CN103091906B - A kind of mask plate - Google Patents
A kind of mask plate Download PDFInfo
- Publication number
- CN103091906B CN103091906B CN201310037537.0A CN201310037537A CN103091906B CN 103091906 B CN103091906 B CN 103091906B CN 201310037537 A CN201310037537 A CN 201310037537A CN 103091906 B CN103091906 B CN 103091906B
- Authority
- CN
- China
- Prior art keywords
- electrochromic
- layer
- electrode
- electrode unit
- conductive layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 claims abstract description 44
- 239000010409 thin film Substances 0.000 claims description 30
- 239000000463 material Substances 0.000 claims description 25
- 238000002161 passivation Methods 0.000 claims description 25
- 238000003860 storage Methods 0.000 claims description 7
- 239000004973 liquid crystal related substance Substances 0.000 abstract description 19
- 238000000034 method Methods 0.000 abstract description 10
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 239000010410 layer Substances 0.000 description 284
- 150000002500 ions Chemical class 0.000 description 8
- 239000010408 film Substances 0.000 description 7
- 239000003292 glue Substances 0.000 description 6
- 238000007789 sealing Methods 0.000 description 6
- 239000003792 electrolyte Substances 0.000 description 4
- 239000012945 sealing adhesive Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 239000000284 extract Substances 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 239000003978 infusion fluid Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229920000767 polyaniline Polymers 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000007784 solid electrolyte Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Landscapes
- Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
Abstract
The invention provides a kind of mask plate, relate to Display Technique field, solve the problem that in available liquid crystal instillation technique, the substrate of different size and model needs to make a mask plate respectively.A kind of mask plate, including: drive circuit, transparency carrier and the first conductive layer being arranged on described transparency carrier, the second conductive layer and be arranged on the electrochromic layer between two conductive layers；Wherein, described electrochromic layer includes: one or more electrochromic cells；Described first conductive layer includes: two or more the first electrode unit；Described second conductive layer includes: one or more second electrode unit；Described first electrode unit and described second electrode unit electrically connect with described drive circuit respectively, and corresponding described first electrode unit and described second electrode unit can drive the variable color as required of described electrochromic cells.The present invention is applicable to design and the manufacture of mask plate.
Description
Technical Field
The invention relates to the technical field of display, in particular to a mask plate.
Background
The liquid crystal display comprises a liquid crystal panel, wherein the liquid crystal panel comprises an array substrate and a color film substrate which are formed in a box-to-box mode, and liquid crystal filled between the array substrate and the color film substrate. An important process in the manufacturing process of the liquid crystal panel is ODF (liquid crystal drop Fill), i.e., filling liquid crystal between the array substrate and the color film substrate to form the liquid crystal panel. The method comprises the specific steps of firstly dripping a plurality of drops of liquid crystal on an array substrate or a color film substrate, then coating frame sealing glue to form a surrounding space to prevent the dripped liquid crystal from flowing freely, then combining the array substrate and the color film substrate, and irradiating and curing the frame sealing glue by utilizing Ultraviolet (UV) Rays to bond the array substrate and the color film substrate together.
However, since UV light has a destructive effect on substances such as liquid crystal, a mask plate is required when the frame sealing adhesive is irradiated and cured by using ultraviolet light, the mask plate corresponds to the panel coated with the frame sealing adhesive, and transmits the ultraviolet light in the region corresponding to the frame sealing adhesive, and the region not requiring the ultraviolet light irradiation except for the frame sealing adhesive is opaque. In the prior art, a mask plate needs to be manufactured before the ODF process is performed on the liquid crystal panels with different sizes, so as to ensure that the mask plate corresponds to the substrate coated with the frame sealing glue.
Disclosure of Invention
The embodiment of the invention provides a mask plate which can be applied to a liquid crystal instillation process and is suitable for liquid crystal panels with different sizes.
In order to achieve the above purpose, the embodiment of the invention adopts the following technical scheme:
an embodiment of the present invention provides a mask, including: the display device comprises a driving circuit, a transparent substrate, a first conducting layer, a second conducting layer and an electrochromic layer, wherein the first conducting layer and the second conducting layer are arranged on the transparent substrate; wherein,
the electrochromic layer includes: one or more electrochromic cells;
the first conductive layer includes: two or more first electrode units;
the second conductive layer includes: one or more second electrode units;
the first electrode unit and the second electrode unit are respectively electrically connected with the driving circuit, and the corresponding first electrode unit and the second electrode unit can drive the electrochromic unit to change color as required.
Optionally, the second conductive layer includes: one or more electrically connected second electrode units, the driving circuit comprising: the first driving circuit and the second driving circuit are electrically connected with the second conducting layer and provide a common voltage for the second conducting layer;
the first drive circuit includes:
a plurality of scanning signal lines disposed on the transparent substrate;
a plurality of data signal lines disposed on the transparent substrate and intersecting the scanning signal lines;
the thin film transistor in one-to-one correspondence with the first electrode unit includes: the grid electrode of the thin film transistor is electrically connected with the scanning signal line, the source electrode of the thin film transistor is electrically connected with the data signal line, and the drain electrode of the thin film transistor is electrically connected with the first electrode unit;
a scanning drive circuit connected to the scanning signal line;
and the data driving circuit is connected with the data signal line.
