CN103029440A - Piezoelectric ultrasonic drive liquid ejection device - Google Patents
Piezoelectric ultrasonic drive liquid ejection device Download PDFInfo
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- CN103029440A CN103029440A CN2012105171303A CN201210517130A CN103029440A CN 103029440 A CN103029440 A CN 103029440A CN 2012105171303 A CN2012105171303 A CN 2012105171303A CN 201210517130 A CN201210517130 A CN 201210517130A CN 103029440 A CN103029440 A CN 103029440A
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Abstract
The invention provides a piezoelectric ultrasonic drive liquid ejection device. The piezoelectric ultrasonic drive liquid ejection device comprises a vibrator, a coupling screw, an amplitude transformer, a piezoelectric ceramic piece, an annular copper electrode, a compression threaded rod, a compression ring, a compression washer and a container. The amplitude transformer is in concentric connection with one end of the vibrator through the coupling screw, a threaded hole is formed in the center of the other end of the vibrator, the compression threaded rod is connected with the center hole in the end surface of the vibrator through the threads, the compression threaded rod enables the piezoelectric ceramics vibration unit to be serially pressed on end portion of the vibrator through the compression washer, and the container and the compression ring are fixed on the vibrator node flange through the threaded rod. The piezoelectric ultrasonic drive liquid ejection device differs from the piezoelectric ceramics pump such as prior cavity type, peristalsis type and traveling wave type, a centrifugal liquid pump and a piston type ejection device, a liquid flow valve and an input, output port of special construction do not need to be controlled, and the liquid ejects outward through the end portion of the amplitude transformer. The piezoelectric ultrasonic drive liquid ejection device is applicable to drive in a high-frequency vibration form. The piezoelectric ultrasonic drive liquid ejection device has a certain application in the fields of chemistry, medical science, ink-jet printing, sprouting spring and the like.
Description
Technical field
The invention belongs to the liquor pump technical field in the precision optical machinery, is the ultrasonic Piezoelectric Driving liquid injection apparatus that a kind of inertia force that utilizes dither is gone out the liquid impelling, specially refers to concrete structure design and the Piezoelectric Driving method of this device.
Background technology
Mainly comprise piezoelectric actuated liquid injection apparatus and piezoelectric ceramic liquid pump based on piezoelectric actuated liquid transporting apparatus.Traditional piezoelectric actuated liquid injection apparatus mainly is piston cylinder operator, comprises the compositions such as Piezoelectric Driving structure, piston mechanism and little flow-out hole.Under electric field action, the dilatation of Piezoelectric Ceramic structure seesaws piston mechanism, thereby causes the change in volume of cavity, orders about liquid and is sprayed by little flow-out hole.Yet, because the drive displacement of piezoelectric ceramics under electric field action is little, it is also little that thereby the cavity volume that produces changes, the fluid flow of single injection event is little, make liquid that certain ejaculation flow velocity be arranged, must make enough little of little flow-out hole, to the also corresponding raising of sealing requirements of piston mechanism, this has just increased the manufacture difficulty of device simultaneously.In addition, because the design feature of piston, the piston general motion is under low frequency, and the pumped liquid scale of construction is limited within the unit interval, and efficient is lower.Therefore, traditional piezoelectric liquid injection apparatus generally is used for quantitatively carrying the occasion of micro liquid.
