CN103088302A - Boron nitride-graphite composite evaporation boat - Google Patents
Boron nitride-graphite composite evaporation boat Download PDFInfo
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- CN103088302A CN103088302A CN2013100416775A CN201310041677A CN103088302A CN 103088302 A CN103088302 A CN 103088302A CN 2013100416775 A CN2013100416775 A CN 2013100416775A CN 201310041677 A CN201310041677 A CN 201310041677A CN 103088302 A CN103088302 A CN 103088302A
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Abstract
The invention relates to a boron nitride-graphite composite evaporation boat. The invention provides a specific technical scheme that: (1) a ceramic boat with an evaporation tank is prepared by using hot-press boron nitride ceramic or hot-press boron-nitride-based composite ceramic (such as boron nitride/aluminum nitride composite ceramic); (2) a graphite heating body is prepared by using high-purity fine-grain graphite; (3) the hot-press boron nitride ceramic or hot-press boron-nitride-based composite ceramic is prepared into a thin sheet; the ceramic boat, the graphite heating body, and the ceramic insulation sheet are connected and fastened by using a fixing clamp and a graphite bolt, or are compacted by using a graphite pressure plate and a graphite pressure block, such that the composite evaporation boat is prepared. The evaporation boat has the characteristics of excellent product performance and simple process. The evaporation boat provides substantial economic and social benefits.
Description
Technical field
The present invention relates to vacuum-evaporation and aluminize film with the manufacture method of evaporation element, be specifically related to a kind of boron nitride-graphite combination evaporator boat.
Background technology
The technology that vacuum-evaporation is aluminized is the method for the minimum extensive manufacturing metallic aluminium film of comprehensive cost.It has a large amount of uses in multiple industry and articles for daily use, as, the electronics in large capacity thin film capacitor, various fresh-keeping aluminum-plastic packaged material, cathode-ray tube display is evacuated film etc.
Vacuum-evaporation is aluminized, and the expendable components and parts of most critical are exactly to make metal aluminum filament become heating unit, evaporation boat or the evaporator crucible of aluminium steam in process.Because the metallic aluminium activity is very large, must be able to tolerate the corrosion of aluminium liquid as the material of evaporation boat or evaporator crucible.Vacuum-evaporation is at present aluminized industrial heating unit according to different filming equipments, or is the evaporation boat of TiB2/boron nitride/aluminium nitride composite conductive ceramic preparation, or is the crucible of high purity graphite preparation.
TiB2/boron nitride/aluminium nitride compounded conducting ceramic evaporator boat is the standard configuration of present most filming equipments.This conductive ceramic evaporation boat corrodes its work-ing life and generally only has 12 ~ 16 hours due to high temperature aluminum, the highest can be over 20 hours.Due to the non-uniform corrosion of this evaporation boat, simultaneously also because the aluminium liquid that is evaporated also participates in conductive exothermal, easily cause aluminium liquid to splash to the middle and later periods in evaporation boat life-span, burn base material, the problem of formation pin hole.
Summary of the invention
The object of the present invention is to provide a kind of boron nitride-graphite combination evaporator boat, it is good that this evaporation boat has product performance, and the simple characteristics of technique have significant economic and social benefit.
For achieving the above object, the present invention adopts following technical scheme: a kind of boron nitride-graphite combination evaporator boat, comprise ceramic boat, graphite heater and ceramic thermal insulation plate, described ceramic boat is to be prepared into boat body with evaporator tank with hot pressed boron pottery or hot pressed boron base composite ceramic; Described graphite heater is to adopt high-purity microlite China ink to be prepared from; Described ceramic thermal insulation plate is the thin plate made from hot pressed boron pottery or hot pressed boron base composite ceramic; Described ceramic boat, graphite heater and ceramic thermal insulation plate are connected to stack successively and adopt fixing catch and/or graphite bolt to connect locking.Described hot pressed boron base composite ceramic is boron nitride/aluminium nitride composite ceramics.1 ~ 3 millimeter of described gauge of sheet.
