CN103094173B - A kind of many chucks wafer chuck - Google Patents
A kind of many chucks wafer chuck Download PDFInfo
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- CN103094173B CN103094173B CN201210559394.5A CN201210559394A CN103094173B CN 103094173 B CN103094173 B CN 103094173B CN 201210559394 A CN201210559394 A CN 201210559394A CN 103094173 B CN103094173 B CN 103094173B
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- jig arm
- chuck
- chucks
- wafer
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Abstract
The present invention discloses a kind of many chucks wafer chuck, and by forcing in jig arm control chuck, the spacing reducing each chuck makes it close up and contact the lateral edges of wafer, completes folder sheet operation. The present invention includes four and with upper grip, chuck is arranged on jig arm end, at its and so that upper clip arm end can be installed multiple chuck, form many collet fixture, part jig arm is relatively fixing, all the other jig arm directional movables drive chuck to draw close, contact the enforcement gripping operation of wafer side edge, are formed with angle between jig arm. Many collet fixture of the present invention, only need wherein three chucks to act on wafer, just can reach the effect of fixture, thus reduce the requirement of control tolerance range to chuck and the manipulation difficulty of holding chip, it is to increase security.
Description
Technical field
The present invention relates to a kind of fixture, only need wherein three chuck effects can complete folder sheet operation in holding chip process in particular to many collet fixture, thus reduce clamping manipulation difficulty, it is to increase security.
Background technology
For the third generation semiconductor material represented, because of its inside and outside quantum yield height, there is the characteristics such as high-luminous-efficiency, high heat conductance, high temperature resistant, radioprotective, acid and alkali-resistance, high strength and high rigidity, and show in novel light display, optical storage, optical illumination, the field such as light-detecting device be widely used. The industrial scale of these semicon industries is in continuous expansion at present, and its output is in continuous increase.
These semicon industries and the development like a raging fire of associated electrical industry, naturally cause everybody and use frequent and indispensable production apparatus and the concern of wafer chuck in producing in these industries.
Current gripping diameter is large-sized semiconductor wafers such as two cun, three cun, four cun, and conventional mainly contains two kinds of modes, and a kind of is with common tweezers, and another kind is that negative pressure of vacuum is drawn. The tow sides that common tweezers utilize its two chuck to clamp wafer complete folder sheet operation; The sucker of vacsorb makes with rubber, it may also be useful to time negative pressure of vacuum sucker hold wafer surface, by negative pressure of vacuum suction wafer held and keeps. Current fixture is lower to the control tolerance range of chuck, and operation easier is relatively big, inefficiency; Vacuum adsorption type fixture is not suitable for hot environment.
No matter above-mentioned tweezers are that gripping accuracy is required higher by two chucks, the tweezers of three chucks or vacsorb. To the tweezers of two chucks, three chucks, require that all chucks force in wafer side edge simultaneously and just can complete clamping operation, and vacsorb, then cannot there is deformation or have booty in its sucker, if easily there is deformation or have booty in sucker, then causing gas leakage cannot complete folder sheet operation, clamping operation is malfunctioning.
So, if there being a kind of fixture, when pressing from both sides sheet and operate, require suitably to reduce to the gripping precise control degree of wherein certain indivedual chuck, both can not have influence on folder sheet operation because of certain chuck because its gripping action is not in place, then the use of this kind of fixture will be more safe and reliable.
Summary of the invention
The order ground of the present invention is for the deficiency that prior art exists, a kind of many collet fixture are provided, containing four or more chuck, chuck is arranged on jig arm end, and by forcing in jig arm control chuck, the spacing reducing each chuck makes it close up and contact the lateral edges of wafer, completes folder sheet operation. Fixture only needs to guarantee that the lateral edges that wherein any three chucks clamp wafer can complete folder sheet operation smoothly in the operation of gripping wafer. Present clip, according to user demand, it is possible to the type selecting of chuck, jig arm, selection, freely installs combination and reaches above-mentioned requirements.
