CN103134428A - Distributed rapid precise plane six-degree of freedom pose measuring device and measuring method - Google Patents

Distributed rapid precise plane six-degree of freedom pose measuring device and measuring method Download PDF

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CN103134428A
CN103134428A CN2013100849343A CN201310084934A CN103134428A CN 103134428 A CN103134428 A CN 103134428A CN 2013100849343 A CN2013100849343 A CN 2013100849343A CN 201310084934 A CN201310084934 A CN 201310084934A CN 103134428 A CN103134428 A CN 103134428A
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freedom
prism
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CN103134428B (en
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黄向东
谭久彬
于文波
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Harbin Institute of Technology
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Harbin Institute of Technology
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Abstract

The invention discloses a distributed rapid precise plane six-degree of freedom pose measuring device and a measuring method and belongs to the technical field of semiconductor fabrication equipment, and particularly relates to the distributed rapid precise plane six-degree of freedom pose measuring device. According to the distributed rapid precise plane six-degree of freedom pose measuring device, laser diodes are introduced to serve as light sources and two-dimension Phase-Sensitive Detectors (PSDs) are introduced to serve as photoelectric elements. The light source portion and the two-dimension PSDs are integrated, and therefore the size is reduced, the weight is lightened, and installation is convenient. In addition, three cube-corner prisms are arranged on a motion platform, and therefore motion load of the motion platform is reduced. To sum up, the distributed rapid precise plane six-degree of freedom pose measuring device is simple in structure and very appropriate for six-degree of freedom pose measurement on the high-speed motion platform. According to the distributed rapid precise plane six-degree of freedom pose measuring device, the cube-corner prisms arranged on the platform to be measured serve as position sensing elements, a three-dimensional coordinate system formed by the cube-corner prisms and the PSDs is converted into a motion coordinate system of the platform to be measured through transformation of coordinate systems, and therefore six-degree of freedom information can be obtained. And therefore the measuring method is easy and convenient to operate and adjustment of light paths is easy.

