CN103092114A - Embedded control equipment for lithography machine and control method thereof - Google Patents
Embedded control equipment for lithography machine and control method thereof Download PDFInfo
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- CN103092114A CN103092114A CN2013100232682A CN201310023268A CN103092114A CN 103092114 A CN103092114 A CN 103092114A CN 2013100232682 A CN2013100232682 A CN 2013100232682A CN 201310023268 A CN201310023268 A CN 201310023268A CN 103092114 A CN103092114 A CN 103092114A
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Abstract
The invention provides embedded control equipment for a lithography machine and a control method thereof. The embedded control equipment for the lithography machine is composed of an embedded motherboard and a single-chip microcomputer daughterboard, wherein the embedded motherboard and the single-chip microcomputer daughterboard are communicated with each other through a serial port. The motherboard comprises a core board and a function board. The core board includes a memorizer and a microprocessor. The function board includes a touch screen module, a universal serial bus (USB) device module, a network connection module, a secure digital (SD) memory card reading storing module, a serial port module, a camera module, a resetting module, a stereo playing module and a debugging module. The daughterboard comprises a serial port module, a stepping motor controlling module, a magnetic valve controlling module and a photoelectricity switch receiving module. According to the embedded control equipment for the lithography machine and the method thereof, all photoetching operation touch control can be achieved, the operation is prompted by voices in the whole process, and the whole photoetching process is enabled to be more human-friendly. Due to the combination of a liquid crystal display (LCD) and the stereo playing module, multimedia video playback function can be achieved and can be used for popularizing products and learning operation instructions. In addition, due to the fact that a high resolution camera is utilized, aiming and detecting in the process of exposure can be accomplished.
Description
Technical field
The present invention relates to particularly relate to a kind of embedded Control equipment and control method for litho machine near the control device in the contact photolithography system.
Background technology
(1) control system of conventional lithography machine is based on the mechanical type control panel, and whole operation does not almost have human-computer interaction, there is no the concrete prompting of image; Because mechanical button is easily aging, long-term use can cause negative the triggering.First family of using all needs to read tediously long instructions, can not get visual in image guidance; Make mistakes or the user runs into use at need when software, the developer often needs to go to makes land used debug and instruct; And limited to a great extent the use of camera;
(2) use PC that litho machine is controlled, the user can only control with mouse and keyboard, can't operate with convenient effective method; For common litho machine, the function of PC often can not get using the most fully, thereby causes the significant wastage of resource; And as PC, compare embedded device, its price is high; The PC power consumption is large, needs fan for cooling in the use procedure of reality, has introduced the problem of vibration; Add that the PC volume is larger, taken in a large number limited space resources.
Summary of the invention
In view of this, the invention provides a kind of control device based on embedded device.By the coordination of software and hardware, realized good man-machine interaction interface, long-range exploitation and guidance, hommization operation.This stabilization of equipment performance is good, and volume is small and exquisite, and is low in energy consumption, and extensibility is strong, and cost of development is cheap, and travelling speed is fast, has very strong real-time, uses hommization more and convenient.
For achieving the above object, the technical solution used in the present invention is as follows: a kind of embedded Control equipment for litho machine, and this equipment is made of embedded motherboard and single-chip microcomputer daughter board; Described embedded motherboard comprises: touch screen module, and the USB device module, network connecting module, the SD card reads memory module, camera module, embedded motherboard reseting module, played in stereo module and debugging module; Described embedded motherboard is connected with the single-chip microcomputer daughter board by 232 interfaces; Communicate by serial ports between described embedded motherboard and single-chip microcomputer daughter board; This equipment extracts on touch-screen operation accordingly on described embedded motherboard, command string and serial data are sent to the single-chip microcomputer daughter board by serial ports, completes control to stepper motor and solenoid valve by the single-chip microcomputer daughter board; The described single-chip microcomputer daughter board of this equipment extracts the signal of litho machine feedback, and command string and serial data are sent to embedded motherboard by serial ports, by liquid crystal display and loudspeaker, information is conveyed to the operator; Described single-chip microcomputer daughter board comprises the step motor control module, solenoid control module, photoswitc receiver module, monolithic processor resetting module and serial port module.