The pump housing of traditional piezoelectric ceramics fluid pump is mainly by shell face, cavity, influent stream mouth with go out the head piece parts and form, and its mesochite face is generally the laminated structure of piezoelectric ceramics that piezoelectric ceramic actuator sheet and metallic elastic Sticking of Thin Steel Sheets During Pack Rolling form.Under electric field action, the dilatation of piezoelectric ceramic actuator sheet causes the piezoelectric ceramics laminate to produce flexural deformation, thereby causes the change in volume of cavity, so that the influent stream mouth forms the motion that passes in and out cavity with the liquid that goes out head piece in the cavity volume change procedure.For liquid can be flowed to certain specific direction, basic approach is at the influent stream mouth of pump and goes out the head piece place and increase check valve apparatus.When cavity volume expanded, influent stream mouth valve was opened, and goes out the head piece valve and closes; And cavity volume is when shrinking, and influent stream mouth valve cuts out, and goes out the head piece valve to open, thereby reaches the purpose that force fluid flows towards specific direction.In order to improve the operational efficiency of pump, the driving voltage frequency of usually wishing piezoelectric ceramic pump is the resonant frequency of cavity body structure, and the variable quantity of cavity volume is much larger than other states at this moment, and power output also reaches maximum.Yet for the cavate piezoelectric ceramic pump, the resonant frequency of its piezoelectric ceramics laminate is generally more than hundreds of Hz; But traditional check valve so that it is difficult to be complementary with the shell surface vibration of piezoelectric ceramic pump, is realized per second inferior synchronous opening and closing up to a hundred owing to there is at work serious hysteresis quality.Under this restriction condition, the performance of cavate piezoelectric ceramic pump under high frequency is not outstanding, and frequency optimum traffic is generally all below 100Hz, so its efficient is not brought into play fully.Utilize the Novel check valve of MEMS fabrication techniques, although have good high frequency characteristics, technique still is in conceptual phase, and the MEMS complex manufacturing technology, and cost is very high, promotes at present practical also unrealistic.The no-valve type piezoelectric ceramic pump of the special turnover head piece of the use of some novelties structure, such as the V-type head piece, the three way type head piece, the turnover such as variable flow resistance pipe head piece head piece structure, although their structural behaviour is subjected to the impact of frequency less, so that utilize the cavate piezoelectric ceramic pump of this type of turnover head piece structure to be fit to be operated on the higher frequency, but because mainly being the flow difference of utilizing interior reversing current of single cycle of liquid to cross the turnover head piece, the mechanism of these turnover head piece structures realizes whole unidirectional circulation, so it is not the one-way flow on the complete meaning, the volume change of its piezoelectric ceramics cavity can not be fully utilized, and the actual characteristic parameters such as the flow of piezoelectric ceramic pump and hydraulic pressure do not obtain substantial lifting.Some Novel pressure electric pumps that occurred in recent years, as utilize the peristaltic pump of continuous series voltage ceramic cavity structure, it is by adjusting the phase relation of periodicity change in volume between each piezoelectric ceramics cavity, so that under the condition that does not need check valve or special turnover head piece structure, just can realize the one-way flow of liquid; The piezoelectric pump that utilizes row ripple principle to make, its drive form and row wave motor are similar, vibration by the piezoelectric ceramics unit, it is moving to drive elastic layer generation row wave-wave, thereby to the driving force of the liquid carrying on the elasticity aspect for certain orientation, realize flowing, although these novel piezo-electric ceramic pump performances promote to some extent, it is complicated that structure and control mode are tending towards; The piezoelectric ceramic pump that utilizes centrifugal principle to make, its piezoelectric ceramics produces dilatation under certain excitation drives, the vibration of realization metal tube, drive liquid flow, this pump configuration is simple, is easy to control, is suitable for high-frequency drive, but owing to utilize centrifugal force to drive, metal tube is wayward liquid flow direction in vibration processes.
The above various types of piezoelectric ceramic pump, different Piezoelectric Ceramic form and pump body structure have been comprised, although all have separately certain advantage, the overall performance of each structure is all undesirable, the invention of the improvement of piezoelectric ceramic pump and novel piezo-electric ceramic pump has great importance.
Summary of the invention
In order to obtain a kind of desirable piezoelectric liquid conveying device, overcome some problems that exist in the existing piezoelectric ceramic pump, propose the ultrasonic Piezoelectric Driving liquid injection apparatus that a kind of inertia force that utilizes dither to produce is gone out the liquid impelling, it has simple in structure, good reliability, control is convenient, range is far away and be applicable to the advantage such as high-frequency drive.
The technical solution used in the present invention: a kind of piezoelectric supersonic drives liquid injection apparatus, comprises ultrasonic transformer, container, joint bolt, pressure ring, oscillator, clamping screw, annular copper electrode, packing washer and piezoelectric ceramics vibration unit; Ultrasonic transformer is by joint bolt and concentric connection of oscillator one end, oscillator other end end face center is processed with screwed hole, the described end face screwed hole of centre of clamping screw and oscillator passes through thread connection, packing washer and piezoelectric ceramics vibration unit are annular, clamping screw is pressed in the oscillator end by packing washer with piezoelectric ceramics vibration unit string, and container and pressure ring are fixed on the oscillator node flange by screw rod; Wherein, described piezoelectric ceramics vibration unit comprises piezoelectric ceramic piece and annular copper electrode, described piezoelectric ceramic piece homopolarity end face is installed relatively, the annular copper electrode is installed in piezoelectric ceramic piece end face both sides, and piezoelectric ceramic piece and annular copper electrode gap are installed in series and are pressed on the oscillator end with clamping screw; The annular copper electrode of same polarity is connected in series mutually.
