CN103063230B - Micromechanical gyroscope assembly test tool and method for fast adjusting cross coupling of micromechanical gyroscope assembly - Google Patents
Micromechanical gyroscope assembly test tool and method for fast adjusting cross coupling of micromechanical gyroscope assembly Download PDFInfo
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Abstract
The invention discloses a micromechanical gyroscope assembly test tool and a method for fast adjusting cross coupling of a micromechanical gyroscope assembly. The micromechanical gyroscope assembly test tool comprises a hexahedron as a main body. An upper surface of the hexahedron is provided with a rectangular groove which is concave inward. The main body of the micromechanical gyroscope assembly is installed in the rectangular groove. The interior of the rectangular groove is provided with threaded holes for installation and fixing of a screw. The bottom surface of the rectangular groove is parallel to an assembly main body installation surface and is used as a first reference surface (9). Side surfaces of the rectangular groove perpendicular to the first reference surface (9) are used as second reference surfaces (10). Other outer surfaces of the hexahedron are provided respectively with third reference surfaces (11) parallel to the first reference surface (9), fourth reference surfaces (12) parallel to the second reference surfaces (10), and fifth reference surfaces (13) perpendicular to the third reference surfaces (11) and the fourth reference surfaces (12).
Description
Technical field
The present invention relates to navigation, guidance and control field, particularly relate to the cross-linked fast adjustment method of micromechanical gyroscope combination of a kind of low cost, miniaturization.
Background technology
Along with the fast development of MEMS (micro electro mechanical system), Micromachined Inertial Devices technology is also more and more ripe.Compare traditional inertia device, and Micromachined Inertial Devices has the advantages such as volume is little, lightweight, cost is low, good reliability, low in energy consumption, measurement range is large.And be that the micro-mechanical inertia of core design is measured combination and can be carried out navigating/guiding independently with micro mechanical device, do not rely on external information, also not outwardly emittance, has good concealment, work not by the advantage that meteorological condition and artificial interference affect.Current micro-mechanical inertia is measured combination and has been started to get a lot of applications in multiple field.But the manufacturing technology root of Mierotubule-associated proteins is in integrated electronic technology, Mierotubule-associated proteins also occurs mainly with integrated chip type, and is welded to circuit board and is equipped with the peripheral support circuit.Each Micromachined Inertial Devices finally occurs with the form of circuit board.
Cross-couplings refers to when having angular speed to input on the direction of certain measurement axle of IMU, the ratio that the coupling output of non-sensitive axle and sensitive axes input; The cross-couplings data reaction gyroscope working shaft of IMU and the non-orthogonal error of coordinate axis, these data are crossed senior general and are directly caused the responsive angular speed distortion of working shaft.And the circuit board form of Micromachined Inertial Devices can make the cross-couplings of micro-mechanical inertia measurement combination excessive and adjustment difficulty usually.In patent 200710119970.3, describe a kind of cross-linked method of adjustment, but this patent needs the method with repeatedly carrying out machining to improve cross-linked precision.After this method can bring processing, main body protection is destroyed, and easily brings the problems such as fifth wheel into combination, is therefore unfavorable for producing in enormous quantities, fast.
Summary of the invention
The object of the invention is to overcome that existing sensitive axes is large perpendicular to the micro-mechanical gyroscope alignment error of installed surface, the unmanageable deficiency of precision, provide a kind of structure is simple, easy to operate, with low cost, be easy to realize degree of precision adjustment micromechanical gyroscope combination cross-coupling error high precision measurement frock and method of adjustment thereof.
Technical solution of the present invention is: the test fixture of micro-mechanical gyroscope combination, test fixture main body is hexahedron, hexahedron upper surface is internally recessed to form a rectangular recess, micro-mechanical gyroscope combined body is arranged in described rectangular recess, a rectangular recess inside processing threaded hole, for installing standing screw; Groove floor is parallel with combined body installed surface as the first reference field, the groove vertical with the first reference field side is as the second reference field, all the other outside surfaces hexahedral process three reference field parallel with the first reference field, four reference field parallel with the second reference field, and with the 3rd reference field, the 5th reference field that the 4th reference field is all vertical.
The surface roughness Ra of five reference fields of described frock is better than 0.8, and each reference field between two depth of parallelism and verticality is better than 0.005mm.
Described frock adopts wrought aluminium alloy or stainless steel material.