Optionally, the electrochromic layer comprises: an electrochromic cell;
the second conductive layer includes: a second electrode unit; one electrochromic unit of the electrochromic layer corresponds to more than two first electrode units of the first conducting layer and corresponds to one second electrode unit of the second conducting layer; or,
the second conductive layer includes: two or more second electrode units electrically connected; and one electrochromic unit of the electrochromic layer corresponds to more than two first electrode units of the first conducting layer and more than two second electrode units of the second conducting layer, and each first electrode unit of the first conducting layer is opposite to each second electrode unit of the second conducting layer.
Optionally, the electrochromic layer comprises: two or more electrochromic cells;
the second conductive layer includes: a second electrode unit; each electrochromic unit of the electrochromic layer is opposite to each first electrode unit of the first conducting layer and corresponds to one second electrode unit of the second conducting layer; the mask plate further comprises: the first passivation layer is positioned between the second conductive layer and the first conductive layer, and a through hole is formed in the position, opposite to each electrochromic unit, of the first passivation layer; or,
the second conductive layer includes: two or more second electrode units electrically connected; each electrochromic unit of the electrochromic layer is opposite to each first electrode unit of the first conducting layer and opposite to each second electrode unit of the second conducting layer.
Optionally, the gate of the thin film transistor is a part of the scanning signal line, or a part of the scanning signal line protruding from the scanning signal line; the source electrode of the thin film transistor is a part on the data signal line or a part of the data signal line protruding from the line.
Optionally, in a case that the second conductive layer includes two or more second electrode units, the two or more first electrode units of the first conductive layer form a row, the two or more second electrode units of the second conductive layer form a row, and the first electrode units intersect with the second electrode units;
the drive circuit includes: and the third driving circuit and the fourth driving circuit are respectively connected with the first electrode unit and the second electrode unit and provide driving scanning voltage and driving data voltage for the first electrode unit and the second electrode unit.
Optionally, the third driving circuit is connected to the first electrode unit, and provides a driving scanning voltage to the first electrode unit; the fourth driving circuit is connected with the second electrode unit and provides driving data voltage for the second electrode unit.
Optionally, the electrochromic layer includes two or more electrochromic units, and the mask further includes: and the second passivation layer is arranged between the first conductive layer and the second conductive layer, and a through hole is formed in the position, opposite to each electrochromic unit, of the second passivation layer.
Optionally, the first electrode unit is perpendicular to the second electrode unit.
Optionally, the electrochromic cell is in a dark state in a normal state and is transparent in a voltage applied state.
According to the mask plate provided by the embodiment of the invention, the first electrode unit and the second electrode unit which are opposite to the electrochromic unit are enabled to simultaneously apply voltage through the driving circuit, the electrochromic unit is driven to change color, a required mask unit is formed, the required mask unit corresponds to a substrate to be exposed, and the mask plate is suitable for substrates with different sizes and structures.
Drawings
Fig. 1 is a schematic diagram of a second electrode unit according to an embodiment of the invention;
fig. 2 is a schematic diagram of an electrical connection of a second electrode unit according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of an electrical connection of another second electrode unit according to an embodiment of the present invention;
fig. 4 is a schematic top view of a mask according to an embodiment of the present invention;
FIG. 5 is a partially enlarged schematic view of the mask shown in FIG. 4;
FIG. 6 is a schematic cross-sectional view of the mask plate shown in FIG. 5 along the A-A' direction;
FIG. 7 is a schematic cross-sectional view of the mask in the direction B-B' shown in FIG. 5;
FIG. 8 is a schematic sectional view of another mask in the direction B-B';
fig. 9 is a schematic top view of another mask according to an embodiment of the present invention;
FIG. 10 is a partially enlarged schematic view of the mask shown in FIG. 9;
reference numerals:
1-a transparent substrate; 2-scanning signal lines; 3-a gate insulating layer; 4-an active layer; 5-data signal lines; 6-a drain electrode; 7-a first passivation layer; 8-a first electrode unit; 9-an electrochromic layer; 10-a second electrode unit; 11-a fourth passivation layer; 12-a fourth conductive layer; 21-a scan drive circuit; 22-data driving circuitry; 31-a third drive circuit; 32-a fourth drive circuit; 91-an ion storage layer; 92-an electrolyte layer; 93-a layer of colour-changing material; 100-mask plate.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
An embodiment of the present invention provides a mask, including: the display device comprises a driving circuit, a transparent substrate, a first conducting layer, a second conducting layer and an electrochromic layer, wherein the first conducting layer and the second conducting layer are arranged on the transparent substrate; wherein the electrochromic layer comprises: one or more electrochromic cells; the first conductive layer includes: two or more first electrode units; the second conductive layer includes: one or more second electrode units;
the first electrode unit and the second electrode unit are respectively electrically connected with the driving circuit, and the corresponding first electrode unit and the second electrode unit can drive the electrochromic unit between the first electrode unit and the second electrode unit to change color as required.