Further, described ceramic boat, graphite heater, ceramic thermal insulation plate are folded from top to bottom successively, and use in its both sides with the isometric boron nitride ceramics fixing catch clamping of the evaporator tank of ceramic boat and fix, and form the combination evaporator boat.
Further, described ceramic boat, graphite heater, ceramic thermal insulation plate are folded from top to bottom successively, and fix with three potteries or the clamping of graphite fixing catch in two ends and the centre of its two sides, form the combination evaporator boat.
Further, described ceramic boat, graphite heater, ceramic thermal insulation plate are folded from top to bottom successively, and fix with pottery or the clamping of graphite fixing catch in the middle of its two sides, form the combination evaporator boat.Bottom in two potteries or graphite fixing catch is provided with pressing plate, and described pressing plate is through graphite bolt and graphite heater, ceramic thermal insulation plate and two potteries or the locking of graphite fixing catch.
The present invention also adopts following technical scheme: a kind of boron nitride-graphite combination evaporator boat, comprise ceramic boat, graphite heater and graphite pressing plate, and described ceramic boat is to be prepared into boat body with evaporator tank with hot pressed boron pottery or hot pressed boron base composite ceramic; Described graphite heater is to adopt high-purity microlite China ink to be prepared from, and has the deep gouge for the placing ceramic boat in the middle part of described graphite heater; Described graphite pressing plate is ring bodies; Described ceramic boat in the graphite pressing plate is pressed on the deep gouge of graphite heater, between described graphite pressing plate and graphite heater through the graphite bolt-locking.
The present invention also adopts following technical scheme: a kind of boron nitride-graphite combination evaporator boat, comprise ceramic boat, graphite heater and graphite briquetting, and described ceramic boat is to be prepared into boat body with evaporator tank with hot pressed boron pottery or hot pressed boron base composite ceramic; Described graphite heater is to adopt high-purity microlite China ink to be prepared from; Described graphite briquetting has the draw-in groove for the clamping ceramic boat; Described ceramic boat is pressed on the upper surface of graphite heater through the graphite briquetting, between described graphite briquetting and graphite heater through the graphite bolt-locking.
Beneficial effect of the present invention is: it is good that this evaporation boat has product performance, and technique is simple, the characteristics of longer service life.To be evaporated the insulation of aluminium liquid and Heating element and come, and significantly reduce aluminium liquid and splash, improve the membrane material amount.This evaporation boat has significant economic and social benefit.
Description of drawings
Fig. 1 is that ceramic boat, graphite heater and ceramic thermal insulation plate stack sequential schematic.
Fig. 2 is fixing catch installation process schematic diagram in embodiment 1.
Fig. 3 is the structural representation of evaporation boat in embodiment 1.
Fig. 4 is the structural representation of evaporation boat in embodiment 2.
Fig. 5 is the structural representation of evaporation boat in embodiment 3.
Fig. 6 is that embodiment 4 ceramic boat, graphite heater and ceramic thermal insulation plate stack sequential schematic.
Fig. 7 is the exploded perspective view of evaporation boat in embodiment 4.
Fig. 8 is the structural representation of evaporation boat in embodiment 4.
Fig. 9 is the exploded perspective view of evaporation boat in embodiment 5.
Figure 10 is the structural representation of evaporation boat in embodiment 5.
Figure 11 is the exploded perspective view of evaporation boat in embodiment 6.
Figure 12 is the structural representation of evaporation boat in embodiment 6.
Label declaration: 1-ceramic boat 2-graphite heater 3-ceramic thermal insulation plate 4-fixing catch 5-pressing plate 6-graphite bolt 7-graphite pressing plate 8-graphite briquetting.
Embodiment
By describing technology contents of the present invention, structural attitude in detail, being realized purpose and effect, below in conjunction with embodiment and coordinate accompanying drawing to be explained in detail.
