CN103115636B - Optical fiber Fabry-Perot sensor multiplexing method and device based on multi-wavelength and low-coherence light source - Google Patents

Optical fiber Fabry-Perot sensor multiplexing method and device based on multi-wavelength and low-coherence light source Download PDF

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CN103115636B
CN103115636B CN201310047987.8A CN201310047987A CN103115636B CN 103115636 B CN103115636 B CN 103115636B CN 201310047987 A CN201310047987 A CN 201310047987A CN 103115636 B CN103115636 B CN 103115636B
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fiber fabry
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perot sensor
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江俊峰
刘铁根
尹金德
刘琨
王双
吴凡
秦尊琪
宋璐瑶
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Tianjin University
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Abstract

The invention discloses an optical fiber Fabry-Perot sensor multiplexing method and device based on a multi-wavelength and low-coherence light source. The optical fiber Fabry-Perot sensor multiplexing device comprises a light source module, 3dB couplers, an optical fiber Fabry-Perot sensor unit and a demodulation unit. The optical fiber Fabry-Perot sensor multiplexing method is characterized in that all channels of the light source module output low-coherence light with different wavelengths; N channel light passes through the corresponding 3dB couplers and then are irradiated to the corresponding optical fiber Fabry-Perot sensors, and reflected light re-passes the corresponding 3dB couplers and form a light beam through a multi-channel beam combiner to be irradiated into the demodulation unit; a demodulation interferometer achieves optical path difference scanning and outputs low-coherence interference fringes overlapped with all sensor cavity length information; and low-coherence interference fringe optical signals are converted to electric signals and then transmitted to a computer, the signals are subjected to filter analysis and decision algorithm processing, simultaneously all optical fiber Fabry-Perot sensor information is demodulated, and multiplexing of the optical fiber Fabry-Perot sensor is achieved. Compared with the prior art, the optical fiber Fabry-Perot sensor multiplexing method and device reduce system cost, support batch production, and can simultaneously and independently achieve multi-channel sensor multiplexing demodulation.

Description

Based on the optical fiber Fabry-Perot sensor multiplexing method of multi-wavelength low-coherence light source
Technical field
The present invention relates to sensory field of optic fibre, particularly relate to a kind of optical fiber Fabry-Perot sensor multiplexing method and device.
Background technology
Optical fiber Fabry-Perot sensor utilizes the long change of its Fa-Po cavity to realize the sensing measurement of the physical quantitys such as displacement, pressure, temperature, has the advantages such as size is little, precision is high, good stability, be all subject to extensive concern in investigation and application field due to it.But Fabry-Perot sensor is compared to other Fibre Optical Sensors such as fiber gratings, and the Technical comparing used when the sensing of sensing measurement is multiplexing realizing multiple spot while is complicated.
Optical fiber Fabry-Perot sensor multichannel multiplexing method can be divided into two classes substantially, and a class is optical path scanning method, and its principle is the method adopting optical path scanning, matches the chamber long value of each different cavity tall sensor.As (Multiplexed optical fibre Fabry-Perot sensors for strain metrology such as M Singh, Smart materials and structures 1999, 8:549 – 553.) and (the Multiplexed fiber Fabry – Perot temperature sensor system using white-light interferometry such as Yichao Chen, Optics Letters, 2002, 27 (11): 903-905) Fabry-Perot sensor long for multiple different cavity is connected as sensing unit, Michelson interferometer is adopted to carry out the method for optical path scanning again, the chamber matching each Fabry-Perot sensor is long, realize Fabry-Perot sensor multiplexing demodulation.Another kind of is spectral scanning method, and its principle gathers and analyzes the interference spectrum of Fabry-Perot sensor, calculates Fa-Po cavity long value.As Liu, (the A frequency division multiplexed low-finesse fiber optic Fabry – Perot sensor system for strain and displacement measurements such as T, Review of Scientific Instruments 71 (3): 1275-1278.) adopt line array CCD to receive the interference spectrum of the long Fabry-Perot sensor of different cavity simultaneously, again Fourier transform is carried out to interference spectrum, obtain long corresponding spectrum peak position, each chamber, realize the multiplexing demodulation of different cavity tall sensor.
