Background technology
In laser cleaning process, if laser energy is too high, can damage matrix, energy is too low can not be clean by surface clean, therefore exists laser cleaning threshold value and laser damage threshold.Before carrying out laser cleaning, first step is exactly to determine laser energy, and the selection of energy must be greater than cleaning threshold and be less than damage threshold.Laser cleaning threshold value obtains by two kinds of modes at present, one class is sound detection method, utilize pulsed laser radiation substrate surface, produce in a short period of time strong shock wave vibratory, substrate surface produces sound wave, by with acoustic instruments such as microphones, collect with processing procedure in the acoustical signal sent, by judgement cleaning thresholds such as the intensity of acoustical signal and frequencies; Another kind of is light detection method, and the substrate of laser pulse irradiation produces high-octane plasma, and its situation of change judgement matrix degree of cleaning is measured in the detections such as the plasma spectrometry by induced with laser, light intensity.These sniffers can both obtain the laser cleaning threshold value of material, but all can only rely on a large amount of experimental datas to find threshold value, when cleaning different material requires, do a large amount of experiments that repeats.
Summary of the invention
The object of the invention is to propose a kind of energy of plasma that utilizes the laser-impact material production of different-energy value and measure the method for laser cleaning threshold value.
Technical scheme of the present invention is: a kind of method of testing of laser cleaning threshold value, set initial laser energy value, and take following steps:
1) the laser plasma signal that exploring laser light impact material produces, converts described laser plasma signal voltage signal to and obtains crest voltage value, by described laser energy value and crest voltage value substitution equation
;
2) change laser energy value, repeating step 1) 6 times and more than, obtain the system of equations that different laser energy values and crest voltage form, calculating laser cleaning threshold value c and laser damage threshold g;
Wherein, x laser energy value, y is crest voltage value, a, b, d, h, p is that material and corrosion layer affect parameter.
Described step 2) laser energy value is for uniformly-spaced changing.
The invention has the beneficial effects as follows: the relation of the crest voltage value by exploring laser light energy value and exploring laser light plasma is calculated laser cleaning cleaning threshold and laser damage threshold, a large amount of repeated experiments have been reduced, save experimental cost, contributed to realize the robotization of laser cleaning threshold testing.
Embodiment
The relation of this method of testing based on swashing light-matter interaction.When laser energy hour, laser action can not or produce very little laser plasma in material surface corrosion layer, and therefore output is less.Along with the increase of laser energy, the effect between corrosion layer and laser strengthens, and laser plasma also strengthens thereupon, and cleaning performance improves gradually.After reaching cleaning threshold, laser strengthens gradually, but the strength increase of laser plasma not obvious, this is because corrosion layer has certain thickness, and laser and corrosion layer effect change and are not obvious, and at this moment cleaning performance is relatively good.But when laser increases to damage threshold again, the big large increase of the intensity of laser plasma, this explanation laser not only with corrosion layer effect, also have an effect with matrix material, therefore the damage of matrix is also increased gradually.
The Changing Pattern of laser cleaning material surface is identical with BiDoseResp model Changing Pattern, and therefore, with BiDoseResp model representation laser cleaning action model, the flex point of this model curve is laser cleaning threshold value and laser damage threshold.BiDoseResp function general formula is
, x laser energy value, y is crest voltage value, a, b, d, h, p is that material and corrosion layer affect parameter, and c is laser cleaning threshold value, and g is laser damage threshold.Due to by after laser energy value x and crest voltage value y substitution formula, there are 7 unknown parameters in equation, therefore should choose 7 times and the laser of above laser energy value cleans and obtain corresponding crest voltage value to material surface, form system of equations, calculate the laser damage threshold and the laser cleaning threshold value that finally need cleaning material.
Be illustrated in figure 1 the proving installation of laser cleaning threshold value, comprise laser instrument 1, catoptron 2, condenser lens 4, wave filter 7, photodetector 8, oscillograph 9 and processor 10, the wavelength of the filtering ripple of wave filter is identical with cleaning laser wavelength, laser instrument 1 sends laser and acts on material 6 surfaces through catoptron 2 and condenser lens 4, produce laser plasma 3, after this plasma line focus lens 4 and wave filter 7, enter photodetector 8, by oscillograph 9, be converted to voltage signal, by processor 10 computings.For laser instrument 1, it is pulsed laser, regulate the energy value of laser instrument and test, obtaining 7 groups and above laser energy value and crest voltage value, and calculate by processor 10, obtaining laser cleaning threshold value and laser damage threshold, is wherein to adopt formula in processor
carry out Inversion Calculation.
Embodiment
Adopt the Nd:YAG pulsed solid stale laser of 1064nm, energy can regulate from 0~1000mJ, measure respectively the laser energy value impact material surface of 100mJ, 200mJ, 300mJ, 400mJ, 500mJ, 600mJ, 700mJ, after the laser plasma of detection is changed into voltage signal, obtain crest voltage value, calculate a=-0.01937, b=1.01746, c=298.31989, g=654.21055, d=0.0125, h=0.01447, p=0.67202.Through experiment method, verify, find that laser cleaning threshold value is 300mJ, laser damage threshold is 654mJ, and its laser cleaning threshold value and calculated value c are basically identical, and laser damage threshold and calculated value g are basically identical.As shown in Figure 2, the crest voltage value that the above-mentioned 100mJ choosing, 200mJ, 300mJ, 400mJ, 500mJ, 600mJ, 700mJ obtain has consistance with the matched curve calculating.