The term "layer" as used herein refers to a thin film formed by depositing a material on a substrate or by other processes. The "cells" in the embodiments of the present invention include different shapes, such as square as shown in fig. 1, or long rectangle as shown in fig. 10. Of course, the shape of the elements is not limited to this, and the elements in fig. 1 may have other irregular shapes. Specifically, taking the second electrode unit as an example, the second conductive layer includes more than two second electrode units, as shown in fig. 1, including a plurality of second electrode units 10 arranged in a matrix form, and the second electrode units 10 are not in contact with each other. Of course, as shown in fig. 2 and 3, the plurality of second electrode units 10 may be connected together through other portions in the layer, for example, through a metal connection line or the like. Alternatively, the second conductive layer may include only one second electrode unit, which forms the second conductive layer, and the one second electrode unit covers all regions of two or more second electrode units, in other words, the second conductive layer may be a unitary electrode. Also, when the electrochromic layer includes two or more electrochromic cells, the shape of the electrochromic cells may be the shape of the second electrode unit 10 as shown in fig. 1. When the electrochromic layer includes one electrochromic cell, the one electrochromic cell forms the electrochromic layer, and the one electrochromic cell covers all regions of two or more electrochromic cells, in other words, the electrochromic layer may be a continuous integral layer. In the embodiments of the present invention, the figures all use the example that the electrochromic layer includes more than two electrochromic units for detailed description.
The working principle of the mask plate provided by the embodiment of the invention is as follows: the driving circuit selectively applies voltage to the first electrode unit and the second electrode unit, current passes through an electrochromic area which is over against the first electrode unit and the second electrode unit and applies voltage simultaneously, electrons are lost when charges are injected or extracted in the electrochromic area, and the color of the electrochromic material is changed. Therefore, the driving circuit can selectively apply voltage to the first conductive unit or the second conductive unit according to the requirement, so that the color of the region, in which the electrochromic layer is over against the first electrode unit and the second electrode unit and the voltage is applied at the same time, is changed, and a required mask pattern is formed on the mask plate, thereby being suitable for mask exposure of substrates with different sizes.
As shown in fig. 7 and 8, the electrochromic layer 9 may further include: an ion storage layer 91, an electrolyte layer 92, and a color-changing material layer 93. The electrolyte layer 92 may be formed of a solid electrolyte material for forming positive and negative ions under the action of an electric current; the ion storage layer 91 plays a role in storing corresponding counter ions and keeping the charge balance of the whole system when the electrochromic material injects or extracts charges; the ion storage layer can also be a material with the color change performance opposite to that of the previous layer of electrochromic material, so that the functions of color superposition or color complementation can be realized. Alternatively, the electrochromic material forming the electrochromic layer includes: the electrochromic material comprises a cathode electrochromic material and an anode electrochromic material, wherein the cathode electrochromic material and the anode electrochromic material can be electrolyzed under the action of voltage or current to provide positive and negative ions, and the cathode electrochromic material and the anode electrochromic material are subjected to chemical combination reaction to form the material of the electrochromic layer. The electrochromic layer and the material can be arranged according to the prior art, and the color of the electrochromic layer can be changed under the action of voltage or current. In the embodiment of the invention, the electrochromic layer comprises: the color-changing material layer, the ion storage layer, and the electrolyte layer are described in detail as examples. In addition, the electrochromic layer is formed by different materials, and the colors of the electrochromic materials are different after electric charges are injected or extracted. Under the action of current or voltage, the color of the electrochromic material of the mask plate changes between light transmission and light non-transmission after the electrochromic material injects or extracts charges. For example, polyaniline, which becomes black or transparent under the action of current or voltage.
In addition, the electrochromic layer is positioned between the first conducting layer and the second conducting layer, so that the first conducting layer can be positioned below the electrochromic layer, and the second conducting layer is positioned above the electrochromic layer; alternatively, the first conductive layer may be located above the electrochromic layer, with the second conductive layer located below the electrochromic layer. The first conductive layer and the second conductive layer may be indium tin oxide, tin dioxide, or the like, and the first conductive layer and the second conductive layer are exemplified as indium tin oxide in the embodiment of the present invention. The upper and lower in the embodiment of the invention are subject to the sequence of manufacturing the mask plate. For example, the upper conductive layer refers to a conductive layer formed later, and the lower conductive layer refers to a conductive layer formed earlier.
According to the mask plate provided by the invention, voltage can be selectively applied to the first electrode unit and the second electrode unit through the driving circuit according to needs, so that the electrochromic layer is opposite to the areas where the voltage is simultaneously applied to the first electrode unit and the second electrode unit, and the required mask pattern is formed on the mask plate and corresponds to a substrate to be exposed, and the mask plate is suitable for substrates with different sizes and structures.
