静電容量センサ
EP1278061B1 (en) * 2001-07-19 2011-02-09 Sony Deutschland GmbH Chemical sensors from nanoparticle/dendrimer composite materials
US7449146B2 (en) 2002-09-30 2008-11-11 3M Innovative Properties Company Colorimetric sensor
US6918284B2 (en) * 2003-03-24 2005-07-19 The United States Of America As Represented By The Secretary Of The Navy Interconnected networks of single-walled carbon nanotubes
US7217354B2 (en) * 2003-08-29 2007-05-15 Ut-Battelle, Llc Method and apparatus for detection of chemical vapors
JP4579593B2 (ja) 2004-03-05 2010-11-10 キヤノン株式会社 標的物質認識素子、検出方法及び装置
US7582196B2 (en) * 2004-08-16 2009-09-01 General Electric Company Laminated membranes for diffusion limited gas sensors resistant to pressure variations
US7776269B2 (en) * 2005-03-15 2010-08-17 The United States Of America As Represented By The Secretary Of The Navy Capacitive based sensing of molecular adsorbates on the surface of single wall nanotubes
US7837844B2 (en) * 2005-04-26 2010-11-23 Seacoast Science, Inc. Interdigitated chemical sensors, and methods of making and using the same
JP2007139447A (ja) 2005-11-15 2007-06-07 Shinshu Univ 薄膜の透湿度測定装置および透湿度測定方法
US7556774B2 (en) 2005-12-21 2009-07-07 3M Innovative Properties Company Optochemical sensor and method of making the same
JP4057036B2 (ja) 2006-01-13 2008-03-05 株式会社日本自動車部品総合研究所 湿度センサ用感湿素子の製造方法
US7767143B2 (en) 2006-06-27 2010-08-03 3M Innovative Properties Company Colorimetric sensors
US8045996B2 (en) 2006-07-31 2011-10-25 Qualcomm Incorporated Determination of cell RF parameters based on measurements by user equipments
US7906223B2 (en) 2006-09-11 2011-03-15 3M Innovative Properties Company Permeable nanoparticle reflector
JP2010532095A (ja) * 2007-06-28 2010-09-30 スリーエム イノベイティブ プロパティズ カンパニー 界面導電性クラスターを組み入れた薄膜トランジスタ
CA2704634A1 (en) * 2007-11-05 2009-05-14 Co2Crc Technologies Pty Ltd Gas separation membranes and processes for the manufacture thereof
JP5160985B2 (ja) * 2008-07-14 2013-03-13 富士フイルム株式会社 検出方法、検出装置、検出用試料セルおよび検出用キット
US7816681B2 (en) * 2008-12-03 2010-10-19 Electronics And Telecommunications Research Institute Capacitive gas sensor and method of fabricating the same
JP5662945B2 (ja) 2008-12-23 2015-02-04 スリーエム イノベイティブ プロパティズ カンパニー 微多孔性有機ケイ酸塩材料を有する有機化学センサ
CN202794129U (zh) 2009-01-29 2013-03-13 3M创新有限公司 用于检测环境空气中有机被分析物存在情况的监控器
KR101720364B1 (ko) 2009-03-30 2017-03-27 쓰리엠 이노베이티브 프로퍼티즈 컴파니 분석물의 검출을 위한 광전자 방법 및 장치
EP2583090B1 (en) 2010-06-15 2016-04-06 3M Innovative Properties Company Variable capacitance sensors and methods of making the same
US8920731B2 (en) * 2010-09-20 2014-12-30 Kimberly-Clark Worldwide, Inc. Nonwoven-based chemi-capacitive or chemi-resistive gas sensor
JP5932806B2 (ja) 2010-09-30 2016-06-08 スリーエム イノベイティブ プロパティズ カンパニー センサー素子、その製造方法、及びそれを含むセンサー装置
WO2012141925A1 (en) 2011-04-13 2012-10-18 3M Innovative Properties Company Method of detecting volatile organic compounds

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040128823A1 (en) * 2001-03-09 2004-07-08 Mole Terrence James Electrochemical gas sensor
US20060246273A1 (en) * 2003-07-26 2006-11-02 Mckeown Neil B Microporous polymer material
US20070292957A1 (en) * 2004-03-31 2007-12-20 Chua Soo J Sensor for Measuring Gas Permeability of a Test Material
CN101815936A (zh) * 2007-10-05 2010-08-25 3M创新有限公司 包含微孔聚合物的有机化学传感器及使用方法
CN101836108A (zh) * 2007-10-05 2010-09-15 3M创新有限公司 具有等离子体沉积微孔层的有机化学传感器及其制备和使用方法

Also Published As

Publication number Publication date
JP2016200605A (ja) 2016-12-01
CN103154712A (zh) 2013-06-12
EP2622333A4 (en) 2016-06-08
WO2012050686A1 (en) 2012-04-19
EP2622333A1 (en) 2013-08-07
EP2622333B1 (en) 2020-06-17
US10228344B2 (en) 2019-03-12
US20130229194A1 (en) 2013-09-05
JP2013542422A (ja) 2013-11-21

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