Description

A kind of distributed plane six-freedom degree pose fast precise measurement apparatus and method
Technical field
A kind of distributed plane six-freedom degree pose fast precise measurement apparatus and method belong to the semiconductor manufacturing equipment technical field, are specifically related to a kind of distributed plane six-freedom degree pose fast precise measurement apparatus and method.
Background technology
The multi-degree of freedom measurement technology has very important effect in the processing of VLSI (very large scale integrated circuit) manufacturing, micro optical element, nano material manufacturing and MEMS (micro electro mechanical system) assembling and the field such as integrated.Fast development along with Precision Manufacturing Technology, the attitude of multiple degrees of freedom platform is controlled had higher requirement, in the litho machine course of work, need to measure quickly and accurately dynamic perfromances such as the pose of work stage and speed, and in real time with the six-degree of freedom position Error Feedback to control system, thereby complete accurate control to work stage.Therefore objectively need a kind of six degree of freedom measuring technique with quick high accuracy, to satisfy in super hot investment casting the pose measurement to multi-degree-of-freedom motion platform.
Traditional multi-degree of freedom measurement technology mainly contains the measuring technique of coordinate measuring machine and binocular stereo vision etc., but all is not suitable for dynamic real-time measurement.Developing at present faster, the multi-degree of freedom measurement technology mainly is based on laser interferometry, as the multi-degree of freedom measurement system based on two-frequency laser interferometer, the method measurement range is large, speed is high, be applicable to macro-scale and measure, but its Installation and Debugging are complicated, cost is high, the measuring system volume is large, is unfavorable for the integrated of system.In addition, cost simple in structure is low receives much attention due to it for the method for utilizing facula position to change to realize multi-degree of freedom measurement.Propose to use two cover laser dopper flowmeter horizontal metroscopes and four-quadrant receiver to form the six degree of freedom measuring system as Taiwan Univ..But the method as measuring basis, wants accurate adjustment parallel to guarantee three-beam due to the laser beam that light source is sent before measuring, directly final measuring accuracy and the difficult compensation of impact of the stability of light source.And for example Nihon University and upper intelligence university propose to record horizontal position error by conventional laser interference length-measuring system, utilize simultaneously beam splitter to obtain two parallel beams, utilize three 4 quadrant detectors to obtain all the other five errors, the method will measure mirror and photodetection partly is placed on movable platform, because volume can not be used for the kinetic measurement of high-speed machining center greatly, also need guarantee simultaneously the collimation of two bundle directional lights, data are difficult for revising, and have limited its range of application.
More than studies show that, the multi-degree of freedom measurement technology is with a wide range of applications, this technology just towards quick high accuracy, on a large scale, compact conformation, portable good future development.Complex structure, integrated level are low, the high in cost of production problems and exist in existing six degree of freedom measuring technique, need constantly to introduce new unit, new method is improved.
Summary of the invention
In order to address the above problem, the invention discloses a kind of distributed plane six-freedom degree pose fast precise measurement apparatus and method, this device have volume little, lightweight, be convenient to install and characteristics simple in structure, the six-freedom degree pose that is very suitable for the high-speed motion platform is measured; The method is easy and simple to handle, and the light path adjustment is simple.
The object of the present invention is achieved like this:
A kind of distributed plane six-freedom degree pose fast precise measurement device comprises the prism of corner cube that is configured on platform to be measured, is configured in light source assembly and signal receiving assembly, signals collecting computing circuit plate and main control computer on gage frame; Described prism of corner cube and light source assembly and signal receiving assembly are 3 covers, and every cover light source assembly and signal receiving assembly all are fixed on gage frame by the mechanical erection frame; Described light source assembly comprises collimation lens, laser diode; Described signal receiving assembly comprises Two-dimensional PSD and signal circuit plate; Wherein, after laser process collimation lens collimation by laser diode output, transmit through polarization maintaining optical fibre, incide prism of corner cube, the reflected light retroeflection is on the Two-dimensional PSD the time, Two-dimensional PSD produces corresponding output signal, then is transferred to together signals collecting computing circuit plate through the signal circuit plate with other two groups of identical signals, and after decoupling zero, the output measurement result is to main control computer.
Above-mentioned a kind of distributed plane six-freedom degree pose fast precise measurement device, described collimation lens and laser diode are arranged in light-source box.
Above-mentioned a kind of distributed plane six-freedom degree pose fast precise measurement device, in measuring process, gage frame remains stationary state.
Above-mentioned a kind of distributed plane six-freedom degree pose fast precise measurement device, described three prism of corner cubes are arranged in three drift angle places of platform to be measured, at right angles triangle; The light that light source sends is parallel with the reflected light of pyramid, and direction of light and platform plane angle to be measured 45 ± 2 degree.
A kind of distributed plane six-freedom degree pose fast precise measurement method,
When prism of corner cube and platform to be measured are in a certain position, obtain the six-degree-of-freedom information of current platform to be measured after coordinate transform;
During along with platform movement to be measured, incide the position change amount of Two-dimensional PSD receiving plane and the geometrical correspondence of asking of to be measured platform according to retroreflection light when prism of corner cube, obtain the six-degree-of-freedom information that platform to be measured changes after coordinate transform.