Described ultrasonic transformer must be done according to the device overall structure requirement design of pure axial vibration mode, and its structure can be designed to the structures such as notch cuttype, taper shape, stretched wire line style or exponential type.
Described oscillator structure needs to do according to the device overall structure requirement design of pure axial vibration mode.
Described ultrasonic transformer can be designed as absolute construction, also can be designed to oscillator the ultrasonic transformer of integrative-structure.
Described piezoelectric ceramic piece adopts loop configuration, and external diameter is identical with the oscillator external diameter, and both ends of the surface are coated with electrode, and thickness is 0.2～10mm, and quantity is 2n, and n is natural number.
Described annular copper electrode shape is identical with piezoelectric ceramic piece, and thickness is 0.01～1mm.
Described container is connected in pressure ring on the oscillator node flange by screw rod and nut.
Described container is installed on the oscillator vibration node flange, and its structure can design from the different of practical function according to occasion is installed.
Mentality of designing of the present invention:
Piezoelectric supersonic liquid injection apparatus of the present invention, the piezoelectric ceramics vibration unit produces stretching vibration under certain signal excitation, vibration is passed to ultrasonic transformer by the oscillator amplification, ultrasonic transformer is immersed in certain distance under the liquid level, ultrasonic transformer free end when the certain frequency exciting through particular design produces pure axial vibration, and dither is dished out the liquid on the ultrasonic transformer end face.
The present invention's advantage compared with prior art is:
Piezoelectric supersonic liquid injection apparatus of the present invention utilizes ultrasonic transformer vibration amplification principle, can utilize different pump body structures and driving frequency, realizes the pure axial stretching vibration of ultrasonic transformer, and the liquid impelling is gone out.For different driving frequency schemes, the structure of ultrasonic transformer and oscillator is different, and the quantity of required piezoelectric ceramic piece also can be different.The structure of ultrasonic transformer and oscillator can be made of one, and also can make separate type.For the different application occasion, pump structure also can be different.
Description of drawings
Fig. 1 is the main cutaway view of piezoelectric supersonic liquid injection apparatus of the present invention.The number in the figure title: 1 is ultrasonic transformer, and 2 is container, and 3 is joint bolt, and 4 is pressure ring, and 5 is oscillator, and 6 is housing screw, and 7 is the annular copper electrode, and 8 is packing washer, and 9 is piezoelectric ceramic piece, and 10 is nut, and 11 is screw rod.
Fig. 2 is that ultrasonic transformer and oscillator are made overall structure, and the ultrasonic transformer outline is exponential function.
Fig. 3 is the stage conical horn, and namely ultrasonic transformer part outline is conical.
Fig. 4 is the main cutaway view of self-balancing type piezoelectric supersonic liquid injection apparatus.The number in the figure title: 12 is container.
The specific embodiment
Further specify the present invention below in conjunction with the drawings and specific embodiments.
Embodiment 1: a kind of piezoelectric supersonic drives liquid injection apparatus, comprises ultrasonic transformer 1, container 2, joint bolt 3, pressure ring 4, oscillator 5, clamping screw 6, annular copper electrode 7, packing washer 8 and piezoelectric ceramics vibration unit; Ultrasonic transformer 1 is by joint bolt 3 and concentric connection of oscillator 5 one ends, oscillator 5 other end centers are processed with screwed hole, clamping screw 6 passes through thread connection with oscillator 5 end-face central holes, packing washer 8 is annular with the piezoelectric ceramics vibration unit, clamping screw 6 is pressed in oscillator 5 ends by packing washer 8 with piezoelectric ceramics vibration unit string, the piezoelectric ceramics vibration unit is comprised of piezoelectric ceramic piece 9 and annular copper electrode 7, and container 2 is connected on the oscillator 5 node flanges by pressure ring 4.
