CN103102061A - Device and method for producing large-size quartz glass by using composite induction-resistance melting induction smelting method - Google Patents
Device and method for producing large-size quartz glass by using composite induction-resistance melting induction smelting method Download PDFInfo
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- CN103102061A CN103102061A CN2013100627390A CN201310062739A CN103102061A CN 103102061 A CN103102061 A CN 103102061A CN 2013100627390 A CN2013100627390 A CN 2013100627390A CN 201310062739 A CN201310062739 A CN 201310062739A CN 103102061 A CN103102061 A CN 103102061A
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
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- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Abstract
The invention provides a device and a method for producing large-size quartz glass by using a composite induction-resistance melting induction smelting method. The device comprises a raw material chamber, a hydrogen storage kettle, a rotary cylinder, a vacuum pump, a smelting chamber, a smelting furnace body, a smelting furnace cover and a material distributor of a material distribution chamber, which are connected with each other to form the device. The large-size quartz glass is prepared by processing highly pure quartz materials of 300 meshes with the purity higher than 99.9% by the device; a resistance-induction composite heating way is adopted; and the quartz flux is electromagnetically stirred by the induction heating, so that air bubbles are decreased and the yield is higher than 90%. The shape and size of glass ingots are determined according to the size of an induction crucible; the glass ingots are quartz glass ingots with the maximum diameter of 2000mm, which breaks through a limit that a method of producing the glass ingots by using a continuous smelting method has difficulty in producing the quartz glass ingots with the diameter larger than 500mm; the investment cost is less than 10% of that of the continuous smelting method; and the method has market flexibility of quantitative production.
Description
Technical field
The present invention is the compound molten induction refining method production large size quartz glass apparatus of a kind of induction/resistance and method.
Background technology
Silica glass is the extraordinary industrial technology glass of silicon-dioxide one-component, and it has extremely good light transmission, in ultraviolet, visible, infrared full-wave section, high transmitance is arranged; Its resistance to elevated temperatures is fine, is transparent refractory materials, and use temperature is up to 1100 ℃, and is higher 700 ℃ than simple glass.Its coefficient of expansion is extremely low, is equivalent to 1/20th of simple glass, and thermostability is good especially.Therefore be widely applied in high-tech areas such as Novel electric light source, semiconductor integrated circuit, laser technology and aerospace.
The manufacturing process of silica glass is very special, and is completely different with general glasswork, and producing silica glass has a lot of difficult points.The first, temperature of fusion is high, viscosity is large, and bubble is difficult to get rid of.Second difficult point, the silica glass that obtain premium properties must be high purity, total impurities less than ten thousand/, the container of fused quartz glass only has high purity tungsten and high purity graphite bi-material.Therefore, the high grade large size silica glass of preparation has larger difficulty.
Making the silica glass thermal source has two kinds, electricity and oxyhydrogen, and the silica glass that the thermal source manufacturing is done in electricity consumption claims electroquartz glass, the silica glass of making the thermal source manufacturing of oxyhydrogen claims blouing ﹠ melting quartz.
First electric smelting technique of China is to adopt large-scale high frequency furnace, and the induction heating plumbago crucible when temperature reaches 1950 ℃, is melted to shapable frit with crystal powder in crucible.Because the high frequency furnace power limited involves great expense, after change into plumbago crucible energising, with large electric current, low voltage resistive heating, claim that this technique is vacuum normal pressure resistance furnaceman skill.On this basis, to the seventies, be improved to again vacuum pressed technique, vacuumize when namely melting, after fusing is good, then improve temperature, make melt softer, claim that this technique is vacuum pressed resistance furnace technique.But vacuum atmospheric pressure kiln and vacuum pressed stove can only be interrupted production, and single furnace output is low, and production efficiency is low, and cost is high, poor product quality.Studied successful continuous smelting technique in 1976, this process using high purity tungsten is done fusion crucible, and with tungsten bar heating, crystal powder is slowly added by feed bin continuously stove is suitable for reading, and the stove end opening draws silica tube continuously, therefore claims continuous induction melting furnace.Adopt the continuous smelting mode can produce Φ 500mm silica glass ingot, but have larger difficulty on larger sized silica glass ingot production technology.
In addition, the continuous smelting method is produced the quartz glass apparatus complexity, investment is higher, is unfavorable for that enterprise is according to the fixed output quota of the turn of the market amount of carrying out.