Above-mentioned two kinds of Fabry-Perot sensor multiplexing methods are all based upon on the multiplexing basis of different cavity tall sensor, and long owing to needing accurately to control each sensor cavity in the manufacturing process of sensor, thus cost of manufacture is high, and efficiency is low.Current, easily realize the long consistent extrinsic optical fiber Fabry-Perot sensor mass in chamber based on MEMS process technology and make, processing cost is low, has promotional value.But there is same chamber for optical fiber Fabry-Perot sensor long, or there is overlapping situation in change of cavity length process, above-mentioned multiplexing method will be no longer applicable.
Summary of the invention
Based on above-mentioned the deficiencies in the prior art, the present invention proposes a kind of optical fiber Fabry-Perot sensor multiplexing method based on multi-wavelength low-coherence light source, this Fabry-Perot sensor multiplexing method is applicable to the parallel of multiple sensor, many measurement points or many reference amounts and independently measures, and realizes the high precision demodulation that displacement, pressure, strain, temperature, refractive index etc. can be converted into the physical quantity of the long change of Fa-Po cavity.
The present invention proposes a kind of optical fiber Fabry-Perot sensor multiplexing method based on multi-wavelength low-coherence light source, comprise following concrete steps:
Step one, after the light of wideband light source outgoing being coupled to N road multimode optical fiber simultaneously in light source module, each road light is respectively through the different optical filter of the wavelength of correspondence, and namely light source module exports the different low-coherent light of N channel wavelength simultaneously; Low-coherent light, by reflecting after corresponding three-dB coupler and optical fiber Fabry-Perot sensor, contains the optical path difference information that sensor produces in reflected light; Each channel reflection light synthesizes light beam after hyperchannel bundling device, and incide demodulated interferential unit, at demodulated interferential unit: demodulated interferential instrument carries out optical path scanning coupling to flashlight, and export the low coherence interference striped having superposed all the sensors optical path difference information.The ground coherent interference striped light signal that demodulated interferential instrument exports by electrooptical device converts electric signal to;
Step 2, via capture card, the electric signal of step one is input to computing machine, and be for further processing in a computer, concrete processing procedure for: Fast Fourier Transform (FFT) is carried out to electric signal described in step one, obtain frequency-domain waveform, in frequency-domain waveform, each self-separation of each optical fiber Fabry-Perot sensor signal, independence; The bandpass filtering function that structure and each optical fiber Fabry-Perot sensor frequency-region signal match, is multiplied each filter function with frequency-domain waveform respectively, isolates each optical fiber Fabry-Perot sensor frequency domain information; Respectively each frequency domain information separated is done inverse fast Fourier transform, thus restore each optical fiber Fabry-Perot sensor independently low coherence interference striped; Determine each sensor corresponding low coherence interference striped peak value respectively, eventually through determining that interference fringe peak realizes optical fiber Fabry-Perot sensor multiplexing demodulation.
The another kind of constituted mode of light source module in described step one adopts wavelength different LED light source to form, and the steps include: to be coupled among N channel multimode optical fiber by the LED light source of N number of different wave length respectively, the low-coherent light that in N channel, output wavelength is different.
Compared with prior art, patent of the present invention has following beneficial effect:
1, compared to existing optical path scanning and spectral scan multiplexing method, the present invention can realize multichannel same chamber tall sensor multiplexing demodulation, must not avoid overlapping restriction by sensor change of cavity length.The extrinsic optical fiber Fabry-Perot sensor multiplexing demodulation that the chamber being applicable to complete based on MEMS process technology is long unanimously, mass makes, reduces the cost of system, has promotional value.
2, compared to photoswitch suitching type multiplexing method, the present invention does not limit by time-switching, can simultaneously, independently realize multiple sensor multiplexing demodulation.Although each sensor signal superposes in the time domain mutually, separate on frequency domain, by frequency domain filtering Analysis And Evaluation algorithm process, realize each sensor signal simultaneously, independent demodulation, and do not affect demodulation accuracy and stability.
Accompanying drawing explanation
Fig. 1 is the optical fiber Fabry-Perot sensor multiplexer structural representation based on multi-wavelength low-coherence light source;
Fig. 2 forms light source module schematic diagram by different wave length LED light source;
Fig. 3 is the low-coherent light spectrum of the four-way different wave length that light source module exports;
Fig. 4 is that the independent low-coherent light of four-way produces low coherence interference bar graph;
Fig. 5 is superposition low coherence interference striped normalization light intensity Output rusults;
Fig. 6 is the low coherence interference signal frequency domain waveform of superposition and the bandpass filtering function of correspondence;
Fig. 7 is four-way corresponding low coherence interference striped separating resulting.