Structure of the present invention is different from the in the past piezoelectric ceramics pumps such as cavate, creeping motion type and travelling-wave-type, and centrifugar liquid pump and piston type injection apparatus, do not need to control the valve of flow direction and input, the output port of special construction, liquid outwards penetrates by the ultrasonic transformer end, is applicable to the dither form and drives.
Described piezoelectric ceramics vibration unit adopts multi-disc piezoelectric ceramic piece 9, annular copper electrode 7 to consist of, annular copper electrode 7 stacks with piezoelectric ceramic piece 9 intervals, the electrode homopolarity links to each other, described packing washer 8 is loop configuration with the piezoelectric ceramics vibration unit, string is on clamping screw 6, and clamping screw 6 passes packing washer 8 and with the piezoelectric ceramics vibration unit itself and oscillator 5 end faces compressed; Described container 2 is used for contain fluid, and oscillator 5 end faces are immersed under the liquid level; Described pressure ring 4 is fixed on container 2 on the oscillator 5 vibration nodal point flanges.
The piezoelectric ceramic piece 9 of described piezoelectric ceramics vibration unit adopts ring plate shape structure; The piezoelectric ceramic piece 9 that adopts can adopt lead zirconate titanate series piezoelectric ceramic or lead-free piezoceramic material.
Described oscillator 5 structures are according to vibration of bar mode specialized designs, and two end face centers are processed with respectively screwed hole.According to the oscillation and wave transmission theory, in the ANSYS finite element analysis software, to the oscillator modeling, and carry out model analysis and Design of Structural parameters, vibrator material aluminium alloy in this example.At first, analyze the piezoelectric vibrator mode of oscillation based on piezoelectric equations.The thick 2mm of piezoelectric ceramics in this example, external diameter is Ф 15.84mm, and internal diameter is Ф 6mm, and 4 homopolarities are installed relatively; The thick 0.08mm of annular copper electrode, shape is consistent with piezoelectric ceramics, installs with the piezoelectric patches interval; In ANSYS software, set up the assembly structure models such as piezoelectric ceramic piece, annular copper electrode, packing washer, clamping screw, to carrying out vibration-mode analysis in the piezoelectric vibration unit, can get the pure axial vibration frequency in piezoelectric vibration unit and be about 55.9kHz.Secondly, determine the structural parameters of oscillator.The structural parameters of oscillator mainly contain: outer diameter D
1, D
4, D
5, D
6With the long l of bar
1, l
2, l
3, as shown in Figure 2.Wherein, get D
6=15.84mm is identical with the piezoelectric patches external diameter; Bar length is got half of ultrasonic wavelength, and can be calculated ultrasonic wavelength by theory is 90mm, gets l
2=2l
1=2l
3=45mm.In finite element analysis software ANSYS, set up model with multidiameter structure and vibration unit, with D
1, D
4, D
5Be parameter, the vibration shape of doing pure axial vibration in 55.9kHz left and right sides frequency take overall structure is optimized design as object function to the oscillator structure parameter, can get D
1=6.35mm, D
4=11.95mm, D
5=11.43.Consider from D
4To D
1The ladder sudden change can cause excessive stress to concentrate, and gets D
3=10.5mm, excessively arc radius is 20mm, thereby can determine oscillator structure as shown in Figure 2.Carry out body vibration model analysis with vibration unit with the oscillator structure parameter that optimal design obtains in ANSYS software, the vibration frequency that can get its pure axial vibration mode is 55.6kHz.
Described ultrasonic transformer 1 structure is according to the mode of oscillation specialized designs, one end is processed with screwed hole, take the exponential type ultrasonic transformer as example, in the situation that the oscillator shape is determined, require the single unit system of the compositions such as itself and oscillator when certain vibration frequency, to do pure axial vibration, the material selection titanium alloy.Index cross section curve function is: D=D1e
-2 β x, wherein
0＜x＜l, D are the exponential type diameter of section, D
1Be outside diameter, D
2Be end diameter, l is ultrasonic transformer length, and structural parameters as shown in Figure 2 can be by changing D
1, D
2Change the resonant frequency of oscillator with the size of l.To get half-wave be l=45mm to ultrasonic transformer length in this example; Get outside diameter initial value D
1=6.35mm is identical with vibrator diameter; Theoretical according to Transformer design, modeling in ANSYS software, do pure axial vibration resonant frequency as object function take oscillator and ultrasonic transformer, in finite element analysis software, carry out model analysis and parameter optimization, when frequency and the vibration shape all meet the global design requirement, get final product.Can get frequency by software analysis is pure axial vibration in 55.5KHz ultrasonic transformer and oscillator, the integrally-built vibration shape of vibration unit, and the ultrasonic transformer physical dimension is respectively l=45mm, D
1=6.36mm, D
2=1.26mm.