Summary of the invention
The object of the invention is to, solve above-mentioned existing existing problem, provide a kind of glass maximum more than diameter can reach 2m, have that technique is simple, investment is less, and the compound molten induction refining method production large size quartz glass apparatus of the induction/resistance of the market handiness of the amount of having fixed output quota and method.
Technical scheme of the present invention is:
Its equipment is, raw material cabin, hydrogen-holder are connected with revolving drum respectively, the Hydrogen Ignition hole is installed on revolving drum, vacuum pump is connected with revolving drum, working chamber respectively by pipeline, the melting body of heater is installed in the working chamber, and the melting upper of furnace body is installed the melting bell, and smelting furnace covers the resistance graphite heating body is installed, and be provided with tumbler pin, guarantee to be connected with the tight of melting body of heater; The smelting furnace external body is installed electromagnetic induction coil, and the revolving drum outlet communicates with the distribution cabins feed-pipe, and distribution cabins connects distributor.
Its production method is:
The high purity quartz raw material of 300 order purity more than 99.9% put into long revolving drum by the top feeding chamber, and the front needs that feed intake first are evacuated to vacuum in revolving drum below 1Pa, open subsequently the hydrogen gas valve and pass into the above hydrogen of purity 99.99%.
After the interior vacuum of revolving drum is qualified, close the vacuum system by-pass valve control, stop the vacuum pump operation, drive large hydrogen gas valve and make furnace pressure reach 0.02MPa.Silica powder after logical hydrogen imports in the distributor of taking out vacuum by tremie pipe, and divides into the even cloth of discharge port by distributor and be dispersed in smelting furnace in the working chamber, and after passing through reciprocal uniform distribution, the bed of material reaches 500-600mm; After cloth is completed, distributor is shifted out, install bell, start vacuum system, vacuum should be less than 0.1Pa.
After vacuum is qualified, open top resistive heating device power switch, slowly be warming up to 1000 ℃ and be incubated 1h.Open 150kW Medium frequency induction melting power switch, be warming up to 1750 ℃ of insulations 2 hours.Continue to improve smelting temperature to 2150 ℃ melting 5 hours, smelting time 15h reduces the induction power supply current direct gradually to stopping induction power supply after melting is complete, utilizes the resistance power supply to carry out temperature and controls.Reduce melting room temp to 1800 ℃ insulation 5 hours, continue to reduce temperature to 1700 ℃ insulation 5 hours, slow reduce working chamber's temperature to 1000 ℃ after, stop the resistive heating temperature control and cool to room temperature with the furnace.
Cooled large-size glass ingot packaging final prod after the operations such as cutting, polishing, detection.
Advantage of the present invention is,
The present invention adopts resistance inductive composite melt refining mode to carry out the preparation of large size silica glass ingot, be on traditional vacuum pressing technology basis, adopt resistance induction composite heating mode, utilize induction heating to carry out induction stirring to quartzy melt, reduce Bubble formation, yield rate reaches more than 90%.Utilize resistive heating to realize directional freeze, be conducive to reduce the internal stress of silica glass ingot.Compare with traditional continuous smelting mode large size silica glass preparation technology, because the composite heating mode needn't be utilized melt raw material and directly draws silica glass ingot, but the control type of cooling after the employing fusing, so the shape and size of glass ingot can design according to the size of inductive crucible, glass ingot is maximum more than diameter can reach Φ 2000mm silica glass ingot, break through the continuous smelting method and produced the limitation that glass ingot is difficult to produce the above silica glass ingot of Φ 500mm, cost of investment is less than 10% of the continuous smelting method, the market handiness of the amount of having fixed output quota.
Description of drawings
Fig. 1 is equipment used structural representation of the present invention;
Fig. 2 is production technological process.
Embodiment
Describe in detail below in conjunction with accompanying drawing: as shown in the figure,
Its equipment is: raw material cabin 1, hydrogen-holder 3 are connected with revolving drum 2 respectively, Hydrogen Ignition hole 4 is installed on revolving drum 2, vacuum pump 5 is connected with revolving drum 2, working chamber 8 respectively by pipeline, melting body of heater 10 is installed in working chamber 8, melting bell 9 is installed on melting body of heater 10 tops, the resistance graphite heating body is installed on melting bell 9, and is provided with tumbler pin, guarantee to be connected with the tight of melting body of heater.The outside electromagnetic induction coil 11 of installing of melting body of heater 10, revolving drum 2 outlets communicate with distribution cabins 6 feed-pipes, and distribution cabins 6 connects distributor 7; 8 bottom surfaces, working chamber and wall inboard are the high purity graphite plate, and graphite cake is outward the electrosmelted magnesite clinker thermal insulation layer, and the outer refractory fibre that adopts is as thermal insulation layer.Melting body of heater 10 adopts glass magnesium plate, and reinforcing and web member all adopt stainless steel or the aluminum alloy material without magnetic diffusivity.