For achieving the above object, the present invention adopts following scheme:
A kind of many chucks wafer chuck, include four and with upper grip, chuck is arranged on jig arm end, at its and so that upper clip arm end can be installed multiple chuck, form many collet fixture, these chucks all can force in wafer side edge and complete clamping operation, now have at least two jig arm could realize above-mentioned gripping object, namely the quantity of jig arm can be two and more than; In described jig arm, part jig arm is relatively fixing, and all the other jig arm directional movables drive chuck to draw close, contact the enforcement gripping operation of wafer side edge; The jig arm place of being interconnected of above-mentioned many collet fixture can be placed in: the first end of jig arm; Jig arm stage casing; And other any positions away from jig arm end (with chuck connecting place); Being formed with angle between jig arm, the movement properties of described jig arm is: wherein a jig arm has certain movement elasticity and is subject to power deflection function, and all the other jig arm maintain static relatively; Or wherein two jig arm have certain movement elasticity and are subject to power deflection function, all the other jig arm maintain static relatively; Or all jig arm all have certain movement elasticity and are subject to power deflection function; The installation mode of chuck and jig arm end, comprise one-body molded, roll, screw combines, bind, welding, clamp and other installation modes.
Wherein in some embodiments, described chuck shape can be flats, earpick shape, spade, duckbill, configuration, inverted triangle, point crest etc., and wherein any three chucks force in wafer side, can complete folder sheet operation smoothly.
Wherein in some embodiments, described jig arm drives chuck to move by force, the spacing of each chuck is made to reduce and draw close, and complete folder sheet operation, the shape of described jig arm can be: the jig arm thickness such as flats, cylindrical and taper portion of not demanding perfection is equal, as: all jig arm thicknesses are identical; One of them jig arm thickness jig arm thickness all from other is different; Wherein two jig arm thicknesses are identical, and other all jig arm thicknesses are not identical; All jig arm thicknesses are all not identical; And it is different from other similar changes of above-mentioned situation.
Wherein in some embodiments, described jig arm material according to different demand such as force situation and use temperature etc., can be able to be selected: irony, carbon element, stainless steel, plastic cement, aluminium alloy and other composite shape matls.
Wherein in some embodiments, described many chucks shape independent assortment, all chuck sizes are identical; Or all chuck sizes are all not identical; Or wherein two chuck sizes are identical, all the other chuck sizes are all not identical; Or one of them chuck size is all not identical with other all chuck sizes; And other other any combinations different from above-mentioned situation; Described chuck has high temperature resistant feature, and described chuck adopts: irony, carbon element, stainless steel, plastic cement, aluminium alloy and other composite shape matls.
Wherein in some embodiments, described many collet fixture also can have other numerous embodiments: as, four chucks, three jig arm; Five chucks, five jig arm; And many chucks, many jig arm; When jig arm and chuck are assembled, a jig arm end installs two chucks.
Wherein in some embodiments, described fixture is provided with four jig arm, four collet fixture, comprises four sizes, A jig arm that shape is identical, B jig arm, C jig arm, D jig arm, and their top is interconnected, and is mutually angle; Described fixture also comprises the identical A chuck of four size shape, B chuck, C chuck, D chuck, and these four chucks are all vertically placed and are connected with A jig arm, B jig arm, C jig arm, D jig arm one respectively; Described A chuck, B chuck, C chuck, D chuck four chucks and wafer point of contact are all in same plane, and the concentric(al) circles diameter that four chucks are formed is slightly larger than the diameter of wafer.
Wherein in some embodiments, described fixture comprises two sizes, shape is identical A jig arm, B jig arm, their top is interconnected, and it is mutually angle, and each jig arm end respectively joins two chucks, A jig arm end is provided with A1 chuck, A2 chuck, and B jig arm end is provided with B1 chuck, B2 chuck, and these four chucks of A1 chuck, A2 chuck, B1 chuck, B2 chuck are all vertically placed and are connected with respective jig arm one respectively; The point of contact of these four chucks and wafer is all in same plane, and the concentric circular diameter that four chucks are formed is slightly larger than wafer diameter.