The laser diode of having introduced frequency stabilization due to apparatus of the present invention is light source, and Two-dimensional PSD is photovalve, and the Lights section and Two-dimensional PSD are integrated, and therefore can reduce volume, weight reduction, be convenient to install; Only three prism of corner cubes are placed on motion platform simultaneously, have also reduced the motion load of platform, in sum, this measurement mechanism is simple in structure, and the six-freedom degree pose that is very suitable for the high-speed motion platform is measured; Because the inventive method adopts the prism of corner cube that is distributed on platform to be measured as position sensing element, by coordinate system transformation, the three-dimensional system of coordinate that prism of corner cube and PSD consist of is converted to platform moving coordinate system to be measured, thereby obtain the six-degree-of-freedom information of platform to be measured, therefore this measuring method is easy and simple to handle, and the light path adjustment is simple.
Description of drawings
Fig. 1 is the present invention distributed plane six-freedom degree pose fast precise measurement apparatus structure schematic diagram.
Fig. 2 is that the present invention measures the coordinate schematic diagram.
Fig. 3 is the system coordinates schematic diagram that the 3rd group of Two-dimensional PSD and prism of corner cube form.
Fig. 4 is Two-dimensional PSD coordinate schematic diagram.
In figure: 1 prism of corner cube, 2 mechanical erection framves, 3 collimation lenses, 4 laser diodes, 5 light-source box, 6 platforms to be measured, 7 Two-dimensional PSD, 8 signal circuit plates, 9 signals collecting computing circuit plates, 10 main control computers, 11 gage frame.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the invention is described in further detail.
The distributed plane six-freedom degree pose fast precise measurement apparatus structure schematic diagram of the present embodiment as shown in Figure 1, this measurement mechanism comprises the prism of corner cube 1 that is configured on platform 6 to be measured, is configured in light source assembly and signal receiving assembly, signals collecting computing circuit plate 9 and main control computer 10 on the gage frame 11 that keeps stationary state in measuring process; Described prism of corner cube 1 is 3 covers with light source assembly and signal receiving assembly, and every cover light source assembly and signal receiving assembly all are fixed on gage frame 1l by mechanical erection frame 2; Described light source assembly comprises the collimation lens 3 and laser diode 4 that is arranged in light-source box 5; Described signal receiving assembly comprises Two-dimensional PSD 7 and signal circuit plate 8; Wherein, after laser process collimation lens 3 collimations by laser diode 4 outputs, transmit through polarization maintaining optical fibre, incide prism of corner cube 1, the reflected light retroeflection is on the Two-dimensional PSD 7 time, Two-dimensional PSD 7 produces corresponding output signals, then is transferred to together signals collecting computing circuit plate 9 through signal circuit plate 8 with other two groups of identical signals, and after decoupling zero, the output measurement result is to main control computer 10.
Above-mentioned distributed plane six-freedom degree pose fast precise measurement device, described three prism of corner cubes 1 are arranged in the place, three item angles of platform 6 to be measured, at right angles triangle; The light that light source sends is parallel with the reflected light of pyramid, and direction of light and platform plane angle to be measured 45 degree.
Fig. 2 has stipulated the coordinate definition in the measuring process, sees the axle to x from true origin, and the direction of y axle and z axle is respectively Rx, Ry, and the Rz direction, and clockwise turn to positive dirction.Prism of corner cube 1 all is positioned at the xoy plane, and the coordinate of installation site is (anx, any, 0), n=l, 2,3; Prism of corner cube 1 reflection direction is β with respect to the angle that is rotated counterclockwise of x axle positive dirction, and Two-dimensional PSD 7 is α with respect to the mounting inclination angle degree of platform 6 to be measured.
Fig. 3 is take system that the 3rd group of Two-dimensional PSD 7 and prism of corner cube 1 forms as example, and the measurement coordinate be described.The coordinate of prism of corner cube 1 is (a3x, a3y, 0), and prism of corner cube 1 reflection direction is β with respect to the angle that is rotated counterclockwise of x axle positive dirction 3, the coordinates table of Two-dimensional PSD 7 is shown (S3x, S3y), and the component of S3y on 6, platform to be measured is S3xa, is S3xb at the component perpendicular to platform 6 to be measured, as shown in Figure 4.
At first calculate S3x, to know, the S3x of Two-dimensional PSD 7 is parallel with the S3x ' on platform 6 to be measured by the geometric relationship raised path between farm fields, and wherein S3x ' is positioned at the xoy plane, and is vertical with vectorial OP, and satisfies S3x=S3x '.So when platform to be measured is done six-freedom motion, x, y and Rz will affect the size of S3x ', by geometric relationship and consider that direction can get:
S3x=S3x'=x·sinβ 3-y·cosβ 3-(a3x·cosβ 3+a3y·sinβ 3)·Rz (1)
Next calculate S3y, easily known by geometric relationship, S3ya and x, y is relevant with Rz, and with z, Rx and Ry are irrelevant, and the computing formula of S3ya is:
S3ya=-x·cosβ 3-y·sinβ 3+(a3y·cosβ 3-a3x·sinβ 3)·Rz (2)
S3yb is identical with the z forward, so S3yb only and Rx, the variation of Ry and z is relevant, can be obtained by geometric relationship:
S3yb=-Rx·a3y+Ry·a3x+z (3)
And have:
S3y=S3yb·sinα+S3ya·COSα (4)
Bringing formula (2) and (3) into formula (4) can get:
S3y=S3yb·sinα+S3ya·cosα
＝x·(-cosβ 3cosα)+y·(-sinβ 3cosα)+z·(sinα)+Rx·(-a3ysinα)
+ Ry (a3xsin α)+Rz[(a3ycos β 3One a3xsin β 3) cos α]
(5)
More than the calculating about the 3rd group of Two-dimensional PSD 7, due to light path process incident and reflection twice, so the coordinate figure of the Two-dimensional PSD 7 in reality is 2 times of calculated value.
In fact be consistent for first group with the derivation of second group of Two-dimensional PSD 7 and the result of gained, for more directly perceived we to be rewritten into matrix form as follows:
S 1 x S 1 y S 2 x S 2 y S 3 x S 3 y = 2 sin β 1 - cos β 1 0 0 0 - cos β 1 cos α - sin β 1 cos α sin α - aly sin α alx sin α sin β 2 - cos β 2 0 0 0 - cos β 2 cos α - sin β 2 cos α sin α - a 2 y sin α a 2 x sin α sin β 3 - cos β 3 0 0 0 - cos β 3 cos α - sin β 3 cos α sin α - a 3 y sin α a 3 x sin α
- alx · cos β 1 - aly · sin β 1 ( aly · cos β 1 - alx · sin β 1 ) · cos α - a 2 x · cos β 2 - a 2 y · sin β 2 ( a 2 y · cos β 2 - a 2 x · sin β 2 ) · cos α - a 3 x · cos β 3 - a 3 y · sin β 3 ( a 3 y · cos β 3 - a 3 x · sin β 3 ) · cos α x y z Rx Ry Rz - - - ( 6 )
Brief note is:
Two-dimensional PSD 7 coordinates=transition matrix * platform 6 coordinates to be measured (7)
Platform six-degree-of-freedom information to be measured to be asked is:
Platform 6 coordinates to be measured=transition matrix-1 * Two-dimensional PSD, 7 coordinates (8)