Its production method is:
High purity quartz raw material 5000kg with 300 order purity more than 99.9% puts into the revolving drum of long 5.0m, diameter 0.2m by the top feeding chamber, the revolving drum outlet communicates with the distribution cabins feed-pipe.The front needs that feed intake first are evacuated to vacuum in revolving drum below 1Pa, open subsequently the hydrogen gas valve and pass into hydrogen; The hydrogen that this process is used need pass through purification, and purity need to be more than 99.99%.After the interior vacuum of revolving drum is qualified, close the vacuum system by-pass valve control, stop the vacuum pump operation, drive large hydrogen gas valve and make furnace pressure reach 0.02MPa.Revolving drum ingress is provided with the hydrogen vent valve, and light at contact fire tube place outside, avoids hydrogen directly to enter outside atmosphere and cause fire.Hydrogen passes into silica powder can displace air in hole, produces when avoiding melting to be difficult for the bubble got rid of.
Silica powder after logical hydrogen imports by tremie pipe in the distributor of taking out vacuum, and it is even to guarantee cloth that distributor is divided into discharge port.Raw material cloth is dispersed in smelting furnace in the working chamber.Open the smelting furnace upper cover during cloth, distributor discharge port and bottom charge level are close to, to reduce Air infitration.Through after reciprocal uniform distribution, the bed of material reaches 500-600mm.
After cloth is completed, distributor is shifted out, install bell, start cooling water system, vacuum system, vacuum should be less than 0.1Pa.
After vacuum is qualified, open top resistive heating device power switch, slowly be warming up to 1000 ℃ and be incubated 1h.Open 150kW Medium frequency induction melting power switch, be warming up to 1750 ℃ of insulations 2 hours.Continue to improve smelting temperature to 2150 ℃ melting 5 hours, smelting time 15h reduces the induction power supply current direct gradually to stopping induction power supply after melting is complete, utilizes the resistance power supply to carry out temperature and controls.Reduce melting room temp to 1800 ℃ insulation 5 hours, continue to reduce temperature to 1700 ℃ insulation 5 hours, slow reduce working chamber's temperature to 1000 ℃ after, stop the resistive heating temperature control and cool to room temperature with the furnace.
Cooled large-size glass ingot is packaging final prod after cutting, polishing, detection order.
Claims (4)
1. the compound molten induction refining method production large size quartz glass apparatus of induction/resistance, is characterized in that,
Raw material cabin, hydrogen-holder are connected with revolving drum respectively, the Hydrogen Ignition hole is installed on revolving drum, vacuum pump is connected with revolving drum, working chamber respectively by pipeline, the melting body of heater is installed in the working chamber, the melting upper of furnace body is installed the melting bell, smelting furnace covers the resistance graphite heating body is installed, and is provided with tumbler pin, guarantees to be connected with the tight of melting body of heater; The smelting furnace external body is installed electromagnetic induction coil, and the revolving drum outlet communicates with the distribution cabins feed-pipe, and distribution cabins connects distributor.
2. method production large size quartz glass apparatus is refined in the compound molten induction of induction/resistance according to claim 1, it is characterized in that, bottom surface, working chamber and wall inboard are the high purity graphite plate, and graphite cake is outward the electrosmelted magnesite clinker thermal insulation layer, and the outer refractory fibre that adopts is as thermal insulation layer.
3. the compound molten induction refining method production large size quartz glass apparatus of induction/resistance according to claim 1, is characterized in that, the melting body of heater adopts glass magnesium plate, and reinforcing and web member all adopt stainless steel or the aluminum alloy material without magnetic diffusivity.