The mask plate provided by the embodiment of the invention can be used for a liquid crystal instillation process and is used for curing frame sealing glue. Because not unidimensional display panel's frame sealing glue is the rectangle, then be applicable to the mask plate to not unidimensional display panel, the region that corresponds the drip infusion liquid crystal is light tight part, therefore, can set up the middle part on the mask plate to light tight, only need set up electrochromic layer and first electrode layer and second electrode layer in the marginal position of mask plate light tight region, make the regional color change of part of electrochromic layer through first electrode layer and second electrode layer, and then form different mask patterns, with the base plate that is applicable to not unidimensional.
Optionally, the mask pattern is formed entirely of the first electrode layer, the second electrode layer, and the electrochromic layer. Therefore, the mask plate can form patterns in any shape according to requirements, can be suitable for manufacturing various thin film patterns on a color film substrate and an array substrate, and can also be suitable for a liquid crystal instillation process in the manufacturing process of a liquid crystal display panel. The embodiment of the invention takes the example that the mask plate is suitable for the liquid crystal dripping process, and the mask plate is used for irradiating and curing the frame sealing glue on the substrate through ultraviolet rays.
Optionally, as shown in fig. 4 to 8, the second conductive layer includes: one or more than two electrically connected second electrode units, a first driving circuit and a second driving circuit, wherein the second driving circuit is electrically connected with the second conducting layer and provides a common voltage for the second conducting layer; the first drive circuit includes: a plurality of scanning signal lines 2 provided on the transparent substrate 1; a plurality of data signal lines 5 provided on the transparent substrate 1 and intersecting the scanning signal lines 2; thin film transistors in one-to-one correspondence with the first electrode units 8, the thin film transistors including: a gate electrode, a source electrode, and a drain electrode 6, wherein the gate electrode of the thin film transistor is electrically connected to the scanning signal line 2, the source electrode is electrically connected to the data signal line 5, and the drain electrode is electrically connected to the first electrode unit 8; the mask plate further comprises: a scanning drive circuit 21 connected to the scanning signal line; and a data driving circuit 22 connected to the data signal line.
Since the second conductive layer includes: and one or more second electrode units electrically connected to the second conductive layer, wherein the second conductive layer is connected to the second driving circuit, is equivalent to a common electrode, and can always maintain a circuit on state. To obtain the corresponding mask unit, the first driving circuit is required to apply a voltage to the corresponding first electrode unit. Specifically, each first electrode unit is connected with one thin film transistor, and circuit conduction is realized through a scanning signal line and a data signal line. And particularly, the driving circuit may further include a timing controller for outputting a control signal. And the driving circuit provides driving scanning voltage for the scanning signal lines and driving data voltage for the data signal lines through the timing controller. Therefore, by controlling the scanning signal line and the data signal line, the electrochromic layer is opposite to the area where the first electrode unit and the second electrode unit are simultaneously applied with voltage for color change, and a corresponding mask unit is obtained. The two or more second electrode units may be electrically connected through other portions of the layer, or may be electrically connected through other layers.
Optionally, the gate of the thin film transistor is a part of the scanning signal line, or a part of the scanning signal line protruding from the scanning signal line; the source electrode of the thin film transistor is a part on the data signal line or a part of the data signal line protruding from the line.
Specifically, the gate of the thin film transistor is a portion of the scanning signal line, and the source of the thin film transistor is a portion of the data signal line. Or, the grid of the thin film transistor is the part of the scanning signal line protruding from the line, and the source of the thin film transistor is the part of the data signal line protruding from the line. A thin film transistor may be disposed in a region surrounded by a scan signal line and a data signal line such that a gate of the thin film transistor is electrically connected to the scan signal line, a source of the thin film transistor is electrically connected to the data signal line, and a drain of the thin film transistor is electrically connected to the first electrode unit. As shown in fig. 5 and 6, in the embodiment of the present invention, a gate of the thin film transistor is a portion on the scan signal line, and a source of the thin film transistor is a portion on the data signal line. This also increases the area of the electrochromic cell, resulting in a finer mask pattern.
Optionally, the electrochromic layer comprises: an electrochromic cell; the second conductive layer includes: a second electrode unit; one electrochromic unit of the electrochromic layer corresponds to more than two first electrode units of the first conducting layer and corresponds to one second electrode unit of the second conducting layer; alternatively, the second conductive layer includes: two or more second electrode units electrically connected; and one electrochromic unit of the electrochromic layer corresponds to more than two first electrode units of the first conducting layer and more than two second electrode units of the second conducting layer, and each first electrode unit of the first conducting layer is opposite to each second electrode unit of the second conducting layer.
Specifically, when first conducting layer, electrochromic layer and second conducting layer have been formed with on the transparent substrate in proper order, first conducting layer includes two above first electrode unit, electrochromic layer includes an electrochromic unit, the second conducting layer includes a second electrode unit. The shape of the first electrode unit can be as shown in fig. 5, and the shape of the first electrode unit 8 is in the area enclosed by the scanning signal line and the data signal line. The electrochromic unit is opposite to the second electrode unit and corresponds to at least two first electrode units of the first conducting layer. At this time, the second conductive layer is connected to the second driving circuit, and the second conductive layer corresponds to the common electrode. The first conductive layer is connected to a first driving circuit, and a voltage is applied to a part of the first electrode units of the first conductive layer through a scanning signal line and a data signal line. The electrochromic layer is electrochromic corresponding to the area of the first electrode unit to which the voltage is applied, and a required mask pattern is formed.