Described annular copper electrode 7 thickness are 0.01～1mm, and shape is identical with piezoelectric ceramic piece 9 shapes.
Described clamping screw 6 structures are according to piezoelectric ceramic piece 9 interior hole sizes and how many designs of sheet number, and screw thread is standard thread, adopts titanium alloy material to make.
Described container 2 is in order to hold the band pump liquid, guarantees that liquid level surpasses ultrasonic transformer 1 end face certain distance, and container 2 shapes and size are different and different according to use occasion and mounting condition, can adopt the making of metal or plastic or other material.
8 one end surface shape of described packing washer are identical with piezoelectric ceramic piece 9 shapes, and its other end endoporus is processed with larger chamfering, adopt stainless steel and other metal materials to make.
Further, container 2 is connected in pressure ring 4 on the oscillator 5 node flanges by screw rod 11 and nut 10.Described screw rod 11 and nut 10 are standard component.Container 2 bearing's encapsulation process.
Piezoelectric ceramic piece quantity is 4, as shown in Figure 1, after applying the periodic activation signals of certain frequency, piezoelectric ceramic piece is out of shape along axial stretching, oscillator is with the axial vibration amplification and be passed to ultrasonic transformer, ultrasonic transformer amplifies vibration and does pure axial vibration, and the inertia force of ultrasonic transformer vibration goes out container with the liquid impelling of its end face, realizes the liquid conveying.
For piezoelectric supersonic liquid injection apparatus of the present invention, also have the link of some particular design, be summarized as follows described:
1) since liquid only when submergence ultrasonic transformer end, the end portion vibration inertia force of ultrasonic transformer could be gone out the liquid impelling on the end, if but liquid level is too high, because the resistance between the liquid, the liquid of ultrasonic transformer end is subject to resistance between liquid and the liquid level of can not being dished out, so piezoelectric supersonic injection apparatus of the present invention must make liquid level be higher than about the about 0.5 ~ 3mm of ultrasonic transformer end face, thereby can be owing to liquid resistance hinder liquid discharge, the ultrasonic transformer end also has enough liquid to dish out continuously simultaneously.
2) oscillator in the piezoelectric supersonic injection apparatus of the present invention and ultrasonic transformer can be made isolating construction as shown in Figure 1, also can make overall structure as shown in Figure 2, its structure need be according to the design of the mode of oscillation of the whole pump housing, and namely the structure of ultrasonic transformer must satisfy the pump overall structure and makes pure axial vibration mode.
3) piezoelectric ceramic piece vibration unit radial polarization in the piezoelectric supersonic injection apparatus of the present invention, homopolarity linked to each other when the multi-disc tandem was installed, and quantity is 2n, and n is natural number.
4) pumping signal of piezoelectric supersonic injection apparatus of the present invention is cyclical signal, and pumping signal can be sinusoidal signal, triangle or rectangular signal, the vibration frequency when signal frequency must satisfy the pure axial vibration mode of pump overall structure.
Embodiment 2: piezoelectric ceramic piece quantity is 6, oscillator and ultrasonic transformer are made the ultrasonic transformer of an integral body, its structure as shown in Figure 2, after applying periodic activation signals, piezoelectric ceramic piece is out of shape along axial stretching, ultrasonic transformer amplifies vibration and does pure axial vibration, and the inertia force of ultrasonic transformer vibration goes out container with the liquid impelling of its end face, realizes the liquid conveying.
Other structure is with embodiment 1.
Embodiment 3: piezoelectric ceramic piece quantity is 4, the container radial dimension is larger, as shown in Figure 4, apply periodic activation signals after, piezoelectric ceramic piece is out of shape along axial stretching, ultrasonic transformer amplifies vibration and does pure axial vibration, the inertia force of ultrasonic transformer vibration goes out container with the liquid impelling of its end face, and liquid is thrown behind the certain altitude because Action of Gravity Field falls into again container, and the liquid level in the container remains certain height, so be concatenated to form circulation, liquid need not supply.