Claims (5)

1. distributed plane six-freedom degree pose fast precise measurement device is characterized in that: comprise the prism of corner cube (1) that is configured on platform to be measured (6), be configured in light source assembly and signal receiving assembly, signals collecting computing circuit plate (9) and main control computer (10) on gage frame (11); Described prism of corner cube (1) is 3 covers with light source assembly and signal receiving assembly, and every cover light source assembly and signal receiving assembly all are fixed on gage frame (11) by mechanical erection frame (2); Described light source assembly comprises collimation lens (3), laser diode (4); Described signal receiving assembly comprises Two-dimensional PSD (7) and signal circuit plate (8); Wherein, after laser process collimation lens (3) collimation by laser diode (4) output, transmit through polarization maintaining optical fibre, incide prism of corner cube (1), when the reflected light retroeflection is upper to Two-dimensional PSD (7), Two-dimensional PSD (7) produces corresponding output signal, then passes through signal circuit plate (8) and be transferred to together signals collecting computing circuit plate (9) with other two groups of identical signals, and after decoupling zero, the output measurement result is to main control computer (10).
2. a kind of distributed plane according to claim 1 six-freedom degree pose fast precise measurement device, it is characterized in that: described collimation lens (3) is arranged in light-source box (5) with laser diode (4).
3. a kind of distributed plane according to claim 1 six-freedom degree pose fast precise measurement device, it is characterized in that: in measuring process, gage frame (11) remains stationary state.
4. a kind of distributed plane according to claim 1 six-freedom degree pose fast precise measurement device is characterized in that: described three prism of corner cubes (1) are arranged in three drift angle places of platform to be measured (6), at right angles triangle; The light that light source sends is parallel with the reflected light of pyramid, and direction of light and platform plane angle to be measured 45 ± 2 degree.
5. distributed plane six-freedom degree pose fast precise measurement method is characterized in that:
When prism of corner cube (1) when being in a certain position, obtains the six-degree-of-freedom information of current platform to be measured (6) with platform to be measured (6) after coordinate transform;
When prism of corner cube (1) moves along with platform to be measured (6), incide the position change amount of Two-dimensional PSD (7) receiving plane and the geometrical correspondence between platform to be measured (6) according to retroreflection light, obtain the six-degree-of-freedom information that platform to be measured (6) changes after coordinate transform.
CN201310084934.3A 2013-03-18 2013-03-18 A kind of distributed plane six-freedom degree pose fast precise measurement method Active CN103134428B (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110749287A (en) * 2019-11-27 2020-02-04 复旦大学 Optical method and device for measuring suspension gap of magnetic suspension guide rail
CN111384655A (en) * 2020-03-25 2020-07-07 龙天洋 Self-feedback high-stability laser pulse compressor
CN113028987A (en) * 2021-03-03 2021-06-25 中国科学院光电技术研究所 High-precision six-degree-of-freedom measuring method and device based on laser range finder
CN113091979A (en) * 2019-12-23 2021-07-09 马洪文 Distributed multi-dimensional force measuring system and force measuring method

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110749287A (en) * 2019-11-27 2020-02-04 复旦大学 Optical method and device for measuring suspension gap of magnetic suspension guide rail
CN110749287B (en) * 2019-11-27 2021-05-07 复旦大学 Optical method and device for measuring suspension gap of magnetic suspension guide rail
CN113091979A (en) * 2019-12-23 2021-07-09 马洪文 Distributed multi-dimensional force measuring system and force measuring method
CN111384655A (en) * 2020-03-25 2020-07-07 龙天洋 Self-feedback high-stability laser pulse compressor
CN111384655B (en) * 2020-03-25 2023-03-14 龙天洋 Self-feedback high-stability laser pulse compressor
CN113028987A (en) * 2021-03-03 2021-06-25 中国科学院光电技术研究所 High-precision six-degree-of-freedom measuring method and device based on laser range finder

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