In figure, 1, light source module (comprising: 2, wideband light source, 3, first optical filter, 4, second optical filter, 5, i-th optical filter, 6 N optical filters), 7, multimode optical fiber, 8, first three-dB coupler, 9, second three-dB coupler, 10, i-th three-dB coupler, 11, N three-dB coupler, 12, optical fiber Fabry-Perot sensor unit (comprises 13, first optical fiber Fabry-Perot sensor, 14, second optical fiber Fabry-Perot sensor, 15, i-th optical fiber Fabry-Perot sensor, 16, N optical fiber Fabry-Perot sensor), 23, demodulating unit (comprising: 17, hyperchannel bundling device, 18, demodulated interferential instrument, 19, electrooptical device, 20, capture card, 21, computing machine, 22, multimode optical fiber), 24, first LED light source, 25, second LED light source, 26, i-th LED light source, 27, N LED light source, 28, 3rd light source light spectrum, 29, 4th light source light spectrum, 30, first low coherence interference striped, 31, second low coherence interference striped, 32, 3rd low coherence interference article, 33, 4th low coherence interference striped, 34, first low coherence interference fringe envelope, 35, second low coherence interference fringe envelope, 36, 3rd low coherence interference article envelope, 37, 4th low coherence interference fringe envelope, 38, low coherence interference stripe stack envelope, 39, low coherence interference stripe stack envelope, 40, 4th frequency spectrum, 41, 3rd frequency spectrum, 42, second frequency spectrum, 43, first frequency spectrum, 44, 4th bandpass filtering function, 45, 3rd bandpass filtering function, 46, second bandpass filtering function, 47, first bandpass filtering function, 48, first filtering is separated low coherence interference striped, and 49, second filtering is separated low coherence interference striped, and 50, 3rd filtering is separated low coherence interference striped, and 51, 4th filtering is separated low coherence interference striped, and the 52, first filtering is separated low coherence interference fringe envelope, and 53, second filtering is separated low coherence interference fringe envelope, and 54, 3rd filtering is separated low coherence interference fringe envelope, and 55, 4th filtering is separated low coherence interference fringe envelope, and 56, first light source light spectrum, 57, secondary light source spectrum.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in detail, if these embodiments exist exemplary content, should not be construed to limitation of the present invention.
Embodiment 1: based on the optical fiber Fabry-Perot sensor multiplexer of multi-wavelength low-coherence light source
This device composition includes light source module, three-dB coupler, optical fiber Fabry-Perot sensor, hyperchannel bundling device, demodulated interferential instrument, electrooptical device, capture card and computing machine, adopts multimode optical fiber to carry out optical signal transmission between each parts of light path:
Light source module 1 is by the first filter plate, second filter plate of wideband light source 2 and N number of different wave length ... i-th filter plate, N filter plate is formed, and the light that wideband light source 2 sends is coupled in N root multimode fiber 7 simultaneously, and N represents optical fiber Fabry-Perot sensor multiplex channel sum.I-th (i represents the number between 1 ~ N) channel wideband light, by the i-th optical filter, exports the low-coherent light with the i-th optical filter corresponding wavelength.This low-coherent light light is by after the i-th three-dB coupler, incide the i-th optical fiber Fabry-Perot sensor, include the reflected light of the i-th optical fiber Fabry-Perot sensor chamber long message again after the i-th three-dB coupler, synthesize light beam by hyperchannel bundling device 17, incide demodulated interferential instrument 18 by multimode optical fiber 22.Demodulated interferential instrument 18 realizes optical path scanning, and exports the low coherence interference striped having superposed all the sensors chamber long message.After low coherence interference striped light signal is converted to electric signal by photoelectric commutator 19, be transferred to computing machine 21 via capture card 20, by signal handler, Filtering Analysis and decision algorithm process carried out to signal, demodulate each sensor information simultaneously, realize sensor multiplexing.