Or, when first conducting layer, electrochromic layer and second conducting layer have been formed with in proper order on the transparent substrate, first conducting layer includes two or more first electrode units, electrochromic layer includes an electrochromic unit, the second conducting layer includes: and the more than two second electrode units are electrically connected. The shapes of the first electrode unit and the second electrode unit refer to the shape of the first electrode unit 8 in the region surrounded by the scanning signal line and the data signal line in fig. 5. And one electrochromic unit of the electrochromic layer corresponds to more than two first electrode units of the first conducting layer and more than two second electrode units of the second conducting layer, and each first electrode unit of the first conducting layer is opposite to each second electrode unit of the second conducting layer. The two or more second electrode units may be electrically connected through other portions of the layer, as shown in fig. 2 and 3. The two or more second electrode units may be electrically connected through another layer. Specifically, a third passivation layer and a third conductive layer may be disposed above the second conductive layer, and a via hole is formed in the third passivation layer at a position opposite to each second electrode pattern, so that each second electrode pattern is electrically connected through the third conductive layer. At this time, the second conductive layer is connected to the second driving circuit, and the second conductive layer corresponds to the common electrode. The first conductive layer is connected to a first driving circuit, and a voltage is applied to a part of the first electrode units of the first conductive layer through a scanning signal line and a data signal line. The electrochromic layer is electrochromic corresponding to the area of the first electrode unit to which the voltage is applied, and a required mask pattern is formed.
Of course, the second conductive layer may also be located below the first conductive layer. When the second conductive layer is located below the first conductive layer, the structures of the layers of the mask plate are the same as those of the mask plate in which the second conductive layer is located above the first conductive layer.
Optionally, the electrochromic layer comprises: two or more electrochromic cells; the second conductive layer includes: a second electrode unit; each electrochromic unit of the electrochromic layer is opposite to each first electrode unit of the first conducting layer and corresponds to one second electrode unit of the second conducting layer; the mask plate further comprises: the first passivation layer is positioned between the second conductive layer and the first conductive layer, and a through hole is formed in the position, opposite to each electrochromic unit, of the first passivation layer; alternatively, the second conductive layer includes: two or more second electrode units electrically connected; each electrochromic unit of the electrochromic layer is opposite to each first electrode unit of the first conducting layer and opposite to each second electrode unit of the second conducting layer.
Specifically, as shown in fig. 5 and 7, when a first conductive layer, an electrochromic layer, and a second conductive layer are sequentially formed on the transparent substrate, the first conductive layer includes two or more first electrode units, the electrochromic layer includes two or more electrochromic units, and the second conductive layer includes: a second electrode unit. Wherein, the shapes of the electrochromic unit and the first electrode unit can refer to the shape of the first electrode unit 8 shown in fig. 5. Each electrochromic unit of the electrochromic layer is opposite to each first electrode unit of the first conducting layer and corresponds to one second electrode unit of the second conducting layer; the mask plate further comprises: and the first passivation layer 7 is positioned between the second conductive layer and the first conductive layer, and a through hole is formed in the position, opposite to each electrochromic unit, of the first passivation layer 7.
The first passivation layer is used for preventing the first conductive layer and the second conductive layer from being electrically connected. At this time, the second conductive layer is connected to the second driving circuit, and the second conductive layer corresponds to the common electrode. The first conductive layer is connected to a first driving circuit, and a voltage is applied to a part of the first electrode units of the first conductive layer through a scanning signal line and a data signal line. In the electrochromic unit, the electrochromic unit which is just opposite to the first electrode unit and is applied with voltage is electrochromic, and a required mask pattern is formed.
Or when a first conductive layer, an electrochromic layer and a second conductive layer are sequentially formed on the transparent substrate, the first conductive layer comprises more than two first electrode units, the electrochromic layer comprises more than two electrochromic units, the second conductive layer comprises more than two second electrode units, and the more than two second electrode units are electrically connected; each electrochromic unit of the electrochromic layer is opposite to each first electrode unit of the first conducting layer and opposite to each second electrode unit of the second conducting layer.
Specifically, the two or more second electrode units may be electrically connected through other portions in the layer, as shown in fig. 2 and 3. The mask plate further comprises: and the first passivation layer is positioned between the second conductive layer and the first conductive layer, and a through hole is formed in the position, opposite to each electrochromic unit, of the first passivation layer.
Alternatively, the two or more second electrode units may be electrically connected, or may be electrically connected through another layer. As shown in fig. 8, a fourth passivation layer 11 and a fourth conductive layer 12 may be disposed above the second conductive layer, and the fourth passivation layer 11 is formed with a via hole at a position opposite to each second electrode pattern, so that each second electrode pattern is electrically connected through the fourth conductive layer 12. The second conductive layer is connected to the second driving circuit, and the second conductive layer corresponds to the common electrode. The first conductive layer is connected to a first driving circuit, and a voltage is applied to a part of the first electrode units of the first conductive layer through a scanning signal line and a data signal line. And the electrochromic area where the first electrode unit and the second electrode unit which are simultaneously applied with voltage are opposite is electrochromic, so that a required mask pattern is formed.