A kind of cross-linked fast adjustment method, step is as follows:
The first step, micromechanical gyroscope combination is arranged on above-mentioned test fixture, specific requirement is as follows: combined body bottom surface and the first reference field are rigidly connected, and the vertical reference face of combined body and the second reference field of frock are close to, and utilizes screw rod and pressing plate combination to be fixed;
Second step, is rigidly connected test fixture and turntable that micromechanical gyroscope combination is housed, and micromechanical gyroscope combination body output lead is connected in testing apparatus;
3rd step, measures non-sensitive axle and exports, calculate non-sensitive axle and the amount of coupling between input shaft according to measured value;
4th step, according to the size and Orientation of the coupling amount calculated in the 3rd step, selects the adjustment pad pad of different-thickness at the mounting screw place, corner of circuit board being welded with micro-mechanical gyroscope;
5th step, measures non-sensitive axle and exports, calculate coupling amount, if not in claimed range, then repeats the 4th step and the 5th step; If met the demands, then complete the adjustment of this input shaft cross-coupling coefficient;
6th step, frock is measured in upset, changes input shaft, repeats the 3rd step ~ the 5th step to all the other diaxons, thus completes each axle cross-coupling coefficient adjustment of micromechanical gyroscope combination.
Adjustment pad in described 4th step adopts red copper, or laminated epoxy glass-cloth board, or PTFE film material, and thickness is divided into a series of different size.
Principle of the present invention is: the present invention mounting screw place when carrying out micro-mechanical gyroscope circuit board and installing adopts different-thickness pad mounting means, if structural body reference field relative gyroscope sensitive axes verticality does not meet the demands, can according to the size and Orientation of angle, corresponding installation spacer thickness is adjusted, makes angle trend towards zero.
In addition, designed measurement frock selects wrought aluminium alloy material, there is enough rigidity, intensity, hardness, not yielding, good stability, there is higher flatness and the form and position tolerance such as surfaceness and higher verticality, the depth of parallelism, the input shaft direction of combination can be changed quickly and easily, be conducive to improving regulated efficiency.
The present invention compared with prior art beneficial effect is:
(1) the high-acruracy survey frock of the micromechanical gyroscope combination of the present invention's design adopts hexahedron structure design, leaves space to install micromechanical gyroscope combination, utilizes screw rod and pressing plate to be fixed; The orthogonal coordinate system direction of combination well transmits out by the first reference field and the second reference field, and simple to operate, precision is high;
(2) the 3rd reference field in high precision measurement frock, the 4th reference field, the 5th reference field are parallel one by one with three change in coordinate axis direction of micromechanical gyroscope combination, by upset frock, the sensitive axes direction of the micromechanical gyro needing adjustment conveniently can be converted;
(3) on the basis not increasing additional knot component, the coupling amount of the non-sensitive axle of micro-mechanical gyroscope is adjusted by the mode adjusting spacer thickness, with low cost, be easy to realize, flexibly and easily.
(4) the present invention have easy to operate, with low cost, be easy to realize compared with the advantage of high accuracy of adjustment, be particularly suitable for carrying out the mass production that micro-mechanical inertia measures combination.
Accompanying drawing explanation
Fig. 1 is micro-mechanical gyroscope scheme of installation of the present invention;
Fig. 2 is micromechanical gyroscope combination schematic diagram of the present invention;
Fig. 3 a, 3b are respectively the outside drawing of test fixture different directions of the present invention;
Fig. 4 is micromechanical gyroscope combination cross-couplings adjustment assembly figure of the present invention.
Embodiment
The present invention, for the micro-mechanical gyroscope of sensitive axes perpendicular to gyro installation face, utilizes a kind of high precision measurement frock, and adjustment micro-mechanical gyroscope combines the cross-couplings amount of three sensitive axes.
The installation method of micro-mechanical gyroscope is as shown in Figure 1 and Figure 2: sensitive axes is welded on (Y-axis gyroscope block plate 6 on gyroscope block plate 3 perpendicular to the micro-mechanical gyroscope 2 in gyro installation face, Z axis gyroscope block plate 7, X-axis gyroscope block plate 8); After X, Y, Z axis gyroscope block plate has welded, four trip bolts 1 are utilized to be connected on the correspondence position of unitized construction body 5; In cross-couplings adjustment process, adjustment pad 4 can be arranged on corner below circuit board, utilize trip bolt 1 to fix.