Above-mentionedly to be specially based on the element in the optical fiber Fabry-Perot sensor multiplexer of multi-wavelength low-coherence light source:
(1) light source module: by wideband light source 2 and filter plate 1,2 ... i ... N is formed, and wideband light source, according to the sensitometric characteristic of electrooptical device, selects white LED light source, Halogen lamp LED, xenon lamp, ASE light source; The another kind of structure of described light source module 1 is by the LED light source 1,2 of different wave length ... i ... N is coupled to multimode optical fiber 7 respectively and forms; Export the low-coherent light of N channel different wave length;
(2) three-dB coupler: select multi-module optical fiber coupler, plays divided beams and the effect of closing light beam;
(3) optical fiber Fabry-Perot sensor: impression is extraneous to be measured, produces and relevant optical path difference to be measured;
(4) hyperchannel bundling device: the reflection combiner of 1 ~ N channel is become light beam, and light is input to demodulated interferential instrument 18;
(5) demodulated interferential instrument: utilize optical path scanning, mates with sensor reflected light optical path difference, and then exports superposition low coherence interference light signal;
(6) electrooptical device: superposition low coherence interference light signal is converted to electric signal, according to selection light source spectral band, selects linear array CCD camera, linear array CMOS camera, Gallium indium arsenide photodetector, PIN photoelectric detector;
(7) capture card: the electric signal gathering electrooptical device 19, and be input to computing machine 21.
(8) computing machine: realize data acquisition, Fourier transform, bandpass filtering, inverse Fourier transform, peak value judgement, signal receiving.
Embodiment 2: the low coherence interference Signal averaging that multi-wavelength low-coherence light source produces is analyzed
Low coherence interference refers to that adopting short-phase dry length light source to produce interferes, and has when zero optical path difference, there is maximum interference fringe visibility, and along with the increase of optical path difference and reduction, the feature that visibility of interference fringes is progressively decayed.When optical path difference is greater than the coherence length of laser, visibility of interference fringes will be zero.Can reach a conclusion: when optical path difference is zero, corresponding low coherence interference fringe envelope peak value.This conclusion is the basis based on low coherence interferometry.
Example is multiplexed with below, to multiplexing method labor of the present invention with four-way optical fiber Fabry-Perot sensor.Be illustrated in figure 3 the low-coherent light spectrum of the four road different wave lengths that light source module exports, the central wavelength lambda of first to fourth light source light spectrum 56,57,28,29 correspondence 01~ λ 04be respectively 450nm, 500nm, 550nm and 600nm, the half-band width Δ λ of four road light sources 1~ Δ λ 4be 25nm, each passage low-coherent light is by after corresponding sensor, and the optical path difference information comprised in light signal is respectively δ 1, δ 2, δ 3and δ 4, incide demodulated interferential instrument 18 after reflection combiner, the optical path scanning function representation of demodulated interferential instrument 18 is kt, and wherein k is optical path scanning coefficient (constant), and t is sweep parameter.The low coherence interference striped normalization light intensity function that each passage is corresponding is expressed as:
I i ( λ , t ) = ∫ - ∞ + ∞ S i ( λ ) · I i ( λ , δ i ) · I i ( λ , t ) dλ - - - ( 1 )
S i ( λ ) = 2 ln 2 Δλ i π exp [ - ( 2 ln 2 λ - λ 0 i Δλ i ) 2 ] - - - ( 2 )
I i ( λ , δ i ) = 1 - cos ( 2 π δ i λ ) - - - ( 3 )
I i ( λ , t ) = 1 - cos ( 2 πkt λ ) - - - ( 4 )
In above formula (1) ~ (4), i=1 ~ 4, represent channel number, I i(λ, t) represents i passage low coherence interference striped normalization light intensity function, S i(λ) i passage low-coherent light spectral function is represented, I i(λ, δ i) represent optical fiber Fabry-Perot sensor i interference function, I i(λ, t) represents demodulated interferential instrument 18 interference function, and λ represents wavelength, λ 0irepresent light source light spectrum i centre wavelength, Δ λ irepresent light source light spectrum i half-band width, δ irepresent that optical fiber Fabry-Perot sensor i produces optical path difference, k is optical path scanning coefficient, and t is sweep parameter.Show that four-way low-coherent light produces low coherence interference bar graph by above formula (1) ~ (4), as shown in Figure 4, horizontal ordinate is demodulated interferential instrument 18 scan light path difference.At first to fourth low coherence interference fringe envelope 34,35,36, the 37 peak value place that first to fourth low coherence interference striped 30,31,32,33 is corresponding respectively, demodulated interferential instrument 18 scan light path difference δ 1, δ 2, δ 3and δ 4to produce optical path difference equal with each corresponding optical fiber Fabry-Perot sensor.So, by determining the low coherence interference fringe envelope peak value that each passage low coherence interference signal is corresponding, each optical fiber Fabry-Perot sensor optical path difference information can be drawn, thus realize sensor demodulation.