As shown in Fig. 1,2 and 3, a kind of boron nitride-graphite combination evaporator boat comprises ceramic boat 1, graphite heater 2 and ceramic thermal insulation plate 3, and described ceramic boat 1 is to be prepared into boat body with evaporator tank with hot pressed boron pottery or hot pressed boron base composite ceramic; Described graphite heater 2 is to adopt high-purity microlite China ink to be prepared from; Described ceramic thermal insulation plate 3 is thin plates made from hot pressed boron pottery or hot pressed boron base composite ceramic; Described ceramic boat 1, graphite heater 2, ceramic thermal insulation plate 3 are folded from top to bottom successively, and use in its both sides with the isometric boron nitride ceramics fixing catch 4 of the evaporator tank of ceramic boat and grip, and form the combination evaporator boat.Described hot pressed boron base composite ceramic is boron nitride/aluminium nitride composite ceramics.1 ~ 3 millimeter of described gauge of sheet.
As shown in Figure 1 and Figure 4, a kind of boron nitride-graphite combination evaporator boat comprises ceramic boat 1, graphite heater 2 and ceramic thermal insulation plate 3, and described ceramic boat 1 is to be prepared into boat body with evaporator tank with hot pressed boron pottery or hot pressed boron base composite ceramic; Described graphite heater 2 is to adopt high-purity microlite China ink to be prepared from; Described ceramic thermal insulation plate 3 is thin plates made from hot pressed boron pottery or hot pressed boron base composite ceramic; Described ceramic boat 1, graphite heater 2, ceramic thermal insulation plate 3 are folded from top to bottom successively, and grip with three potteries or graphite fixing catch 4 in two ends and the centre of its two sides, form the combination evaporator boat.Described hot pressed boron base composite ceramic is boron nitride/aluminium nitride composite ceramics.1 ~ 3 millimeter of described gauge of sheet.
As Fig. 1 and shown in Figure 5, a kind of boron nitride-graphite combination evaporator boat comprises ceramic boat 1, graphite heater 2 and ceramic thermal insulation plate 3, and described ceramic boat 1 is to be prepared into boat body with evaporator tank with hot pressed boron pottery or hot pressed boron base composite ceramic; Described graphite heater 2 is to adopt high-purity microlite China ink to be prepared from; Described ceramic thermal insulation plate 3 is thin plates made from hot pressed boron pottery or hot pressed boron base composite ceramic; Described ceramic boat 1, graphite heater 2, ceramic thermal insulation plate 3 are folded from top to bottom successively, and grip with pottery or graphite fixing catch 4 in the middle of its two sides, form the combination evaporator boat.Described hot pressed boron base composite ceramic is boron nitride/aluminium nitride composite ceramics.1 ~ 3 millimeter of described gauge of sheet.
As shown in Fig. 6,7 and 8, a kind of boron nitride-graphite combination evaporator boat comprises ceramic boat 1, graphite heater 2 and ceramic thermal insulation plate 3, and described ceramic boat 1 is to be prepared into boat body with evaporator tank with hot pressed boron pottery or hot pressed boron base composite ceramic; Described graphite heater 2 is to adopt high-purity microlite China ink to be prepared from; Described ceramic thermal insulation plate 3 is thin plates made from hot pressed boron pottery or hot pressed boron base composite ceramic; Described ceramic boat 1, graphite heater 2, ceramic thermal insulation plate 3 are folded from top to bottom successively, and grip with pottery or graphite fixing catch 4 in the middle of its two sides, form the combination evaporator boat.Bottom in two potteries or graphite fixing catch 4 is provided with pressing plate 5, and described pressing plate is through graphite bolt 6 and graphite heater, ceramic thermal insulation plate and two potteries or 4 lockings of graphite fixing catch.Described hot pressed boron base composite ceramic is boron nitride/aluminium nitride composite ceramics.1 ~ 3 millimeter of described gauge of sheet.
