CN103021974B - 半导体封装件 - Google Patents

半导体封装件 Download PDF

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Publication number
CN103021974B
CN103021974B CN201310003561.2A CN201310003561A CN103021974B CN 103021974 B CN103021974 B CN 103021974B CN 201310003561 A CN201310003561 A CN 201310003561A CN 103021974 B CN103021974 B CN 103021974B
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semiconductor package
barb
structural layer
matsurface
package part
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CN103021974A (zh
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卢俊庭
李天伦
刘承政
詹士伟
孙铭伟
邱彬鸿
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Advanced Semiconductor Engineering Inc
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Advanced Semiconductor Engineering Inc
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA

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  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

半导体封装件包括基板、芯片、封装体、散热板及倒钩结构层。芯片设于基板上。封装体包覆芯片且具有上表面。散热板具有粗糙面,散热板以粗糙面形成于封装体的上表面上。倒钩结构层包覆粗糙面且位于封装体与散热板之间,以提升散热板与封装体之间的结合性。

Description

半导体封装件
技术领域
本发明是有关于一种半导体封装件,且特别是有关于一种具有散热功能的半导体封装件。
背景技术
传统半导体封装件包含封装体及芯片,其中封装体包覆芯片,而芯片提供半导体封装件的功能。然而,芯片会产生高热,且封装体的热传导性通常不佳,导致芯片周围温度过高而影响其工作效率。因此,如何驱散芯片的热量成为业界努力重点之一。
发明内容
本发明有关于一种半导体封装件,一例中,半导体封装件包括散热片,可驱散芯片的热量。
根据本发明,提出一种半导体封装件。半导体封装件包括一基板、一芯片、一封装体、一散热板及一倒钩结构层。芯片设于基板上。封装体包覆芯片且具有一上表面。散热板具有一粗糙面,散热板以粗糙面形成于封装体的上表面上。倒钩结构层包覆粗糙面且位于封装体与散热板之间,以提升散热板与封装体之间的结合性。
为让本发明的上述内容能更明显易懂,下文特举实施例,并配合附图,作详细说明如下:
附图说明
图1绘示依照本发明一实施例的半导体封装件的剖视图。
图2绘示依照本发明另一实施例的半导体封装件的剖视图。
主要元件符号说明:
100、200:半导体封装件
110:基板
110u、130u:上表面
120:芯片
120u:主动面
125:焊线
130:封装体
140:散热板
140b:粗糙面
140u:外表面
150:倒钩结构层
151:倒钩
152:内层
153:外层
1511:容置空间
260:硅烷层
具体实施方式
请参照图1,其绘示依照本发明一实施例的半导体封装件的剖视图。半导体封装件100包括基板110、芯片120、封装体130、散热板140及倒钩结构层150。
基板110可以是有机(organic)基板、陶瓷(ceramic)基板、硅基板或金属载板。此外,基板110可以是单层或多层线路基板。
芯片120以其主动面120u朝上方位设于基板110的上表面110u上,并通过至少一焊线125电性连接于基板110,焊线125可以是金线或铜线。另一例中,芯片120可以是覆晶(flip chip),其以其主动面120u朝下方位设于基板110的上表面110u上且通过至少一凸块电性连接于基板110。
封装体130包覆芯片120、焊线125及基板的上表面110u的至少一部分,且具有上表面130u。封装体130可包括酚醛基树脂(Novolac-based resin)、环氧基树脂(epoxy-based resin)、硅基树脂(silicone-based resin)或其他适当的包覆剂。封装体130亦可包括适当的填充剂,例如是粉状的二氧化硅。可利用数种封装技术形成封装体130,例如是压缩成型(compression molding)、注射成型(injectionmolding)或转注成型(transfer molding)。
散热板140具有粗糙面140b。散热板140以粗糙面140b朝下方位设于封装体130的上表面130u上。散热板140的厚度介于0.07毫米至0.1毫米之间,而粗糙面140b的中心线平均粗糙度(Center line average roughness)(又称为Ra)介于约0.4微米至3.5微米之间,然亦可大于3.5微米。本例中,粗糙面140b的中心线平均粗糙度Ra大于2微米,可使粗糙面140b上形成倒钩结构层150,其中倒钩结构层150具有至少一倒钩151。由于倒钩151的形成,可增加倒钩结构层150的表面粗糙度。一例中,倒钩结构层150的粗糙度大于粗糙面140b的粗糙度,但小于粗糙面140b的粗糙度的1.3倍,然亦可大于粗糙度的1.3倍。然而,只要形成于粗糙面140b上的倒钩结构层150可形成倒钩151即可,本发明实施例不限制粗糙面140b的表面粗糙度值。
散热板140并非所有表面都需要形成粗糙面,例如,散热板140更具有外表面140u,此外表面140u包含散热板140的上表面及/或至少一外侧面,外表面140u的表面粗糙度可小于粗糙面140b的表面粗糙度。然另一例中,外表面140u亦可为粗糙面,其表面粗糙度可相似于粗糙面140b。此外,散热板140的材料包含铜、铝或其它适用材料。
倒钩结构层150位于封装体130与散热板140之间,而提升散热板140与封装体130之间的结合性。详细来说,倒钩结构层150的倒钩151的端部侧向地延伸而形成容置空间1511,部分封装体130被填入于容置空间1511内,而形成卡合结构,增加封装体130与倒钩结构层150之间的结合性,进而使散热板140经由倒钩结构层150更加牢固于封装体130上。相较于省略倒钩结构层150,本发明实施例的倒钩结构层150与封装体130之间的结合性提升约30至50%,甚至更高。
由于倒钩结构层150提升散热板140与封装体130之间的结合性,故可改善切割工艺中因为刀具进刀及退刀过程对散热板140的拉扯而使散热板140从封装体130剥离(peeling)或撕裂的问题。在此改善下,即使散热板140为延性材料(本发明并不限定散热板140须为延性材料),仍不会发生散热板140与封装体130之间严重剥离或撕裂的问题。
此外,倒钩结构层150可采用例如是化学气相沉积、无电镀法(electrolessplating)、电解电镀(electrolytic plating)、印刷、旋涂、喷涂、溅镀(sputtering)或真空沉积法(vacuum deposition)形成。
通过上述形成方法,可使形成于粗糙面140b上的层结构形成至少一倒钩1511,而构成倒钩结构层150。一例中,可只对散热板140的粗糙面140b进行上述方法而形成倒钩结构层150。另一例中,可对整个散热板140进行上述形成倒钩结构层150的形成方法,由于外表面140u的表面粗糙度Ra小于2微米,故形成于外表面140u的层结构不致因为形成倒钩151或形成过大的倒钩而导致其表面粗糙度大幅提升,如此可维持外表面140u的细致触感。另一例中,外表面140u的表面粗糙度Ra不限于小于2微米,亦可大于2微米。
倒钩结构层150可以是单层结构或多层结构。以多层结构来说,倒钩结构层150包括内层152及外层153,其中内层152包覆粗糙面140b,而外层包覆内层。内层152例如是镍层,而外层153例如是铬层,镍层可以提升铬层与散热板140的结合性,而铬层可提升倒钩结构层150的抗腐蚀性。另一例中,内层152及外层153可包含镍及铬以外的材料,只要是可紧密包覆粗糙面140b的材料,都可作为本例的内层152及外层153的用料。倒钩结构层150的层数不限于双层,亦可为双层以上。此外,以单层结构来说,倒钩结构层150可以是铜层、铝层、镍层、铬层或其它合适材料。
请参照图2,其绘示依照本发明另一实施例的半导体封装件的剖视图。半导体封装件200包括基板110、芯片120、封装体130、散热板140、倒钩结构层150及硅烷层260。散热板140具有粗糙面140b,硅烷层260形成于封装体130与倒钩结构层150之间。硅烷层260的氧原子与封装体130的氢原子进行键合,因此可再提升封装体130与倒钩结构层150之间的结合性约10至20%,或甚至更高。
综上所述,虽然本发明已以实施例揭露如上,然其并非用以限定本发明。本发明所属技术领域中具有通常知识者,在不脱离本发明的精神和范围内,当可作各种的更动与润饰。因此,本发明的保护范围当视权利要求书所界定者为准。