Of course, the second conductive layer can also be located below the first conductive layer, and the principle is the same as that of the second conductive layer located above the first conductive layer. In the embodiments of the present invention, the second conductive layer is only located above the first conductive layer for example.
Alternatively, as shown in fig. 9, in the case where the second conductive layer includes two or more second electrode units, two or more first electrode units 8 of the first conductive layer form a row, two or more second electrode units 10 of the second conductive layer form a row, and the first electrode units intersect with the second electrode units;
the drive circuit includes: a third drive circuit 31 and a fourth drive circuit 32; the third driving circuit 31 and the fourth driving circuit 32 are respectively connected to the first electrode unit 8 and the second electrode unit 10, and supply a driving scan voltage and a driving data voltage to the first electrode unit 8 and the second electrode unit 10.
The first electrode units and the second electrode units are shaped as shown in fig. 10, two or more first electrode units of the first conductive layer are arranged in a row along the second direction 102, and two or more second electrode units of the second conductive layer are arranged in a row along the first direction 101. Preferably, the first direction 101 and the second direction 102 are perpendicular, i.e. the first electrode unit and the second electrode unit intersect perpendicularly. As shown in fig. 9, the third driving circuit and the fourth driving circuit are connected to the first electrode unit and the second electrode unit, respectively, and supply the driving scan voltage and the driving data voltage to the first electrode unit and the second electrode unit. In this way, when the first electrode unit and the second electrode unit are simultaneously powered on, the electrochromic layer is discolored in the electrochromic region at the intersection of the first electrode unit and the second electrode unit, and a required mask pattern is formed.
Or alternatively, the first conductive layer includes two or more first electrode units, where the shape of the first electrode unit can be as shown in fig. 1, and a plurality of the first electrode units are electrically connected through other portions in the layer, and form a row along a first direction, refer to fig. 2 and 3, and two or more first electrode units form multiple rows; the second conductive layer comprises more than two second electrode units, wherein the shape of the second electrode units is as shown in fig. 1, the second electrode units are electrically connected through other parts in the layer and form a row along a second direction as shown in fig. 2 and 3, and the more than two second electrode units form multiple rows; the third driving circuit and the fourth driving circuit are respectively connected with the first electrode unit and the second electrode unit, and provide driving scanning voltage and driving data voltage for the first electrode unit and the second electrode unit by taking a row as a unit. Wherein the shape of the first electrode unit and the second electrode unit is as the shape of the first electrode unit shown in fig. 5.
Of course, the first conductive layer may be located below the electrochromic layer, in which case the second conductive layer is located above the electrochromic layer; alternatively, the first conductive layer may be located above the electrochromic layer, with the second conductive layer located below the electrochromic layer. In the embodiment of the present invention, the first conductive layer is located below the electrochromic layer, and the second conductive layer is located above the electrochromic layer. Specifically, the driving circuit may further include a timing controller, and the timing controller may enable one of the third driving circuit and the fourth driving circuit to provide the driving scan voltage, and enable the other to selectively provide the driving data voltage. For example, the third driving circuit may be connected to the first electrode unit, and provide a driving scan voltage to the first electrode unit; the fourth driving circuit is connected with the second electrode unit and provides driving data voltage for the second electrode unit.
Of course, the third driving circuit may also be connected to the second electrode unit to provide a driving scan voltage to the second electrode unit; the fourth driving circuit is connected with the first electrode unit and provides driving data voltage for the first electrode unit. Any one of the third driving circuit and the fourth driving circuit outputs a driving scanning voltage, and the other one inputs a driving data voltage, which is respectively connected with the first electrode unit and the second electrode unit, and can be used for driving the electrochromic area at the intersection position of the first electrode unit and the second electrode unit to change color to form a required mask pattern.
Optionally, the electrochromic layer includes more than two electrochromic units, and the electrochromic units are corresponding to the crossing positions of the first electrode unit and the second electrode unit. The mask plate further comprises: and the second passivation layer is arranged between the first conductive layer and the second conductive layer, and a through hole is formed in the position, opposite to each electrochromic unit, of the second passivation layer. Since the electrochromic layer includes two or more electrochromic cells, in order to prevent the first conductive layer and the second conductive layer from being electrically connected, a second passivation layer is disposed between the first conductive layer and the second conductive layer. At this time, when the first electrode unit and the second electrode unit are simultaneously electrified, the electrochromic layer unit facing the intersection position of the first electrode unit and the second electrode unit is electrochromic, and a required mask pattern is formed.
Optionally, the mask further includes: and the fifth passivation layer is used for forming a protective layer and covering all layers formed on the transparent substrate. Or,
preferably, the mask further includes: and the other transparent substrate forms all layer structures between the two transparent substrates, so that the layer structures can work for a long time without being influenced by the external environment through the protection of the two transparent substrates.