Micromechanical gyroscope combination cross-couplings adjustment assembly is as shown in Figure 4: comprise high precision measurement frock 15 and micromechanical gyroscope combination 14.As shown in Figure 3, main body is hexahedron to its high precision measurement frock profile, comprises the first reference field 9, second reference field 10, the 3rd reference field 11, the 4th reference field 12, the 5th reference field 13 and inner rectangular recess; Rectangular recess is internally caved in by hexahedron upper surface, and shape, size form according to the profile arrangement of micromechanical gyroscope combination, is embedded in high precision measurement frock rectangular recess to make Gyro body; Micromechanical gyroscope combination with the matching relationship of high precision measurement frock is: the bottom surface parallel with combined body installed surface is as the first reference field 9, a side vertical with the first reference field 9 is as the second reference field 10, combined body is put into after in rectangular recess, by these two reference field centering positions, be fixedly connected with pressing plate 17 by screw rod 16, make it to be difficult to high precision measurement frock, relative position to occur again and move; All the other outside surfaces of hexahedron process three reference field 11 parallel with the first reference field 9, four reference field 12 parallel with the second reference field 10, and five reference field 13 all vertical with the 3rd, the 4th reference field, with satisfied transmission micromechanical gyroscope combination three output shaft orthogonality relation needs.
A threaded hole is left in rectangular recess inside, is used for connecting screw rod 16, and screw rod 16 and pressing plate 17 coordinate fixing micromechanical gyroscope combination; Its size, position are by combining profile and installation site decision.Adopt this kind of connected mode, convenient, fast, reliable.
During specific design, according to the physical dimension of micromechanical gyroscope combination, the machined parameters such as size, shape, mounting hole, technique of rectangular recess in design high precision measurement frock, bamboo product test fixture surface, mainly comprises index and the parameters such as the position of reference field, size, shape, processing technology; Require that five reference fields have higher flatness, surfaceness and form and position tolerance, be specially:
The material of high precision measurement frock adopts the material such as wrought aluminium alloy or stainless steel, high/low temperature process (high temperature 180 DEG C is carried out in process, be incubated 4 hours, low temperature-196 DEG C, is incubated 2 hours, 3 circulations, high temperature air cooling is come out of the stove), to eliminate stress, stabilizing tissue, prevents benchmark to be out of shape; Surface treatment is carried out after frock machines; The surface roughness Ra of five reference fields of high precision measurement frock is better than 0.8, and each reference field between two depth of parallelism and verticality is better than 0.005mm.
After micromechanical gyroscope combination and high precision measurement frock having been assembled, start to carry out testing and debugging, process is as follows:
(1) the 3rd reference field 11 of assembly is downward, be placed on turntable, be rigidly connected; Array output is connected with digital voltmeter;
(2) gyroscope measuring now two non-sensitive axles exports: determine that lower step sensitive axes needs adjustment direction according to this numerical value is positive and negative; Calculate with the ratio size that sensitive axes inputs the amount of coupling again according to the output of non-sensitive axle;
(3) according to judgement and the calculating of step 2, select the mounting screw place, corner of the adjustment pad pad micro-mechanical gyroscope circuit board that sensitive axes is corresponding at this moment of different-thickness, whole gasket material is red copper, or laminated epoxy glass-cloth board, or polytetrafluoroethylene film, thickness is divided into a series of different size (such as 0.05mm, 0.1mm, 0.2mm etc.);
(4), after mounting and adjusting pad, measure the now gyrostatic output of non-sensitive axle, calculate non-sensitive axle and the amount of coupling between input shaft.If not in claimed range, then repeat step (3) and (4); If met the demands, then complete the adjustment of this input shaft cross-coupling coefficient;
(5) high precision measurement frock is overturn, 4th reference field 12 is downward, and be rigidly attached on turntable, array output is connected with testing apparatus, repeat step (2) to (4), complete the adjustment of the cross-coupling coefficient of this input shaft;
(6) high precision measurement frock is overturn, 5th reference field 13 is downward, and be rigidly attached on turntable, array output is connected with testing apparatus, repeat step (2) to (4), complete the adjustment of the cross-coupling coefficient of the 3rd input shaft;
By the cross-linked adjustment of three axles that can complete micromechanical gyroscope combination of above step.
The present invention can as a kind of cross-couplings method of adjustment of general micromechanical gyroscope combination, application person can according to the feature of micromechanical gyroscope combination special separately, by size or the partial structurtes of amendment high precision measurement frock, then by selecting the adjustment pad of different size and thickness to realize its function flexibly and easily.