Wherein, embedded motherboard comprises:
A) the S3C2440 chip that adopts Samsung is as microprocessor,
B) configure the four-wire ohm touch-screen of 8 cun;
C) two serial ports, one of them is used for debugging, and one is used for and microcontroller communication;
D) five USB interface are respectively used to debugging, the sound equipment power supply, and USB flash disk patches and the expansion board clamping interface;
E) adopt core board to separate with function and separate design, be connected with row's pin female seat by row's pin;
F) adopt professional reset chip MAX811 that motherboard is resetted;
G) use the DM9000A network chip to be connected with the HR911105 network interface and being connected of the Internet;
H) adopt toggle switch that start-up mode is set.
Wherein, the single-chip microcomputer daughter board comprises:
A) adopt AT89C52 as processor of single chip computer,
B) realize shutter by solenoid control module operation solenoid valve, silicon wafer stage, the control of mask stage;
C) use 3 line serial ports to complete and the communicating by letter of embedded motherboard;
D) use the stepper motor module to operate to realize accurately walking to the position to stepper motor;
E) use the optoelectronic switch module to read the signal of optoelectronic switch feedback to determine the particular location of precision workpiece stage.
Wherein, operating system is WinCE5.0.
Wherein, this equipment also comprises user interface, and this user interface comprises:
A) be used for controlling the button (24) of whole system work, realize rising, reset, fine setting, the function of exposure;
B) be used for showing the information feedback frame (21) of respective icon;
C) be used for inputting the digital button (25) of time shutter, and change numeral retreat and empty button;
D) time shutter display box (22), and be used for locking or the button of release time input value and the button of time exposure;
E) step number inquire button and display box (23).
In addition, the present invention also provides a kind of control method of the embedded Control equipment for litho machine, and the method comprises:
Step a), have recognition button information and send the step of command information by serial ports;
Step b), each operation steps has corresponding image and this control command of icon representation to trigger after clicking;
Step c), after each step is completed, next step the action of icon prompting user of image is arranged;
Steps d), after obtaining feedback information, have the icon of image to show the task that the litho machine present situation is being carried out;
Step e), after receiving each step and completing or after obtaining feedback information, corresponding voice suggestion step is arranged, be used for consumer-oriented operation;
Step f), have a time shutter input step that oneself carries, this step can realize the characters in a fancy style input;
Step g), have fine setting step number query steps, and can point out the user when work stage reaches the limit of;
Step h), picture that camera is photographed is presented at camera viewing area (21) in real time, the user can be completed easily aims at and detect.
The beneficial effect that the present invention has is:
1), the whole operation of the present invention has good human-computer interaction, the prompting sign that image is concrete, the system that high speed is stable, the operation instruction of visual pattern; Remote debugging and software upgrading; Be presented to the clear picture that camera is taken liquid crystal display.
2), all operations of the present invention all adopts the mode of touch to carry out, equipment price is cheap, volume is small and exquisite, low noise dead-beat in operational process, and power consumption is little, need not special heat dissipation equipment.Simultaneously, integrated serial ports, USB interface, network interface and SD deck have fabulous extendability.
Description of drawings
Fig. 1 is the schematic diagram that embedded motherboard is connected with the single-chip microcomputer daughter board;
Fig. 2 is the structural drawing of the embedded motherboard decorum;
Fig. 3 is the structural drawing of the single-chip microcomputer daughter board decorum;
Fig. 4 is user interface schematic diagram of the present invention.
Element explanation in figure:
1S3C2440, 2SDRAM, 3NandFlash, 4NorFlash, 5 mother matrix 232 interfaces, the 6USB module, 7 network interface modules, 8 camera modules, the 9SD card module, 10 touch screen modules, 11 stereo modules, 12 real-time clock modules, 13 debugging modules, 14 infrared modules, 15 embedded motherboards, 16 single-chip microcomputer daughter boards, 17 daughter board 232 interfaces, 18 step motor control modules, 19AT89C52, 20 optoelectronic switch modules, 21 icon indicators (camera viewing area), 22 time exposure control zones, 23 fine setting step number interrogation zone, 24 master control districts, 25 time setting regions, 26 solenoid control modules
Embodiment
For making the purpose, technical solutions and advantages of the present invention clearer and more definite, below in conjunction with accompanying drawing and specific embodiment to one-piece construction of the present invention, embedded motherboard, the single-chip microcomputer daughter board, software systems and user interface are described further.