Claims (10)

1.一种半导体封装件,包括:
一基板;
一芯片,设于该基板上;
一封装体,包覆该芯片且具有一上表面;
一散热板,具有一粗糙面,该散热板以该粗糙面形成于该封装体的该上表面上;以及
一倒钩结构层,包覆该粗糙面且位于该封装体与该散热板之间,以提升该散热板与该封装体之间的结合性。
2.如权利要求1所述的半导体封装件,其中该粗糙面的中心线平均粗糙度大于2微米。
3.如权利要求1所述的半导体封装件,其中该倒钩结构层的表面粗糙度介于该粗糙面的表面粗糙度的1.1至1.3倍之间。
4.如权利要求1所述的半导体封装件,其中该倒钩结构层是一电镀层。
5.如权利要求1所述的半导体封装件,其中该倒钩结构层是单层或多层结构。
6.如权利要求5所述的半导体封装件,其中该倒钩结构层包括:
一镍层,包覆该粗糙面;以及
一铬层,包覆该镍层。
7.如权利要求1所述的半导体封装件,更包括:
一硅烷层,形成于该封装体与该倒钩结构层之间。
8.如权利要求1所述的半导体封装件,其中该倒钩结构层包括一倒钩,该倒钩的端部侧向地延伸而形成一容置空间,该封装体的一部分填入于该容置空间内,而形成卡合结构。
9.如权利要求1所述的半导体封装件,其中该散热板的厚度介于0.07毫米至0.1毫米之间。
10.如权利要求1所述的半导体封装件,其中该散热板的上表面及/或至少一外侧面的表面粗糙度小于该粗糙面的表面粗糙度。
CN201310003561.2A 2013-01-06 2013-01-06 半导体封装件 Active CN103021974B (zh)

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CN109065512B (zh) * 2013-08-15 2021-11-09 日月光半导体制造股份有限公司 半导体封装件及其制造方法

Citations (4)

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US2244771A (en) * 1938-08-16 1941-06-10 Int Standard Electric Corp Composite conductor and contact between conductors
US5164815A (en) * 1989-12-22 1992-11-17 Texas Instruments Incorporated Integrated circuit device and method to prevent cracking during surface mount
US5175060A (en) * 1989-07-01 1992-12-29 Ibiden Co., Ltd. Leadframe semiconductor-mounting substrate having a roughened adhesive conductor circuit substrate and method of producing the same
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Publication number Priority date Publication date Assignee Title
US2244771A (en) * 1938-08-16 1941-06-10 Int Standard Electric Corp Composite conductor and contact between conductors
US5175060A (en) * 1989-07-01 1992-12-29 Ibiden Co., Ltd. Leadframe semiconductor-mounting substrate having a roughened adhesive conductor circuit substrate and method of producing the same
US5164815A (en) * 1989-12-22 1992-11-17 Texas Instruments Incorporated Integrated circuit device and method to prevent cracking during surface mount
CN1116770A (zh) * 1994-06-06 1996-02-14 摩托罗拉公司 用来改善聚合物同金属间界面粘合性的方法和设备

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