Other structure is with embodiment 1.
Structure of the present invention is different from the in the past piezoelectric ceramics pumps such as cavate, creeping motion type and travelling-wave-type, do not need to control the valve of flow direction or input, the output port of special construction, do not need complicated piezoelectric ceramics vibration unit and drive circuit yet, be applicable to the dither form.The present invention has certain application prospect in fields such as medical science, chemistry, inkjet printing, fountain decorations.
The part that the present invention does not elaborate belongs to techniques well known.
Claims (8)
1. a piezoelectric supersonic drives liquid injection apparatus, it is characterized in that: comprise ultrasonic transformer (1), container (2), joint bolt (3), pressure ring (4), oscillator (5), clamping screw (6), packing washer (8) and piezoelectric ceramics vibration unit; End is concentric connects by joint bolt (3) and oscillator (5) for ultrasonic transformer (1), oscillator (5) other end end face center is processed with screwed hole, clamping screw (6) passes through thread connection with the described end face screwed hole of centre of oscillator (5), packing washer (8) is annular with the piezoelectric ceramics vibration unit, clamping screw (6) is pressed in oscillator (5) end by packing washer (8) with piezoelectric ceramics vibration unit string, and container (2) is fixed on the oscillator node flange by screw rod with pressure ring (4); Wherein, described piezoelectric ceramics vibration unit comprises piezoelectric ceramic piece (9) and annular copper electrode (7), described piezoelectric ceramic piece (9) homopolarity end face is installed relatively, annular copper electrode (7) is installed in piezoelectric ceramic piece (9) end face both sides, and piezoelectric ceramic piece (9) is installed in series with annular copper electrode (7) and is pressed on the oscillator end with clamping screw (6); The annular copper electrode (7) of same polarity is serial connection mutually.
2. piezoelectric supersonic according to claim 1 drives liquid injection apparatus, it is characterized in that: described ultrasonic transformer must be done according to the device overall structure requirement design of pure axial vibration mode, and its structure can be designed to notch cuttype, taper shape, stretched wire type or exponential type structure.
3. piezoelectric supersonic according to claim 1 and 2 drives liquid injection apparatus, it is characterized in that: described oscillator structure needs to do according to the device overall structure requirement design of pure axial vibration mode.
4. piezoelectric supersonic according to claim 1 drives liquid injection apparatus, and it is characterized in that: described ultrasonic transformer can be designed as absolute construction, also can be designed to oscillator the ultrasonic transformer of integrative-structure, and the integrative-structure ultrasonic transformer does not need joint bolt (3).
5. piezoelectric supersonic according to claim 1 drives liquid injection apparatus, it is characterized in that: described piezoelectric ceramic piece adopts loop configuration, and external diameter is identical with the oscillator external diameter, and both ends of the surface are coated with electrode, and thickness is 0.2～10mm, and quantity is 2n, and n is natural number.
6. piezoelectric supersonic drives liquid injection apparatus according to claim 1 or 5, and it is characterized in that: described annular copper electrode shape is identical with piezoelectric ceramic piece, and thickness is 0.01～1mm.
7. according to claim 1,5 described piezoelectric supersonics drive liquid injection apparatus, it is characterized in that: container (2) is connected in pressure ring (4) on oscillator (5) the node flange by screw rod (11) and nut (10), and described screw rod (11) and nut (10) are standard component.
8. according to claim 1,2 or 4 described piezoelectric supersonics drive liquid injection apparatus, it is characterized in that: described container is installed on the oscillator vibration node flange, its structure can design from the different of practical function according to occasion is installed.