1. one-piece construction and principle:
A) the embedded Control equipment of this litho machine is made of embedded motherboard and single-chip microcomputer daughter board, wherein embedded motherboard is connected with the single-chip microcomputer daughter board by 232 interfaces, communicate by serial ports, embedded motherboard extracts the operation information on touch-screen, form with command string and serial data sends to the single-chip microcomputer daughter board, the single-chip microcomputer daughter board is identified these confidence, finally changes into the action control to stepper motor and solenoid valve;
B) Optical Coatings for Photolithography can be passed to the single-chip microcomputer daughter board by optoelectronic switch with the real-time information of litho machine, after receiving these feedback signals, the single-chip microcomputer daughter board it can be arranged out corresponding character string and command string, send to embedded motherboard by serial ports, by liquid crystal display and loudspeaker, these information are passed to the operator with image and sound.
Described single-chip microcomputer daughter board comprises the step motor control module, solenoid control module, photoswitc receiver module, monolithic processor resetting module and serial port module;
2. embedded motherboard comprises:
A) main control chip adopt Samsung the S3C2440 chip as microprocessor, built-in WinCE5.0 operating system;
B) configure the four-wire ohm touch-screen of 8 cun, the resolving power of demonstration is 800*600, adopts 40 pin FFC soft arranging wires to connect;
C) two two serial ports, one of them is used for debugging, and one is used for and microcontroller communication, and control chip is MAX202E;
D) five USB interface are respectively used to debugging, the sound equipment power supply, and USB flash disk patches and the expansion board clamping interface, and control chip is AU925A21;
E) adopt core board to separate with function and separate design, be connected with row's pin female seat by row's pin, be convenient to replacing and the upgrading of core board, integrated main control chip on core board, SDRAM, NandFlash and NorFlash, the user by jumper cap can selective system startup Flash;
F) adopt Special reset chip MAX811 that motherboard is resetted;
G) use the DM9000A network chip to be connected with the HR911105 network interface and being connected of the Internet;
H) adopt 4-bit DIP switch that start-up mode is set.
I) use UDA1341TS audio decoder chip to realize the left and right acoustic channels of sound equipment is controlled;
J) is furnished with the SD draw-in groove, the maximum SD card of supporting 4G;
K) use the DC3 socket of 20 pins to connect camera, wherein camera is ov9650, and pixel is 3,000,000.
3. the single-chip microcomputer daughter board comprises:
A) adopt AT89C52 as processor of single chip computer, the built-in complete driver to solenoid valve and stepper motor,
B) the solenoid control module comprises the photoelectrical coupler coupled signal, and uses triode to amplify, and finally drives solenoid valve;
C) use 3 line serial ports to complete and the communicating by letter of embedded motherboard, adopt the MAX232 chip to control;
D) the stepper motor module realizes enabling, and pulse output and set direction drive stepper motor, achieve precision and walk;
E) the optoelectronic switch module is for detecting the position of work stage, and after work stage moved to certain position, light was cut off, and whole optoelectronic switch sends information to processor.
4. software systems comprise:
A) software has recognition button information and sends the function of command information by serial ports;
B) there are corresponding image and this control command of icon representation to trigger after each operation steps of software is clicked, will scheme to be plotted to mutually corresponding zone by the mode of drawing;
C) software is after each step is completed, and next step the action of icon prompting user of image is arranged;
D) software after obtaining feedback information, has the icon of image to show the task that the litho machine present situation is being carried out;
E) software after receiving each step and completing or after obtaining feedback information, has corresponding sound prompt function, is used for consumer-oriented operation;
F) software has the time shutter input function that oneself carries, and can realize that characters in a fancy style shows, facilitates the user to operate better like this;
G) software has fine setting step number query function, and can prompting user operation can not proceed when work stage arrives the fine setting limit;
H) the software picture that camera can be photographed is presented on liquid crystal display in real time, the user can be completed easily aim at and detect.