Embodiment 3: based on the optical fiber Fabry-Perot sensor multiplexing method of multi-wavelength low-coherence light source
Each channel sensor reflected light signal synthesizes light beam through hyperchannel bundling device 17, after inciding demodulated interferential instrument 18, exports low coherence interference stripe stack result 38, and superposition low coherence interference striped normalization light intensity function is expressed as:
I ( λ , t ) = Σ i = 1 4 ∫ - ∞ + ∞ S i ( λ ) · I i ( λ , δ i ) · I i ( λ , t ) dλ - - - ( 1 )
Superposition low coherence interference striped normalization light intensity function result as shown in Figure 5.There is multiple peak value in low coherence interference stripe stack result 38, but can not reflect the true optical path difference information of each sensor, so, first need each sensor signal to be separated.Concrete steps are as follows: the first step, do Fast Fourier Transform (FFT), obtain its frequency-domain waveform, as shown in Figure 6 to low coherence interference stripe stack result 38; First to fourth frequency spectrum 43,42,41,40 corresponds respectively to first to fourth low coherence interference bar 30,31,32,33; Second step, constructs first to fourth corresponding bandpass filtering function 47,46,45,44 respectively according to frequency-domain waveform; 3rd step, does inverse fast Fourier transform by first to fourth bandpass filtering function and low coherence interference stripe stack result 38 multiplied result respectively, obtains first to fourth corresponding filtering and is separated low coherence interference striped 48,49,50,51, as shown in Figure 7.So far, complete each Fabry-perot optical fiber pressure sensor signal to be separated.
Comparison diagram 4 and Fig. 7, can find out, filtering is separated low coherence interference fringe envelope peak value and is in same light path difference position with corresponding former low coherence interference fringe envelope peak value.By decision algorithm, determine that each filtering is separated low coherence interference fringe envelope peak, get final product each optical fiber Fabry-Perot sensor information of accurate demodulation, realize sensor multiplexing.

Claims (2)

1. based on an optical fiber Fabry-Perot sensor multiplexing method for multi-wavelength low-coherence light source, it is characterized in that, the method comprises following concrete steps:
Step one, after the light of wideband light source outgoing being coupled to N road multimode optical fiber simultaneously in light source module, each road light is respectively through the different optical filter of the wavelength of correspondence, and namely light source module exports the different low-coherent light of N channel wavelength simultaneously; Low-coherent light, by reflecting after corresponding three-dB coupler and optical fiber Fabry-Perot sensor, contains the optical path difference information that sensor produces in reflected light; Each channel reflection light synthesizes light beam after hyperchannel bundling device, and incide demodulated interferential unit, at demodulated interferential unit: demodulated interferential instrument carries out optical path scanning coupling to flashlight, and export the low coherence interference striped having superposed all the sensors optical path difference information; The ground coherent interference striped light signal that demodulated interferential instrument exports by electrooptical device converts electric signal to;
Step 2, via capture card, the electric signal of step one is input to computing machine, and be for further processing in a computer, concrete processing procedure for: Fast Fourier Transform (FFT) is carried out to electric signal described in step one, obtain frequency-domain waveform, in frequency-domain waveform, the each self-separation of each optical fiber Fabry-Perot sensor signal, independence, the bandpass filtering function that structure and each optical fiber Fabry-Perot sensor frequency-region signal match, respectively each filter function is multiplied with frequency-domain waveform, isolates each optical fiber Fabry-Perot sensor frequency domain information; Respectively each frequency domain information separated is done inverse fast Fourier transform, thus restore each optical fiber Fabry-Perot sensor independently low coherence interference striped; Determine each sensor corresponding low coherence interference striped peak value respectively, eventually through determining that interference fringe peak realizes optical fiber Fabry-Perot sensor multiplexing demodulation.
2. as claimed in claim 1 based on the optical fiber Fabry-Perot sensor multiplexing method of multi-wavelength low-coherence light source, it is characterized in that, light source module in described step one adopts wavelength different LED light source to form, the steps include: respectively the LED light source of N number of different wave length to be coupled among N channel multimode optical fiber, the low-coherent light that in N channel, output wavelength is different.
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