Embodiment 5
As shown in Figures 9 and 10, a kind of boron nitride-graphite combination evaporator boat comprises ceramic boat 1, graphite heater 2 and graphite pressing plate 7, and described ceramic boat 1 is to be prepared into boat body with evaporator tank with hot pressed boron pottery or hot pressed boron base composite ceramic; Described graphite heater 2 is to adopt high-purity microlite China ink to be prepared from, and described graphite heater 2 middle parts have the deep gouge for the placing ceramic boat; Described graphite pressing plate 7 is ring bodies; Described ceramic boat 1 is locked through graphite bolt 6 between described graphite pressing plate and graphite heater in graphite pressing plate 7 is pressed on the deep gouge of graphite heater 2.
As shown in FIG. 11 and 12, a kind of boron nitride-graphite combination evaporator boat comprises ceramic boat 1, graphite heater 2 and graphite briquetting 8, and described ceramic boat 1 is to be prepared into boat body with evaporator tank with hot pressed boron pottery or hot pressed boron base composite ceramic; Described graphite heater 2 is to adopt high-purity microlite China ink to be prepared from; Described graphite briquetting has the draw-in groove for the clamping ceramic boat; Described ceramic boat 1 is pressed on the upper surface of graphite heater 2 through graphite briquetting 8, lock through graphite bolt 6 between described graphite briquetting 8 and graphite heater 2.
The above is only embodiments of the invention; not thereby limit the scope of the claims of the present invention; every equivalent structure or equivalent flow process conversion that utilizes specification sheets of the present invention and accompanying drawing content to do; or directly or indirectly be used in other relevant technical fields, all in like manner be included in scope of patent protection of the present invention.
Claims (9)
1. boron nitride-graphite combination evaporator boat is characterized in that: comprise ceramic boat, graphite heater and ceramic thermal insulation plate, described ceramic boat is to be prepared into boat body with evaporator tank with hot pressed boron pottery or hot pressed boron base composite ceramic; Described graphite heater is to adopt high-purity microlite China ink to be prepared from; Described ceramic thermal insulation plate is the thin plate made from hot pressed boron pottery or hot pressed boron base composite ceramic; Described ceramic boat, graphite heater and ceramic thermal insulation plate are connected to stack successively and adopt fixing catch and/or graphite bolt to connect locking.
2. boron nitride according to claim 1-graphite combination evaporator boat, it is characterized in that: described hot pressed boron base composite ceramic is boron nitride/aluminium nitride composite ceramics.
3. boron nitride according to claim 1-graphite combination evaporator boat, is characterized in that: 1 ~ 3 millimeter of described gauge of sheet.
4. boron nitride according to claim 1-graphite combination evaporator boat, it is characterized in that: described ceramic boat, graphite heater, ceramic thermal insulation plate are folded from top to bottom successively, and use in its both sides with the isometric boron nitride ceramics fixing catch clamping of the evaporator tank of ceramic boat and fix, form the combination evaporator boat.
5. boron nitride according to claim 1-graphite combination evaporator boat, it is characterized in that: described ceramic boat, graphite heater, ceramic thermal insulation plate are folded from top to bottom successively, and fix with three potteries or the clamping of graphite fixing catch in two ends and the centre of its two sides, form the combination evaporator boat.
6. boron nitride according to claim 1-graphite combination evaporator boat, it is characterized in that: described ceramic boat, graphite heater, ceramic thermal insulation plate are folded from top to bottom successively, and fix with pottery or the clamping of graphite fixing catch in the middle of its two sides, form the combination evaporator boat.
7. boron nitride according to claim 6-graphite combination evaporator boat, it is characterized in that: the bottom in two potteries or graphite fixing catch is provided with pressing plate, and described pressing plate is through graphite bolt and graphite heater, ceramic thermal insulation plate and two potteries or the locking of graphite fixing catch.