The user interface of described embedded Control equipment for litho machine comprises:
A) be used for controlling the button of whole system work, can realize rising and reset operation, each click upward will be finely tuned a step after the mediation down button, click the opening and closing that shutter release button can realize shutter, meeting load image and configuration serial ports after click initialization button;
B) be used for showing the information feedback frame of respective icon, in a single day each operation is carried out, and this zone can show corresponding icon; After opening camera function, this zone will demonstrate the shooting picture of camera;
C) be used for inputting the digital button of time shutter, and change numeral retreat and empty button;
D) time shutter display box, the time showing that needs can be exposed facilitates the user that the time is held in this display box;
E) step number inquire button and display box, after the button of number of motor steps inquiry, the step number of fine setting will be presented in this display box.
5. the control algolithm of described embedded Control equipment for litho machine comprises:
Step a), the touch signal on touch-screen is decoded as corresponding control signal, the interface by touch-screen and motherboard transmits control signal to motherboard;
Step b), identify the kind of control signal according to recognizer, the icon indicator demonstrates image, shows that with this this control signal is triggered; Search simultaneously action lists, the control signal of correspondence is converted to the action of required execution, concrete action is decoded as control string successively, so far decoding work is completed;
Step c), control string is converted into the UNICODE code, send to the single-chip microcomputer daughter board by serial ports successively.Daughter board is decoded into the execution character string with the UNICODE code of receiving, searches built-in driving code, controls by electric signal that motor walks and electromagnetic valve switch.
Steps d), the action complete after, this equipment detects the position of litho machine and current state by optoelectronic switch, is the UNICODE code with these finish messages, sends it back embedded motherboard by serial ports;
Step e), motherboard decoding UNICODE code obtains corresponding status information, search the status information table, diagram with the present situation of litho machine by image is shown to the icon indicator, after a period of time, equipment enters the prompting state automatically, and next step operation that should carry out is presented at the icon indicator by image, search simultaneously sound bank, find corresponding voice suggestion paragraph, by player, audio-frequency information is play by sound equipment, be used for next step operation of guides user;
Step f), program carries the step number statistic algorithm, each fine setting running program of user all can be added up automatically, when the user pressed the step number inquire button, program can be plotted to fine setting step number interrogation zone with step number by the characters in a fancy style algorithm routine;
Step g), program carries time shutter input algorithm, after the each input value of user, this algorithm can be automatically cumulative, and be plotted in dialog box in the time setting regions by the characters in a fancy style algorithm routine; Click reset button, time shutter meeting auto zero; Click back, this algorithm can be given up lowest order automatically, and reduces 10 times, realizes modification to input value with this;
Step h), start the button of taking pictures after, can start camera driver, and the picture that camera photographs is shown to the camera viewing area in real time, the user can be completed easily aims at and detect.
The content that the present invention does not elaborate adopts the known technology of this area.
Although the above is described the illustrative embodiment of the present invention; so that the technician of present technique neck understands the present invention; but should be clear; the invention is not restricted to the scope of embodiment; to those skilled in the art; as long as various variations appended claim limit and the spirit and scope of the present invention determined in, these variations are apparent, all utilize innovation and creation that the present invention conceives all at the row of protection.
Claims (6)
1. embedded Control equipment that is used for litho machine, it is characterized in that: this equipment is by embedded motherboard (15) and single-chip microcomputer daughter board (16) formation; Described embedded motherboard (15) comprising: touch screen module (10), USB device module (6), network connecting module (7), the SD card reads memory module (9), camera module (8), embedded motherboard reseting module, played in stereo module (11) and debugging module (13); Described embedded motherboard (15) is connected with single-chip microcomputer daughter board (16) by 232 interfaces (5); Communicate by serial ports between described embedded motherboard (15) and single-chip microcomputer daughter board (16); This equipment extracts on touch-screen operation accordingly on described embedded motherboard (15), command string and serial data are sent to single-chip microcomputer daughter board (16) by serial ports, completes control to stepper motor and solenoid valve by single-chip microcomputer daughter board (16); The described single-chip microcomputer daughter board of this equipment (16) extracts the signal of litho machine feedback, and command string and serial data are sent to embedded motherboard (15) by serial ports, by liquid crystal display and loudspeaker, information is conveyed to the operator; Described single-chip microcomputer daughter board (16) comprises step motor control module (18), solenoid control module (26), photoswitc receiver module (20), monolithic processor resetting module and serial port module (17).
