CN103090969B - Laser cleaning threshold value test method - Google Patents

Laser cleaning threshold value test method Download PDF

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Publication number
CN103090969B
CN103090969B CN201210581710.9A CN201210581710A CN103090969B CN 103090969 B CN103090969 B CN 103090969B CN 201210581710 A CN201210581710 A CN 201210581710A CN 103090969 B CN103090969 B CN 103090969B
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Prior art keywords
laser
value
threshold value
cleaning threshold
laser energy
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CN103090969A (en
Inventor
佟艳群
张永康
姚红兵
张署光
张罗
王浩
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Jiangsu University
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Jiangsu University
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Abstract

The invention discloses a laser cleaning threshold value test method. The laser cleaning threshold value test method includes the following steps: setting initial laser energy value, detecting laser plasma signals generated by laser shock materials, transforming the laser plasma signals into voltage signals and obtaining peak voltage value, and substituting the laser energy value and the peak voltage value into the Bi Dose Resp function; changing the laser energy value, repeating the steps more than five times, obtaining different equation sets formed by the laser energy value and the peak voltage, and calculating laser cleaning threshold value and laser-damaged threshold value. The laser cleaning threshold value test method achieves automatic test of the laser cleaning threshold value.

Description

A kind of method of testing of laser cleaning threshold value
Technical field
The invention belongs to laser cleaning field, relate in particular to a kind of method of testing of laser cleaning threshold value.
Background technology
In laser cleaning process, if laser energy is too high, can damage matrix, energy is too low can not be clean by surface clean, therefore exists laser cleaning threshold value and laser damage threshold.Before carrying out laser cleaning, first step is exactly to determine laser energy, and the selection of energy must be greater than cleaning threshold and be less than damage threshold.Laser cleaning threshold value obtains by two kinds of modes at present, one class is sound detection method, utilize pulsed laser radiation substrate surface, produce in a short period of time strong shock wave vibratory, substrate surface produces sound wave, by with acoustic instruments such as microphones, collect with processing procedure in the acoustical signal sent, by judgement cleaning thresholds such as the intensity of acoustical signal and frequencies; Another kind of is light detection method, and the substrate of laser pulse irradiation produces high-octane plasma, and its situation of change judgement matrix degree of cleaning is measured in the detections such as the plasma spectrometry by induced with laser, light intensity.These sniffers can both obtain the laser cleaning threshold value of material, but all can only rely on a large amount of experimental datas to find threshold value, when cleaning different material requires, do a large amount of experiments that repeats.
Summary of the invention
The object of the invention is to propose a kind of energy of plasma that utilizes the laser-impact material production of different-energy value and measure the method for laser cleaning threshold value.
Technical scheme of the present invention is: a kind of method of testing of laser cleaning threshold value, set initial laser energy value, and take following steps:
1) the laser plasma signal that exploring laser light impact material produces, converts described laser plasma signal voltage signal to and obtains crest voltage value, by described laser energy value and crest voltage value substitution equation
2) change laser energy value, repeating step 1) 6 times and more than, obtain the system of equations that different laser energy values and crest voltage form, calculating laser cleaning threshold value c and laser damage threshold g;
Wherein, x laser energy value, y is crest voltage value, a, b, d, h, p is that material and corrosion layer affect parameter.
Described step 2) laser energy value is for uniformly-spaced changing.
The invention has the beneficial effects as follows: the relation of the crest voltage value by exploring laser light energy value and exploring laser light plasma is calculated laser cleaning cleaning threshold and laser damage threshold, a large amount of repeated experiments have been reduced, save experimental cost, contributed to realize the robotization of laser cleaning threshold testing.
Accompanying drawing explanation
Fig. 1 proving installation figure;
1 laser instrument; 2 catoptrons; 3 laser plasmas; 4 condenser lenses; 5 material corrosion layers; 6 are cleaned material matrix; 7 wave filters; 8 photodetectors; 9 oscillographs; 10 processors;
The matched curve of Fig. 2 experimental data.
Embodiment
The relation of this method of testing based on swashing light-matter interaction.When laser energy hour, laser action can not or produce very little laser plasma in material surface corrosion layer, and therefore output is less.Along with the increase of laser energy, the effect between corrosion layer and laser strengthens, and laser plasma also strengthens thereupon, and cleaning performance improves gradually.After reaching cleaning threshold, laser strengthens gradually, but the strength increase of laser plasma not obvious, this is because corrosion layer has certain thickness, and laser and corrosion layer effect change and are not obvious, and at this moment cleaning performance is relatively good.But when laser increases to damage threshold again, the big large increase of the intensity of laser plasma, this explanation laser not only with corrosion layer effect, also have an effect with matrix material, therefore the damage of matrix is also increased gradually.
The Changing Pattern of laser cleaning material surface is identical with BiDoseResp model Changing Pattern, and therefore, with BiDoseResp model representation laser cleaning action model, the flex point of this model curve is laser cleaning threshold value and laser damage threshold.BiDoseResp function general formula is , x laser energy value, y is crest voltage value, a, b, d, h, p is that material and corrosion layer affect parameter, and c is laser cleaning threshold value, and g is laser damage threshold.Due to by after laser energy value x and crest voltage value y substitution formula, there are 7 unknown parameters in equation, therefore should choose 7 times and the laser of above laser energy value cleans and obtain corresponding crest voltage value to material surface, form system of equations, calculate the laser damage threshold and the laser cleaning threshold value that finally need cleaning material.
Be illustrated in figure 1 the proving installation of laser cleaning threshold value, comprise laser instrument 1, catoptron 2, condenser lens 4, wave filter 7, photodetector 8, oscillograph 9 and processor 10, the wavelength of the filtering ripple of wave filter is identical with cleaning laser wavelength, laser instrument 1 sends laser and acts on material 6 surfaces through catoptron 2 and condenser lens 4, produce laser plasma 3, after this plasma line focus lens 4 and wave filter 7, enter photodetector 8, by oscillograph 9, be converted to voltage signal, by processor 10 computings.For laser instrument 1, it is pulsed laser, regulate the energy value of laser instrument and test, obtaining 7 groups and above laser energy value and crest voltage value, and calculate by processor 10, obtaining laser cleaning threshold value and laser damage threshold, is wherein to adopt formula in processor carry out Inversion Calculation.
Embodiment
Adopt the Nd:YAG pulsed solid stale laser of 1064nm, energy can regulate from 0~1000mJ, measure respectively the laser energy value impact material surface of 100mJ, 200mJ, 300mJ, 400mJ, 500mJ, 600mJ, 700mJ, after the laser plasma of detection is changed into voltage signal, obtain crest voltage value, calculate a=-0.01937, b=1.01746, c=298.31989, g=654.21055, d=0.0125, h=0.01447, p=0.67202.Through experiment method, verify, find that laser cleaning threshold value is 300mJ, laser damage threshold is 654mJ, and its laser cleaning threshold value and calculated value c are basically identical, and laser damage threshold and calculated value g are basically identical.As shown in Figure 2, the crest voltage value that the above-mentioned 100mJ choosing, 200mJ, 300mJ, 400mJ, 500mJ, 600mJ, 700mJ obtain has consistance with the matched curve calculating.