The present invention provides a kind of many collet fixture, comprises the chuck of 4 and more than 4, in wafer holder process, wherein three chucks are only needed to act on wafer, just can reach the effect of fixture, thus reduce the requirement of control tolerance range to chuck and the manipulation difficulty of holding chip, it is to increase security. And can according to the environment for use of fixture, its material can select irony, carbon element, stainless steel, plastic cement, aluminium alloy and other composite shape matls, all can use at high temperature or normal temperature.
Accompanying drawing explanation
The schematic diagram of the embodiment of the present invention one shown in Fig. 1.
The schematic diagram of the embodiment of the present invention two shown in Fig. 2.
Description of reference numerals is as follows:
A jig arm 1, B jig arm 2, C jig arm 3, D jig arm 4, A chuck 5, B chuck 6, C chuck 7, D chuck 8, wafer 9, A1 chuck 13, A2 chuck 14, B1 chuck 15, B2 chuck 16.
Embodiment
For the feature of the present invention, technique means and the concrete order ground reached, function can be understood further, resolve the advantages and spirit of the present invention, by the present invention is further elaborated by the following examples.
The design sketch FIGS 1 of the embodiment of the present invention, accompanying drawing 2, the present invention provides a kind of many collet fixture, and it contains four or more chuck. Described chuck is arranged on jig arm end, drives chuck to move by jig arm force, makes the spacing of each chuck reduce and draw close, and completes folder sheet operation. Described fixture, in gripping wafer operates, only needs to guarantee that wherein any three chucks force in wafer side, can complete folder sheet operation smoothly. Described fixture according to user demand, to type selecting, the selection of chuck, jig arm, can carry out independent assortment and just can reach the object of the invention. Above-mentioned fixture, it is assembled by chuck and jig arm two kinds of major partss.
Described fixture is many collet fixture, the quantity of its chuck can be 4 or more than 4, these chucks all can force in wafer side edge and complete clamping operation, and its shape can be flats, earpick shape, spade, duckbill, configuration, inverted triangle, point crest etc. Reaching under above-mentioned gripping object prerequisite, described many chucks, its big I chooses at random and independent assortment, as: all chuck sizes are identical; All chuck sizes are all not identical; Wherein two chuck sizes are identical, and all the other chuck sizes are all not identical; Other any combinations different from above-mentioned situation. Described chuck has high temperature resistant feature, can adopt: irony, carbon element, stainless steel, plastic cement, aluminium alloy and other composite shape matls.
The many collet fixture of the present invention, can install multiple chuck in its jig arm, now have at least two jig arm could realize above-mentioned gripping object, and namely the quantity of jig arm can be 2,3 or more than 4. In described jig arm, part jig arm is relatively fixing, and all the other jig arm directional movables drive chuck to draw close, contact the enforcement gripping operation of wafer side edge. The movement properties of described jig arm has following situations: wherein a jig arm has certain movement elasticity and is subject to power deflection function, and all the other jig arm maintain static relatively; Wherein two jig arm have certain movement elasticity and are subject to power deflection function, and all the other jig arm maintain static relatively; All jig arm all have certain movement elasticity and are subject to power deflection function; And it is different from other similar changes of above-mentioned situation. The shape of described jig arm can be: flats, cylindrical and taper etc. Reaching under above-mentioned gripping object prerequisite, its jig arm thickness portion of not demanding perfection is equal, as: all jig arm thicknesses are identical; One of them jig arm thickness jig arm thickness all from other is different; Wherein two jig arm thicknesses are identical, and other all jig arm thicknesses are not identical; All jig arm thicknesses are all not identical; And it is different from other similar changes of above-mentioned situation. Jig arm material according to different demand such as force situation and use temperature etc., can be able to be selected: irony, carbon element, stainless steel, plastic cement, aluminium alloy and other composite shape matls.
The jig arm place of being interconnected of above-mentioned many collet fixture can be placed in: the first end of jig arm; Jig arm stage casing; And other any positions away from jig arm end (with chuck connecting place). Its mode of connection each other: comprise one-body molded, roll, screw combines, bind, welding, clamp and other mode of connection.