Optionally, the electrochromic cell is in a dark state in a normal state and is transparent in a voltage applied state. The mask plate comprising the electrochromic layer does not need a backlight lamp, and the electrochromic layer has the bistable characteristic, namely, under the voltage-applying state, after the color is changed and a static image is displayed, as long as the display content is not changed, the power consumption is avoided, and the purpose of energy conservation is achieved.
The above description is only for the specific embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the appended claims.
Claims (9)
1. A mask, comprising: the display device comprises a driving circuit, a transparent substrate, a first conducting layer, a second conducting layer and an electrochromic layer, wherein the first conducting layer and the second conducting layer are arranged on the transparent substrate; wherein,
the electrochromic layer includes: one or more electrochromic cells;
the first conductive layer includes: two or more first electrode units;
the second conductive layer includes: one or more second electrode units;
the first electrode unit and the second electrode unit are respectively electrically connected with the driving circuit, and the corresponding first electrode unit and the corresponding second electrode unit can drive the electrochromic unit to change color as required;
the second conductive layer includes: one or more electrically connected second electrode units, the driving circuit comprising: the first driving circuit and the second driving circuit are electrically connected with the second conducting layer and provide a common voltage for the second conducting layer;
the first drive circuit includes:
a plurality of scanning signal lines disposed on the transparent substrate;
a plurality of data signal lines disposed on the transparent substrate and intersecting the scanning signal lines;
the thin film transistor in one-to-one correspondence with the first electrode unit includes: the grid electrode of the thin film transistor is electrically connected with the scanning signal line, the source electrode of the thin film transistor is electrically connected with the data signal line, and the drain electrode of the thin film transistor is electrically connected with the first electrode unit;
a scanning drive circuit connected to the scanning signal line;
a data driving circuit connected to the data signal line;
wherein the electrochromic layer further comprises an ion storage layer, and the material of the ion storage layer is opposite to the material of the electrochromic layer in color change performance.
2. A mask according to claim 1, wherein the electrochromic layer comprises: an electrochromic cell;
the second conductive layer includes: a second electrode unit; one electrochromic unit of the electrochromic layer corresponds to more than two first electrode units of the first conducting layer and corresponds to one second electrode unit of the second conducting layer; or,
the second conductive layer includes: two or more second electrode units electrically connected; and one electrochromic unit of the electrochromic layer corresponds to more than two first electrode units of the first conducting layer and more than two second electrode units of the second conducting layer, and each first electrode unit of the first conducting layer is opposite to each second electrode unit of the second conducting layer.
3. A mask according to claim 1, wherein the electrochromic layer comprises: two or more electrochromic cells;
the second conductive layer includes: a second electrode unit; each electrochromic unit of the electrochromic layer is opposite to each first electrode unit of the first conducting layer and corresponds to one second electrode unit of the second conducting layer; the mask plate further comprises: the first passivation layer is positioned between the second conductive layer and the first conductive layer, and a through hole is formed in the position, opposite to each electrochromic unit, of the first passivation layer; or,
the second conductive layer includes: two or more second electrode units electrically connected to each other; each electrochromic unit of the electrochromic layer is opposite to each first electrode unit of the first conducting layer and opposite to each second electrode unit of the second conducting layer.
4. A mask according to claim 1, wherein the gate of the thin film transistor is a portion of the scanning signal line or a portion of the scanning signal line protruding from the scanning signal line; the source electrode of the thin film transistor is a part on the data signal line or a part of the data signal line protruding from the line.
5. A mask according to claim 1, wherein in a case where the second conductive layer includes two or more second electrode units, the two or more first electrode units of the first conductive layer form a row, the two or more second electrode units of the second conductive layer form a row, and the first electrode units intersect with the second electrode units;
the drive circuit includes: and the third driving circuit and the fourth driving circuit are respectively connected with the first electrode unit and the second electrode unit and provide driving scanning voltage and driving data voltage for the first electrode unit and the second electrode unit.
6. A mask plate according to claim 5, wherein the third driving circuit is connected to the first electrode unit and supplies a driving scanning voltage to the first electrode unit; the fourth driving circuit is connected with the second electrode unit and provides driving data voltage for the second electrode unit.
7. A mask according to claim 5, wherein the electrochromic layer comprises more than two electrochromic units, and the mask further comprises: and the second passivation layer is arranged between the first conductive layer and the second conductive layer, and a through hole is formed in the position, opposite to each electrochromic unit, of the second passivation layer.