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| CN201210517130.3A CN103029440B (en) | 2012-12-06 | 2012-12-06 | Piezoelectric ultrasonic drive liquid ejection device |
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|---|---|---|---|
| CN201210517130.3A CN103029440B (en) | 2012-12-06 | 2012-12-06 | Piezoelectric ultrasonic drive liquid ejection device |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104113231A (en) * | 2014-06-24 | 2014-10-22 | 苏州世优佳电子科技有限公司 | Miniature ultrasonic focusing motor |
| CN104613182A (en) * | 2015-01-22 | 2015-05-13 | 泰州职业技术学院 | Air cylinder water control device |
| CN105584217A (en) * | 2016-03-03 | 2016-05-18 | 佛山科学技术学院 | Ceramic interior decoration 3D printer |
| CN107015511A (en) * | 2017-06-02 | 2017-08-04 | 武汉科技大学 | A kind of outdoor current levitation device |
| CN107930503A (en) * | 2018-01-05 | 2018-04-20 | 苏州科技大学 | A kind of rotatable ultrasonic water disturbs device |
| CN109782690A (en) * | 2019-03-25 | 2019-05-21 | 浙江大学宁波理工学院 | Double drive electrichydraulic control formula accurate feeding system and its control method |
| WO2019227263A1 (en) * | 2018-05-28 | 2019-12-05 | 庄婷婷 | Micro-flow essential oil atomizer |
| CN111094001A (en) * | 2017-09-28 | 2020-05-01 | 日本电产株式会社 | Liquid coating device |
| CN111188749A (en) * | 2018-11-15 | 2020-05-22 | 哈尔滨工业大学 | Novel piezoelectric pump without diaphragm based on piezoelectric ceramic drive |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1150172A (en) * | 1965-09-01 | 1969-04-30 | Physics Internat Company | Improvements in Piezoelectric Liquid Pumps. |
| CN1253237A (en) * | 1998-11-11 | 2000-05-17 | 张建辉 | Piezoelectric ceramic pump |
| CN101042129A (en) * | 2006-03-24 | 2007-09-26 | 北京航空航天大学 | High-frequency inertia one-way valve hydraulic pumps and control method based on piezoelectric ceramics |
| CN101435421A (en) * | 2008-12-19 | 2009-05-20 | 中国科学技术大学 | Piezoelectric ceramic pump for implementing fluid flow by centrifugal principle |
-
2012
- 2012-12-06 CN CN201210517130.3A patent/CN103029440B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1150172A (en) * | 1965-09-01 | 1969-04-30 | Physics Internat Company | Improvements in Piezoelectric Liquid Pumps. |
| CN1253237A (en) * | 1998-11-11 | 2000-05-17 | 张建辉 | Piezoelectric ceramic pump |
| CN101042129A (en) * | 2006-03-24 | 2007-09-26 | 北京航空航天大学 | High-frequency inertia one-way valve hydraulic pumps and control method based on piezoelectric ceramics |
| CN100585180C (en) * | 2006-03-24 | 2010-01-27 | 北京航空航天大学 | High-frequency inertia one-way valve hydraulic pumps based on piezoelectric ceramics |
| CN101435421A (en) * | 2008-12-19 | 2009-05-20 | 中国科学技术大学 | Piezoelectric ceramic pump for implementing fluid flow by centrifugal principle |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104113231A (en) * | 2014-06-24 | 2014-10-22 | 苏州世优佳电子科技有限公司 | Miniature ultrasonic focusing motor |
| CN104613182A (en) * | 2015-01-22 | 2015-05-13 | 泰州职业技术学院 | Air cylinder water control device |
| CN105584217A (en) * | 2016-03-03 | 2016-05-18 | 佛山科学技术学院 | Ceramic interior decoration 3D printer |
| CN105584217B (en) * | 2016-03-03 | 2017-04-05 | 佛山科学技术学院 | Raw decorative pattern 3D printer in ceramic |
| CN107015511A (en) * | 2017-06-02 | 2017-08-04 | 武汉科技大学 | A kind of outdoor current levitation device |
| CN111094001A (en) * | 2017-09-28 | 2020-05-01 | 日本电产株式会社 | Liquid coating device |
| CN107930503A (en) * | 2018-01-05 | 2018-04-20 | 苏州科技大学 | A kind of rotatable ultrasonic water disturbs device |
| CN107930503B (en) * | 2018-01-05 | 2023-08-11 | 苏州科技大学 | Rotatable ultrasonic wave water scrambler |
| WO2019227263A1 (en) * | 2018-05-28 | 2019-12-05 | 庄婷婷 | Micro-flow essential oil atomizer |
| CN111188749A (en) * | 2018-11-15 | 2020-05-22 | 哈尔滨工业大学 | Novel piezoelectric pump without diaphragm based on piezoelectric ceramic drive |
| CN109782690A (en) * | 2019-03-25 | 2019-05-21 | 浙江大学宁波理工学院 | Double drive electrichydraulic control formula accurate feeding system and its control method |
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|---|---|
| CN103029440B (en) | 2015-03-25 |
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