It is mutually angle, its angle each other: can complete to select arbitrarily under above-mentioned gripping object prerequisite between above-mentioned each jig arm. Above-mentioned chuck is arranged on jig arm end, and a jig arm end can install at most two chucks. Chuck and jig arm can select to install arbitrarily angle according to demand. The installation mode of chuck and jig arm end: comprise one-body molded, roll, screw is combined, bind, weld, clamp and other installation modes.
Embodiment one:
The embodiment of the present invention one provides a kind of four jig arm, four collet fixture, and as shown in Figure 1, it comprises four sizes, shape is identical A jig arm 1, B jig arm 2, C jig arm 3, D jig arm 4, their top is interconnected, and is mutually angle. Described fixture also comprises the identical A chuck 5 of four size shape, B chuck 6, C chuck 7, D chuck 8, and these four chucks are all vertically placed and are connected with A jig arm 1, B jig arm 2, C jig arm 3, D jig arm 4 one respectively. Described A chuck 5, B chuck 6, C chuck 7, D chuck 8 four chucks and wafer 9 point of contact are all in same plane, and the concentric(al) circles diameter that four chucks are formed is slightly larger than the diameter of wafer 9.
Embodiment two:
The embodiment of the present invention two provides a kind of two jig arm, four collet fixture, as shown in Figure 2, it comprises two sizes, shape is identical A jig arm 1, B jig arm 2, their top is interconnected, and it is mutually angle, and each jig arm end respectively joins two chucks, A jig arm 1 end is provided with A1 chuck 13, A2 chuck 14, B jig arm 2 end is provided with B1 chuck 15, B2 chuck 16, A1 chuck 13, A2 chuck 14, B1 chuck 15, these four chucks of B2 chuck 16 are all vertically placed and are connected with respective jig arm one respectively. The point of contact of these four chucks and wafer 9 is all in same plane, and the concentric circular diameter that four chucks are formed is slightly larger than wafer 9 diameter.
The many collet fixture of the present invention also can have other numerous embodiments: as, four chucks, three jig arm; Five chucks, five jig arm; And many chucks, many jig arm.
In concrete enforcement, the quantity of chuck can be 4 or more than 4, and these chucks all can force in wafer side edge and complete clamping operation, and its shape can be flats, earpick shape, spade, duckbill, configuration, inverted triangle, point crest etc. Reaching under above-mentioned gripping object prerequisite, described many chucks, its big I chooses at random and independent assortment, as: all chuck sizes are identical; All chuck sizes are all not identical; One of them chuck size is all not identical with other all chuck sizes; Wherein two chuck size all the other all chuck sizes identical are all not identical; And other other any combinations different from above-mentioned situation. Described chuck has high temperature resistant feature, can adopt: irony, carbon element, stainless steel, plastic cement, aluminium alloy and other composite shape matls.
Can installing multiple chuck in its jig arm, now have at least two jig arm could realize above-mentioned gripping object, namely the quantity of jig arm can be 2,3 more than 4. The movement properties of described jig arm has following situations: wherein a jig arm has certain movement elasticity and is subject to power deflection function, and all the other jig arm maintain static relatively; Wherein two jig arm have certain movement elasticity and are subject to power deflection function, and all the other jig arm maintain static relatively; All jig arm all have certain movement elasticity and are subject to power deflection function; And it is different from other similar changes of above-mentioned situation. The shape of described jig arm can be: flats, cylindrical and taper etc. Reaching under above-mentioned gripping object prerequisite, its jig arm thickness portion of not demanding perfection is equal, as: all jig arm thicknesses are identical; One of them jig arm thickness jig arm thickness all from other is different; Wherein two jig arm thicknesses are identical, and other all jig arm thicknesses are not identical; All jig arm thicknesses are all not identical; And it is different from other similar changes of above-mentioned situation. Jig arm material according to different demand such as force situation and use temperature etc., can be able to be selected: irony, carbon element, stainless steel, plastic cement, aluminium alloy and other composite shape matls.