2. be used for according to claim 1 the embedded Control equipment of litho machine, it is characterized in that embedded motherboard (15) comprising:
A) adopting the S3C2440(1 of Samsung) chip is as microprocessor,
B) configure the four-wire ohm touch-screen of 8 cun;
C) two serial ports (5), one of them is used for debugging, and one is used for and microcontroller communication;
D) five USB interface are respectively used to debugging, the sound equipment power supply, and USB flash disk patches and the expansion board clamping interface;
E) adopt core board to separate with function and separate design, be connected with row's pin female seat by row's pin;
F) adopt professional reset chip MAX811 that motherboard is resetted;
G) use the DM9000A network chip to be connected with the HR911105 network interface and being connected of the Internet;
H) adopt toggle switch that start-up mode is set.
3. be used for according to claim 1 the embedded Control equipment of litho machine, it is characterized in that single-chip microcomputer daughter board (16) comprising:
A) adopt AT89C52(19) as processor of single chip computer,
B) realize shutter, silicon wafer stage, the control of mask stage by solenoid control module (26) operation solenoid valve;
C) use 3 line serial ports (17) to complete and the communicating by letter of embedded motherboard (15);
D) use stepper motor module (18) to operate to realize accurately walking to the position to stepper motor;
E) use optoelectronic switch module (20) to read the signal of optoelectronic switch feedback to determine the particular location of precision workpiece stage.
4. be used for according to claim 1 the embedded Control equipment of litho machine, it is characterized in that operating system is WinCE5.0.
5. be used for according to claim 1 the embedded Control equipment of litho machine, it is characterized in that, this equipment also comprises user interface, and this user interface comprises:
A) be used for controlling the button (24) of whole system work, realize rising, reset, fine setting, the function of exposure;
B) be used for showing the information feedback frame (21) of respective icon;
C) be used for inputting the digital button (25) of time shutter, and change numeral retreat and empty button;
D) time shutter display box (22), and be used for locking or the button of release time input value and the button of time exposure;
E) step number inquire button and display box (23).
6. the control method of the described embedded Control equipment for litho machine of according to claim 1 to 5 any one, is characterized in that, the method comprises:
Step a), have recognition button information and send the step of command information by serial ports;
Step b), each operation steps has corresponding image and this control command of icon representation to trigger after clicking;
Step c), after each step is completed, next step the action of icon prompting user of image is arranged;
Steps d), after obtaining feedback information, have the icon of image to show the task that the litho machine present situation is being carried out;
Step e), after receiving each step and completing or after obtaining feedback information, corresponding voice suggestion step is arranged, be used for consumer-oriented operation;
Step f), have a time shutter input step that oneself carries, this step can realize the characters in a fancy style input;
Step g), have fine setting step number query steps, and can point out the user when work stage reaches the limit of;
Step h), picture that camera is photographed is presented at camera viewing area (21) in real time, the user can be completed easily aims at and detect.
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| CN2013100232682A CN103092114A (en) | 2013-01-22 | 2013-01-22 | Embedded control equipment for lithography machine and control method thereof |
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| CN2013100232682A CN103092114A (en) | 2013-01-22 | 2013-01-22 | Embedded control equipment for lithography machine and control method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103365266A (en) * | 2013-06-20 | 2013-10-23 | 中国科学院光电技术研究所 | Distributed intelligent photoetching device based on Agent |
| CN103389625A (en) * | 2013-07-11 | 2013-11-13 | 浙江大学 | Communication method of immersion liquid transmission system applied to immersion lithography machine |
| CN103888471A (en) * | 2014-04-04 | 2014-06-25 | 中国科学院光电技术研究所 | Embedded remote communication and control method for photoetching machine |
| CN110445005A (en) * | 2019-08-13 | 2019-11-12 | 北京科益虹源光电技术有限公司 | A kind of hardware interlock control and its method based on excimer laser |
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Application publication date: 20130508 |