Claims (4)
1. a cross-linked fast adjustment method, is characterized in that step is as follows:
The first step, the test fixture of design micro-mechanical gyroscope combination, test fixture main body is hexahedron, hexahedron upper surface is internally recessed to form a rectangular recess, micro-mechanical gyroscope combined body is arranged in described rectangular recess, a rectangular recess inside processing threaded hole, for installing standing screw; Groove floor is parallel with micro-mechanical gyroscope combined body installed surface as the first reference field, the groove vertical with the first reference field side is as the second reference field, all the other outside surfaces hexahedral process three reference field parallel with the first reference field, four reference field parallel with the second reference field, and with the 3rd reference field, the 5th reference field that the 4th reference field is all vertical;
Second step, micromechanical gyroscope combination is arranged on described test fixture, specific requirement is as follows: micromechanical gyroscope combination body bottom surface and the first reference field are rigidly connected, the vertical reference face of micromechanical gyroscope combination body and the second reference field of test fixture are close to, and utilize screw rod and pressing plate micromechanical gyroscope combination to be fixed;
3rd step, test fixture and turntable that micromechanical gyroscope combination is housed are rigidly connected, micromechanical gyroscope combination output lead is connected in testing apparatus;
4th step, measures non-sensitive axle and exports, calculate non-sensitive axle and the amount of coupling between input shaft according to measured value;
5th step, according to the size and Orientation of the coupling amount calculated in the 4th step, selects the adjustment pad pad of different-thickness at the mounting screw place, corner of circuit board being welded with micro-mechanical gyroscope;
6th step, measures non-sensitive axle and exports, calculate coupling amount, if not in claimed range, then repeats the 5th step and the 6th step; If met the demands, then complete the adjustment of this input shaft cross-coupling coefficient;
7th step, frock is measured in upset, changes input shaft, repeats the 4th step ~ the 6th step to all the other diaxons, thus completes each axle cross-coupling coefficient adjustment of micromechanical gyroscope combination.
2. the cross-linked fast adjustment method of one according to claim 1, is characterized in that: the adjustment pad in described 5th step adopts red copper, or laminated epoxy glass-cloth board, or PTFE film material, and thickness is divided into a series of different size.
3. the cross-linked fast adjustment method of one according to claim 1, is characterized in that: the surface roughness Ra of five reference fields of described test fixture is better than 0.8, and each reference field between two depth of parallelism and verticality is better than 0.005mm.
4. the cross-linked fast adjustment method of one according to claim 1, is characterized in that: described test fixture adopts wrought aluminium alloy or stainless steel material.
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| CN104653963B (en) * | 2014-12-26 | 2017-01-18 | 北京兴华机械厂 | Dual-freedom degree tracking cloud deck with inertial orientation function |
| CN104567934B (en) * | 2015-01-22 | 2017-05-24 | 中航捷锐（北京）光电技术有限公司 | Jig for vibration test of fiber-optic gyroscope and testing method |
| CN105203284A (en) * | 2015-09-23 | 2015-12-30 | 河北汉光重工有限责任公司 | Experimental device and method suitable for vibration and impact of small-sized laser gyroscopes |
| CN107860383A (en) * | 2017-07-18 | 2018-03-30 | 深圳市亿境虚拟现实技术有限公司 | Inexpensive multiaspect calibration VR heads show posture method |
| CN111664868A (en) * | 2020-05-28 | 2020-09-15 | 北京航天时代光电科技有限公司 | Method for calibrating and compensating installation error of single-axis gyroscope |
| CN112362087B (en) * | 2021-01-13 | 2021-08-10 | 北京诺亦腾科技有限公司 | Industrial measurement structure and industrial measurement system |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1821722A (en) * | 2006-03-27 | 2006-08-23 | 北京航空航天大学 | Decoupling detecting device for gyroscope scale factor and input shaft default angle |
| CN101109634A (en) * | 2007-08-06 | 2008-01-23 | 北京航空航天大学 | MEMS gyroscope accurate installation reference component and installation method thereof |
| CN101349564A (en) * | 2008-06-13 | 2009-01-21 | 北京航空航天大学 | Inertial measurement apparatus |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010145121A (en) * | 2008-12-16 | 2010-07-01 | Murata Mfg Co Ltd | Piezoelectric vibrator and vibrating gyroscope device |
-
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1821722A (en) * | 2006-03-27 | 2006-08-23 | 北京航空航天大学 | Decoupling detecting device for gyroscope scale factor and input shaft default angle |
| CN101109634A (en) * | 2007-08-06 | 2008-01-23 | 北京航空航天大学 | MEMS gyroscope accurate installation reference component and installation method thereof |
| CN101349564A (en) * | 2008-06-13 | 2009-01-21 | 北京航空航天大学 | Inertial measurement apparatus |
Non-Patent Citations (2)
| Title |
|---|
| MEMS 微惯性测量组合标定技术研究;李杰等;《传感器技术学报》;20080731;第21卷(第7期);第1169-1173页 * |
| MEMS陀螺仪大失准角解耦测试方法的研究;周祥龙等;《自动化仪表》;20100430;第31卷(第4期);第50-52,56页 * |
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