The jig arm place of being interconnected can be placed in: the first end of jig arm; Jig arm stage casing; And other any positions away from jig arm end (with chuck connecting place). Angle between jig arm, under the prerequisite that can implement fixture function, can select arbitrarily. When jig arm and chuck are assembled, a jig arm end can install one or two chucks. Installation angle between chuck and jig arm, can select arbitrarily angled according to demand. The installation mode of chuck and jig arm end, comprise one-body molded, roll, screw combines, bind, welding, clamp and other installation modes.
Self-evident; the enforcement mode of the many collet fixture of above-mentioned the present invention is only illustrate; and the restriction of not Yong Zuo Dui Ben Faming, as long as in the core of the present invention both within many chucks scope, any distortion above enforcement mode done all is included in the claims in the present invention institute protection domain.
The above embodiment only have expressed the specific embodiment of the present invention, and it describes comparatively concrete and detailed, but therefore can not be interpreted as the restriction to patent scope of the present invention. It should be appreciated that for the technology of this area, without departing from the inventive concept of the premise, it is also possible to make some distortion and improvement, these all belong to protection scope of the present invention. Therefore, the protection domain of patent of the present invention should be as the criterion with claims.
Claims (7)
1. chuck wafer chuck more than a kind, it is characterised in that, described chuck is arranged on jig arm end;
Described many collet fixture comprise four chucks, three jig arm; Or described many collet fixture comprise five chucks, five jig arm; When described jig arm and chuck are assembled, a jig arm end installs two chucks;
In described jig arm, part jig arm is relatively fixing, and all the other jig arm directional movables drive chuck to draw close, contact the enforcement gripping operation of wafer side edge; Described jig arm is interconnected, and described jig arm is interconnected to be disposed in the first end of jig arm or jig arm stage casing or away from jig arm end; It is formed with angle between described jig arm;
The movement properties of described jig arm is: wherein a jig arm has certain movement elasticity and is subject to power deflection function, and all the other jig arm maintain static relatively; Or wherein two jig arm have certain movement elasticity and are subject to power deflection function, all the other jig arm maintain static relatively; Or all jig arm all have certain movement elasticity and are subject to power deflection function;
The installation mode of described chuck and jig arm end, comprise one-body molded, roll, screw combine, bind, welding, clamp install mode.
2. one many chucks wafer chuck according to claim 1, it is characterised in that, described chuck shape is flats, earpick shape, spade, duckbill, inverted triangle, point crest, and wherein any three chucks force in wafer side.
3. one many chucks wafer chuck according to claim 1, it is characterised in that, described jig arm drives chuck to move by force, makes the spacing of each chuck reduce and draw close, and completes folder sheet operation;
The shape of described jig arm is: flats, cylindrical, taper;
Described jig arm thickness is: all jig arm thicknesses are identical; Or one of them jig arm thickness jig arm thickness all from other is different; Or wherein two jig arm thicknesses are identical, other all jig arm thicknesses are not identical.
4. one many chucks wafer chuck according to claim 1, it is characterised in that, described jig arm material is: irony, carbon element, stainless steel, plastic cement, aluminium alloy.
5. one many chucks wafer chuck according to claim 1, it is characterised in that, identical sized by described chuck shape; Or one of them chuck size is all not identical with other all chuck sizes; Described chuck material adopts: irony, carbon element, stainless steel, plastic cement, aluminium alloy.