8. boron nitride-graphite combination evaporator boat is characterized in that: comprise ceramic boat, graphite heater and graphite pressing plate, described ceramic boat is to be prepared into boat body with evaporator tank with hot pressed boron pottery or hot pressed boron base composite ceramic; Described graphite heater is to adopt high-purity microlite China ink to be prepared from, and has the deep gouge for the placing ceramic boat in the middle part of described graphite heater; Described graphite pressing plate is ring bodies; Described ceramic boat in the graphite pressing plate is pressed on the deep gouge of graphite heater, between described graphite pressing plate and graphite heater through the graphite bolt-locking.
9. boron nitride-graphite combination evaporator boat is characterized in that: comprise ceramic boat, graphite heater and graphite briquetting, described ceramic boat is to be prepared into boat body with evaporator tank with hot pressed boron pottery or hot pressed boron base composite ceramic; Described graphite heater is to adopt high-purity microlite China ink to be prepared from; Described graphite briquetting has the draw-in groove for the clamping ceramic boat; Described ceramic boat is pressed on the upper surface of graphite heater through the graphite briquetting, between described graphite briquetting and graphite heater through the graphite bolt-locking.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310041677.5A CN103088302B (en) | 2013-02-04 | 2013-02-04 | Boron nitride-graphite composite evaporation boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310041677.5A CN103088302B (en) | 2013-02-04 | 2013-02-04 | Boron nitride-graphite composite evaporation boat |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103088302A true CN103088302A (en) | 2013-05-08 |
| CN103088302B CN103088302B (en) | 2015-05-13 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201310041677.5A Expired - Fee Related CN103088302B (en) | 2013-02-04 | 2013-02-04 | Boron nitride-graphite composite evaporation boat |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104177086A (en) * | 2014-09-15 | 2014-12-03 | 山东理工大学 | Process for preparing zirconium carbide-silicon carbide-boron nitride ternary conductive ceramic evaporation boat |
| CN105483621A (en) * | 2016-01-28 | 2016-04-13 | 福州赛瑞特新材料技术开发有限公司 | Combined type graphite electrode-ceramic evaporator boat |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4528120A (en) * | 1983-07-14 | 1985-07-09 | Elektroschmelzwerk Kempten Gmbh | Refractory, electrically conductive, mixed materials containing boron nitride and process for their manufacture |
| CN1097222A (en) * | 1991-12-20 | 1995-01-11 | 先进陶瓷公司 | Use the metallic resistance heating method of the graphite boat of coating pyrolitic boron nitride |
| CN1167509A (en) * | 1994-09-28 | 1997-12-10 | 先进陶瓷公司 | Evaporator having multiple coating |
-
2013
- 2013-02-04 CN CN201310041677.5A patent/CN103088302B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4528120A (en) * | 1983-07-14 | 1985-07-09 | Elektroschmelzwerk Kempten Gmbh | Refractory, electrically conductive, mixed materials containing boron nitride and process for their manufacture |
| CN1097222A (en) * | 1991-12-20 | 1995-01-11 | 先进陶瓷公司 | Use the metallic resistance heating method of the graphite boat of coating pyrolitic boron nitride |
| CN1167509A (en) * | 1994-09-28 | 1997-12-10 | 先进陶瓷公司 | Evaporator having multiple coating |
Non-Patent Citations (1)
| Title |
|---|
| 郭圣波: "高性能C/BN层状复合材料的研究进展", 《陶瓷学报》, vol. 26, no. 4, 31 December 2005 (2005-12-31) * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104177086A (en) * | 2014-09-15 | 2014-12-03 | 山东理工大学 | Process for preparing zirconium carbide-silicon carbide-boron nitride ternary conductive ceramic evaporation boat |
| CN105483621A (en) * | 2016-01-28 | 2016-04-13 | 福州赛瑞特新材料技术开发有限公司 | Combined type graphite electrode-ceramic evaporator boat |
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| Publication number | Publication date |
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| CN103088302B (en) | 2015-05-13 |
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