4. the device fabrication large size silica glass method of the compound molten induction refining method production large size silica glass of an induction/resistance according to claim 1, it is characterized in that, the high purity quartz raw material of 300 order purity more than 99.9% put into long revolving drum by the top feeding chamber, the front needs that feed intake first are evacuated to vacuum in revolving drum below 1Pa, open subsequently the hydrogen gas valve and pass into the above hydrogen of purity 99.99%; After the interior vacuum of revolving drum is qualified, close the vacuum system by-pass valve control, stop the vacuum pump operation, drive large hydrogen gas valve and make furnace pressure reach 0.02MPa; Silica powder after logical hydrogen imports in the distributor of taking out vacuum by tremie pipe, and divides into the even cloth of discharge port by distributor and be dispersed in smelting furnace in the working chamber, and after passing through reciprocal uniform distribution, the bed of material reaches 500-600mm; After cloth is completed, distributor is shifted out, install bell, start vacuum system, vacuum should be less than 0.1Pa; After vacuum is qualified, open top resistive heating device power switch, slowly be warming up to 1000 ℃ and be incubated 1h; Open 150kW Medium frequency induction melting power switch, be warming up to 1750 ℃ of insulations 2 hours; Continue to improve smelting temperature to 2150 ℃ melting 5 hours, smelting time 15h reduces the induction power supply current direct gradually to stopping induction power supply after melting is complete, utilizes the resistance power supply to carry out temperature and controls; Reduce melting room temp to 1800 ℃ insulation 5 hours, continue to reduce temperature to 1700 ℃ insulation 5 hours, slow reduce working chamber's temperature to 1000 ℃ after, stop the resistive heating temperature control and cool to room temperature with the furnace; Cooled large-size glass ingot packaging final prod after the operations such as cutting, polishing, detection.
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103387330A (en) * | 2013-07-30 | 2013-11-13 | 湖北菲利华石英玻璃股份有限公司 | Quantitative starting method for producing quartz glass ingots |
| CN105502895A (en) * | 2015-12-14 | 2016-04-20 | 湖南顶立科技有限公司 | Quartz glass cast ingot production device |
| CN105502896A (en) * | 2015-12-14 | 2016-04-20 | 湖南顶立科技有限公司 | Quartz glass ingot production technology |
| CN105819674A (en) * | 2016-04-06 | 2016-08-03 | 湖南大学 | Automatic mould pressing machine for high-melting-point glass |
| CN109436864A (en) * | 2018-12-12 | 2019-03-08 | 中冶焦耐(大连)工程技术有限公司 | A kind of electric-melting magnesium production furnace vehicle bottom material laying device and method |
| WO2019091084A1 (en) * | 2017-11-08 | 2019-05-16 | 东北大学 | Method for calculating operating resistance of dual electrode direct-current electrically-molten magnesium furnace |
| CN111217516A (en) * | 2018-11-23 | 2020-06-02 | 贺利氏科纳米英国有限公司 | Quartz glass ingot, and method and apparatus for manufacturing same |
| CN112624579A (en) * | 2020-12-03 | 2021-04-09 | 东海县奥兰石英科技有限公司 | Preparation method and device for producing large-diameter transparent quartz lump by integrated method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105819674A (en) * | 2016-04-06 | 2016-08-03 | 湖南大学 | Automatic mould pressing machine for high-melting-point glass |
| WO2019091084A1 (en) * | 2017-11-08 | 2019-05-16 | 东北大学 | Method for calculating operating resistance of dual electrode direct-current electrically-molten magnesium furnace |
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| CN111217516A (en) * | 2018-11-23 | 2020-06-02 | 贺利氏科纳米英国有限公司 | Quartz glass ingot, and method and apparatus for manufacturing same |
| CN109436864A (en) * | 2018-12-12 | 2019-03-08 | 中冶焦耐(大连)工程技术有限公司 | A kind of electric-melting magnesium production furnace vehicle bottom material laying device and method |
| CN109436864B (en) * | 2018-12-12 | 2024-03-12 | 中冶焦耐(大连)工程技术有限公司 | Furnace wagon bottom material paving device and method for producing electric smelting magnesium |
| CN112624579A (en) * | 2020-12-03 | 2021-04-09 | 东海县奥兰石英科技有限公司 | Preparation method and device for producing large-diameter transparent quartz lump by integrated method |
| CN112624579B (en) * | 2020-12-03 | 2021-09-17 | 东海县奥兰石英科技有限公司 | Preparation method and device for producing large-diameter transparent quartz lump by integrated method |
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