6. chuck wafer chuck more than a kind, it is characterised in that, described chuck is arranged on jig arm end; In described jig arm, part jig arm is relatively fixing, and all the other jig arm directional movables drive chuck to draw close, contact the enforcement gripping operation of wafer side edge; Described jig arm is interconnected, and described jig arm is interconnected to be disposed in the first end of jig arm or jig arm stage casing or away from jig arm end; It is formed with angle between described jig arm;
The movement properties of described jig arm is: wherein a jig arm has certain movement elasticity and is subject to power deflection function, and all the other jig arm maintain static relatively; Or wherein two jig arm have certain movement elasticity and are subject to power deflection function, all the other jig arm maintain static relatively; Or all jig arm all have certain movement elasticity and are subject to power deflection function;
The installation mode of described chuck and jig arm end, comprise one-body molded, roll, screw combine, bind, welding, clamp install mode;
Described many chucks wafer chuck is provided with four jig arm, four collet fixture, comprise four sizes, A jig arm (1) that shape is identical, B jig arm (2), C jig arm (3), D jig arm (4), their top is interconnected, and is mutually angle; Described fixture also comprises the identical A chuck (5) of four size shape, B chuck (6), C chuck (7), D chuck (8), and these four chucks are all vertically placed and are connected with A jig arm (1), B jig arm (2), C jig arm (3), D jig arm (4) one respectively; Described A chuck (5), B chuck (6), C chuck (7), D chuck (8) four chucks and wafer (9) point of contact are all in same plane, and the concentric(al) circles diameter that four chucks are formed is greater than the diameter of wafer (9).
7. chuck wafer chuck more than a kind, it is characterised in that, described chuck is arranged on jig arm end; In described jig arm, part jig arm is relatively fixing, and all the other jig arm directional movables drive chuck to draw close, contact the enforcement gripping operation of wafer side edge; Described jig arm is interconnected, and described jig arm is interconnected to be disposed in the first end of jig arm or jig arm stage casing or away from jig arm end; It is formed with angle between described jig arm;
The movement properties of described jig arm is: wherein a jig arm has certain movement elasticity and is subject to power deflection function, and all the other jig arm maintain static relatively; Or wherein two jig arm have certain movement elasticity and are subject to power deflection function, all the other jig arm maintain static relatively; Or all jig arm all have certain movement elasticity and are subject to power deflection function;
The installation mode of described chuck and jig arm end, comprise one-body molded, roll, screw combine, bind, welding, clamp install mode;
Described many chucks wafer chuck comprises two sizes, shape is identical A jig arm (1), B jig arm (2), their top is interconnected, and it is mutually angle, and each jig arm end respectively connects two chucks, A jig arm (1) end is provided with A1 chuck (13), A2 chuck (14), B jig arm (2) end is provided with B1 chuck (15), B2 chuck (16), and these four chucks of A1 chuck (13), A2 chuck (14), B1 chuck (15), B2 chuck (16) are all vertically placed and are connected with respective jig arm one respectively; The point of contact of these four chucks and wafer (9) is all in same plane, and the concentric circular diameter that four chucks are formed is greater than wafer (9) diameter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210559394.5A CN103094173B (en) | 2012-12-21 | 2012-12-21 | A kind of many chucks wafer chuck |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210559394.5A CN103094173B (en) | 2012-12-21 | 2012-12-21 | A kind of many chucks wafer chuck |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103094173A CN103094173A (en) | 2013-05-08 |
| CN103094173B true CN103094173B (en) | 2016-06-01 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210559394.5A Expired - Fee Related CN103094173B (en) | 2012-12-21 | 2012-12-21 | A kind of many chucks wafer chuck |
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| CN (1) | CN103094173B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109847999A (en) * | 2019-04-10 | 2019-06-07 | 武汉锐科光纤激光技术股份有限公司 | A kind of dispensing curing system |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2721335Y (en) * | 2004-06-29 | 2005-08-31 | 王兆祥 | Picker |
| CN2830012Y (en) * | 2005-07-08 | 2006-10-25 | 邹四奇 | Multifunction manipulator |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6322312B1 (en) * | 1999-03-18 | 2001-11-27 | Applied Materials, Inc. | Mechanical gripper for wafer handling robots |
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2012
- 2012-12-21 CN CN201210559394.5A patent/CN103094173B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2721335Y (en) * | 2004-06-29 | 2005-08-31 | 王兆祥 | Picker |
| CN2830012Y (en) * | 2005-07-08 | 2006-10-25 | 邹四奇 | Multifunction manipulator |
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| CN103094173A (en) | 2013-05-08 |
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