8. A mask according to claim 5, wherein the first electrode unit is perpendicular to the second electrode unit.
9. A mask according to claim 1, wherein the electrochromic cells are dark in a normal state and transparent in a voltage applied state.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310037537.0A CN103091906B (en) | 2013-01-30 | 2013-01-30 | A kind of mask plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310037537.0A CN103091906B (en) | 2013-01-30 | 2013-01-30 | A kind of mask plate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103091906A CN103091906A (en) | 2013-05-08 |
| CN103091906B true CN103091906B (en) | 2016-12-28 |
Family
ID=48204671
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310037537.0A Expired - Fee Related CN103091906B (en) | 2013-01-30 | 2013-01-30 | A kind of mask plate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103091906B (en) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103235451A (en) * | 2013-04-23 | 2013-08-07 | 北京京东方光电科技有限公司 | Mask and production method thereof |
| CN105353566A (en) * | 2015-10-26 | 2016-02-24 | 京东方科技集团股份有限公司 | Exposure device, manufacturing method thereof, and frame sealing glue solidifying method |
| CN105607377B (en) * | 2016-04-01 | 2020-01-03 | 京东方科技集团股份有限公司 | Mask plate, manufacturing method and using method thereof and equipment comprising mask plate |
| CN105892111B (en) * | 2016-06-14 | 2019-05-07 | 深圳市华星光电技术有限公司 | Light shield equipment and the method for making photocuring product |
| CN106773521B (en) * | 2017-01-04 | 2020-01-21 | 京东方科技集团股份有限公司 | Mask plate, display substrate and manufacturing method of display substrate |
| CN106647090A (en) * | 2017-03-10 | 2017-05-10 | 合肥鑫晟光电科技有限公司 | Mask plate and manufacturing method thereof, as well as shading device and control method thereof |
| CN108255350B (en) * | 2018-03-09 | 2021-07-16 | 上海天马微电子有限公司 | Touch control display device |
| CN108628053A (en) * | 2018-05-09 | 2018-10-09 | 深圳市华星光电技术有限公司 | UV mask plates and preparation method thereof |
| CN109031882B (en) * | 2018-09-20 | 2021-09-21 | 京东方科技集团股份有限公司 | Mask device and mask control method |
| CN111445785B (en) * | 2019-01-16 | 2022-06-10 | 北京小米移动软件有限公司 | Electronic equipment and screen module |
| CN111638618A (en) * | 2020-07-01 | 2020-09-08 | 京东方科技集团股份有限公司 | Dimming panel, dimming glass, dimming device and light transmittance adjusting system |
| CN114779570A (en) * | 2022-04-11 | 2022-07-22 | 西湖大学 | Reticle, lithographic apparatus and method for manufacturing a reticle |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1706908A (en) * | 2004-06-04 | 2005-12-14 | 力光科技股份有限公司 | Compound as electrochromic material and electrochromic module |
| US7851110B2 (en) * | 2007-04-20 | 2010-12-14 | Photronics, Inc. | Secure photomask with blocking aperture |
| CN202548530U (en) * | 2012-01-09 | 2012-11-21 | 京东方科技集团股份有限公司 | Mask plate and mask plate system |
-
2013
- 2013-01-30 CN CN201310037537.0A patent/CN103091906B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1706908A (en) * | 2004-06-04 | 2005-12-14 | 力光科技股份有限公司 | Compound as electrochromic material and electrochromic module |
| US7851110B2 (en) * | 2007-04-20 | 2010-12-14 | Photronics, Inc. | Secure photomask with blocking aperture |
| CN202548530U (en) * | 2012-01-09 | 2012-11-21 | 京东方科技集团股份有限公司 | Mask plate and mask plate system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103091906A (en) | 2013-05-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103091906B (en) | A kind of mask plate | |
| CN101419375B (en) | Electrophoretic display device and making method thereof | |
| US10211420B2 (en) | OLED display device | |
| CN105607377B (en) | Mask plate, manufacturing method and using method thereof and equipment comprising mask plate | |
| US20070195252A1 (en) | Electronic Ink Display | |
| CN104216193A (en) | Electronic paper module, electronic paper display device and electronic paper module manufacturing method | |
| CN104317090A (en) | Bi-stable state liquid crystal light valve and operation method thereof | |
| CN102566190A (en) | Electronic paper device | |
| CN103698948A (en) | Liquid crystal display panel and liquid crystal display | |
| CN105116602A (en) | Display panel and display device | |
| CN111025778A (en) | Liquid crystal box and electronic equipment | |
| CN103137557B (en) | Array substrate and display unit and manufacturing method of array substrate | |
| CN103969874B (en) | Liquid crystal display panel, manufacturing method, semitransparent and semi-reflecting display device and display control method | |
| WO2005012994A1 (en) | Electrochromic display | |
| US6980263B2 (en) | Display device using bidirectional two-terminal element and manufacturing method thereof | |
| CN206096692U (en) | Liquid crystal display panel and display device | |
| JP2015018061A (en) | Electrophoresis device, method for manufacturing the electrophoresis device, and electronic apparatus | |
| CN107102471B (en) | Color filter substrate, manufacturing method thereof and liquid crystal panel | |
| CN104181738B (en) | A kind of pixel cell, array base palte, display device and image element driving method | |
| CN203013725U (en) | Flexible display substrate and flexible display device | |
| CN101900919A (en) | Apparatus for hardening seal of electrophoretic display device and method of fabricating electrophoretic display device using thereof | |
| CN104122711A (en) | Narrow frame display device and manufacturing method thereof | |
| JP2009031640A (en) | Method for manufacturing electrophoretic display panel, and electrophoretic display panel | |
| CN107329315B (en) | Display panel, display device and preparation method thereof | |
| CN204155041U (en) | Bistable liquid crystal light valve |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161228 Termination date: 20220130 |