CN103149217B - 光学元件表面及亚表面缺陷检测红外锁相成像方法及装置 - Google Patents
光学元件表面及亚表面缺陷检测红外锁相成像方法及装置 Download PDFInfo
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Families Citing this family (9)
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CN103712960B (zh) * | 2013-12-26 | 2016-01-13 | 无锡利弗莫尔仪器有限公司 | 一种采用级联锁相检测的光热检测装置及其检测方法 |
CN104034704A (zh) * | 2014-06-27 | 2014-09-10 | 无锡利弗莫尔仪器有限公司 | 一种提高红外辐射成像分辨率的方法及装置 |
CN104713906B (zh) * | 2015-04-01 | 2018-03-13 | 无锡双马钻探工具有限公司 | 一种微波锁相热成像系统及方法 |
CN106770128B (zh) * | 2017-01-11 | 2023-06-27 | 中国工程物理研究院激光聚变研究中心 | 快速三维探测光学元件亚表面缺陷的检测装置及检测方法 |
WO2019174435A1 (zh) | 2018-03-12 | 2019-09-19 | Oppo广东移动通信有限公司 | 投射器及其检测方法和装置、图像获取装置、电子设备、可读存储介质 |
CN112525952A (zh) * | 2020-11-30 | 2021-03-19 | 合肥利弗莫尔仪器科技有限公司 | 一种主动式红外无损检测装置及其检测方法 |
CN112611746A (zh) * | 2020-12-16 | 2021-04-06 | 合肥利弗莫尔仪器科技有限公司 | 一种对于材料微区的吸收光谱检测装置及检测方法 |
CN114295731B (zh) * | 2021-12-28 | 2023-02-21 | 杭州电子科技大学 | 一种基于激光激励纵波测量亚表面缺陷深度的方法 |
CN115219480B (zh) * | 2022-09-01 | 2022-12-16 | 合肥锁相光学科技有限公司 | 一种锁相微光显微成像方法及装置 |
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US5923423A (en) * | 1996-09-12 | 1999-07-13 | Sentec Corporation | Heterodyne scatterometer for detecting and analyzing wafer surface defects |
JP2004108828A (ja) * | 2002-09-13 | 2004-04-08 | Ricoh Co Ltd | 画像入力方法、画像入力装置及び表面欠陥検査装置 |
CN1525160A (zh) * | 2003-02-24 | 2004-09-01 | Asml | 用于测量光刻装置中元件表面污染物的方法和设备 |
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CN101644657A (zh) * | 2009-09-03 | 2010-02-10 | 浙江大学 | 大口径精密光学元件表面缺陷检测的旋转照明方法及装置 |
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CN102519976A (zh) * | 2011-12-26 | 2012-06-27 | 上海大学 | 光学元件亚表面缺陷数字全息检测装置 |
CN102721664A (zh) * | 2012-04-25 | 2012-10-10 | 吴周令 | 一种多光束激光诱导红外辐射成像装置及方法 |
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