Claims (2)

1. a method of testing for laser cleaning threshold value, is characterized in that, sets initial laser energy value, takes following steps test:
1) the laser plasma signal that exploring laser light impact material produces, converts described laser plasma signal voltage signal to and obtains crest voltage value, by described laser energy value and crest voltage value substitution equation
2) change laser energy value, repeating step 1) 6 times and more than, obtain the system of equations that different laser energy values and crest voltage value form, calculating laser cleaning threshold value c and laser damage threshold g;
Wherein, x laser energy value, y is crest voltage value, a, b, d, h, p is that material and corrosion layer affect parameter.
2. the method for testing of a kind of laser cleaning threshold value according to claim 1, is characterized in that, described step 2) laser energy value be uniformly-spaced to change.
CN201210581710.9A 2012-12-28 2012-12-28 Laser cleaning threshold value test method Active CN103090969B (en)

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CN104748691B (en) * 2015-03-05 2017-09-05 江苏大学 The measurement apparatus and method of film thickness
CN105588836B (en) * 2016-01-25 2018-04-17 江苏大学 A kind of device and method for detecting laser cleaning effect
CN107121398B (en) * 2017-04-25 2019-05-31 苏州德威尔卡光电技术有限公司 Determination method and device, laser cleaning method and the system of laser cleaning energy
CN109647801B (en) * 2019-01-08 2021-08-24 常州英诺激光科技有限公司 Cleaning device for cleaning fabric by laser and working method thereof
CN110038858B (en) * 2019-04-22 2020-11-27 北京镭赛卫蓝激光装备有限公司 Laser cleaning method for adhesive stains

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JP4295885B2 (en) * 2000-02-28 2009-07-15 株式会社東芝 Laser cleaning device
JP2002043269A (en) * 2000-07-31 2002-02-08 Japan Steel Works Ltd:The Laser cleaning completion judging apparatus and method
CN100510714C (en) * 2006-12-05 2009-07-08 中国科学院安徽光学精密机械研究所 Laser breakdown spectrographic detection method and system for metal pollutants in water body
CN101143364A (en) * 2007-10-08 2008-03-19 南开大学 Ultrasonic detection narrow pulsewidth laser sludge remover and its sludge removing method

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JP特开2002-43269A 2002.02.08

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